Effective modification of MgO with surface transition metal oxides for NF3 decomposition

NF3 decomposition over transition metal oxides coated MgO reagents in the absence of water is investigated. The results show that NF3 can be decomposed completely over pure MgO but the time of NF3 steady full conversion kept as short as 80 min, while the reactivities of coated MgO reagents were remarkably enhanced by transition metal oxides, for example the time of NF3 complete conversion over 12%Fe/MgO extended to 380 min. It is suggested that not only an increase in surface area but also a significant enhancement in the fluorination of MgO substrate caused by the surface transition metal oxides result in an improved reactivity of coated MgO reagents for NF3 decomposition.     

Carbon Dioxide Reforming of Methane over Ni Catalysts Supported on Al2O3 Modified with La2O3, MgO, and CaO

The preparation of synthesis gas from carbon dioxide reforming of methane (CDR) has attracted increasing attention. The present review mainly focuses on CDR to produce synthesis gas over Ni/MO_x/Al₂O₃ (X = La, Mg, Ca) catalysts. From the examination of various supported nickel catalysts, the promotional effects of La₂O₃, MgO, and CaO have been found. The addition of promoters to Al₂O₃-supported nickel catalysts enhances the catalytic activity as well as stability. The catalytic performance is strongly dependent on the loading amount of promoters. For example, the highest CH₄ and CO₂ conversion were obtained when the ratios of metal M to Al were in the range of 0.04–0.06. In the case of Ni/La₂O₃/Al₂O₃ catalyst, the highest CH₄ conversion (96%) and CO₂ conversion (97%) was achieved with the catalyst (La/Al = 0.05 (atom/atom)). For Ni/CaO/Al₂O₃ catalyst, the catalyst with Ca/Al = 0.04 (atom/atom) exhibited the highest CH₄ conversion (91%) and CO₂ conversion (92%) among the catalysts with various CaO content. Also, Ni/MgO/Al₂O₃ catalyst with Mg/Al = 0.06 (atom/atom) showed the highest CH₄ conversion (89%) and CO₂ conversion (90%) among the catalysts with various Mg/Al ratios. Thus it is most likely that the optimal ratios of M to Al for the highest activities of the catalysts are related to the highly dispersed metal species. In addition, the improved catalytic performance of Al₂O₃-supported nickel catalysts promoted with metal oxides is due to the strong interaction between Ni and metal oxide, the stabilization of metal oxide on Al₂O₃ and the basic property of metal oxide to prevent carbon formation.     

Synthesis of high surface area nanometer magnesia by solid-state chemical reaction

Nanometer MgO samples with high surface area, small crystal size and mesoporous texture were synthesized by thermal decomposition of MgC₂O₄ · 2H₂O prepared from solid-state chemical reaction between H₂C₂O₄ · 2H₂O and Mg (CH₃COO)₂ · 4H₂O. Steam produced during the decomposition process accelerated the sintering of MgO, and MgO with surface area as high as 412 m² · g⁻¹ was obtained through calcining its precursor in flowing dry nitrogen at 520°C for 4 h. The samples were characterized by X-ray diffraction, N₂ adsorption, transmission electron microscopy, thermogravimetry, and differential thermal analysis. The as-prepared MgO was composed of nanocrystals with a size of about 4–5 nm and formed a wormhole-like porous structure. The MgO also had good thermal stability, and its surface areas remained at 357 and 153 m²·g⁻¹ after calcination at 600 and 800°C for 2 h, respectively. Compared with the MgO sample prepared by the precipitation method, MgO prepared by solid-state chemical reaction has uniform pore size distribution, surface area, and crystal size. The solid-state chemical method has the advantages of low cost, low pollution, and high yield, therefore it appears to be a promising method in the industrial manufacture of nanometer MgO. Translated from Chinese Journal of Catalysis, 2006, 27(9): 793–798 (in Chinese)     

A model for the etching of Si in CF4 plasmas: Comparison with experimental measurements

A model has been developed to describe the chemistry which occurs in CF₄ plasmas and the etching of Si both in the plasma and downstream. One very important feature of this model is that for discharge residence times which vary by more than an order of magnitude, the amount of CF₄ consumed is low and relatively constant. This is because the gas-phase combination reactions between F and both CF₃ and CF₂ lead to the rapid reforming of CF₄. The model predicts that CF₂ is a major species in the gas phase and that the [F] detected as a sample point downstream is a very sensitive function of [CF₂]/[F] in the discharge. Even though the calculations show that [F] in the discharge varies only slightly over the wide range of experimental conditions considered, large variations in [F] at the sample point occur because the [CF₂]/[F] ratio in the discharge changes. The concentrations of C₂F₆ and SiF₄ are predicted to within a factor of 2 over a very wide range of experimental conditions. This confirms the importance of gas-phase free radical reactions in the etching of Si.     

