Depth profile analysis of plasma assisted CVD hard materials coatings

The wear resistance of homogeneous and multilayer TiN_x., TiC_xN_y- and TiC_x-coatings is considerably determined by the layer composition and by the conditions at the interface. This work deals with the possibilities of different depth profile analysis methods for the study of TiN_x and TiC_x layers on hard metal and steel substrates prepared by plasma assisted CVD technique, and furthermore it demonstrates the performance of factor analysis for detailed investigation of a multilayer system consisting of amorphous C and TiC_x single layers.The hard materials coatings were investigated by different methods of depth profile analysis, which may be an important tool in the research of thin layer deposition for wear applications. The following techniques were used: GDOES, analytical TEM, electron microdiffraction and AUGER electron spectroscopy. By means of the combined application of energy dispersive X-ray spectrometry and microdiffraction a correlation of the depth profiles of both elemental concentrations and lattice parameters in TiC_x coatings could be revealed.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday     

Investigations on microstructure,composition and properties of PECVD TiNx-coatings

Nearly stoichiometric TiN_x-coatings have been deposited on different substrates using a gaseous reaction mixture of TiCl₄, N₂, H₂ and Ar in a pulsed d.c. plasma discharge. The influence of substrate temperature, plasma power density, argon partial pressure and type of substrate on chlorine content, texture and microstructure of the coatings has been investigated keeping constant the other parameters of the plasma enhanced chemical vapor deposition (PECVD) process. Microstructure has been characterized by scanning electron microscopy (SEM) fractographs of the coatings and by determination of texture. The chlorine content quantitatively determined from energy-dispersive X-ray spectra (EDX) using a chlorine containing mineral as standard decreases on an increase of substrate temperature or plasma power density. Texture changes from 〈200〉 to 〈111〉 and random and microstructure changes from columnar growth to granular for decreasing substrate temperature as well as decreasing plasma power density. Argon partial pressure does not affect the microstructure but the texture. The properties of the coatings are independent of type of substrate for higher plasma power densities. Oxygen present at the surface of the substrate stimulates the development of a texture at low plasma power densities.     

Zur Bestimmung der Zusammensetzung und Homogenit?t reaktiv gesputterter SiNx-Schichten

Summary Thin SiN_x-layers are to be used for joining Si₃N₄ ceramics. For the characterization of such layers produced by reactive sputtering using a RF magnetron cathode, the chemical composition requires determination. Layers were therefore sputtered under various sputtering conditions onto stainless steel, graphite and silicon substrates and then analyzed using three different methods: Glow Discharge Optical Spectrometry (GDOS), Electron Microprobe Analysis (EMPA) and Rutherford-Backscattering (RBS).     

Composition of Ti-N films: EDX analysis during the sputtering process

Summary Energy dispersive X-ray (EDX) analysis was applied in-situ for measurements of composition, surface mass and deposition rate of Ti atoms during reactive sputtering. Electron beam excitation was used for the determination of composition and X-ray fluorescence (XRF) for the surface mass determination. Intensity measurements of the optical emission of Ti atoms agree well with the deposition rate of Ti atoms measured by XRF. The influences of nitrogen mass flow and negative bias substrate voltage on concentration and sputtering rate were investigated in homogeneous TiN_x films and TiN_x/TiN_y multilayers.     

TEM investigation of TiNx-PACVD-coatings

The wear resistance of cermet cutting tools can be remarkably increased by TiN_x coatings. These layers are deposited at substrate temperatures of 723 K, 773 K and 973 K using a plasma-assisted chemical vapour deposition (PACVD) process. TEM investigations combined with EDXS analysis and electron diffraction gave information on structure and composition of the TiN_x layers and the interface range. X-ray structure investigations were performed additionally.The structure and the chlorine content of layers and interfaces change in dependence on the deposition temperature. All coatings show a columnar structure, but the fibre diameter increases with temperature. The fine-grained TiN_x layer deposited at 723 K has the highest chlorine content, a low-developed columnar structure and a 111 texture. The coatings deposited at 773 K and 973 K contain less chlorine impurities and have a 100 preferred orientation. The fibre structures at 723 K and 773 K can be resolved into single crystallites. By TEM investigations the fibres formed at 773 K are proved to be an accumulation of neighbouring and similarly oriented crystallites. Grain size determined by X-ray analysis and fibre diameter agree with each other. Grain sizes determined more exactly from TEM images are 6 nm at 723 K, 10 nm at 773 K and 30 nm at 973 K. In the interface region the thickness and the chlorine content of this zone decreases with increasing deposition temperature and simultaneously the layer adhesion increases.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday     

