Deformable mirrors based on piezoelectric unimorph microactuator array for adaptive optics correction

This paper describes a piezoelectric deformable mirror (DM) for adaptive optics (AO) applications, with a 100 μm thick silicon mirror driven by 61 unimorph microactuators. Measurement results show that the stroke of the DM is ~ 7.4 μm at 100 V, and the resonance frequency is at 18 kHz. To demonstrate the correction capability of the DM, low-order Zernike modes up to 14th term were reproduced. Furthermore, a close-loop correction of laser beam in a 633 nm helium-neon laser system was performed. After system aberrations being compensated, a focal spot approximate to Airy disk was achieved.     

Low-cost segmented mirrors for aberration correction in small aperture systems

Two low-cost 3×3 and 4×4 segmented mirrors built for near-real time adaptive optics are described. The construction and performance characteristics of the mirrors are discussed and it is shown that they have the potential to provide very good correction of atmospheric aberration despite their low number of segments. Their use in an adaptive optics system is described.     

Study on differential algebraic method for electron optical properties of wide electron beams in immersion electrostatic-magnetic lenses

Differential algebraic method for calculation of electron optical properties is extended to wide electron beams in combined immersion electrostatic-magnetic lenses, based on Taylor series expansion of the differential algebraic data structure of wide electron beam focusing systems. Higher order aberrations referred to off-axis central trajectories are calculated and this makes the evaluation of wide electron beam focusing properties much simplified with high-enough precision. A program was written, and a specific combined immersion electrostatic-magnetic lens is calculated as an example. Computed results show that the second aperture aberrations referred to off-axis central trajectories of the system of the primary one, whereas the third- and over third-order ones only play a secondary role.     

Differential algebraic method for computing the high order aberrations of practical electron lenses

Differential algebraic method is of an effective technique in computer numerical analysis. It implements exactly differentiation up to arbitrary high order based on the nonstandard analysis. Some complicated nonlinear dynamics problems including high order aberrations of electron optics systems can be solved by mapping properties of differential algebraic quantities. However, the existing electron optical differential algebraic method can only be applied to those problems where the electric and/or magnetic fields are expressed in analytic forms. In this paper, the principle of differential algebraic method is applied to practical electron lenses whose electric/magnetic fields are in the forms of discrete arrays, for example, the files computed by FEM or FDM method. Thus the developed new differential algebraic method is applicable to engineering design. The programs were written for computing the high order aberrations of practical electron lenses. An example is given to show that the numerical results have good accuracy compared with the results computed by using the electric fields expressed in analytical form; the accuracy is limited only by the accuracy of the numerical computation of the fields and the arithmetic errors, and it is enough for engineering design.     

基于近红外光谱的人眼像差校正系统中变形镜性能对比研究

对比分析了基于近红外光谱的人眼像差校正系统中两种微机械薄膜变形镜(OKO37单元和BMC140单元)的结构特征和空间特性,着重对变形镜的影响函数进行了主成分研究,建立了变形镜电压控制模型,并通过调整参数d确定变形镜最优控制模式。最后对Zernike单位模式波前像差和Thibos模式人眼波前像差进行拟合仿真实验,结果表明BMC140单元变形镜对Zernike各阶模式的拟合能力均为OKO37单元变形镜的2倍以上。对RMS均值为0.683λ(λ=0.785 μm)的Thibos模式人眼像差,BMC变形镜校正后残余像差RMS值为0.063λ,达到了光学系统的衍射极限(λ/14)。而OKO变形镜由于受相邻电极交连值大、电极分布密度小等因素的影响,其校正能力不及BMC变形镜,残余像差RMS值为0.168λ。本方法也可用于其他种类变形镜的性能评估。     

消像差条件在共形光学系统中的应用

根据轴对称光学系统中的消像散条件探讨了共形整流罩结构中消像散万向节点位置的存在性.在此基础上,对共形光学系统中消像差万向节点位置进行了理论推导.软件分析结果表明,轴对称光学系统消像差条件对于共形光学系统的设计仍有良好的指导意义,由此得到的消像差共形光学系统的残余像差已处于实际成像系统的像差校正能力范围之内.     

