Particle densities and non-equilibrium in a low-pressure argon plasma jet

Plasma diagnostic techniques have been employed to determine particle densities and temperatures in a low-pressure argon plasma jet generated by a cascade arc. These measurements allow characterization of the extent to which the plasma jet deviates from thermodynamic equilibrium and provide a basis for predicting how reactive gases will interact with the excited and ionized species in the plasma jet. It was found that the distribution of atomic states in the plasma jet is not adequately described by either local thermodynamic equilibrium (LTE) or partial local thermodynamic equilibrium (pLTE), and the jet was optically thick for 3p4s transitions across the jet radius. Excited argon neutrals outnumber ions by a large ratio, and dominate subsequent dissociation/excitation phenomena. The rate of methane destruction in the plasma jet shows that estimates for particle densities, temperature, and jet velocity are self-consistent.     

旋转滑动弧氩等离子体裂解甲烷制氢

采用切向气流和磁场协同驱动的旋转滑动弧氩等离子体,先通过光谱分析法计算了其电子温度和电子密度,了解其物理特性,将其应用于甲烷裂解制氢,研究了进气流量和CH_4/Ar比对反应效果的影响。结果表明,该滑动弧系统电子温度为1.0-2.0 e V,电子密度高达1015cm~(-3),是介于热与低温等离子体之间的一种等离子体形式,具有独特的物理特性,可以在达到较高反应效率的同时,保持较大的处理量;在CH_4裂解制氢实验中,CH_4转化率可达22.1%-70.2%,并随进气流量和CH_4/Ar比的增大均逐渐降低;H_2选择性为21.2%-61.2%,并随进气流量的增大先基本不变后有所增大,随CH_4/Ar比的增大逐渐降低;与应用于甲烷裂解的不同形式的低温等离子体对比(如微波、射频、介质阻挡放电等)可以发现,旋转滑动弧在获得较高甲烷转化率、较高H_2选择性和较低制氢能耗的同时,还可以保持较大的处理量,即进气流量可达6-20 L/min。     

An overall mechanism for the deposition of plasma polymers from methane in a low-pressure argon plasma jet

An overall mechanism for plasma polymer deposition from a methane-seeded argon plasma jet was established from experimental measurements and a simplified model of reaction kinetics within the plasma jet. Total mass deposition rates were obtained at various substrate positions and methane flow rates. Methane consumption was estimated from residual gas analysis. The influence of substrate coolant temperature on deposition rate was evaluated. The model was based on particle densities, jet temperature, and jet velocity data published previously, and reaction rate constants from the literature were used. No adjustable parameters were employed in this model. Experimental results for total deposition rate and methane consumption were in good agreement with model predictions. The overall deposition mechanism consists of three steps: Penning ionization of methane by excited argon neutrals, followed by dissociative recombination of CN _x ⁺ to yield CH, followed by incorporation of CH into the growing film upon impact. Contributions of species other than CH to the total deposition rate are minor, and adsorption is not a prerequisite for incorporation into the growing film.     

Atomic and molecular emission spectroscopy on an expanding argon/methane plasma

A supersonically expanding cascaded arc plasma in argon is analyzed axperimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (C _n H _v ) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with (e.g. parameters (e.g., refractive index).     

Nitriding of titanium with plasma jet under reduced pressure

The nitriding of titanium with argon-nitrogen (3%) and argon-nitrogen (3%)-hydrogen (2%) plasma jets at pressures of 190 torr was studied. The reaction kinetics obeyed mainly a parabolic law. The parabolic kinetic constants were 10^–10–10^–8 g² cm^–4 s^–1, which were 2–3 orders of magnitude larger than those in R.F. discharges. From emission spectroscopy, nitrogen atoms in the excited states were observed. The nitrogen atoms can promote the nitriding reaction. The effect of the addition of hydrogen to nitrogen is also briefly discussed.     