Direct dynamics studies for the reactions of CF3CHFCF3 and CF3CF2CHF2 with H atoms

The rate constants of the hydrogen abstraction reactions of CF₃CHFCF₃ + H (R1) and CF₃CF₂CHF₂ + H (R2) have been calculated by means of the dual-level direct dynamics method. Optimized geometries and frequencies of stationary points and extra points along the minimum-energy path (MEP) are obtained at the MPW1K/6-311+G(d,p) level, and the classical energetic information is further corrected with the interpolated single-point energy (ISPE) approach by the G3(MP2) level of theory. Using the canonical variational transition state theory (CVT) with small-curvature tunneling corrections (SCT), the rate constants are evaluated over a wide temperature range of 200-2000 K. The calculated CVT/SCT rate constants are in good agreement with available experimental values. It is found that the variational effect is very small and almost negligible over the whole temperature region. However, the small-curvature tunneling correction plays an important role in the lower temperature range. Furthermore, the heats of formation of species CF₃CF₂CHF₂ (SC₁ or SC₂) and CF₃CF₂CF₂ are studied using isodesmic reactions to further elucidate the thermodynamic properties.     

Methyl hypofluorite (MeOF) reactions with various fluoroolefins

The reaction of methyl hypofluorite (MeOF) with certain fluoroolefins, such as CF₂CF₂, CF₂CFCF₃, CF₂CFOCF₃, CF₂CFOMe, CF₂CClF, CF₂CHF, CF₂CH₂, CHFCH₂, CF₂CFCFCF₂, occurred in CD₃CN or in the presence of NaF. Using neat MeOF in the presence of NaF was a novel method and gave good results. We observed that when more than three fluorine atoms are bonded to the CC double bond, the addition products were obtained in mostly good yields.     

Gas-phase reactions of CF3 and CF2 with atomic and molecular fluorine: Their significance in plasma etching

Reaction rate coefficients have been measured at 295 K for both CF₃ and CF₂ with atomic and molecular fluorine. The reaction between CF₃ and F was studied over a gas number density range of (2.4–23)×10¹⁶ cm^–3 with helium as the bath gas. The measured rate coefficient increased from (1.1–1.7)×10^–11 cm³ s^–1 as the gas number density increased over this range. In contrast to this relatively small change in rate coefficient with gas number density, the rate coefficient for CF₂+F increased from (0.4–2.3)×10^–12 cm³ s^–1 as the helium gas number density increased from (3.4–28.4)×10¹⁶ cm^–3. Even for the highest bath gas number density employed, the rate coefficient was still more than an order of magnitude lower than earlier measurements of this coefficient performed at comparable gas number densities.Both these association reactions are examined from the standpoint of the Gorin model for association of radicals and use is made of unimolecular dissociation theory to examine the expected dependence on gas number density. The calculations reveal that CF₃+F can be explained satisfactorily in these terms but CF₂+F is not well described by the simple Gorin model for association.CF₃ was found to react with molecular fluorine with a rate coefficient of (7±2)×10^–14 cm³ s^–1 whereas only an upper limit of 2×10^–15 cm³ s^–1 could be placed on the rate coefficient for the reaction between CF₂ and F₂. The values obtained for this set of reactions mean that the reaction between CF₃ and F will play an important role in plasmas containing CF₄. The high rate coefficient will mean that, under certain conditions, this particular reaction will control the amount of CF₄ consumed. On the other hand, the much lower rate coefficient for reactions between CF₂ and F means that CF₂ will attain much higher concentrations than CF₃ in plasmas where these combination reactions are dominant.     

