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用椭偏仪测透明介质膜(例如硅片上生长的二氧化硅膜),实验数据与理论计算曲线符合得很好;但对于有很强吸收的金属膜,其实验数据与理论计算曲线相差很大。例如,用相同的加热电流但用不同的蒸发时间在硅片上蒸发出不同厚度的银膜,用椭偏仪测试膜厚的结果如图所示。按一般手册所 相似文献
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探讨了利用普通光谱型椭偏仪对各向异性液晶层进行综合性测量的可行性. 并利用法国Jobin Yvon公司的UVISEL SPME(Spectroscopic Phase Modulated Ellipsometer)光谱型椭偏仪测量了光学各向异性液晶层的折射率no和ne及液晶层厚d,进一步利用椭偏仪在透射方式下测量了平行排列液晶层的光延迟特性Δnd,二者取得了很好的一致性,说明利用光谱型椭偏仪可以实现对光学单轴性液晶层及其他材料的测量,测厚精度为纳米量级.
关键词:
光谱型椭偏仪
各向异性
折射率
相位延迟 相似文献
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WJZ型多功能激光椭圆偏振仪是在JJY型分光计上附加激光椭偏装置而组成。兼有分光计和椭偏仪的功能,可用于测量不同基底上介质薄膜的厚度和折射率;除作为高校中级物理实验外,亦可用于材料表面光学参数的分析研究。但是,与原椭偏装置相配用的椭偏仪数据表,只能适用于K_q基底上生长的氧化锆薄膜标准试样,这就实际上限制了椭偏仪的使用范围;另一方面,即使对上述标准试样测量,所获数据往往与数据表提供的数值偏离甚大,直接影响实验效果。经过多次实际试验,本文分析了三相椭偏方程解的特性,讨论了不同条件下椭偏法测厚及折射率的计算机解算。 相似文献
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薄膜科学与技术是当前高科技中的一个领域,在目前各高等院校开设的近代物理实验课程中均有用反射型椭偏仪测量薄膜厚度及折射率的内容。然而,本实验内容的安排却存在一个问题,只能确定膜厚在第一周期以内的值而不能由实验数据本身确定膜厚的周 相似文献
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本文介绍了各种椭偏仪的原理及性能,重点对外差式椭偏仪进行介绍,并对提出的几种外差透射椭偏仪的原理进行了实验验证。 相似文献
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讨论了银道面内的引力场强分布和太阳在银河系中所受引力与到银心距离r的关系,指出引力场强g并不是与r的平方成反比,这是由于银河系的大小和形状不能忽略造成的.强调了万有引力定律的适用条件. 相似文献
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R. A. Vadov 《Acoustical Physics》2005,51(3):265-270
The disagreement between the experimental and calculated positions of the first convergence zone are known from many publications. The most probable cause for such a disagreement, namely, the incorrect specification of the input data for the calculations, is considered. The lack of simultaneity between the hydrological surveys of the region and the acoustic experiments is emphasized. The experimental data obtained by the author in five ocean regions are presented. These data characterize the diurnal variability of the distance from the source to the nearest boundary of the convergence zone. The relations proposed by different researchers for calculating the sound speed from the temperature, salinity, and hydrostatic pressure are analyzed. It is shown that these relations lead to a substantial difference in the estimated depth dependence of the hydrostatic gradient of the sound speed. The position of the first convergence zone is calculated for the propagation conditions determined by vertical temperature and salinity profiles with the subsequent recalculation of these profiles into sound speed profiles by using eight different formulas known from the literature. It is shown that different formulas lead to different values of the distance to the first zone; this difference is substantially greater than that between the calculations and experiment. The necessity of improving the recalculation relations in view of the experimental data on sound propagation in natural oceanic waveguides, including the data on the actual positions of the convergence zones, is emphasized. 相似文献
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J. Šlechta 《Czechoslovak Journal of Physics》1968,18(10):1299-1308
On the basis of the classical theory of radiation produced in incomplete Coulomb interaction, a formula is derived for the coefficient of the bremsstrahlung of fully ionized plasma. In the region of rectilinear approximation a comparison is made with the results of the quantum formula derived from the Born approximation. Furthermore, the influence of dispersion upon the emission coefficient is taken into account; some relations for the region of dispersion are given. 相似文献
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The investigation was made of the dependence of the intensity of Tl, Ga, Mo, Mg, Mn, Sn, Bi, Ni, Zn, Pt and Au spectral lines and the plasma parameters (temperature T, electron concentration ne, degree of 6 ionnization α) from concentration of lithium additive. 相似文献
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We consider associated production of squarks and gluinos with the lightest supersymmetric particle (LSP), or states nearly degenerate in mass with it. Though sub-dominant to pair production of color SU(3)-charged superpartners, these processes are directly sensitive to the wavefunction composition of the lightest neutralinos. Exploiting event-shape variables - including some introduced here for the first time - we are able to identify the composition of the LSP by selecting events involving a single high-pT jet recoiling against missing transverse energy. We illustrate the proposed technique on a set of benchmark cases and propose methods for applying these results in more realistic experimental environments. 相似文献
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SJ Rose 《Contemporary Physics》2013,54(2):109-121
In this paper we describe experiments conducted with high-power lasers that are attempting to replicate, for a very short time and in miniature, conditions found in the Sun. Experiments to date have reached conditions in the outer part of the Sun. To reach the Sun's centre requires compression of material to very much greater than solid density and heating to over ten million degrees. To achieve this, a new class of experiments and a new generation of high-power lasers are required. 相似文献
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Technical Physics - The object of this work is the apokamp—a new type of plasma jet, which is formed from a bright offshoot emerging at the bending point of a channel of a high-voltage... 相似文献