Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding

In this study we fabricated a silicon-based stamp with various microchannel arrays, and demonstrated successful replication of the stamp micro-structure on poly methyl methacrylate (PMMA) substrates. We used maskless UV lithography for the production of the micro-structured stamp. Thermal imprint lithography was used to fabricate microfeatured fluidic platforms on PMMA substrates, as well as to bond PMMA lids on the fluidic platforms. The microfeature in the silicon-based (silicon wafer coated with SU-8) stamp includes microchannel arrays of approximately 30 μm in depth and 5 mm in width. We produced various channels without pillars, as well as with SU-8 pillars in the range of 50–100 μm wide and 6 μm in height. PMMA discs of 1 mm thickness were utilized as the molding substrate. We found 10 kN applied force and 100 °C embossing temperature were optimum for transferring the micro-structure to the PMMA substrate.     

Design and fabrication of a negative microlens array

An operation model of a negative microlens array is demonstrated. The array consists of two kinds of materials with different refractive indices. First of all, a positive microlens array with 256×256 elements serving as a pattern is fabricated by argon ion beam etching on the quartz. The diameter and average corona height of the element are 28 and 0.638 μm, respectively. The spacing between two neighboring elements is 2 μm. In the second phase, after being coated by epoxy, the positive microlens array pattern is spun and baked, leading to a complex negative microlens array. Surface stylus measurement shows that the surface of the positive quartz microlens array is smooth and uniform. Focal length measurement of the negative microlens array indicates that the focal length region with −731±3 μm is in good agreement with the theoretical calculation value of −729 μm.     

Formation of microvias in epoxy-glass composites by laser ablation

Single CO₂ laser pulses, of 10.6μm wavelength, are used to form blind microvias (holes in electronic boards for through-plating conducting paths) in copper-clad epoxy-glass laminates. The microvia dimensions depend on pulse energy and duration, the thicknesses of the epoxy-glass laminate and copper cladding, and the distribution of glass within the epoxy-glass laminate. The useful range of laser parameters, especially pulse energy, is primarily determined by the ability to metallize subsequently the blind microvias. Several conclusions can be drawn from the data. The pulse enegy should be within ±20% of the optimum value in order to form vias with a cylindrical geometry. For 300 μm thick laminates, the thickness of the copper on the bottom should be 18 μm or more. A larger range of pulse energies could be used if the glass fibre density was more uniform and if subsequent copper metallization of the blind vias could be improved.     

Controlled fabrication of Si nanostructures by high vacuum electron beam annealing

Silicon nanostructures, called Si nanowhiskers, have been successfully synthesized on Si(1 0 0) substrate by high vacuum electron beam annealing (EBA). Detailed analysis of the Si nanowhisker morphology depending on annealing temperature, duration and the temperature gradients applied in the annealing cycle is presented. A correlation was found between the variation in annealing temperature and the nanowhisker height and density. Annealing at 935 °C for 0 s, the density of nanowhiskers is about 0.2 μm⁻² with average height of 2.4 nm grow on a surface area of 5×5 μm, whereas more than 500 nanowhiskers (density up to 28 μm⁻²) with an important average height of 4.6 nm for field emission applications grow on the same surface area for a sample annealed at 970 °C for 0 s. At a cooling rate of −50 °C s⁻¹ during the annealing cycle, 10–12 nanowhiskers grew on a surface area of 5×5 μm, whereas close to 500 nanowhiskers grew on the same surface area for samples annealed at the cooling rate of −5 °C s⁻¹. An exponential dependence between the density of Si nanowhiskers and the cooling rate has been found. At 950 °C, the average height of Si nanowhiskers increased from 4.0 to 6.3 nm with an increase of annealing duration from 10 to 180 s. A linear dependence exists between the average height of Si nanowhiskers and annealing duration. Selected results are presented showing the possibility of controlling the density and the height of Si nanowhiskers for improved field emission properties by applying different annealing temperatures, durations and cooling rates.     

