New Laser Interferometer with OPD Multiplication for Nanometer Measurement

By using coupled differential interferometry a new laser displacement measurement interferometer with nanometric accuracy has been developed. The resolution and the stability of the interferometer are improved by multiplicating the optical path difference (OPD). The new interferometer is simple in concept,symmetric in optical paths,without optical deadpath,easy to set up and align. λ/1600 resolution and nanometric accuracy are achieved within the measurement range of 10 mm.     

半导体激光微小振动实时干涉测量仪

设计了一种半导体激光干涉测量仪,可以实时测量物体的微小振动。通过信号处理电路对干涉信号进行分析,得到实际振动的振幅和频率。给出了具体的理论分析,实验结果验证了该干涉仪的实用性。     

四路激光跟踪干涉三维坐标测量系统

介绍了基于多边法原理的四路激光跟踪干涉三维坐标测量系统 ,包括系统的工作原理、冗余特性、激光跟踪干涉仪、新型目标靶镜、系统的布局及实验结果等 ,并进一步指出下一步的工作。实验表明 ,在距跟踪干涉仪80 0mm远处 70 0mm× 6 0 0mm平面范围内 ,系统三维坐标测量不确定度为 0 .0 6 2 0mm。     

X射线干涉仪实现扫描探针显微镜样板线间距纳米测量

X射线干涉仪以非常稳定的单晶硅晶格作为长度单位 ,可以实现亚纳米精度的微位移测量。提出了将 X射线干涉仪和扫描隧道显微镜结合起来 ,利用单晶硅的晶格尺度测量扫描探针显微镜样板节距的技术方案 ,并进行了实验研究     

A New Development of a Single Mode Laser Interferometer

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近红外瞬态脉冲波前高精度干涉检测技术

惯性约束聚变(ICF)系统中高能瞬态脉冲激光由于脉冲时间短、能量高、波前畸变大,通常的检测方法难于检测脉冲激光波前。提出了一种基于空间相位调制技术可用于近红外瞬态波前高精度检测的环形径向剪切干涉仪。该系统可以以30~150 mm的圆瞳和方瞳口径、对波长为1064 nm的近红外纳秒级脉宽的脉冲激光波前实现共路、无参考面的瞬态、高精度的检测。系统的波前重构理论经过计算机仿真验证,精度达1/1000λ以上;检测结果与ZYGO数字波面干涉仪进行了比对,峰谷值、均方根值均优于1/15λ,并具有很好的可重复性。该系统目前已用于惯性约束聚变系统的脉冲检测,并且该技术适用于各种可见光和红外波段激光。     

一种用激光干涉测量光波波长的新方法

提出了一种利用激光干涉仪测量光波波长的方法。通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度,使相干光的光程差发生变化;利用干涉条纹与转过角度、透明玻璃厚度之间的关系,通过激光干涉实验能准确测量出光波的波长。     

Radius Measurement of a Concave Mirror by a Zone Plate Interferometer

A new technique to measure the radius of a concave mirror is proposed, in which the radius is calculated from the difference of the two interferograms obtained before and after shifting the sample perpendicular to or along the optical axis. By comparison of these two shifting directions, it is shown that since the amount of shift can be measured accurately and the result is insensitive to the tilt during the shifting, better accuracy can be obtained by shifting the sample along the optical axis.Presented at the International Commission of Optics Topical Meeting, Kyoto, 1994.     

Optic Fiber Interferometer for Absolute Distance Measurement

1.IntroductionAbsolutedistancemeasurementisfarfromanewtopic.However,itisstillafieldstimulatinggreatinterestsnowadaysduetoitSimportantroleinmanufacturingandassembly['J.SincethegreatsuccessachievedbyMichelsonandBenoitwhentheyfirstdevelopedaninterferometertodeterminethestandardmeterintermsofthemonochromaticredcadmiumline,theopticinterferometerhasbeenprovedtobeoneofthemostpreciseandefficientwayindisplacementmeasurementbecauseofitshighdiscriminationandsimplestructure.However,thetraditionalinterfe…     

外差干涉仪中声光调制器特性对测量精度的影响

提出并论证了混合型声光调制器衍射光的衍射级次混叠特性, 它使衍射光强中存在着驱动频率的谐波项, 此外入射光束的漂移将引起衍射光的频率漂移。分析了在外差干涉仪中应用它们对测量精度的影响, 提出了消除这些因素影响的方法： 利用双声光调制器外差干涉, 并在干涉仪的内部提取测量的参考信号。用双声光调制器的外差干涉仪可以实现纳米测量。     

Phase Measurement Algorithm in Wavelength Scanned Fizeau Interferometer

Wavelength scanned interferometry allows the simultaneous measurement of top surface shape and optical thickness variation of a transparent object consisting of several parallel surfaces. Interference signals from these surfaces can be separated in frequency space, and their phases are detected by discrete Fourier analysis. However, these signal frequencies are shifted from the detection frequency by the refractive index dispersion of the object and a nonlinearity of the wavelength scanning. The Fourier analysis is sensitive to the detuning of the signal frequency and suffers from the multiple-beam interference noise. Conventional error-compensating algorithms cannot be applied to an object consisting of more than three reflecting surfaces. We derive a new 2N-1 sample error-compensating algorithm, which allows the phase detection of any order of harmonic frequency among the interference signals. The new algorithm suppresses the effect of signal frequency detuning as well as the multiple-beam interference noise and can be applied to the measurement of complex objects consisting of more than three reflecting surfaces.     