LaNi1 − x Cu x O3 (x = 0.05, 0.10, 0.30) coated electrodes for oxygen evolution in alkaline medium

LaNi_1???x Cu _x O₃ (x?=?0.05, 0.10, 0.30) coated electrodes were prepared by brush painting using Ni foam substrates in order to increase its active surface area. For comparison, coatings with x?=?0.05 were also prepared using vitreous carbon substrates. Cyclic voltammetry was used to evaluate the coating roughness (R _f). Values between 5,145?±?148 and 6,334?±?277 were obtained, depending on the x value, for the coatings on Ni foam. These results show that the electrodes prepared with LaNi_1???x Cu _x O₃ powder, obtained at 600 °C, lead to a big increase on the oxide electrode roughness when compared with LaNiO₃ electrodes prepared by a similar method. Much lower values were obtained for the coatings on vitreous carbon indicating that the substrate nature is also a key factor for the preparation of high surface area electrodes. The calculated kinetic parameters for the oxygen evolution reaction (OER) show that the partial replacement of Ni by Cu has no beneficial effect on the intrinsic catalytic activity of the coatings. On the other hand, a big increase on the active area is observed even for small amounts of Cu (x?=?0.05), leading to a better overall OER performance for the LaNi_0.95Cu_0.05O₃ coating on Ni foam. For this composition, the activity is dominated by geometric effects.     

Investigations on microstructure, composition and properties of PECVD TiNx-coatings

Nearly stoichiometric TiN_x-coatings have been deposited on different substrates using a gaseous reaction mixture of TiCl₄, N₂, H₂ and Ar in a pulsed d.c. plasma discharge. The influence of substrate temperature, plasma power density, argon partial pressure and type of substrate on chlorine content, texture and microstructure of the coatings has been investigated keeping constant the other parameters of the plasma enhanced chemical vapor deposition (PECVD) process. Microstructure has been characterized by scanning electron microscopy (SEM) fractographs of the coatings and by determination of texture. The chlorine content quantitatively determined from energy-dispersive X-ray spectra (EDX) using a chlorine containing mineral as standard decreases on an increase of substrate temperature or plasma power density. Texture changes from 200 to 111 and random and microstructure changes from columnar growth to granular for decreasing substrate temperature as well as decreasing plasma power density. Argon partial pressure does not affect the microstructure but the texture. The properties of the coatings are independent of type of substrate for higher plasma power densities. Oxygen present at the surface of the substrate stimulates the development of a texture at low plasma power densities.     

Influence of substrate temperature and N2/Ar flow ratio on the stoichiometry,structure and hardness of TaNx coatings deposited by DC reactive sputtering

The effect of substrate temperature and N2/Ar flow ratio on the stoichiometry, structure and hardness of TaN_x coatings prepared on (111) Si substrates by DC reactive sputtering was investigated. For the structural, chemical and morphological analysis, X‐ray diffraction (XRD), Auger electron scanning and atomic force microscopy were respectively used. Hardness values of thin films were determined using the work of indentation model from nanoindentation measurements. TaN stoichiometric coatings were obtained for samples deposited at room temperature. The stoichiometric TaN phase was not obtained by increasing the temperature up to 773 K, even when increasing the N₂/Ar flow ratio. Even when a saturation in nitrogen content was achieved, nitrogen vacancies are still present in those samples. For coatings prepared at 773 K and low N₂/Ar flow ratio, a phase mixture between TaN_x and cubic α‐Ta was observed, while a cubic structure δ‐TaN was formed by increasing the N₂/Ar flow ratio. A maximum in hardness and (38 GPa) was obtained for the sample deposited at 773 K and a N₂/Ar flow ratio of 0.2, which presented a δ‐TaN cubic crystalline structure and a roughness value of 1.6 nm. Copyright © 2015 John Wiley & Sons, Ltd.     