Diagnostics of a thermal plasma jet by optical emission spectroscopy and enthalpy probe measurements

An accurate determination of electron density, temperature, and velocity distributions is of primary interest for the characterization of steady-state thermal plasma spray jets. Our diagnostic capabilities based on optical emission spectroscopy include measurements of absolute emission coefficients and Stark broadening. In addition, enthalpy probe diagnostics has also been used for temperature and velocity measurements. Observation of large discrepancies between temperatures derived from absolute emission coefficients, Stark broadening, and from enthalpy probe measurements indicate that severe deviations from LTE (local thermal equilibrium) exist in various regimes of plasma spray jets. Nonequilibrum characterization of such turbulent thermal plasma jets suggests that diffusion of high-energy electrons into the fringes of plasma jets and deviations from chemical equilibrium due to high velocities in the core of plasma jets and entrainment of cold gas, are the main reasons for these discrepancies. The establishment of a reliable data base, taking these nonequilibrium effects into account, is a prerequisite for meaningful modeling of real plasma jets.     

A comparison of experimental measurements and theoretical predictions regarding the behavior of a turbulent argon plasma jet discharging into air

Computed results are presented describing the temperature and concentration fields obtained when an argon plasma jet is being discharged into ambient air. A previously published mathematical model for turbulent plasma plumes is used for the calculations. These predictions are compared with recent), published experimental measurements by Brossa and Pfender, performed with an enthalpy probe. The theoretical predictions appear to agree reasonably well with the measurements of both the temperature and concentration profiles, with a maximum deviation in the 10–20% range.Notation A _max maximum temperature or velocity in the torch exit profile - C ₁ C ₂ C _D constants inK- model - h enthalpy - I torch current - K turbulent kinetic energy per unit mass - m mass concentration of plasma p pressure - Q How rate of argon through the torch - r radial coordinate - r _n nozzle radius (inside) - S source term for dependent variable      

Characterization of a twin-torch transferred dc arc

The results of a twin-torch transferred de arc .study are presented. The arc system consists of two torches of opposite polarity, and a coupling zone of plasma jets located between them. The torch configuration increases the system reliability and efficiency during material plasma processing. The results of the study present data for the voltage-current characteristics, general behavior of the twin-torch arc, and spatial distribution of the plasma parameters. The plasma parameters have been measured using optical emission spectroscopy for a 200 A (20 k W) do arc, at atmospheric pressure, with argon and nitrogen introduced as plasma forming gases into the anode and the cathode units, respectively. The measurement technique used has allowed the determination of local electron density and temperature values in an inhomogeneous plasma volume having no axial sysmmetry. The data obtained illustrate the novel features of the twin-torch transfrred do arc for its applications in plasma processing.     

大气压等离子体射流重整CH_4-CO_2制合成气

采用大气压等离子体射流,以CH4和CO2直接作为放电气体进行常压下重整制合成气的实验研究,考察了等离子体射流的放电特征及放电距离、放电功率、原料气配比和流量对反应的影响。结果表明,该等离子体具有放电稳定、均匀的特征。重整反应的主要产物为合成气,只有少量的H2O和积炭生成。优化的反应条件为放电距离为9 mm,CH4和CO2的摩尔比为4/6。当原料气流量为1 000 mL/min,放电功率为88.4 W时,CH4和CO2的最高转化率为分别为94.99%和87.23%。甲烷和二氧化碳的转化率随放电功率的增加而增加,随流量的增加而减少。     

Surface modifications of PET in argon atmospheric pressure plasma: Gas flow rate effect

The correlation between plasma optical properties and the treated polyethylene terephthalate (PET) surface characteristics have been studied at various Ar flow rate. The rotational T_rot and vibrational T_vib temperatures of APPJ were determined from SPS emission band. The pristine and plasma-treated PET surfaces were characterized by several techniques including X-ray photoelectrons spectroscopy (XPS), Raman spectroscopy, contact angle (CA), and atomic force microscope (AFM). The CA decreased rapidly in the flow rate range 1–3 L/min and weakly dependent as flow rate > 3 L/min. XPS results showed that C 1s % of plasma-treated PET surfaces decreases and has a minimum for samples treated at 3–4 L/min, while O 1s has a maximum at the same flow rate range. The carbon C 1s peak of pristine and plasma treated PET samples resolved into five subcomponents: C–C, C–O, C=O, O–C=O, and π–π bonds with variable percentage ratio accordance to the plasma gas flow rate. Raman data revealed a partial loss in the crystallinity of the treated PET samples and also confirm the incremental of C–O band at Ar flow rate of 3 L/min. AFM images showed that the surface roughness of treated PET films increases as Ar flow rate increases.     

