Rhodium carbene complexes as versatile catalyst precursors for Si-H bond activation

Rhodium(III) complexes comprising monoanionic C,C,C-tridentate dicarbene ligands activate Si-H bonds and catalyse the hydrolysis of hydrosilanes to form silanols and siloxanes with concomitant release of H(2). In dry MeNO(2), selective formation of siloxanes takes place, while changing conditions to wet THF produces silanols exclusively. Silyl ethers are formed when ROH is used as substrate, thus providing a mild route towards the protection of alcohols with H(2) as the only by-product. With alkynes, comparably fast hydrosilylation takes place, while carbonyl groups are unaffected. Further expansion of the Si-H bond activation to dihydrosilanes afforded silicones and polysilyl ethers. Mechanistic investigations using deuterated silane revealed deuterium incorporation into the abnormal carbene ligand and thus suggests a ligand-assisted mechanism involving heterolytic Si-H bond cleavage.     

Volatile beta-ketoiminato- and beta-diketiminato-based zirconium complexes as potential MOCVD precursors

An amine elimination pathway has been used to produce a number of homo- and heteroleptic zirconium complexes, starting from tetrakis(dialkylamido)zirconium complexes and beta-diketimine or, alternatively, Schiff Base compounds. Reaction of 2 equiv of the bidentate beta-diketimine (2Z,4E)-N-methyl-4-(methylimino)pent-2-en-2-amine with Zr(NR(2))(4) (R = Me, Et) affords the six-coordinate heteroleptic compounds bis(N-methyl-4-(methylimino)pent-2-en-2-amido)bis(dialkylamido)zirconium 1 (alkyl = Me) and 2 (alkyl = Et). The dynamic behavior of these two compounds in solution has been investigated. Reaction with the isopropyl-substituted beta-diketimine (2Z)-N-isopropyl-4-(isopropylimino)pent-2-en-2-amine gives the five-coordinate mono(diketiminato)-substituted compound (N-isopropyl-4-(isoropylimino)pent-2-en-2-amido)tris(dimethylamido )zirconium, 3. With employment of the Schiff base (3Z)-4-(methylamino)pent-3-en-2-one, it was also possible to prepare the six-coordinate bis(4-(methylamino)pent-3-en-2-onato)bis(diethylamido)zirconium compound 4. When the bidentate ligand bearing hydrogen as substituent on the imino-nitrogen atom was employed, homoleptic tetrakis(beta-ketoiminato)- and tetrakis(beta-diketiminato)zirconium compounds 5 and 6 can be obtained. Complexes 1 and 5 have been tested for their air stability with reference to Zr(NMe(2))(4). The stability order turned out to be 1 > 5 > Zr(NMe(2))(4). The thermal properties and volatility of all the compounds are discussed in view of their potential application in metal-organic chemical vapor deposition processes (MOCVD) of zirconium nitride.     

Rhodium carbene complexes as hydrosilylation catalysts

The catalytic activity of various rhodium carbene complexes has been investigated. These complexes are active for the hydrosilylation of a wide variety of unsaturated organic molecules such as olefins, acetylenes and dienes. Their activity is comparable to other rhodium(I) complexes previously used as hydrosilylation catalysts. The yield of products is found to vary with catalyst, silane and organic substrate.     

Cyclodextrin inclusion complexes as novel MOCVD precursors for potential cobalt oxide deposition

The potential use of the inclusion complexes of β‐cyclodextrins with metal halides as novel precursors in MOCVD applications was examined in terms of microstructure, thermal stability and chemical modifications during heating. The investigation was especially focused on the inclusion complex of β‐cyclodextrin with cobalt iodide for cobalt oxide thin film deposition. The general composition assigned to the dextrin's inclusion complex was: (β‐CD)₂^?CoI₇^?11H₂O. It was found that the inclusion complex of β‐cyclodextrin with CoI₂ may prove a promising alternative to traditional metalorganic or organometallic Co‐precursors for precise CVD applications. The sublimation temperature must be preferably in the range 70–125 °C, and the decomposition temperature (substrate temperature) in the range of 350–400 °C. Three distinct regions can be recognized by heating: transformation of tightly bound water molecules into easily movable ones, sublimation of iodine ions and Co atoms oscillation and thermal decomposition of the glycositic ring into volatile by‐products. Copyright © 2009 John Wiley & Sons, Ltd.     