Study of Zircon-Dolomite Reactions Monitored by Neutron Thermodiffractometry

The reaction mechanism that takes place in ZrSiO₄-Mg Ca(CO₃)₂ mixtures was studied in air up to 1300°C by collecting neutron diffraction patterns during the heating ramp. Neutron diffraction intensities were used to monitor and establish the mechanism of reaction that occurs in successive stages. (a) MgCa(CO₃)₂ decomposition yielding MgO and CaCO₃; (b) CaCO₃ decomposition; (c) reactions between CaO, MgO, and ZrSiO₄ involving the formation of phases such as: tetragonal-ZrO₂, α-Ca₂SiO₄, and Ca₃MgSi₂O₈, some of them acting as transitory phases; and (d) formation of CaZrO₃. The results obtained by this technique agree with data obtained by differential thermal analysis and thermogravimetry. The final product has a porous structure, due to the release of CO₂, with a very narrow pore size distribution (≈1 μm). This open-porosity can be controlled by tailoring the reaction sintering process.     

Thermal and X-ray diffraction studies of the solid–solid interactions in CuO–MoO3/MgO system

The solid–solid interactions in pure and MoO₃-doped CuO/MgO system were investigated using TG, DTA and XRD. The composition of pure mixed solids were 0.1CuO/MgO, 0.2CuO/MgO and 0.3CuO/MgO and the concentrations of MoO₃ were 2.5 and 5 mol%. These solids were prepared by wet impregnation of finely powdered basic magnesium carbonate with solutions containing calculated amounts of copper nitrate and ammonium molybdate followed by heating at 400–1000°C. The results revealed that ammonium molybdate doping of the system investigated enhanced the thermal decomposition of copper nitrate and magnesium hydroxide which decomposed at temperatures lower than those observed in case of the undoped mixed solids by 70 and 100°C, respectively. A portion of CuO present dissolved in the lattice of MgO forming CuO–MgO solid solution with subsequent limited increase in its lattice parameter. The other portion interacted readily with a portion of MoO₃ at temperatures starting from 400°C yielding CuMoO₄ which remained stable up to 1000°C. The other portion of MoO₃ interacted with MgO producing MgMoO₄ at temperatures starting from 400°C and remained also stable at 1000°C. The diffraction peaks of Cu₂MgO₃ phase were detected in the diffractograms of pure and MoO₃-doped 0.3CuO/MgO precalcined at 1000°C. The formation of this phase was accompanied by an endothermic peak at 930°C.     

Investigation of CF2 carbene on the surface of activated charcoal in the synthesis of trifluoroiodomethane via vapor-phase catalytic reaction

This paper investigates the synthetic mechanism of trifluoroiodomethane (CF₃I) in the reaction of trifluoromethane and iodine via vapor-phase catalytic reaction. It is suggested that CF₂ carbene is the key intermediate and is formed in the pyrolysis process of CHF₃ at high temperature. However, in pyrolysis of CHF₃ under activated charcoal (AC) existing conditions, no C₂F₄ was detected. H₂ and 2-methyl-2-butene could not trap the CF₂ carbene. When treating the remained compounds on the used AC with H₂, CH₄ is formed on the process. It is proposed that CF₂ carbene combines with AC strongly and transfers into CF₃ radical on heat. In addition, it is found that the AC is not only the catalyst supporter to form CF₃I, but also a co-catalyst to promote the formation of CF₂ carbene and CF₃ radical.     

A comparative study of CH4 and CF4 rf discharges using a consistent plasma physics and chemistry simulator

A self-consistent, one-dimensional simulator for the physics and chemistry of radio frequency (rf) plasmas was developed and applied for CH₄ and CF₄. The simulator consists of a fluid model for the discharge physics, a commercial Boltzmann equation solver for calculations of electron energy distribution fuction (EEDF), a generalized plasma chemistry code, and an interface module among the three models. The CH₄ and CF₄ discharges are compared and contrasted: CH₄ plasmas are electropositive, with negative ion densities one order of magnitude less than those of electrons, whereas CF₄ plasmas are electronegative, with ten times more negative ions than electrons. The high-energy tail of tire EEDF in CH₄, lies below both the Druyvensteyn and Maxwell distributions, whereas tire EEDF high-energy tail in CF₄ lies between the two. For CH₄, the chemistry model was applied for four species, namely, CH₄ CH₃ CH₂, and H, whereas for CF₄, five species were examined namely CF₄, CF₃, CF₂, CF, and F The predicted densities and profiles compare favorably with experimental data. Finally, the chemistry results were fedback into the physics model until convergence was obtained.     

