透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线研究

利用透射式GaAs光电阴极AlGaAs/GaAs外延层的结构特点及其X射线衍射摇摆曲线分析方法,解释了AlGaAs/GaAs外延层摇摆曲线半峰宽和其衍射角角位移随外延层生长温度升高而增大的现象.     

优质GaAs/Si和AlGaAs/Si材料的MOCVD生长研究

用自制常压MOCVD装置,在Si衬底上生长GaAs和AlGaAs外延层,在高温去除Si衬底表面氧化膜之后,采用两步法,即低温生长过渡层,再提高温度生长外延层。得到了表面镜面光亮的优质GaAs和AlGaAs外延层。X射线双晶衍射仪测试GaAs外延层,其回摆曲线半峰宽是200孤秒,GaAs和AlGaAs外延层在77K温度下,PL谱半峰宽分别是17meV和24meV。     

GaAs/AlGaAs分子束外延材料的X射线双晶形貌观察

本文介绍了用非平行非对称(+、-)双晶X射线形貌术研究Ⅲ—Ⅴ族化合物外延晶体的设置和原理。分析了外延后形成的弯曲样品造成的衍射效应。对分子束外延(MBE)法生长的GaAs/AlGaAs衬底和外延层分别进行了X射线形貌术观察。讨论了外延层中存在的失配位错、生长小丘、沾污和局部微差取向等缺陷。对位错的组态和来源进行了初步分析。本实验结果也表明,有应变超晶格过渡层的MBE法对生长优质的GaAs/AlGaAs外延片是有利的。     

透射式GaAs光电阴极AlGaAs/GaAs外延层倒易点二维图分析

本文介绍了摇摆曲线和倒易点二维图在评价晶格完整性时的特点,分析了透射式GaAs光电阴极样品AlGaAs/GaAs外延层的倒易点二维图,获得了晶面弯曲以及AlGaAs外延层中Al组份变化等方面的信息,为优化外延工艺提供了可靠的保证.     

透射式GaAs光电阴极AlGaAs/GaAs外延层在热应力作用下晶格弯曲的倒易点二维图研究

本文介绍了倒易点及其倒易点二维图的概念、倒易点形状及其倒易点二维图同晶格形变的关系,推导了热应力作用下双层膜发生弯曲的理论公式,阐明了晶格弯曲的原因和晶格倒易点二维图展宽的方向,分析了GaAs光电阴极AlGaAs/GaAs外延层的实测倒易点二维图,最后提出了降低AlGaAs/GaAs外延层中的热应力的技术途径.     

GaAs/AlGaAs量子阱材料的X射线形貌及其发光性能

本文介绍了用X射线双品形貌术研究MBE生长的GaAs/AlGaAs量子阱材料中的生长缺陷、位错及其对发光性能的影响。同时研究了低温下MBE生长的GaAs/AlGaAs量子阱材料的正交方向的位错。在有应变超品格过渡层高温生长的量子阱材料中,位错及光致发光性能有明显的改善。     

透射式GaAs光电阴极AlGaAs窗层和GaAs光电发射层界面应变状况的X射线衍射研究

本文介绍了应变和弛豫的概念以及倒易点在倒易空间的分布,阐明了GaAs光电阴极AlGaAs窗层和GaAs光电发射层界面应变状况的X射线衍射的分析方法,最后给出了实例.     

透射式GaAs光电阴极AlGaAs/GaAs外延层内应力的种类及其表征与测量

本文介绍了透射式GaAs光电阴极AlGaAs窗层和GaAs光电发射外延层内应力的种类及其表征方法和测量方法,另外还给出了相应的实例.     

InGaAs/GaAs应变脊形量子线分子束外延非平面生长研究

提出了新型InGaAs/GaAs应变脊形量子线结构．这种应变脊形量子线结合了非平面应变外延层中沿不同晶向能带带隙的变化、非平面生长应变层In组分的变化，以及非平面外延层厚度的变化等三方面共同形成的横向量子限制效应的综合作用．在非平面GaAs衬底上用分子束外延生长了侧面取向为（113）的脊形AlAs/In GaAs/AlAs应变量子线．用10K光致荧光谱测试了其发光性质．用Kronig-Penney模型近似计算了这种应变脊形结构所具有的横向量子限制效应，发现其光致荧光谱峰位的测试结果，与计算结果相比，有10meV的“蓝移”．认为这一跃迁能量的“蓝移”是上述三方面横向量子限制效应综合作用的结果 关键词：     