Convenient synthesis of dithiafulvene carbene complexes as potential precursors of extended TTF

The condensation of α-carbanion of Fischer-type carbene complex with 2-thiomethyl-1,3-dithiolium salts 1 gave new heterocyclic organometallic carbenes 2 potentially precursors of extended TTF. Reaction of allylic carbanion 4 derived from (methoxypropenyl)pentacarbonyl carbene complex afforded a mixture of monoheterocyclic condensation products 7 and diheterocyclic carbene complexes 8 produced from successive α and γ attacks of the heterocyclic cations.     

New volatile β-diketonate complexes of barium with sterically hindered methoxy-β-diketones as precursors for CVD

The new β-diketones with a methoxy group of the type (R¹R²)C(OCH₃)COCH₂COR³ and their barium complexes have been synthesized. The barium β-diketonates obtained were identified and characterized by elemental, IR and Raman spectroscopic analyses. TG, DTG and DTA analyses carried out in vacuo and at atmospheric pressure have allowed the determination of the relative volatility and thermal stability of these barium complexes. The influence of the methoxy group, by type of substituent in the ligand, has been investigated by mass spectrometry. It has been found that the introduction of bulky end substituents into the ligand does not reduce the maximal oligomerization degree of barium β-diketonates in the gas phase.     

Thermal properties of mixed-ligand magnesium complexes with beta-diketonates and diamimes as potential MOCVD precursors

The series of adducts of magnesium beta-diketonates with diamimes namely Mg(thd)₂(tmeda) 1 and four new complexes Mg(thd)₂(tmpda) 2, Mg(thd)₂(pda) 3, Mg(ptac)₂(tmeda) 4, Mg(tfac)₂(tmeda) 5 [beta-diketonates = R₁C(O)CHC(O)R₂: thd (R₁ = R₂ =  ^t Bu), ptac (R₁ =  ^t Bu, R₂ = CF₃), tfac (R₁ = Me, R₂ = CF₃); diamines = R₂N(CH₂) _n NR₂: tmeda (n = 2, R = Me), tmpda (n = 3, R = Me), pda (n = 3, R = H)] were synthesized in order to investigate the influence of both ligand types on the thermochemical properties of these compounds. The thermal behavior of the complexes in the condensed phase was investigated by thermogravimetry and differential scanning calorimetry; the thermodynamic parameters of phase transitions were determined. The saturated vapor pressure of solid complexes Mg(thd)₂(tmeda) and Mg(tfac)₂(tmeda) were measured by the transmission method giving the enthalpies and entropies of sublimation processes. The reliable thermodynamic data for compound Mg(thd)₂(tmeda) were obtained with the assistance of X-ray diffraction and the static method of saturated and unsaturated vapor pressure measurements.     

Phosphane/phosphite silver(I) carboxylates as CVD precursors

The preparation of [L_mAgO₂CR] (L = PⁿBu₃, P(OMe)₃, P(OEt)₃; m = 1, 2; R = singly-bound organic group) and [L_mAg–E–AgL_m] (L = PⁿBu₃; E = oxalate; m = 1, 2, 3) is described. Their use as spin-on and CVD precursors is reported. SEM and EDX studies show that closed and homogeneous silver films with admirable conductivity could be obtained.     

Volatile magnesium octahydrotriborate complexes as potential CVD precursors to MgB2. Synthesis and characterization of Mg(B3H8)2 and its etherates

The solid-state reaction of MgBr2 and NaB3H8 at 20 degrees C, followed by sublimation at 80 degrees C and 0.05 Torr, affords Mg(B3H8)2 as a white solid. Similar reactions with MgBr2(Et2O) and MgBr2(Me2O)1.5 afford the crystalline ether adducts Mg(B3H8)2(Et2O)2 and Mg(B3H8)2(Me2O)2, respectively. In contrast, reactions of MgBr2 with NaB3H8, the presence of excess solvent result in the formation of nonvolatile, probably ionic, magnesium compounds of the type [MgLx][B3H8]2. The adducts Mg(B3H8)2(Et2O)2 and Mg(B3H8)2(Me2O)2 are the first crystallographically characterized magnesium complexes of the B3H8- ligand; in both structures, the magnesium center adopts a distorted cis-octahedral geometry with two bidentate B3H8 groups and two Et2O ligands. Owing to their volatility, Mg(B3H8)2(Et2O)2 and Mg(B3H8)2(Me2O)2 are potential precursors for the deposition of MgB2 thin films, although preliminary efforts to employ them as chemical vapor deposition sources produce boron-rich MgBx films instead, with x approximately 7. Finally, the synthesis and structure of Cp2Mg(thf) are described: this mono-thf adduct of Cp2Mg bears two eta5-Cp groups, unlike other Lewis base adducts of Cp2Mg, which contain one eta5-Cp group and one eta1- or eta2-Cp group.     