Effects of Cr dopant on the microstructure and electromigration performance of Cu interconnects

Cu and Cu(Cr) alloy films were deposited on SiO₂ substrates by magnetron sputtering. The microstructure and electromigration performance of films were investigated. A small amount of Cr refines the Cu grains and improves the surface morphology of Cu films. After annealing at 450 °C, in contrast to the Cu film with large lateral grown grains, the Cu(Cr) alloy film exhibits fine columnar grains with a 1 1 1 preferred orientation. Most of Cr in the annealed Cu(Cr) film has segregated at the film surface and the film/substrate interface. The grain boundary grooving at the film/substrate interface is completely prohibited for Cu(Cr) films. As a result, the electromigration lifetimes of annealed Cu(Cr) lines are 10–100 times longer than those of annealed Cu lines. The final resistivity of the annealed Cu(Cr) film is 2.55 μΩ cm which is close to that of the annealed Cu film. With the improved surface morphology and high electromigration resistance, the dilute Cu(Cr) alloy film can be a viable interconnect material or a seed layer in the Cu-damascene technology.     

Self-assembly of Ag nanopowder on OTS-patterned glass

Ag ink was spontaneously patterned on glass substrate by using the surface energy difference of a pre-patterned octadecyltrichlorosilane (OTS) layer. Ag ink was confined into the hydrophilic area, where OTS layer was not formed. OTS layer was selectively transferred by micro-contact printing (μCP) method and significantly decreased surface energy. As a result, surface of glass substrate was separated as hydrophobic and hydrophilic with and without OTS layer, respectively. Ag line could be successfully patterned with the width of below 10 μm on the glass. The patterned Ag line was dense and abrupt on the edge and the thickness was about 0.25 μm. Ag film showed good adhesion on a glass substrate after anneal above 200 °C. The minimum resistivity was about 4 μΩ cm.     

Short wave pass and long wave pass dichroic coating at 45° on zinc selenide substrate for dual band thermal imager

In dual band thermal imager dichroic coating plays a vital role in separating 3–5 μm and 7.5–10.5 μm wavelength region for observing better image quality from two different channels. In this work a study has been carried out on the design and fabrication of short and long wave pass dichroic coating at 45° on zinc selenide flat substrate. These dichroic coated optics can be used to separate 3–5 μm (in reflection or transmission channel) and 7.5–10.5 μm (in transmission or reflection channel) wavelength region. An inhomogeneous refractive index profile which is a polynomial of 5th order was considered to design the high and low wave pass dichroic coating on zinc selenide substrate. The inhomogeneous profile was then approximated with five steps from substrate to air medium. These steps were then converted in terms of durable coating materials of six and seven layer stack for short and long wave pass dichroic coating respectively. The coating material combination used was germanium as high index material and IR-F625 as low index material. Result achieved for short wave pass dichroic filter was 94% average transmission in 3–5 μm region and 95% average reflection in 7.5–10.5 μm region. Similarly, result achieved for long wave pass dichroic filter was 95% average reflection in 3–5 μm region and 94% average transmission in 7.5–10.5 μm.     

Surface texturing of polytetrafluoroethylene by hot embossing

In this study, hot embossing by reusable Ni mold with features in the form of rectangular diffraction gratings of 4 μm period was successfully employed for surface texturing of polytetrafluoroethylene (PTFE) film above the glass transition temperature of PTFE amorphous phase with the aim to enhance surface hydrophobicity. Imprint pressure was set to 0.5 MPa and it was at least tenfold lower than reported by other authors using cold stamping. Embossed gratings were clearly seen on the surface of all imprinted samples even after the annealing at 140 °C and aging for 1 month at room temperature. The best results were achieved when imprint temperature was 150 °C. Measurements of the water contact angle on imprinted PTFE surfaces have showed that increase of the average contact angle for the current test setup was 8°. Using imprint stamp with the more favorable features may lead to somewhat higher hydrophobicity.     

Analysis of pupil and corneal wave aberration data supplied by the SN CT 1000 topography system