A different algebraic method for the fifth-order combined geometric-chromatic aberrations of practical magnetic electron lenses

In this paper, differential algebraic (DA) method is applied to fifth-order combined geometric-chromatic aberrations of practical magnetic electron lenses. The magnetic fields of magnetic electron lenses, which are computed by FEM or FDM method, are in the form of discrete arrays. Thus the developed new DA method is applicable to engineering design and programs were written for computing the fifth-order combined geometric-chromatic aberrations of practical magnetic electron lenses. An example is given. The combined geometric-chromatic aberrations up to fifth order are calculated. It is proved that the numerical results for the magnetic fields in the form of discrete arrays have good accuracy compared with the results computed by using the magnetic fields expressed in analytical form. The accuracy is limited only by the accuracy of the numerical computation of the fields and the arithmetic errors. Finally, a practical magnetic electron lens is analyzed and discussed as an example.     

Aberration correction and its automatic control in scanning electron microscopes

An automatic aberration correction method has been implemented in scanning electron microscopes (SEM). Necessity of the automatic aberration correction is discussed. The procedure of the automatic aberration correction is explained in detail, where deconvolution techniques are used in order to extract probe information from SEM images. Due to the precise digitization and the usage of proper combinations of correction fields, linearity has been found between the amplitude of each aberration and the corresponding field strength. Experimental results are shown which demonstrate that the aberrations are corrected automatically by a linear feedback control method. After the automatic aberration correction, the image quality has been improved drastically.     

Theoretical analysis of imaging properties of a pressure-actuated deformable mirror for adaptive compensation of rotationally symmetrical wavefronts

Our work presents a theoretical analysis of aberration properties of a simple single-channel deformable mirror from both the aspect of modeling the shape of the mirror reflecting surface and the mechanisms of wave-front correction using such mirror. The proposed mirror can be used for a compensation of rotationally symmetrical wavefronts, e.g. focusing of optical beams, adaptive change of resonator parameters in laser technology, phase shifting, etc. The detailed analysis of possibilities of wave-front correction was performed.     

Differential algebraic method for arbitrary-order chromatic aberration analysis of electrostatic lenses

In this paper, differential algebra is applied to calculate arbitrary high-order chromatic aberrations of electrostatic electron lenses. Expressions of differential algebraic form of high-order combined chromatic aberration coefficients are obtained and arbitrary-order chromatic aberrations can be calculated numerically. As an example, a typical Schiske's electrostatic lens has been studied. All the first- to third-order chromatic aberration coefficients of the lens have been calculated, and the pattern of the first-order chromatic aberration has been given as well.     

Beam analysis of scanning electron microscope according to the mirror effect phenomenon

In a scanning electron microscope the influence of electronic beam parameters on the electron-mirror images has been investigated. A simple theoretical model for scanning electron beam behavior in terms of beam and surface potentials is presented. The derived expression relates the scanning beam parameters and parameters of an irradiation region. Influence of a beam (the size and current), scanning potential, working distance, trapped charge and the irradiated area on electron mirror images are defined. Results show that the electron beam current has a considerable effect on the deduced mirror images in comparison with the other beam parameters. So it could be adapted for adjusting the phenomena of mirror effect. Moreover, the trapped charges have been calculated and the results examined in comparison with experimental data.     

Aberration correction using a multi-segment mirror with feedback interferometry

A novel real-time aberration correction system using feedback interferometry and a multi-segment mirror for the wavefront corrector is described. The result is a simple and high-speed adaptive optics system demonstrating that feedback interferometry may potentially be an alternative method to conventional aberration correction techniques. Its high-speed processing and simplicity makes real-time correction practical. Our results show that the system can respond up to 37 Hz for sinusoidal phase variations with amplitude of one wavelength and improves Strehl ratio significantly.     