CF4 decomposition over solid ternary mixture NaF-Si-MO（MO=La2O3,CeO2,Pr6O-（11）,Nd2O3,Y2O3）

A solid ternary mixture consisting of NaF,silicon and one metal oxide such as La2O3,CeO2,Pr6O11,Nd2O3,and Y2O3 was prepared and usedas de-fluorinated reagent for CF4 decomposition.The results show that 90% conversion of CF4 can be reached initially over NaF-Si-La2O3,NaF-Si-CeO2,NaF-Si-Nd2O3,and NaF-Si-Y2O3 at 850 C.The fresh and used reagents were characterized using XRD and XPS techniques.It was found that the active components of NaF and metal oxides in NaF-Si-CeO2,NaF-Si-Pr6O11,NaF-Si-Nd2O3,and NaF-Si-Y2O3 weretransformed into inert phases of mixed metal fluorides and silicates,respectively,resulting in an ineffective utilization of these de-fluorinatedreagents,whereas no inert phases from NaF and La2O3 can be observed in the used NaF-Si-La2O3,indicating the NaF-Si-La2O3 reagent couldbe utilized more efficiently than the other reagents in CF4 decomposition.     

Etching Efficiency for Si and SiO2 by CF+x,F+, and C+ Ion Beams Extracted from CF4 Plasmas

Fluorocarbon (CF⁺ _x), fluorine (F⁺), and carbon (C⁺) ion beams with highcurrent density (50i<800 A/cm²) were irradiated to Si and SiO₂surfaces to investigate the influence of the ion species on the etchingefficiency. The ion beams were extracted from magnetized helicon-wave CF₄plasmas operated in pulsed modes. The CF⁺ ₃ beam had the largest etchingefficiency for Si at the same beam energy. When the same data weresummarized as a function of the momentum of the incident ion beam, thedifference in the etching efficiency became small, although the CF⁺ ₃ beamstill had a slightly larger etching efficiency. On the other hand, theetching efficiency for SiO₂ by the CF⁺ ₃ beam was larger than that by theother ion beams in the low-momentum region. In addition, in the low-momentumregion, the etching efficiency for SiO₂ by CF⁺ ₃ was larger than that forSi. These results suggest the high chemical reactivity of CF⁺ ₃ with SiO₂,leading to the high etching selectivity of SiO₂ over underlying Si in thefabrication of semiconductor devices.     

双分子水和氨气催化CF3OH分子裂解的理论研究

The G3 and CBS-QB3 theoretical methods are employed to study the decomposition of CF₃OH into FCFO and HF by water, water dimmer, and ammonia. The decomposition of CF₃OH into FCFO and HF is unlikely to occur in the atmosphere due to the high activated energy of 88.7 kJ/mol at the G3 level of theory. However, the computed results predict that the barrier for unimolecular decomposition of CF₃OH is decreased to 25.1 kJ/mol from 188.7 kJ/mol with the aid of NH₃ at the G3 level of theory, which shows that the ammonia play a strong catalytic effect on the split of CF₃OH. In addition, the calculated rate constants show that the decomposition of CF₃OH by NH₃ is faster than those of H₂O and the water dimmer by 109 and 105 times respectively. The rate constants combined with the corresponding concentrations of these species demonstrate that the reaction CF₃OH with NH₃ via TS4 is of great importance for the decomposition of CF₃OH in the atmosphere.     