Ocular aberrations depend on pupil size and centring and the retinal image quality under natural conditions differs from that corresponding to laboratory ones. In the present article, pupil and wave aberration data supplied by the Shin Nippon CT 1000 (SN CT 1000) topography system are analysed. Two groups of eyes under natural viewing conditions are considered ((260±20) lux at the eye under study). The first group consists of 10 normal eyes (−1.25 to 3 D sphere; 0 to −1.75 D cylinder) of five young subjects (age between 18 and 33 years). For this group, five determinations per eye are performed and the repeatability of results is analysed. Pupil centre is displaced from corneal vertex towards the temporal region, the largest displacement being (0.5±0.1) mm. The variation of pupil diameter in each eye is less than 21% while the inter-subject variability is large since diameters are between (3±0.3) and (5.3±0.6) mm. Aberrations are evaluated for two different pupil sizes, the natural one and a fictitious one of 6 mm. The corneal higher-order root-mean square wavefront error (RMS_HO) for a 6 mm pupil centred in the corneal vertex, averaged across all eyes, is (0.37±0.06) μm while, considering the natural pupil diameter, the average in each eye is significantly lower, up to eight times smaller. The fourth-order spherical aberration is an important aberration in the considered eyes, its maximum value for a 6 mm pupil being (0.38±0.02) μm. The second group consists of 24 eyes of 12 subjects (age between 25 and 68 years) such that four eyes are of normal adults (1.25 to +6 D sphere; 0 to −0.5 D cylinder), eight have astigmatisms (−5.5 to +3.25 D sphere; −1.5 to −4.5 D cylinder), six have post-refractive surgery (+0.5 to +3.5 D sphere; −0.5 to −4 D cylinder) and six have keratoconus (−9.5 to +1 D sphere; −1 to −4.5 D cylinder). For this group only one determination per eye is performed. Pupil centre is displaced from corneal vertex towards the temporal region except in cases of keratoconus, where there can be a dominant upwards displacement. Pupil diameters are between 2.7 and 5.6 mm. The corneal higher order root mean square wavefront error for a 6 mm pupil ranges between 0.3 (normal eye) and 5.3 μm (keratoconus).     

Coherence characteristics of light-emitting diodes

We report the measurement of coherence characteristics of light-emitting diodes (LEDs). Experiments were performed using red and green color LEDs directly illuminating the Young's double slit kept in the far-zone. Fourier transform fringe analysis technique was used for the measurement of the visibility of interference fringes from which the modulus of degree of spectral coherence was determined. Low degree of spectral coherence, typically 0.4 for red and 0.2 for green LED with double-slit separation of 400 μm was observed. A variable slit was then kept in front of the LEDs and the double slit was illuminated with the light coming out of the slit. Experiments were performed with various slit sizes and the visibility of the interference fringes was observed. It was found that visibility of the interference fringes changes drastically in presence of variable slit kept in front of LEDs and a high degree of spectral coherence, typically 0.85 for red and 0.8 for green LED with double-slit separation of 400 μm and rectangular slit opening of 500 μm was observed. The experimental results are compared with the theoretical counterparts. Coherence lengths of both the LEDs were also determined and it was obtained 5.8±2 and 24±4 μm for green and red LEDs, respectively.     

Synthesis and field emission of patterned ZnO nanorods

A simple and self-catalytic method has been developed for synthesizing finely patterned ZnO nanorods on ITO-glass substrates under a low temperature of 500 °C. The patterned ZnO nanorod arrays, a unit area is of 400 × 100 μm², are synthesized via vapor phase transport method. The surface morphology and composition of the as-synthesized ZnO nanorods are characterized by means of scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDX). The mechanism of formation of ZnO nanorods is also discussed. The measurement of field emission (FE) reveals that the as-synthesized ZnO nanorods arrays have a turn-on field of 3.3 V/μm at the current density of 0.1 μA/cm² and a low threshold field of 6.2 V/μm at the current density of 1 mA/cm². So this approach must have a potential application of fabricating micropatterned oxide thin films used in FE-based flat panel displays.     

Influence of microsupersonic gas jets on nanosecond laser percussion drilling

This paper reports on etching rates and hole quality for nanosecond laser percussion drilling of 200-μm thick 316L stainless steel performed with micro supersonic gas jets. The assist-gas jets were produced using nozzles of 200, 300 and 500 μm nominal throat diameters. Air and oxygen were used separately for the process gas in the drilling trials and the drilling performance was compared to drilling in ambient conditions. The highest etch rate of 1.2 μm per pulse was obtained in the ambient atmosphere condition, but this was reduced by about 50% with assist-air jets from the 200 μm nozzle. Increasing the jet diameter and/or using oxygen assist gas also decreased the etching rate and increased the hole diameter. The 200 μm nozzle using air-assist jets produced the least amount of recast and gave the best compromise for etching rate. A combination of plasma shielding and different gas dynamic conditions inside the holes and at the surface are correlated to the observations of different drilling rates and hole characteristics.     

