射频溅射FeTaN纳米晶软磁薄膜结构和磁性

用射频反应溅射制备了FeTaN纳米晶软磁薄膜.研究了薄膜结构和磁性与制备条件的依赖关系.研究发现,当Ta的含量较高时,在N2+Ar混合气氛中易形成沉积态薄膜的非晶结构.适当的热处理后,αFe纳米晶从中晶化生成.薄膜显示出优良的软磁特性 关键词： 纳米晶 软磁性 非晶态     

条形畴结构的FeCoAlON薄膜磁性的研究

用磁控射频溅射法制备了FeCoAlON薄膜, 研究了Al-O和N元素的添加对FeCo合金薄膜的软磁性的影响. 研究结果表明: 随着Al, O, N元素添加量的增加, 薄膜微结构从多晶转化到纳米晶再转化到非晶态, 薄膜表现为软磁性; 在N的含量较高时, 薄膜呈现条形畴结构, 本文对条形畴结构出现的机理和条件作了详细讨论, 并发现具有条形畴结构的薄膜的磁导率频率特性具有多峰共振的特点. 关键词： 铁钴基合金 薄膜 条形畴     

铁基软磁非晶/纳米晶合金研究进展及应用前景

非晶合金通常是将熔融的金属快速冷却、通过抑制结晶而获得的原子呈长程无序排列的金属材料.由于具有这种特殊结构,铁基软磁非晶合金具有各向同性特征、很小的结构关联尺寸和磁各向异性常数,因而具有很小的矫顽力H_c,但可和晶态材料一样具有高的饱和磁感强度B_s.优异的软磁性能促进了铁基软磁非晶合金的应用研究.目前,铁基软磁非晶/纳米晶合金带材已实现大规模工业化生产和应用,成为重要的高性能软磁材料.本文回顾了软磁非晶合金的发现和发展历程,结合成分、结构、工艺对铁基非晶/纳米晶合金软磁性能的影响,介绍了相关基础研究成果和工艺技术进步对铁基软磁非晶/纳米晶合金研发和工业化应用的重要贡献.并根据结构、性能特征将铁基软磁非晶合金研发与应用分为三个阶段,指出了目前铁基软磁非晶合金研发与应用中面临的挑战和发展方向.     

FeCoBSiO2磁性纳米颗粒膜的微波电磁特性

采用交替沉积磁控溅射工艺制备了超薄多层的FeCoBSiO2磁性纳米颗粒膜.利用x射线衍射仪、扫描探针显微镜、透射电子显微镜分析了薄膜的微结构和形貌特征.采用振动样品磁强计、四探针法、微波矢量分析仪及谐振腔法测量薄膜试样的磁电性能和微波复磁导率.重点对SiO2介质相含量、薄膜微结构对电磁性能产生重要影响的机理做了分析和探讨.结果 表明：这类FeCoBSiO2磁性纳米颗粒膜具有良好的软磁性能和高频电磁性能，2GHz时的 磁导率μ′高于70，可以应用于高频微磁器件或微波吸收材料的设计. 关键词： 磁性纳米颗粒膜 高频特性 复磁导率 磁控溅射     

预退火时间对Fe_(80.8)B_(10)P_8Cu_(1.2)非晶合金微结构及磁性能的影响

研究了预退火时间对Fe_(80.8)B_(10)P_8Cu_(1.2)非晶合金微结构及磁性能的影响.穆斯堡尔谱研究表明:在660 K的预退火温度下,随着预退火时间的增加,Fe原子不断富集,非晶基体中的类Fe_3B化学短程有序结构向类Fe B结构转变,并且非晶基体中Fe第一近邻壳层中Cu原子的逐渐脱离以及Fe-P配位键数量的明显减少可间接表征CuP团簇的形成过程.同时,本研究通过调节预退火时间来调控非晶基体中CuP团簇和Fe团簇的数量,促进后续退火晶化过程中α-Fe纳米晶相的析出,并细化纳米晶尺寸,从而获得综合磁性能更加优异的非晶/纳米晶软磁合金.     