Rhodium complexes of some cyclo-olefins

Dicarbonyl(pentane-2,4-dionato)rhodium(I) does not form a complex with, or induce a skeletal rearrangement in, cycloheptatriene. 5-Exo-methylene-2-norbornene is present as an impurity in cycloheptatriene and is complexed by Rh(I) complexes as its endocyclic tautomer. Rhodium complexes of 1,3,5-cyclooctatriene, bicyclo [3.2.1] octa-2,6-diene, cyclooctatetraene, cyclooctatetraene epoxide, bicyclo [6.1.0] nonatriene and 9,9-dimethyl bicyclo [6.1.0] nonatriene are also reported.     

Rhodium and platinum complexes as catalysts for the polymerization of phenylacetylene

In polymerization reactions of phenylacetylene three different types of polyphenylacetylene (PPA) were prepared by using Rh and Pt complexes as catalysts in different reaction conditions. Type I PPA is obtained with [Rh (COD) Chel] PF₆ complexes (COD = cis,cis-cycloocta 1,5-diene; chel = 2,2′-bipyridine, 1,10-phenanthroline, 2,9-dimethyl-1,10-phenanthroline, 5,6-dimethyl-1,10-phenanthroline, 3,4,7,8-tetramethyl-1,10-phenanthroline) in bulk, benzene methanol, while type II PPA is obtained with the same catalysts in p-dioxane and type III PPA in the presence of [Pt (? C?CPh)₂(PPh₃)₂] in bulk. Type I, II, and III PPA exhibit different IR and ¹H-NMR spectra, which have been compared with literature data. Correlations proposed by different Authors between spectral properties of PPA and chain structures are also discussed.     

Dinuclear Rh(II) pyrazolates as CVD precursors for rhodium thin films

New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh(2)(3-R,5-R'Pz)(4)·2L (R = R' = CF(3), L = H(2)O (1), CH(3)CN (2)) and Rh(2)(3-R,5-R'Pz)(4) (R = R' = (t)Bu (3); R = CF(3), R' = (t)Bu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh(2)(OAc)(4) in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H(2) as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).     

Dinuclear cyano-bridged CoIII-FeII complexes as precursors for molecular mixed-valence complexes of higher nuclearity

The preparation and characterization of a series of trinuclear mixed-valence cyano-bridged Co(III)-Fe(II)-Co(III) compounds derived from known dinuclear [[L(n)Co(III)(mu-NC)]Fe(II)(CN)(5)](-) complexes (L(n)() = N(5) or N(3)S(2) n-membered pendant amine macrocycle) are presented. All of the new trinuclear complexes were fully characterized spectroscopically (UV-vis, IR, and (13)C NMR). Complexes exhibiting a trans and cis arrangement of the Co-Fe-Co units around the [Fe(CN)(6)](4-) center are described (i.e., cis/trans-[{L(n)Co(III)(mu-NC)](2)Fe(II)(CN)(4)](2+)), and some of their structures are determined by X-ray crystallography. Electrochemical experiments revealed an expected anodic shift of the Fe(III/II) redox potential upon addition of a tripositively charged [Co(III)L(n)] moiety. The Co(III/II) redox potentials do not change greatly from the di- to the trinuclear complex, but rather behave in a fully independent and noncooperative way. In this respect, the energies and extinction coefficients of the MMCT bands agree with the formal existence of two mixed-valence Fe(II)-CN-Co(III) units per molecule. Solvatochromic experiments also indicated that the MMCT band of these compounds behaves as expected for a class II mixed-valence complex. Nevertheless, its extinction coefficient is dramatically increased upon increasing the solvent donor number.     

Dimethyl selenide complexes of copper,gallium and indium halides as potential precursors for selenium-containing chalcopyrite semiconducting materials

The coordination chemistry of copper, gallium and indium halides with the simplest possible selenoether i.e. Me₂Se was investigated with the aim to use the resulting complexes as precursors for selenium-containing chalcopyrite semiconducting materials. An optimized general procedure for the high yield synthesis is described and the influence of a halide ion on the structure and solubility of these metal halide dimethyl selenide complexes are discussed. These complexes were characterized by the elemental analysis, FT-IR and ¹H NMR spectroscopy as well as single crystal X-ray structures, the later study showing them to be monomeric for gallium halides, mono- or dimeric for indium halides and either an ion-pairs or 2-D extended structure in the case of copper halides.     