Effect of polymer relaxation on dielectric spectroscopic study of polymer–ferroelectric liquid crystal composites

Polymethylmethacrylate (PMMA) and ferroelectric liquid crystal (P–FLC) composite films (~ 4 μm) with varying proportions of ferroelectric liquid crystal have been prepared and the dielectric response of the composite films as a function of wide frequency (100 Hz–10 MHz) and temperature (127–40 °C) have been analyzed. The dielectric spectra of such composite systems are considerably modified compared to those of the corresponding pure LC or PMMA materials. The observed paraelectric to ferroelectric transition temperature of the composites is found to be lower (~ 85 °C) compared to that of the pure LC system (~ 98 °C), which makes these composites technologically more significant. The P–FLC composites also exhibit higher relaxation frequency and smaller dielectric strength for the Goldstone mode compared to those of the corresponding pure FLC. Depending on the percentage of the constitute materials, the molecular dynamics of the composite materials changes. Dielectric contributions of both liquid crystal and PMMA matrix forming the composites have been analyzed on the basis of Havriliak and Negami function.     

Design of an optical fiber sensor for linear thermal expansion measurement

Design and operation of an optical fiber device for temperature sensing and thermal expansion measurement are reported. The modulated intensity has been measured by using a pair of 450 μm core fiber, one acting as the source and the other one as receiving fiber. In this design, the light intensity modulation is based on the relative motion of the optical fibers and a reflective coated lens. By using displacement calibration data for this sensor, the linear thermal expansion of the aluminum rod is determined. This sensor shows an average sensitivity of about 11.3 mV/°C for temperature detection and 7 μm/°C for thermal expansion detection. Device resolution for a linear expansion measurement is about 3 μm for a dynamic range of 600 μm corresponding to a temperature change of 100°C. The measured linear expansion results are checked against the expected theoretical ones and an agreement within ±2 μm is noticed. The operation of this sensor was also compared with other types and some advantages are observed, which verify the capability of this design for such precise measurements.     

Synthesis and field emission of diamond-like carbon nanorods on TiO2/Ti nanotube arrays

Highly ordered TiO₂/Ti nanotube arrays were fabricated by anodic oxidation method in 0.5 wt% HF. Using prepared TiO₂/Ti nanotube arrays deposited Ni nanoparticles as substrate, high quality diamond-like carbon nanorods (DLCNRs) were synthesized by a conventional method of chemical vapor deposition at 750 °C in nitrogen atmosphere. DLCNRs were analyzed by filed emission scanning electron microscopy and Raman spectrometer. It is very interesting that DLCNRs possess pagoda shape with the length of 3–10 μm. Raman spectra show two strong peaks about 1332 cm⁻¹ and 1598 cm⁻¹, indicating the formation of diamond-like carbon. The field emission measurements suggest that DLCNRs/TiO₂/Ti has excellent field emission properties, a low turn-on field about 3.0 V/μm, no evident decay at 3.4 mA/cm² in 480 min.     

Type I quasi-phase-matched blue second harmonic generation with different polarizations in periodically poled LiNbO3

First-order type I quasi-phase-matched (QPM) blue second-harmonic generation was demonstrated in periodically poled LiNbO₃ with period of 14.5 μm using d₃₁. 52 μJ of harmonic blue light at 0.473 μm was generated pumped by 114 μJ 35 ps pulse laser at 0.946 μm at 150 °C with a conversion efficiency of 45.6%. The average conversion efficiencies of 41.3% and 19% were also obtained at 150 °C, respectively, in the conventional first- and third-order QPM blue second-harmonic generation at 0.473 μm. The temperature acceptance bandwidths of 20 mm length periodically poled LiNbO₃ with first-order grating periods of 14.5 and 4.5 μm are 2.0 and 0.9 °C, respectively. The larger acceptance bandwidths and grating period for than those for enhance the frequency conversion efficiency, which shows the polarization dependence of quasi-phase matching.     

Efficient frequency upconversion of coherent radiation from 10.26 to 1.187 μm in a GaSe crystal

Frequency upconversion of laser pulses at 10.26 μm to those at 1.187 μm was achieved in the presence of Nd:YAG laser pulses based on difference-frequency generation in a 10 mm-long GaSe crystal. The highest power conversion efficiency for the parametric conversion was determined to be 20.9%, corresponding to the photon conversion efficiency of 2.42%. This value is two orders of magnitude higher than the highest value reported on GaSe in the literature. The saturation of the output power at 1.187 μm as the input power at 10.26 μm was increased, due to the back conversion, i.e. 1.187 μm + 10.26 μm → 1.064 μm, was clearly evidenced. Such a parametric process has potential for achieving sensitive detections of mid-infrared radiation.     