大气压等离子体射流重整CH4-CO2制合成气

采用大气压等离子体射流,以CH₄和CO^₂直接作为放电气体进行常压下重整制合成气的实验研究,考察了等离子体射流的放电特征及放电距离、放电功率、原料气配比和流量对反应的影响。结果表明,该等离子体具有放电稳定、均匀的特征。重整反应的主要产物为合成气,只有少量的H₂O和积炭生成。优化的反应条件为放电距离为9mm,CH₄和CO₂的摩尔比为4/6。当原料气流量为1000mL/min,放电功率为88.4W时,CH4和CO₂的最高转化率为分别为94.99%和87.23%。甲烷和二氧化碳的转化率随放电功率的增加而增加,随流量的增加而减少。     

Ni/MgO catalyst prepared using atmospheric high-frequency discharge plasma for CO2 reforming of methane

A new type of Ni/MgO catalyst was prepared using atmospheric high-frequency discharge cold plasma. The influences of conventional method, plasma method, and plasma plus calcination method on the catalytic activity were studied and the CO2 reforming of methane was chosen as the probe reaction. The catalysts were characterized by X-ray diffraction (XRD), transmission electron microscope (TEM), X-ray photoelectron spectroscopy, and CO2 temperature-programmed surface reaction techniques. The results suggested that the nickel-based catalyst prepared by plasma plus calcination method possessed a smaller particle size and a higher dispersion of active component, better low-temperature activity and enhanced anti-coking ability. The conversion of CO2 and CH4 was 90.70% and 89.37%, respectively, and the reaction lasted for 36 h without obvious deactivation under 101.325 kPa and 750°C with CO2/CH4 = 1/1.     

Optical emission diagnostics in cascade arc plasma polymerization and surface modification processes

Optical Emission Spectroscopy (OES) was used to identify reactive species and their excitation states in low-temperature cascade arc plasmas of N₂, CF₄, C₂F₄, CH₄, and CH₃OH. In a cascade arc plasma, the plasma gas (argon or helium) was excited in the cascade arc generator and injected into a reactor in vacuum. A reactive gas was injected into the cascade arc torch (CAT) that was expanding in the reactor. What kind of species of a reactive gas, for example, nitrogen, are created in the reactor is dependent on the electronic energy levels of the plasma gas in the cascade arc plasma jet. OES revealed that no ion of nitrogen was found when argon was used as the plasma gas of which metastable species had energy less than the ionization energy of nitrogen. When helium was used, ions of nitrogen were found. While OES is a powerful tool to identify the products of the cascade arc generation (activation process), it is less useful to identify the reactive species that are responsible for surface modification of polymers and also for plasma polymerization. The plasma surface modification and plasma polymerization are deactivation processes that cannot be identified by photoemission, which is also a deactivation process. © 1998 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 36: 1583–1592, 1998     

介质阻挡放电等离子体甲烷/水蒸气重整制氢

采用自制的介质阻挡放电实验系统,进行了甲烷/水蒸气大气压下重整制氢实验研究。考察了水碳比（水蒸气/甲烷物质的量比）、气体总流量、放电电压和放电频率对甲烷转化率及氢气等主要产物产率的影响。结果表明,甲烷转化率和氢气产率随着水碳比和放电电压的增加而增大,随着气体总流量和放电频率的增加呈现先增大后减小的变化规律。在放电电压18.6 kV、放电频率9.8 kHz、水碳比3.4、反应气体总流量79 mL/min时,获最大氢气产率（14.38%）。此外,利用发射光谱对放电过程中的活性基团进行了原位诊断,得到了CH·、OH·、H₂及H_α活性粒子的光谱信号强度随实验参数的变化规律,并结合放电机理推测了氢气的生成路径。     

Growth rate studies of CVD diamond in an RF plasma torch

This paper addresses the complex chemistry in the boundary later over a substrate in a chemical vapor deposition rector at atmospheric pressure. In this study, a highspeed plasma (140m/s) was created using a radio-frequency inductively coupled plasma torch for the deposition of diamond thin films. Growth rates on the order of 50 m/ h were obtained for well-faceted continuous films grown on molybdenum substrates positioned normal to the plasma flow. The highest growth rates were obtained at substrate temperatures of 1370 K and a feed gas ratio of 2.5% CH₄ in H₂. Growth rates are compared to predicted results obtained from numerical simulations, based on a one-dimensional stagnation-point flow, and are/mend to be in good agreement. Several other surface analysis techniques were used to characterize the deposited films, inchaling SEA/, Raman spectroscopy, transmission electron microscopy. Rutherfard backscattering spectroscopy, and hydrogen-forward recoil spectroscopy. Optical emission spectroscopy was used to characterize the RF plasma during the deposition process. Results from these studies form an important database for the validation and improvement of current models of the atmospheric-pressure diamond CVD environment.     