非晶粉/硅橡胶复合薄膜应力阻抗性能

选用硅橡胶为基材,Fe73.5Cu1Nb3Si13.5B9非晶纳米晶软磁合金粉体为磁性功能填料,采用机械共混的方法制备非晶粉/硅橡胶力敏复合材料。采用自制测试夹具测试非晶粉/硅橡胶复合材料的阻抗值,采用扫描电镜分析非晶粉颗粒形貌及其在硅橡胶基材中分散情况,在此基础上研究了复合材料界面绝缘性、单层与多层叠加复合薄膜、加入导电层及其层数对复合应力阻抗性能的影响。研究结果表明:铜箔作为界面强化导电层的加入是提高复合薄膜力敏特性的有效途径之一,设计实验中的复合薄膜/铜箔/复合薄膜结构相当于聚合物/金属/聚合物三明治多层膜结构,对敏感性具有增强效应。     

过渡区p型氢化硅氧薄膜结构和光电特性的研究

采用射频等离子体增强化学气相沉积技术,利用二氧化碳(CO_2)、氢气(H_2)、硅烷(SiH_4)和乙硼烷(B_2H_6)作为气源,制备出一系列p型氢化硅氧薄膜.利用拉曼光谱、傅里叶变换红外光谱和暗电导测试,研究了不同二氧化碳流量对薄膜材料结构和光电特性的影响,获得了从纳米晶相向非晶相转变的过渡区P层.研究表明:随着二氧化碳流量从0增加到1.2 cm~3·min~(-1),拉曼光谱的峰值位置从520 cm~(-1)逐渐移至480 cm~(-1).材料红外光谱表明,随着二氧化碳流量的增加,薄膜中的氧含量逐渐增加,氢键配置逐渐由硅单氢键转换为硅双氢键.P层SiO:H薄膜电导率从3S/cm降为8.3×10~(-6)S/cm.所有p型SiO:H薄膜的光学带隙(Eopt)都在1.82—2.13 eV之间变化.在不加背反射电极的条件下,利用从纳米晶相向非晶相转变的过渡区P层作为电池的窗口层,且在P层和I层之间插入一定厚度的缓冲层,制备出效率为8.27%的非晶硅薄膜电池.     

B元素添加对FePBCCu合金非晶形成能力、磁性能和力学性能的影响

铁基非晶合金因其低矫顽力、高磁导率和低铁耗等被广泛应用于变压器、电抗器等电力电子领域,然而,较低的饱和磁感值限制了其进一步应用.铁含量增大可有效提高合金的饱和磁感,但相应非磁性元素含量的降低又将引起合金非晶形成能力的下降,导致后续纳米晶带材的软磁性能及弯折韧性的恶化.针对上述问题,文章基于金属-类金属间的杂化作用,通过原子百分比为7%的B替代P,利用单辊甩带法制备了厚度约为25μm的FePBCCu非晶薄带,并研究了B添加对薄带非晶形成能力、磁性能和力学性能的影响.热动力学行为揭示出小原子B添加能够降低合金结构的异质性,有效提高非晶基体的热稳定性;熔化与凝固曲线表明B元素能够促使合金系接近共晶成分且具有较大的过冷度.因此合金的非晶形成能力显著提高,其临界厚度从基体的约21μm提高到约30μm. B添加促使合金系磁性原子有效磁矩的增大,导致非晶薄带的饱和磁感值增大.纳米压痕实验结果表明, B添加合金的约化模量值较大且在一个较小范围内波动,这与合金的结构均匀性密切相关.     

不同退火温度下晶化硅薄膜的电学输运性质

采用等离子体化学气相沉积技术制备氢化非晶硅薄膜,经过不同温度下的热退火处理,使薄膜由非晶结构向晶化结构转变,得到含有纳米晶粒的晶化硅薄膜.在晶化过程中,采用Raman技术对样品的结构进行表征.通过变温电导率的测试,对薄膜的电学输运性质进行了分析.研究结果表明：退火温度为700 ℃时,样品中开始有纳米晶形成,随着退火温度的增加,样品的晶化比增大,在1000 ℃时,薄膜的晶化比达到90%以上.在700 ℃退火时,薄膜中晶化成分较低,载流子的传输特性主要受到与硅悬挂键有关的缺陷态影响,表现为带尾定域态的跳跃电导 关键词： 氢化非晶硅 退火 纳米硅 电输运     

纳米超微晶Fe_(73.5)Cu_lMo_3Si_(13.5)B_9合金显微结构和磁性的研究

对纳米晶Fe_(73.5)Cu_1Mo_3Si_(13.5)B_9合金的原始制备态和各退火态样品进行了室温Mossbauer谱研究,结果表明晶化态的合金存在α-Fe(Si)微晶相和晶界的非晶相。晶相和非晶相内场和面积随退火温度的变化是退火时Cu,Mo,B等成分的扩散和在各相中的再分配引起的。最佳磁性能对应非晶相中的铁量占合金铁总量的30％左右,超微晶合金的双相无规各向异性模型表明,一定量的非晶相对保持纳米晶优异的软磁性能是必要的。Fe_2B相的出现使合金的性能变坏。     