Thermal decomposition mechanisms of MgCl2·6H2O and MgCl2·H2O

The thermal decomposition mechanisms and the intermediate morphology of MgCl₂·6H₂O and MgCl₂·H₂O were studied using integrated thermal analysis, X-ray diffraction, scanning electron microscope and chemical analysis. The results showed that there were six steps in the thermal decomposition of MgCl₂·6H₂O: producing MgCl₂·4H₂O at 69 °C, MgCl₂·2H₂O at 129 °C, MgCl₂·nH₂O (1 ≤ n ≤ 2) and MgOHCl at 167 °C, the conversion of MgCl₂·nH₂O (1 ≤ n ≤ 2) to Mg(OH)Cl·0.3H₂O by simultaneous dehydration and hydrolysis at 203 °C, the dehydration of Mg(OH)Cl·0.3H₂O to MgOHCl at 235 °C, and finally the direct conversion of MgOHCl to the cylindrical particles of MgO at 415 °C. To restrain the sample hydrolysis and to obtain MgCl₂·H₂O, MgCl₂·6H₂O was first calcined in HCl atmosphere until 203 °C when MgCl₂·H₂O was obtained; HCl gas was then turned off and the calcination process continued, producing Mg₃Cl₂(OH)₄·2H₂O calcined at 203 °C, Mg₃(OH)₄Cl₂ at 220 °C and MgO at 360 °C. The temperature of producing MgO from calcination of MgCl₂·H₂O was lower (360 °C) than that from MgCl₂·6H₂O (415 °C) because of its more reactive intermediate products: the irregular shape and tiny needle-like Mg₃Cl₂(OH)₄·2H₂O particles and the uneven surface porous Mg₃(OH)₄Cl₂ particles. The MgO particles obtained at 360 °C had a flake structure.     

Effective Removal of CF4 by Combining Nonthermal Plasma with γ-Al2O3

Conversion of CF₄ was experimentally evaluated with three systems including catalytic hydrolysis, NTP-alone and plasma catalysis. Firstly, activity of γ-Al₂O₃ for CF₄ conversion was tested via catalytic hydrolysis. Experimental results indicate that the highest CF₄ conversion (72%) could be achieved with γ-Al₂O₃ in the presence of 45% H₂O_(g) with the operating temperature of 900 °C and the apparent activation energy is calculated as 85 kJ/mol using power rate law model. For plasma-based systems, results indicate that CF₄ conversions achieved with plasma catalysis remain 100% with the applied voltage ranging from 12 to 23 kV, while the highest CF₄ conversion achieved with NTP-alone is 86%. For the effects of various parameters on plasma-based systems, the results indicate that plasma catalysis also has better resistivity for higher total flow rate, CF₄ concentration and O₂ contents. Especially, CF₄ conversion could maintain at 100% with the operating applied of 23 kV as CF₄ concentration is increased to 10,000 ppm. On the other hand, CF₄ conversion achieved with NTP-alone is 18% at the same conditions. In addition, negative effect of O₂ on plasma catalysis could be reduced by the addition of Ar due to its good discharge properties and high excitation threshold energy (13 eV). The kinetics of plasma catalysis is investigated for CF₄ conversion by a simplified model, and the results indicate that overall energy constant achieved with plasma catalysis reaches 0.015 mg J^?1. Overall, plasma catalysis is demonstrated with good potential for the reduction of CF₄ emission.

     

Solid-solid interactions in pure and Li2O-doped manganese and magnesium mixed oxides system

The solid-solid interactions between manganese and magnesium oxides in absence and in presence of small amounts of Li₂O have been investigated. The molar ratios between manganese and magnesium oxides in the form of Mn₂O₃ and MgO were varied between 0.05:1 to 0.5:1. The mixed solids were calcined in air at 400-1000°C. The techniques employed were DTA, XRD and H₂O₂ decomposition at 20-40°C.The results obtained revealed that solid-solid interactions took place between the reacting solids at 600-1000°C yielding magnesium manganates (Mg₂MnO₄, Mg₆MnO₈, MgMnO₄ besides unreacted portions of MgO, Mn₂O₃ and Mn₃O₄). Li₂O-doping (0.75-6 mol%) of the investigated system followed by calcination at 600 and 800°C decreased progressively the intensity of the diffraction lines of Mn₂O₃ (Bixbyite) with subsequent increase in the lattice parameter 'a' of MgO to an extent proportional to the amount of Li₂O added. This finding might suggest that the doping process enhanced the dissolution of Mn₂O₃ in MgO forming solid solution. This treatment led also to the formation of Li₂MnO₃. Furthermore, the doping with 3 and 6 mol% Li₂O conducted at 800°C resulted in the conversion of Mn₂O₃ into Mn₃O₄, a process that took place at 1000°C in absence of Li₂O. The produced Li₂MnO₃ phase remained stable by heating at up to 1000°C. Furthermore, Li₂O doping of the investigated system at 400-1000°C resulted in a progressive measurable increase in the particle size of MgO.The catalytic activity measurements showed that the increase in the molar ratio of Mn₂O₃ in the samples precalcined at 400-800°C was accompanied by a significant increase in the catalytic activity of the treated solids. The maximum increase in the catalytic activity expressed as reaction rate constant measured at 20°C (k _20°C) attained 3.14, 2.67 and 3.25-fold for the solids precalcined at 400, 600 and 800°C, respectively. Li₂O-doping of the samples having the formula 0.1 Mn₂O₃/MgO conducted at 400-600°C brought a progressive significant increase in its catalytic activity. The maximum increase in the value of k _20°C due to Li₂O attained 1.93 and 2.75-fold for the samples preheated at 400 and 600°C, respectively and opposite effect was found for the doped samples preheated at 800°C.This revised version was published online in November 2005 with corrections to the Cover Date.     