Temperature Distribution in a Pilot Plasma Tundish: Comparison Between Plasma Torch and Graphite Electrode Systems

Arc, bath, and refractory wall temperatures are measured in a pilot transferred-arc plasma furnace by atomic emission spectroscopy (AES) and multiwavelength pyrometry. Argon plasma torch and graphite electrode with nitrogen as plasma gas are both examined and compared using the steel bath as anode. With argon, a two-slope characteristic curve is measured for arc temperature, which ranges from 9000 to 25,000 K. Another trend is observed with nitrogen for temperatures in the range 8000–12,000 K. In this latter case, the bath temperature is very sensitive to arc length: more than 100 K increase results in arc length rise from 50 to 150 mm. Experimental data shows the variation of heat transfer efficiency between the two configurations, which is supported by results about surface emissivity in the spectral domain 1–15 m.     

Partial oxidation of methane to syngas over Ni-Fe/Al2O3 catalyst with plasma enhanced activity

A novel Ni-Fe/Al₂O₃ catalyst for partial oxidation of methane has been prepared by glow discharge treatment followed by calcination thermally. The catalyst prepared exhibits better activity and selectivity. This revised version was published online in June 2006 with corrections to the Cover Date.     

A magnetically excited microwave plasma source for atomic emission spectroscopy with performance approaching that of the inductively coupled plasma

A novel magnetically excited microwave plasma emission source was developed and tested. Unlike previous microwave plasma sources which couple energy from the microwave electric field, this source couples energy from the magnetic field. The resultant plasma shape allows easy entrainment of wet sample aerosol, such as is produced by a conventional inductively coupled plasma (ICP) nebulizer and spray chamber, into the core of the plasma. Plasma support gas can be either nitrogen or air although better sensitivity is achieved using nitrogen. Good stability of operation was observed for both aqueous and organic solvents over a wide range of sample flows. The measured performance when used as a spectroscopic source in conjunction with an echelle polychromator showed detection limits approaching those of commercial ICP sources.     

Optical and Electrical Properties of Polymerizing Plasmas and Their Correlation with DLC Film Properties

Diamond-like carbon (DLC) films were grown from radiofrequency plasmas of acetylene-argon mixtures, at different excitation powers, P. The effects of this parameter on the plasma potential, electron density, electron temperature, and plasma activity were investigated using a Langmuir probe. The mean electron temperature increased from about 0.5 to about 7.0 eV while the mean electron density decreased from about 1.2 × 10⁹ to about 0.2 × 10⁹ cm^–3 as P was increased from 25 to 150 W. Both the plasma potential and the plasma activity were found to increase with increasing P. Through actinometric optical emission spectrometry, the relative concentrations of CH, [CH], and H, [H], in the discharge were mapped as a function of the applied power. A rise in [H] and a fall in [CH] with increasing P were observed and are discussed in relation to the plasma characteristics and the subimplantation model. The optical properties of the films were calculated from ultraviolet-visible spectroscopic data; the surface resistivity was measured by the two-point probe method. The optical gap, E _G, and the surface resistivity, _s, fall with increasing P. E _G and _s are in the ranges of about 2.0–1.3 eV and 10¹⁴–10¹⁶ /, respectively. The plasma power also influences the film self-bias, V _b, via a linear dependence, and the effect of V _b on ion bombardment during growth is addressed together with variation in the relative densities of sp² and sp³ bonds in the films as determined by Raman spectroscopy.     

冷等离子体喷射流对甲烷二氧化碳重整用Ni/Al2O3催化剂的还原机制

采用理论计算与实验相结合的方法研究了常压冷等离子体喷射流还原Ni/Al2O3催化剂的机理.首先,在假设还原过程是H原子起主导作用的基础上,依据对冷等离子体喷射流的放电特性分析,计算得到H2的理论解离度和催化剂理论还原时间.其次,采用X射线衍射表征及活性评价的手段,考察了等离子体制得催化剂还原过程及实际还原时间.结果表明...