Magnetic nanocomposite spinel and FeCo core-shell and mesoporous systems

The fabrication of condensed silica and mesoporous silica coated spinel CoFe₂O₄ and FeCo alloy magnetic nanocomposites are reported. The encapsulation of well-defined 5 nm thick uniform silica layer on CoFe₂O₄ magnetic nanoparticles was performed. The formation of mesopores in the shell was a consequence of removal of organic group of the precursor through annealing. The NiO nanoparticles were loaded into the mesoporous silica. The mesoporous silica shells leads to a larger coercivity than that of pure CoFe₂O₄ magnetic nanoparticles due to the decrease of interparticle interactions and magneto-elastic anisotropy. In addition, the FeCo nanoparticles were coated by condensed and mesoporous silica. The condensed silica can protect the reactive FeCo alloy from oxidation up to 300 °C. However, saturation magnetization of FeCo nanoparticles coated by silica after 400 °C annealing is dramatically decreased due to the oxidation of the FeCo core. The mesoporous silica coated magnetic nanostructure loaded with NiO as a final product could be used in the field of biomedical applications.     

Microstructure and microwave permeability of FeCo thin films with Co underlayer

Microstructure, static magnetic properties and microwave permeability of sputtered FeCo films were examined. Fe₆₀Co₄₀ films (100 nm in thickness) deposited on glass substrates exhibited in-plane isotropy and a large coercivity of 161.1 Oe. When same thickness films were deposited on 2.5 nm Co underlayer, well-defined in-plane anisotropy was formed with an anisotropy field of 65 Oe. The sample had a static initial permeability of about 285, maximum imaginary permeability of 1255 and ferromagnetic resonance frequency of 2.71 GHz. Cross-sectional TEM image revealed that the Co underlayer had induced a columnar grain structure with grain diameter of 10 nm in the FeCo films. In comparison, FeCo films without Co underlayer showed larger grains of 70 nm in diameter with fewer distinct vertical grain boundaries. In addition, the Co underlayer changed the preferred orientation of the FeCo from (1 0 0) to (1 1 0). The improvement in soft magnetic properties and microwave behavior originates from the modification of the film microstructure, which can be well understood by the random anisotropy theory.     

Influence of annealing on microstructure and magnetic-transport of FeCo–SiO2 nanogranular films

A series of FeCo–SiO₂ nanogranular films were prepared using magnetron controlled sputtering method. The microstructure, tunneling giant magnetoresistance (TMR) and magnetic properties of FeCo–SiO₂ films deposited at room temperature and then annealed at various temperatures were investigated using transmission electron microscopy (TEM), conventional four probes method and vibrated sample magnetometer (VSM) under room temperature, respectively. The results showed that all FeCo–SiO₂ films consisted of FeCo granules with equiaxial shape uniformly dispersed in the SiO₂ matrix and formed body-centered cubic (bcc) structure. With increasing the annealing temperature, FeCo granule size increased monotonically. For film with 30.5 vol% FeCo, the size distribution satisfied the log-normal function at lower annealing temperature. While with increasing annealing temperature, the size distribution deviated gradually from the log-normal function. Meanwhile, upon varying the annealing temperature, the TMR of films with lower volume fraction reached a peak value at higher annealing temperature and the TMR of films with higher volume fraction reached a peak value at lower annealing temperature. In addition, the results also indicated that the sensitivity of TMR changed non-monotonically with the increment of the annealing temperature and both the saturation magnetization and the susceptibility of FeCo (30.5 vol%)–SiO₂ films increased with increasing the annealing temperature.     

射频反应性溅射沉积的Cd2SnO4薄膜物理性质与缺陷特性研究

在Ar+O₂混合气氛中射频反应性溅射Cd-Sn合金靶制备了透明导电Cd₂SnO₄(简称CTO)薄膜。用X射线衍射测量了CTO膜的结构。实验结果表明,这种薄膜的电学和光学性质依赖于混合气体中的氧浓度、衬底温度以及沉积后的热处理。获得的CTO膜最低电阻率为1.74×10^-6Ω·cm,可见光光谱区最高透射率为95％。对于氧浓度为6％、衬底温度为400℃时沉积的CTO膜,经热处理后,其光隙能由热处理前的2.37eV增大为2.6 关键词：     

Soft magnetic properties of FeCo films with Co underlayer

Bilayered Fe₆₅Co₃₅ (=FeCo)/Co films were prepared by facing targets sputtering with 4πM_s∼24 kg. The soft magnetic properties of FeCo films were induced by a Co underlayer. H_c decreased rapidly when the Co underlayer was 2 nm or more. The films showed well-defined in-plane uniaxial anisotropy with the typical values of H_ce=10 Oe and H_ch=3 Oe, respectively. High frequency characteristics of the films show the films can work at 0.8 GHz with real permeability as high as 250.     