光热正弦相位调制干涉仪中相位的抗干扰测量

在正弦相位调制半导体激光干涉仪中,半导体激光波长随注入电流和温度漂移而产生相位测量误差,同时干涉仪的机械振动和干涉仪两臂中的空气扰动也会引入相位误差,在已有光热正弦相位调制干涉仪中引入反馈机制,有效地降低了上述误差,增强了干涉仪的抗干扰能力,使用此干涉仪测量了物体的位移,测量结果表明这种方法可以有效地提高相位的测量精度。     

Synthesis of Nanometer Glass and Crystal Particles by Excimer Laser Ablation

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测量微观不平度的90°相移激光干涉仪

叙述了测量微观不平度的90°相移激光干涉仪的原理和构成。对这种新型干涉仪的性能及有关问题作了讨论。测量结果的计算和样品扫描的控制，由个人计算机完成。垂直分辨率达1um，横向分辨率达10μm。实验结果证明了系统的稳定性。     

用迈克尔逊干涉仪测量He-Ne激光波长的测量不确定度分析

针对迈克尔逊干涉实验中测出的He-Ne激光的波长值总是比真实值偏大的问题,分析了用迈克尔逊干涉仪测量He-Ne激光波长时的实验误差来源,发现实验光路调整的不理想以及仪器读数装置中残留的螺纹空程差是导致λ值偏大的主要原因。在此基础上提出了相应的改进办法,并且对测量不确定度进行了合理的估算。     

Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement

A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10⁻⁸ rad.     

傅里叶变换干涉仪激光信号处理电路的分析

激光信号处理电路是傅里叶变换干涉仪的重要组成部分,为提高干涉仪控制器的控制精度,在分析干涉仪工作特点的基础上设计了激光信号处理电路,并着重分析了四阶Besell带通滤波器的误差传递路径,及各噪声对信号质量的影响,从而为低噪声电路设计提供一定的理论基础,具有参考作用.最后,半实物仿真结果表明所设计的激光信号处理电路精度达到0.01％,从而验证了所设计电路的合理性.     

Multi-Channel FIR Laser Interferometer on the HL-2A Tokamak

In recent years, the high density plasma in the range of 10^19～ 10^20m^-3 have been operated in large or middle tokamak device in the world. A muhichannel far infrared interferometer for profile measurement of plasma density on HL-2A divertor tokamak is being developed, however the design of the interferometer will appear many new problem in face of experimental environment of the HL-2A divertor device, such as how to make both transmission and arrangement of optics of the interferometer, the effect of electromo- tive force on device and how about the vibration etc. According to the eight windows setting on the largest flange of the device we have to design a Michelson-type FIR laser interferometer with 8 probing channels and eight concave mirrors must be attached it to the inner wall of the vacuum vessel of the device. Therefore, there are many problems should be taken into account to resolve, for example, （ 1 ） the vibration-proof consider for muhichannel interferometer and HCN laser, （2） the stabilization and reliability of the mirror frame uum vessel, the mirrors, hanging on internal wall of vachow to prevent the sputtering to （3） the vacuum seal of the windows and the design of mobile seal for the shutter to avoid the sputter coating of plasma,     

光纤干涉测距中光程定位的研究

提出一种由定位干涉仪和测量干涉仪组成的光纤干涉绝对距离测量方法;并用标准长度光纤实现光程倍增以增大测量范围;重点讨论了用脉冲电流调制的准单色光源实现光程定位的方法及其精度。通过理论分析和仿真实验,定位重复性误差优于±1μm。     

激光干涉测速技术在内弹道弹丸速度测量中的应用研究

 利用任意反射面激光干涉测速（VISAR）系统以及全光纤位移干涉仪（FDI）,测量了线膛炮弹丸速度,获得了线膛炮弹丸在0~491 μs内从零加速到140 m/s的速度历史,弹丸运动了20.7 mm,出炮口时的弹丸速度为817 m/s。实验结果表明,影响激光干涉测速技术在内弹道测量中应用的主要因素是炮口烟。研究结果对于深入探索激光干涉测速技术在内弹道测量中的应用有重要的参考意义。