螺旋波等离子体推进器中双层形成的PIC模拟

建立了螺旋波等离子体推进器中双层等离子体形成过程的一维全粒子PIC模型,讨论了放电过程中电子加热模型和等离子体膨胀模型,计算了不同条件下螺旋波等离子体推进器中双层等离子体的分布。结果表明：采用氩气工质,在射频电流90 A/m2和工作压强0.05~0.15 Pa的条件下,可产生双层等离子体,其密度为1.31015~2.81015 m-3,双层电势降为10~30 V,可加速氩离子束流,喷射速度为3~12 km/s,双层加速效应对推进器的性能具有一定影响。     

磁场对螺旋波等离子体波和能量吸收影响的数值研究

本文考察在径向电子数密度呈抛物形分布的情况下,外加稳恒磁场,射频通过螺旋波天线在等离子体中激发电磁波的传播性质.采用线性扰动波假设,数值求解Maxwell方程组,得到80—800 G(1 G=10-4T)磁场条件下等离子体中径向电、磁场强度及能量沉积密度的分布情形.计算结果表明,磁场增大(80→800G)时,螺旋波受到的阻尼较小,可深入等离子体传播;Trivelpiece-Gould(TG)波受到的阻尼增大,在等离子体-真空边界处衰减增强;整体的能量吸收向边界集中.磁感应强度小于100 G时,TG波可深入主等离子体区传播,等离子体径向能量吸收相对均匀.     

Kinetic study of instability growth rate in a helicon plasma discharge source

In this work, a kinetic model is developed to study the effects of the radio frequency antenna wavenumber, helicon plasma electron density, as well as their drift velocity and temperature on the instability increment rate of the helicon wave in both longitudinal and transverse directions. The ion acoustic (IA) wave frequencies and wavenumbers of the helicon waves are obtained when the maximum wave energy is deposited on the plasma ions. Moreover, it is shown that, at the IA wavenumber and frequencies, while the longitudinal instability increment rates for both the helicon and IA waves are ignorable, the transverse instability increment rate for both the helicon and IA wave increases. Besides, the longitudinal instability increment rate for the helicon or IA wave has non‐zero resonant frequencies. On the other hand, the transverse instability increment rate of helicon or IA wave can be neglected. Furthermore, it is observed that, while both the imaginary part of longitudinal permittivity and longitudinal instability increment rate are not influenced by the electron temperature, their transverse component increases linearly with the electron temperature. In addition, the imaginary part of transverse permittivity increases almost linearly with the drift velocity of the plasma electrons.     

Experimental results of helicon sources

Helicon plasma sources are known as efficient generators of uniform and high density plasma.A helicon plasma source was developed for the investigation of plasma stripping and plasma lenses at the Institute of Modern Physics, CAS.In this paper, the characteristics of helicon plasma have been studied by using a Langmuir four-probe and a high plasma density up to 3.9×10~(13)/cm~3 has been achieved with the Nagoya type Ⅲ antenna.In the experiment, several important phenomena were found: (1) for a given magnetic induction intensity, the plasma density became greater with the increase of RF power; (2) helicon mode appeared at RF power between 300 W and 400 W; (3) the plasma density gradually tended to saturation as the RF power increased to the higher power; (4) a higher plasma density can be obtained by a good match between the RF power and the magnetic field distribution.The key issue is how to optimize the matching between the RF power and the magnetic field.Moreover, some tests on the extraction of ion beams were performed, and preliminary results are given.The problems which existed in the helicon ion source will be discussed and the increase in beam density will be expected by extraction system optimum.     

Experimental results of helicon source

Helicon plasma sources are known as efficient generators of uniform and high density plasma. A helicon plasma source was developed for the investigation of plasma stripping and plasma lenses at the Institute of Modern Physics, CAS. In this paper, the characteristics of helicon plasma have been studied by using a Langmuir four-probe and a high plasma density up to 3.9× 10^13/cm^3 has been achieved with the Nagoya type III antenna. In the experiment, several important phenomena were found： （1） for a given magnetic induction intensity, the plasma density became greater with the increase of RF power; （2） helicon mode appeared at RF power between 300 W and 400 W; （3） the plasma density gradually tended to saturation as the RF power increased to the higher power; （4） a higher plasma density can be obtained by a good match between the RF power and the magnetic field distribution. The key issue is how to optimize the matching between the RF power and the magnetic field. Moreover, some tests on the extraction of ion beams were performed, and preliminary results are given. The problems which existed in the helicon ion source will be discussed and the increase in beam density will be expected by extraction system optimum.     

碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响

考虑了离子与中性粒子的弹性碰撞和电荷交换碰撞效应,建立了一套描述射频等离子体鞘层动力学特性的自洽模型,并利用MonteCarlo模拟方法研究了入射到电极上的离子的能量分布和角度分布.数值结果表明:随着放电气压增加,入射到电极上离子的能量分布逐渐地由双峰分布变成单峰分布,而且低能离子的数目也逐渐地增加.入射到电极上的离子呈小角分布,而且放电气压等参数对角度分布的影响不是太明显. 关键词： 射频放电 等离子体 离子 鞘层     

LEAD螺旋波射频等离子体电子能量分布函数的测量

通过电压扫描探针测量了LEAD装置螺旋波射频等离子体伏安特性曲线和电子能量分布函数,并对等离子体基本参数剖面如电子温度、密度、等离子体电位和鞘电位降系数等进行了计算.实验发现在LEAD装置半径5cm以内的位置电子能量分布函数都遵循麦克斯韦分布.而在半径7cm附近,即与射频源线圈处于相同径向位置,电子能量呈现出典型的双麦...     

Synthesis of SiC/graphene nanosheet composites by helicon wave plasma

We report an approach to the rapid, one-step, preparation of a variety of wide-bandgap silicon carbide/graphene nanosheet(Si C/GNSs) composites by using a high-density helicon wave plasma(HWP) source. The microstructure and morphology of the Si C/GNSs are characterized by using scanning electron microscopy(SEM), Raman spectroscopy, x-ray diffraction(XRD), x-ray photoelectron spectroscopy(XPS), and fluorescence(PL). The nucleation mechanism and the growth model are discussed. The existence of Si C and graphene structure are confirmed by XRD and Raman spectra.The electron excitation temperature is calculated by the intensity ratio method of optical emission spectroscopy. The main peak in the PL test is observed at 420 nm, with a corresponding bandgap of 2.95 e V that indicates the potential for broad application in blue light emission and ultraviolet light emission, field electron emission, and display devices.     

Investigation on the optimal configuration design and discharge characteristics of the helicon plasma tube

Helicon discharge is characterized by its high ionization efficiency. In order to obtain the desired density, the configuration design of the helicon discharge tube is carried out, and the discharge characteristics are then studied to explore the correlation between the plasma parameters and the input discharge parameters. Finite‐length helicon discharge theory is employed to calculate the plasma resistance R _p, and then the optimal tube length L _s, the radius r _p, and the tube–antenna gap d are confirmed. The partial and energy loss mechanisms of the tube are investigated based on low‐pressure discharge particle collision theory. The results show that, for a 10‐cm‐long Nagoya III type antenna, with a tube radius of 4 cm and length of 20 cm, the R _p versus n _e curves have peak values at n _e higher than 10¹² cm⁻³ when the magnetic field intensity B ₀ ≥ 200 G. We find that a local minimum of P _loss exists when p ₀ is ∼1.5–3.0 mTorr; meanwhile, the radial confinement reduces T _e and P _loss at constant p ₀.     

短管螺旋波放电中等离子体参数测量和模式转化研究

对长度为45 cm的短放电管螺旋波放电等离子体进行了Langmuir探针、原子发射光谱以及集成电荷耦合检测器(ICCD)检测诊断,研究螺旋波等离子体的放电特性.Langmuir探针数据显示电子密度在射频功率增加过程中出现两次大幅增长,由此确认了放电模式的转换及螺旋波放电模式的出现.发射光谱测量结果与Langmuir探针测量的电子密度数据一致,发现Ar原子和Ar离子的谱线强度与放电模式变化有着密切相关性.而通过对不同放电模式的ICCD测量,获得射频功率吸收因放电模式转变而变化的方式,认为放电模式转换时电子行为和能量传递方式也发生着变化.     

脉冲束流引出时的等离子体鞘层变化

采用一维无碰撞的动力学鞘层模型计算了脉冲等离子体在恒压引出时的等离子体鞘层厚度变化,分别对短脉冲和长脉冲放电时的离子源发射面演变进行了分析。结果表明：对于短脉冲放电,发射面位置的变化相对等离子体密度的变化存在一定时间的延迟;对于长脉冲的上升沿和直流放电的开启阶段,鞘层厚度变化的速度与离子初始速度相关,稳定后发射面的位置与离子初始速度和等离子体密度的乘积相关。     

Influence of ion species ratio on grid-enhanced plasma source ion implantation

Grid-enhanced plasma source ion implantation (GEPSII) is a newly proposed technique to modify the inner-surface properties of a cylindrical bore. In this paper, a two-ion fluid model describing nitrogen molecular ions N_2^+ and atomic ions N^+ is used to investigate the ion sheath dynamics between the grid electrode and the inner surface of a cylindrical bore during the GEPSII process, which is an extension of our previous calculations in which only N_2^+ was considered. Calculations are concentrated on the results of ion dose and impact energy on the target for different ion species ratios in the core plasma. The calculated results show that more atomic ions N^+ in the core plasma can raise the ion impact energy and reduce the ion dose on the target.     