Effects of parylene C layer on high power light emitting diodes

20 μm parylene C layer was deposited on silicone film to enhance the oxygen and water barrier properties, deposited at typical rate of 2.0 and 5.6 μm/h by controlling different deposited pressures. Surface morphology and roughness were observed by atomic force microscopy (AFM), surface morphology images show lower deposited rate that can lead to better quality film. 20 μm parylene C layer was deposited on silicone encapsulation of high power light emitting diodes (LEDs), the samples were tested by power temperature cycling (PTC) test from −40 to 85 °C, 15 min each extreme, and no corrosion, discoloration, cracks was found on the LEDs after the 1000 h PTC reliability test, and PTC test is intended to simulate worst case conditions encountered in typical applications, and parylene C floating membrane structure can stand such high stress and strain. Optical test on white and red LED samples with and without 20 μm parylene C layer, measurement result shows the optical transmittance more than 95%. 1000 h temperature humidity bias life test (T&HB) is performed for the purpose of evaluating the reliability of LEDs in humid environments, energy-dispersive X-ray (EDX) analysis revealed much lower content of C (carbon) and O (oxygen) on the lead frame of LED with parylene C coating after T&HB test on, and no oxidation was found in the LED package.     

Computation of streamwise vorticity in a compressible flow of a winglet nozzle-based COIL device

Chemical oxygen iodine laser (COIL) is a high-power laser with potential applications in both military as well as in the industry. COIL is the only chemical laser based on electronic transition with a wavelength of 1.315 μm, which falls in the near-infrared (IR) range. Thus, COIL beam can also be transported via optical fibers for remote applications such as dismantling of nuclear reactors. The efficiency of a supersonic COIL is essentially a function of mixing specially in systems employing cross-stream injection of the secondary lasing (I₂) flow in supersonic regime into the primary pumping (O₂¹Δ_g) flow. Streamwise vorticity has been proven to be among the most effective manner of enhancing mixing and has been utilized in jet engines for thrust augmentation, noise reduction, supersonic combustion, etc. Therefore, a computational study of the generation of streamwise vorticity in the supersonic flow field of a COIL device employing a winglet nozzle with various delta wing angles of 5°, 10°, and 22.5° has been carried out. The study predicts a typical Mach number of approximately 1.75 for all the winglet geometries. The analysis also confirms that the winglet geometry doubles up both as a nozzle and as a vortex generator. The region of maximum turbulence and fully developed streamwise vortices is observed to occur close to the exit, at x/λ of 0.5, of the winglets making it the most suitable region for secondary flow injection for achieving efficient mixing. The predicted length scale of the scalloped mixer formed by the winglet nozzle is 4λ. Also, the winglet nozzle with 10° lobe angle is most suitable from the point of view of mixing developing cross-stream velocity of 120 m/s with acceptable pressure drop of 0.7 Torr. The winglet geometry with 5° lobe angle is associated with a low cross-stream velocity of 60 m/s, whereas the one with 22.5° lobe angle is associated with a large static and total pressure drop of 1.87 and 9.37 Torr, respectively, making both the geometries unsuitable for COIL systems. The experimental validation shows a close agreement with the computationally predicted values. The studies for the most suitable 10° lobe angle geometry show an observed Mach number of 1.72 with an improved mixing efficiency of 74% due to the occurrence of predicted streamwise vortices in the flow.     

Measurement of wire diameter by optical diffraction

A combined interference and diffraction pattern, in the form of equidistant interference fringes, resulting from illuminating a vertical metallic wire by a laser beam is analyzed to measure the diameter of four standard wires. The diameters range from 170 to 450 μm. It is found that the error in the diameter measurements increases for small metallic wires and for small distances between the wire and the screen due to scattering effects. The intensity of the incident laser beam was controlled by a pair of sheet polaroids to minimize the scattered radiation. The used technique is highly sensitive, but requires controlled environmental conditions and absence of vibration effects. The expanded uncertainty for k=2 is calculated and found to decrease from U(D)=±1.45 μm for the wire of nominal diameter 170 μm to ±0.57 μm for the diameter 450 μm.