Experimental observation of TiN12 + cluster and theoretical investigation of its stable and metastable isomers

TiN_n ⁺ clusters were generated by laser ablation and analyzed experimentally by mass spectrometry. The results showed that the mass peak of the TiN₁₂ ⁺ cluster is dominant in the spectrum. The TiN₁₂ ⁺ cluster was further investigated by photodissociation experiments with 266, 532 and 1064 nm photons. Density functional calculations were conducted to investigate stable structures of TiN₁₂ ⁺ and the corresponding neutral cluster, TiN₁₂. The theoretical calculations found that the most stable structure of TiN₁₂ ⁺ is Ti(N₂)₆ ⁺ with O _h symmetry. The calculated binding energy is in good agreement with that obtained from the photodissociation experiments. The most stable structure of neutral TiN₁₂ is Ti(N₂)₆ with D _3d symmetry. The Ti–N bond strengths are greater than 0.94 eV in both Ti(N₂)₆ ⁺ and its neutral counterpart. The interaction between Ti and N₂ weakens the N–N bond significantly. For neutral TiN₁₂, the Ti(N₃)₄ azide, the N₅TiN₇ sandwich structure and the N₆TiN₆ structure are much higher in energy than the Ti(N₂)₆ complex. The DFT calculations predicted that the decomposition of Ti(N₃)₄, N₅TiN₇, and N₆TiN₆ into a Ti atom and six N₂ molecules can release energies of about 139, 857, and 978 kJ mol^–1 respectively.     

Revision of the Ti-N phase diagram as probed by neutron diffraction

Full-profile (Rietveld) analysis of neutron diffraction patterns was used to show that the homogeneity ranges of a tetragonal phase ɛ-Ti₂N_{1 − x} and an ordered tetragonal phase δ′-Ti₂N_2x phase of the Ti-N system lie within 0.38 ≤ N/Ti ≤ 0.42 and 0.45 ≤ N/Ti ≤ 0.50, respectively. Unit cell parameters were determined for ɛ and δ′ phases at the lower and upper boundaries of the homogeneity ranges. A cubic nitride phase having a short-range order in the nitrogen arrangement was shown to exist in the concentration range 0.45 ≤ N/Ti ≤ 0.75 at relatively high temperatures. The short range order transforms to a long-range order below 800 K in the concentration range 0.45 ≤ N/Ti ≤ 0.50. Phase transition features in titanium nitride were determined for the concentration range TiN_0.45–TiN_0.50. A revised version of a fragment of the Ti-N phase diagram was proposed proceeding from the formation conditions and the existence ranges of the δ′ and ɛ phases and on the basis of literature data.     

Thermal treatment of (TiZr)N coatings on CO2‐controlled atmosphere

Currently, studies about the CO₂ gas injection improve the production efficiency of crude oil. The surface interaction between CO₂ and thin films is a large area of research in the scientific community. In this work, we are showing that The TiZrN (coating) + Si (substrate) system immersed on environments of fully CO₂ can interact to below 400°C temperature, because the TiZrN (coating) + Si (substrate) system is broken to temperatures above of the 400°C. The Ti2p, Zr3d, N1s, O1s, and C1s narrow spectra are shown, which illustrate the evolution of TiZrN to TiN_x, TiO_x, and TiON_x compounds and afterwards to TiO₂ and ZrO₂ phases. TiN_x, TiO_x, and TiON_x compounds are responsible for the increase of the micro‐hardness (measured through Vickers Hardness Testing) of the system (TiZrN [coating] + Si [substrate]) due to that are found at 400°C thermal treatment. Topographical images obtained by atomic force microscopy showed an increase of the surface roughness due to the thermal treatment. Scanning electron microscopy demonstrated that sample submit to 600°C temperature suffered fracture with small indentations.     