宽波段的透射式GaAs光阴极

早先,我们曾报导过玻璃粘结的GaAs光阴极的工艺及性能。简言之,它的结构是:GaAs(基底)—AlGaAs—GaAs—AlGaAs—SiO_2—7056玻璃。半导体层以通常的液相外延形成。SiO_2以化学汽相沉积形成,它作为增透膜并防止与玻璃牯结的AlGaAs表面的氧化。     

Influence of surface strain on the MOVPE growth of InGaP epitaxial layers

In this paper, we present a study of the influence of strain on the composition uniformity, phase separation and ordering of compressive and tensile strained InGaP epitaxial layers grown on GaP and GaAs substrates. The paper demonstrates how strain, caused by lattice mismatch, influences the spinodal-like decomposition and ordering in InGaP layers. We concentrated our efforts on an alloy with the lattice mismatch close to a value of Δa/a=10^-2. Transmission electron microscopy (TEM), low temperature photoluminescence and atomic force microscopy (AFM) were used to demonstrate that epitaxial layers grown under compressive strain have additional properties in comparison to those ones grown under tensile strain. The presence of ordering, spinodal-like decomposition and compositional fluctuations was studied in relation to the sign of strain. PACS 61.72.Lk; 68.35.Ct; 68.37.Lp; 68.35.Dv; 78.30.Fs     

InxGa1-xAs/GaAs量子阱应变量对变温光致发光谱的影响

利用变温光致发光(PL)研究了In0.182Ga0.818As/GaAs应变及应变补偿量子阱在77～300 K温度范围内的发光特性.随着温度T的升高,PL峰位向低能方向移动.在应力作用下In0.182Ga0.818As/GaAs量子阱的价带顶轻空穴带和重空穴带发生了劈裂.通过理论计算推导应变随温度变化对InxGa1-x...     

失配应力引起的Ga_xIn_（1－x）P外延层能带隙的移动

本文首次观察了用ＭＯＣＶＤ方法生长的ＧａｘＩｎ１－ｘＰ外延层的能带隙移动，并给出了ＧａｘＩｎ１－ｘＰ外延层光荧光（ＰＬ）峰能量随组分ｘ的变化关系，结果表明ＰＬ是探测混晶组分的简单而有效的方法之一。     

在(100)GaAs衬底上低温液相外延晶格匹配的In1-xGaxAs1-yPy层及其特性研究

介绍一种低温液相外延技术,可在650℃在GaAs衬底上生长晶格匹配和组份可重复的In1-xGaxAs1-yPy层。给出对外延层进行场发射扫描电镜观察、电子探针、X光双晶衍射、俄歇电子谱和光荧光测量得到的结果。结果表明外延层具有平坦的异质结界面和良好的晶体特性。同时研究了异质结界面的粗糙度和组份梯度变化区域的宽度和晶格失配率的关系。     

Growth of GaAs/AlGaAs hexagonal pillars on GaAs (1 1 1)B surfaces by selective-area MOVPE

We report on the growth of GaAs and GaAs/AlGaAs heterostructured hexagonal pillar structures using selective area (SA) metalorganic vapor phase epitaxy (MOVPE). By performing growth on SiO₂-masked (1 1 1)B GaAs substrates with circular or hexagonal hole openings, extremely uniform array of hexagonal GaAs/AlGaAs pillars consisting {1 1 0} vertical facets with their diameter of order of 100 nm were obtained. Unexpectedly, strong intense light emission was observed for the room temperature photoluminescence measurement of the pillar arrays in triangular lattice, which is promising for the application to the photonic crystals to enhance the light extraction efficiency from the materials with high refractive index. Furthermore, it was also found that hexagonal pillars with size 60 nm and large aspect ratio (>100) by reducing the size of initial hole size of mask, opening a possibility to grow nanowires using epitaxial growth.     

Theoretical studies of polarization dependent electro-optical modulation in lattice matched and strained multi-quantum well structures

We report on polarization dependent optical absorption for excitonic and interband transitions in lattice matched (GaAs/AlGaAs) and strained (biaxial tensile strain - GaAsP/AlGaAs; biaxial compressive strain - InGaAs/AlGaAs) multiquantum well structures in the presence of transverse electric fields. The hole states are solved by using the Kohn-Luttinger Hamiltonian and using an eigenvalue technique. The effect of heavy-hole and light-hole mixing due to the strain, electric field and quantization is studied. Under biaxial tensile strain the heavy-hole and light-hole transition can coincide, leading to interesting polarization dependent effects. Results are presented for excitonic and interband transitions.