Influence of Support Type and Metal Loading in Methane Decomposition over Iron Catalyst for Hydrogen Production

Natural gas resources, stimulate the method of catalytic methane decomposition. Hydrogen is a superb energy carrier and integral component of the present energy systems, while carbon nanotubes exhibit remarkable chemical and physical properties. The reaction was run at 700 °C in a fixed bed reactor. Catalyst calcination and reduction were done at 500 °C. MgO, TiO₂ and Al₂O₃ supported catalysts were prepared using a co‐precipitation method. Catalysts of different iron loadings were characterized with BET, TGA, XRD, H₂‐TPR and TEM. The catalyst characterization revealed the formation of multi‐walled nanotubes. Alternatively, time on stream tests of supported catalyst at 700 °C revealed the relative profiles of methane conversions increased as the %Fe loading was increased. Higher %Fe loadings decreased surface area of the catalyst. Iron catalyst supported with Al₂O₃ exhibited somewhat higher catalytic activity compared with MgO and TiO₂ supported catalysts when above 35% Fe loading was used. CH₄ conversion of 69% was obtained utilizing 60% Fe/Al₂O₃ catalyst. Alternatively, Fe/MgO catalysts gave the highest initial conversions when iron loading below 30% was employed. Indeed, catalysts with 15% Fe/MgO gave 63% conversion and good stability for 1 h time on stream. Inappropriateness of Fe/TiO₂ catalysts in the catalytic methane decomposition was observed.     

Rate Coefficient for Self-Association Reaction of CF2 Radicals Determined in the Afterglowof Low-Pressure C4F8 Plasmas

We have analyzed decay kinetics of CF₂ radicals in the afterglow of low-pressure, high-density C₄F₈ plasmas. The decay curve of CF₂ density has been approximated by the combination of first- and second-order kinetics. The surface loss probability evaluated from the frequency of the first-order decay process has been on the order of 10^–4. This small surface loss probability has enabled us to observe the second-order decay process. The mechanism of the second-order decay is self-association reaction between CF₂ radicals (CF₂+CF₂C₂F₄). The rate coefficient for this reaction has been evaluated as (2.6–5.3)×10^–14 cm³/s under gas pressures of 2 to 100 mTorr. The rate coefficient was found to be almost independent of the gas pressure and has been in close agreement with known values, which are determined in high gas pressures above 1 Torr.     

Site directed synthesis of mono and disubstituted SF5-polyfluoroalkyl benzenes

A novel method for the preparation of o-, m-, p-SF₅CF₂CFYC₆H₄X (Y = Br, F and X = m-Br, p-Br, Cl, CH₃, CF₃, NO₂, o-NO₂, F, CF₃, CH(CH₃)₂) derivatives was devised by a two-step reaction: SF₅Br-addition to o-, m-, p-CF₂CFC₆H₄X followed by reaction of AgBF₄ with the o-, m-, p-SF₅CF₂CFBrC₆H₄X adducts. Additional studies have been carried out with several derivatives and includes the preparation of SF₅CF₂C(O)C₆H₅, p-CF₃CFBrC₆H₄NO₂, SF₅CF₂CF₂C₆H₃(NO₂)₂, SF₅CF₂CF₂C₆H₃(NH₂)₂, and an SF₅CF₂CF₂-containing polyimide and dye. The complete characterization (IR, NMR, and MS) of these compounds is given.