Effect of substrate materials on the superconducting properties of electrophoretically deposited YBa2Cu3O7−x coatings

Coatings of the high-temperature superconductor YBa₂Cu₃O_7–x (x = 0.1–0.2) (YBCO), were deposited on commercial Ni,Ti and stainless steel substrates, by an electrophoretic deposition technique. Sintering and annealing procedures were followed in order to get strongly adherent superconducting films. The suitability of the used substrates was tested by measuring the stoichiometry and the superconducting properties of the deposited coatings by X-ray diffraction analysis (XRD), Raman spectroscopy and magnetization measurements with a superconducting quantum interference device (SQUID).     

First-principles calculations of the structural,elastic and electronic properties of MNxC1−x (M = Ti,Zr, Hf; 0 ≤ x ≤ 1) carbonitrides at ambient and elevated hydrostatic pressure

The structural, electronic, and elastic properties of three mixed transition metal carbonitrides TiN_xC_1−x, ZrN_xC_1−x, and HfN_xC_1−x (0 ≤ x ≤ 1) with the rock-salt structure were calculated at ambient and elevated up to 50 GPa hydrostatic pressures in the framework of the density functional theory methods. The lattice constants, densities, and bulk moduli of the considered compounds were shown to behave as linear functions of the nitrogen concentration x. The obtained linear dependencies of all these parameters allow for getting their estimates at any value of x in the range from 0 to 1. Gradual enhancement of the ionicity of the chemical bonds with gradual replacement of carbon by nitrogen was demonstrated by calculating the bond orders and electron density difference distributions.     

Effect of Active Fillers on Properties of Heat-Resistant Composites

The effect of active fillers such as titanium nitrides TiN _x , carbides TiC _x , and carbonitrides TiC _x N _y (0.5 < x or x + y ≤ 1.0) on properties of polymeric composites based on thermostable binders PAIS-104, SFP-012 AK-30, and ED-20 is studied.     

Biological responses to silicon and nitrogen-rich PVD silicon nitride coatings

Most structural bioceramics are comprised of metallic oxides such as alumina and zirconia. They are generally considered to be completely bioinert, but a non-oxide ceramic, silicon nitride, achieves equivalent levels of mechanical reliability while being bioactive. Silicon nitride can not only stimulate cellular proliferation but it is also antipathogenic with demonstrated efficacy against Gram-positive and Gram-negative bacteria, fungi, and viruses. In this work, three physical vapor deposition coatings with different Si:N ratios (silicon-rich, stoichiometric, and nitrogen-rich) were deposited on mirror-polished silica glass substrates. The coatings were characterized by spectroscopic and microscopic techniques and tested in vitro against E. coli and KUSA-A1 mesenchymal cells. Results showed that nitrogen-enriched Si_xN_y has a strong antibacterial effect against E. coli and contributes to cellular proliferation while silicon-enriched Si_xN_y stimulates the production of bone tissue, with higher indexes for mineralization and quality. These results suggest that Si_xN_y's biological properties can be optimized for specific applications by carefully tuning its surface chemistry.     

Determination of the cubic to hexagonal structure transition in the metastable system TiN-AlN

Structural transitions of metastable Ti_1–xAl_xN coatings on technically relevant substrates were determined as a function of the Ti/Al ratio. Ti_1–xAl_xN films with different Ti/Al ratios were deposited on high speed steel (HSS) substrates at substrate temperatures of 300?° and 500?°C by means of reactive magnetron sputtering ion plating (MSIP). A Ti/Al compound target was used as well as a cluster arrangement of one Ti and one Al target for comparison. The composition of the films was determined by electron probe microanalysis (EPMA), the crystallographic structure by thin film X-ray diffraction (XRD). The analyses revealed that films deposited with Ti/Al ratios of 44/56 and 36/64 had grown in cubic NaCl structure, a film with a Ti/Al ratio of 32/68 was two-phase, and a Ti/Al ratio of 25/75 led to a hexagonal film in wurtzite structure. Only small differences of the lattice parameters could be observed in dependence of temperature: At 300?°C the lattice parameters of the cubic structure corresponded exactly to Vegard‘s law, whereas they slightly decreased in the films deposited at 500?°C. The application of a cluster arrangement instead of a compound target resulted in nearly the same lattice parameters and peak shapes.     