离散效应对高强度激光三次谐波转换的影响

使用分步傅里叶变换和四阶龙格库塔法(R-K) ，对高强度激光以Ⅰ/Ⅱ类角度失谐方式，在KDP晶体中的谐波转换进行了研究，详细讨论了离散效应对三次谐波转换的影响。结果表明，离散效应不但降低了三次谐波转换效率，而且使谐波光束质量显著降低；初始入射基频光束腰半径较小时，离散效应是二次谐波转换和三次谐波转换效率降低的主要因素，失谐角对三次谐波转换的影响较小；随着束腰半径的增加，离散效应的影响逐渐减小，失谐角对三次谐波转换的影响逐渐增加。     

Aberration theory of plane‐symmetric grating systems

Aberration theory of plane‐symmetric optical systems of mirror and grating has been developed based on the wavefront aberration method. A toroidal reference wavefront surface is used to define the wavefront aberration. Based on the ray geometry, the coordinate mapping relationships of the ray between the optical element and the incident and aberrated wavefronts are derived using a polynomial‐fit method; this enables the resultant coefficients of the wavefront and the transverse aberration to be kept to the fourth‐order accuracy of the aperture‐ray coordinates. By setting up the transfer equations of the field and aperture rays, the contribution to wavefront aberrations from each mirror and grating can be added to make the aberration calculation of multi‐element systems feasible. The theory is validated by the analytic formulae of the spot diagram.     

Different algebraic method for computing the high-order aberrations of practical combined focusing-deflection systems

Differential algebraic (DA) method is an effective technique in computer numerical analysis. It implements conveniently differentiation up to arbitrary high order, based on the nonstandard analysis. Some complicated nonlinear dynamics problem including high-order aberrations of electron optical systems can be solved effectively by mapping properties of DA quantities. However, the existing study applying DA method to the practical system is limited to simple electron lenses. In this paper, the application of DA method is extended to practical combined focusing-deflection systems, and the aberrations up to fifth order are calculated. The electric and magnetic fields of the electron lenses and deflectors, which are computed by finite element method (FEM) or finite difference method (FDM), are in the form of discrete arrays. Local analytical expressions for electric and magnetic field quantities are constructed from these arrays for arbitrary place where electron is traced in DA computation. Thus the developed DA method is applicable for engineering design and computing problem. Based on the study of the expressions and the structure of the aberration coefficients for the fifth-order aberrations of the combined focusing-deflection system and the local analytic expression of the practical electromagnetic field, correlative computer software was developed, whose interface is convenient to calculate the high-order aberrations of the practical systems. The new DA method and software are tested with a uniform magnetic field deflection having an analytic solution. And the results show that the accuracy is sufficiently high, only limited by machine precision. Finally, as an example, a practical combined magnetic focusing and magnetic deflection system is analyzed and discussed.     

分块式变形镜的计算机模拟

本文提出了多种分块式变形镜方案,利用最佳波前匹配方法推导出了所提出的各种变形镜方案最佳参数的计算公式,并以补偿大气湍流能力的角度评价各种变形镜方案,通过计算机模拟获得了一些重要结论,为变形镜的实际制做奠定了必要的基础。     

带边缘驱动的214单元单压电变形镜仿真与实验

为了提高用于天文自适应光学系统的单压电变形镜的校正能力,提出了一种直径为75 mm且包含214个单元的带边缘驱动的单压电变形镜,单压电变形镜的边缘由数个压电堆栈执行器支撑.首先,通过有限元方法对变形镜进行仿真建模,分析比较三点、六点能动支撑对变形镜性能的影响.之后制备了三点、六点边缘驱动的变形镜样机.最后,利用波前传感器测试了边缘执行器对低阶像差的校正能力.实验结果表明:在0~100 V电压下,三点能动支撑与六点能动支撑变形镜均可重构大于12μm的倾斜像差,对应的归一化残余误差小于0.06,六点致动对像散和三叶草像差也具有较好的校正能力,证明边缘执行器可提高单压电变形镜的校正能力.