CoFeB/MgO不连续多层纳米软磁薄膜微波电磁特性

采用直流/射频磁控溅射方法和不连续多层交替沉积工艺,制备了CoFeB/MgO系列纳米不连续多层薄膜,研究了微波频段下的电磁性能.结果表明,通过调整CoFeB合金相和MgO介质相的相对含量可有效调控薄膜的微结构和电磁性能,且在［Co₆₄Fe₂₄B₁₂(0.7nm)/MgO(0.4nm)］₄₀薄膜中获得了优良的微波软磁性能和高电阻率,其饱和磁化强度1.3 T,难轴矫顽力130 A/m,电阻率3.4mΩ·cm,且共振频率高达2.1 GHz,磁导率实部μ′和虚部μ″在1.59 GHz处均高于240,并且在0.9—2 GHz宽频带范围同时大于100.该薄膜可用于微波吸收材料和电磁兼容的设计中. 关键词： 纳米磁性颗粒膜 磁导率频谱 电磁性能 吸波材料     

GaAs自旋注入及巨霍尔效应的研究

在自旋电子学研究中,一般以超晶格结构、自旋阀、隧道结来实现,另一种自旋注入典型方法是稀磁半导体材料,如GaMnAs,本文通过颗粒膜实现自旋注入,利用磁控溅射法将Fe颗粒嵌入GaAs阵体上,制备了(GaAs)₁₉Fe₈₁颗粒膜样品,在室温条件下观测到15 μΩ ·cm最大饱和霍尔电阻率,该效应比纯铁的饱和霍尔电阻率大了一个数量级,成功地实现了自旋注入. 关键词： 自旋注入 颗粒膜 巨霍尔效应     

Ni0.8Co0.2-SiO2颗粒膜中的Hall效应

对用离子束溅射制备的Ni_0.8Co_0.2-SiO₂颗粒膜的Hall效应进行了研究.当Ni_0.8Co_0.2合金的含量为43vol%时,在9.5×10⁵A/m的外磁场下,样品的室温Hall电阻率达6.3μΩ·cm ,高于普通磁性金属两个数量级以上,还研究了不同NiCo组分样品的电阻率与温度的关系（95—300K）,发现x＜x_c(逾渗组分)时,电阻率与-logT成正比,电阻温度系数为负;当x＜x_c时,逐渐呈现金属性;而当x≈x_c时,为过渡态.还用透射电子显微镜和振动样品磁强计等手段对样品的微结构和磁性进行了对比研究,表明金属-绝缘体颗粒膜中在逾渗阈值附近有较大的Hall效应,这与样品的微结构有密切关系. 关键词：     

Effect of Co underlayer on soft magnetic properties and microstructure of FeCo thin films

High saturation magnetization soft magnetic FeCo (=Fe₆₅Co₃₅) films were prepared using a thin Co underlayer. The FeCo/Co films exhibited a well-defined in-plane uniaxial anisotropy with easy axis coercivity (H_ce) of 10 Oe and hard axis coercivity (H_ch) of 3 Oe, and a half reduction of H_c with H_ce=4.8 Oe and H_ch=1.0 Oe was obtained when the composition was adjusted to 25 at% Co. The effective permeability of the films remains flat around 250 to 800 MHz. The saturation magnetostriction was 5.2×10⁻⁵ and the intrinsic stress was 0.8 GPa in FeCo single layer, both were slightly reduced by Co underlayer. The Co underlayer changed the preferred orientation of the FeCo films from (2 0 0) to (1 1 0) but more significantly, reduced the average grain size from ∼74 to ∼8.2 nm. It also reduced the surface roughness from 2.351 to 0.751 nm. The initial stage and interface diffusion properties were examined by TEM and XPS.     

高电阻率多层纳米颗粒膜软磁特性及微波磁导率

研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率.采用多次顺序沉积Co₄₀Fe₄₀B₂₀和SiO₂薄层制备了薄膜.在100kA/m均匀面内磁场经过250℃真空退火2h,制备的Co₄₀Fe₄₀B₂₀/SiO₂多层膜具有难轴矫顽力为210A/m、饱和磁化强度为838.75kA/m、电阻率为2.06×10^{3关键词： 纳米颗粒膜 电阻率 软磁特性 微波磁导率}