Cadmium O‐alkylxanthates as CVD precursors of CdS: a chemical characterization

Cadmium bis(O‐alkylxanthates) are potential single‐source molecular precursors for the chemical vapor deposition (CVD) of Cd(II) sulfide thin films. In this work, a multi‐technique characterization of Cd(O‐RXan)₂ compounds [where O‐RXan is CH₃CH₂OCS₂ (O‐EtXan) or (CH₃)₂CHOCS₂ (O‐ⁱPrXan)] is performed by means of several analytical methods (extended x‐ray absorption fine structure, Raman, Fourier transform infrared and optical absorption, spectroscopics ¹H and ¹³C NMR, thermal analysis and mass spectrometry) for a thorough investigation of their structure and chemical–physical properties. The most important results concerning the chemical behavior under different experimental conditions, with particular attention to relevant properties for CVD applications, are presented and discussed. Copyright © 2005 John Wiley & Sons, Ltd.     

Tungsten imido complexes as precursors to tungsten carbonitride thin films

Thin films of tungsten carbonitride have been formed on glass by low-pressure chemical vapour deposition (LP)CVD at 550 degrees C from four closely related precursors: [W(mu-N(t)Bu)(N(t)Bu)Cl(2)(H(2)N(t)Bu)](2), [W(N(t)Bu)(2)Cl(2)(TMEDA)] (TMEDA = N,N,N',N'-tetramethylethylenediamine), [W(N(t)Bu)(2)Cl(2)(py)(2)] (py = pyridine) and [W(N(t)Bu)(2)Cl(N{SiMe(3)}(2))]. The grey mirror-like films were grown with a nitrogen or ammonia bleed gas. In all cases the chlorine content of the deposited films was less than 1 at% and the oxygen content of the films was lower for those grown using ammonia. Surprisingly, the use of ammonia did not significantly change the carbon content of the resulting films. Despite the coordination environment around the metal being essentially the same and the materials having a comparable volatility, some differences in film quality were observed. The films were uniform, adhesive, abrasion resistant, conformal and hard, being resistant to scratching with a steel scalpel. X-Ray powder diffraction patterns of all the films showed the formation of beta-WN(x)C(y). As a comparison the aerosol-assisted chemical vapour deposition (AA)CVD of [W(mu-N(t)Bu)(N(t)Bu)Cl(2)(H(2)N(t)Bu)](2) was investigated and amorphous tungsten carbonitride films were deposited.     

Fluorescent aluminum chelate complexes as modified precursors for nano-structured alumina

A series of new mononuclear heteroleptic derivatives of aluminum(III), {[(CH₃COCHCOCH₃)AlL] (1 and 4)}, {[(C₆H₅COCHCOC₆H₅)AlL] (2, 5, and 7)}, and {[(C₉H₆NO)AlL] (3 and 6)}, have been synthesized by reacting Al(OPrⁱ)₃ with tridentate Schiff base H₂L^x (H₂L¹ = C₁₃H₁₀BrNO₂; H₂L² = C₁₄H₁₃NO₃; H₂L³ = C₁₇H₁₃NO₂) and β-diketone/8-hydroxyquinoline (β-diketone = acetylacetone/dibenzoylmethane) in 1?:?1?:?1 stoichiometry using anhydrous benzene and ethanol. All the complexes were characterized by elemental analysis, FTIR, and NMR (¹H and ¹³C) spectral studies. Molecular structures obtained from single-crystal XRD of aqua 1 (1a) and DMSO coordinated 2 (2a) authenticate their existence. Further, nanostructured α-alumina was synthesized from 1 by well-established sol–gel method and was characterized by powder XRD, TEM, and EDX analyses.     

Remarkably volatile copper(II) complexes of N,N'-unsymmetrically substituted 1,3-diketimines as precursors for Cu metal deposition via CVD or ALD

To enhance the volatility of the copper precursor in the copper deposition process, it was envisioned that N,N'-unsymmetrically substituted 1,3-diketimines should be more volatile than their symmetrically substituted counterparts. A variety of Cu(II) (N,N'-unsymmetrically substituted 1,3-diketiminate) complexes have been synthesized and have proven to be much more volatile than their symmetrical counterparts. This makes the new materials particularly attractive to the ALD and CVD processes. Among the new compounds, 8-a and 8-b are sublimable even at room temperature.