The TiN system: Kinetic,calorimetric, structural and metallurgical investigations of the δ'-TiN0.51 phase

The transformation of the quenched δ-TiN_x phase, with values of x between 0.5 and 0.6, into δ'-TiN_0.51 was investigated using the heat treatment of two types of TiN_x homogeneous bulk samples produced by nitrogen diffusion into titanium plates (45 × 10 × 0.4 mm³) and strips (100 × 10 × 0.12 mm³).The transformation of quenched δ-TiN_x was investigated using electrical resistance measurements, differential scanning calorimetry (DSC), differential thermal analysis (DTA), X-ray diffraction and metallography.The transformation quenched δ → δ' was complete for the composition 33.8 ± 0.5 at.% N, with ΔH = −64 J g⁻¹. The δ'. The δ' phase splits up on a peritectoid at 800 ± 10 °C according to the reaction δ′ ⇌ ε + δ. A partial TiN equilibrium diagram is proposed.     

Simultaneous Determination of Total Nitrogen and Metal Elements in Tobaccos by High Performance Ion Chromatography

A simple method, developed primarily for simultaneous determination of total nitrogen and inorganic cations by high performance ion chromatographic (HPIC), was optimized for digestion of flue‐cured tobaccos, and compared with the traditional Kjeldahl method and atomic absorption spectrometry (AAS). Nitrogen determination by either Dumas method or Kjeldahl method is time‐consuming and tedious. Metal elements determination by either inductively coupled plasma‐mass spectrometry (ICP‐MS) or AAS may be more expensive and requires specialist equipment. The use of HPIC to simultaneous determine total nitrogen as ammonium ion and metal elements as inorganic cations after sample digestion significantly improves the speed of the analysis compared with the conventional methods. The cation‐exchange column and suppressed conductivity detector was used for determination of ammonium and inorganic cations in the presence of the elevated levels of sulfuric acid found in digested sample. The propsoed digestion method was accurate and precise, and required little investment. The determination of ammonium and inorganic cations was linear from 15 pg·L^?1 up to 25 ng·L^?1. The results obtained by the HPIC method were compared with those for the conventional methods approach for the determination of total nitrogen and metal elements. The application of the HPIC method is also demonstrated for a variety of other plant samples matrices.     

The alkoxide sol–gel process in the calcium phosphate system and its applications†

A single calcium glycolate was synthesized. The alkoxide was stable under ambient atmosphere. The calcium glycolate, phosphoric acid and P(OH) _x (OEt)_{3− x} were used as the precursors. Acetic acid was used as a reagent to modify the calcium glycolate and to change the acidity of the mixtures of the precursors. Mixtures of the calcium glycolate and phosphoric acid in a Ca/P ratio of 1.67 showed unusual sol–gel behavior. A transparent gel could be formed depending on the content of acetic acid and the extent of stirring. The behavior is attributed to a high viscosity and a large molecular size of the ethylene glycol solvent, leading to a strong dependence of the reactions in the mixtures on the diffusion process, greatly affected by stirring. When the mixtures of the calcium glycolate and PO(OH) _x (OEt) _{3− x} contained acetic acid at an acetic acid/Ca ratio of 3, stable alkoxide solutions with Ca/P ratios of 1.0, 1.5 and 1.67 could be formed. Different calcium phosphate compounds and hydroxyapatite coatings on alumina substrates could easily be formed from the alkoxide solutions. The chemical homogeneity provided by the alkoxide route leads to easy formation of the required products. Copyright © 1999 John Wiley & Sons, Ltd.