Sheath structure in plasma with two species of positive ions and secondary electrons

The properties of a collisionless plasma sheath are investigated by using a fluid model in which two species of positive ions and secondary electrons are taken into account. It is shown that the positive ion speeds at the sheath edge increase with secondary electron emission(SEE) coefficient, and the sheath structure is affected by the interplay between the two species of positive ions and secondary electrons. The critical SEE coefficients and the sheath widths depend strongly on the positive ion charge number, mass and concentration in the cases with and without SEE. In addition, ion kinetic energy flux to the wall and the impact of positive ion species on secondary electron density at the sheath edge are also discussed.     

外加磁场对碰撞射频鞘层离子能量分布的影响

采用双流体模型,数值研究入射到射频鞘层偏压电极上的离子能量分布.研究结果表明：磁场在改变离子运动状态的同时,调控着基板上的离子能量分布,使之在垂直基板方向和平行基板方向间转移. 关键词： 等离子体 射频 鞘层 磁场     

脉冲偏压上升沿特性对等离子体浸没离子注入鞘层扩展动力学的影响

等离子体浸没离子注入(PIII)是用于材料表面改性的一种廉价高效、非视线的技术.采用等离子体粒子模型，通过假设电子密度服从Boltzmann分布，求解Poisson方程和Newton方程，跟踪离子在等离子体鞘层中的运动形态及特性并进行统计分析，研究了不同上升速率和形状的6种波形上升沿对鞘层时空演化、离子注入能量和剂量的影响.结果表明，在PIII过程中，脉冲上升沿影响了等离子体鞘层的扩展，且不同波形诱导的鞘层厚度间存在最大差值.电场强度在鞘层的外边缘区域存在陡降区，离子的运动为非匀加速过程.可以通过调整脉冲 关键词： 等离子体浸没离子注入 鞘层 粒子模型 上升沿     

Adjustment of the ion energy distribution in double plasma and other synthesized plasma devices

The parallel ion energy distribution of a synthesized plasma can be readily controlled via plasma potential gradients in the ion source chamber(s). Alternatively, layers of electrically biased metal filaments can introduce an isotropic ion heating.     

蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

利用蒙特卡罗方法模拟氩气直流辉光放电鞘层内离子的运动过程.模拟基于离子与中性原子的电荷转移和弹性散射两种主要的散射过程，考虑了碰撞截面与能量相关和不相关两种情况，在弹性散射中采用了势场相互作用模型和刚性球碰撞两种模型.通过模拟得到不同气压和不同放电电压下离子入射阴极的能量分布和角度分布，并对几种模型的模拟结果进行了比较和讨论. 关键词： 辉光放电 等离子体鞘层 蒙特卡罗模拟     

半圆形容器等离子体源离子注入过程中离子动力学的两维PIC计算机模拟

利用两维particle-in-cell方法研究了半圆形容器表面等离子体源离子注入过程中鞘层的时空演化规律. 详尽考察了鞘层内随时间变化的电势分布和离子密度分布规律,离子在鞘层中的运动轨迹和运动状态,得到了半圆容器内、外表面和边缘平面上各点离子注入剂量分布规律,获得了工件表面各点注入离子的入射角分布规律. 研究结果揭示了半圆容器边缘附近鞘层中离子聚焦现象,以及离子聚焦现象导致工件表面注入剂量分布和注入角度分布存在很大不均匀的基本物理规律. 关键词： 等离子体源离子注入 鞘层 两维particle-in-cell方法 离子运动轨迹     

Sheath characteristics in multi-component plasma with negative ions

Properties of steady state ion sheath formed in front of a negatively biased metal plate under the influence of negative ions have been investigated in collisionless argon/SF₆ plasma. This experiment is carried out at a fixed discharge voltage and fixed filament heating power. In this experiment, the decrement in plasma pre-sheath potential drop as well as positive ion drift velocity toward the plate is experimentally recorded in the presence of negative ions. It is also found that the plasma positive ion density and plasma electron temperature decrease in the presence of negative ions. These factors attribute to the decrease of ion current toward the plate. Hence the usual ion sheath expands. Article presented at the International Conference on the Frontiers of Plasma Physics and Technology, 9–14 December 2002, Bangalore, India.