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1.
The direct formation of iron phosphate nanoparticles on hydroxyl-terminated SiO(2)/Si substrates with a narrow size distribution (average diameter = 2.2 nm) is achieved by a simple room temperature spontaneous reaction of ferric chloride and phosphoric acid. Single-walled carbon nanotubes (SWNTs) are grown in high yield from the synthesized iron phosphate nanoparticles by the thermal chemical vapor deposition (CVD) method, as confirmed by atomic force microscopy (AFM) and Raman spectroscopy. Furthermore, three-terminal, p-type, nanotube network field effect transistor (FET) devices are successfully fabricated using the synthesized SWNTs via the photolithography technique. The reduced solubility of Fe(III) ions when they form iron phosphate salts in aqueous media is the main driving force for the nanoparticle formation. Systematic control experiments reveal that the surface property, concentration, and pH of the reaction solution play equally important roles in the formation of nanoparticles.  相似文献   

2.
光刻与光刻胶的研究与发展   总被引:1,自引:0,他引:1  
洪啸吟 《高分子通报》1993,(3):129-133,185
本文介绍用于超大规模集成电路的光刻技术及其光刻胶,包括化学增值型光刻胶和无显影气相光刻胶等的研究进展和发展趋势.  相似文献   

3.
光致诱蚀作用或无显影气相光刻作用是一个非常有趣的现象。为了探讨肉桂酸酯系光敏聚合物的光致诱蚀作用机理,观察了各种因素的相互影响。提出了下述理论假设:当肉桂酸酯光敏聚合物薄膜受紫外光照射时,发生光化学反应并使其结构性质发生变化,从而使得薄膜可以从腐蚀气体中吸收H_2O和HF气体,形成一个氢氟酸-聚合物溶液,此溶液与HF和H_2O的混和气体不同,可以与其下部的SiO_2迅速反应。但未受光照射的区域不易同时吸收H_2O和HF,其下部SiO_2的反应速度很慢,于是在两个区域间形成了很大的腐蚀速度差,从而形成一个清晰的光刻图象。这个假设可以解释现有的全部实验结果。  相似文献   

4.
针对电脑芯片的制造涉及到许多化学反应,介绍了单晶硅晶片的制备、外延、氧化、化学气相沉积、光刻蚀等化学反应过程。  相似文献   

5.
无显影气相光刻技术是我国在1980年发明的一种独特的光刻技术,具有不需要显影,分辨率高等优点,但它的机理并不清楚,本文介绍十多年来在无显影气相光刻机理研究方面的成果,实验证明,无显影气相光刻是以光致光刻胶膜内的诱恂剂浓度差为基础的方法;而传统的光刻方法是基于光致光刻胶膜溶解度关匠方法,由于两者的光刻原理不同,导致了他们间光刻效果和应用范围之区别,所得机理研究之结果可以解释无显影气相光刻中的呼种独特的现象并可指导无显影气相光刻技术的发展,克服技术中存在的问题。  相似文献   

6.
研究了聚合物在无显影气相光刻过程中的作用,由此解释了无显影气相光刻过程中曝光区和非曝光区高腐蚀速度差,高分辨率和高腐蚀纵宽比的原因.  相似文献   

7.
A new, versatile architecture is presented for microfluidic devices made entirely from glass, for use with reagents which would prove highly corrosive for silicon. Chips consist of three layers of glass wafers bonded together by fusion bonding. On the inside wafer faces a network of microfluidic channels is created by photolithography and wet chemical etching. Low dead-volume fluidic connections between the layers are fabricated by spark-assisted etching (SAE), a computer numerical controlled (CNC)-like machining technique new to microfluidic system fabrication. This method is also used to form a vertical, long path-length, optical cuvette through the middle wafer for optical absorbance detection of low-concentration compounds. Advantages of this technique compared with other, more standard, methods are discussed. When the new glass-based device for flow-injection analysis of ammonia was compared with our first-generation chips based on silicon micromachining, concentration sensitivity was higher, because of the longer path-length of the optical cuvette. The dependence of dispersion on velocity profile and on channel cross-sectional geometry is discussed. The rapid implementation of the devices for an organic synthesis reaction, the Wittig reaction, is also briefly described.  相似文献   

8.
Poly(dimethylsiloxane) (PDMS) is a common material used in fabricating microfluidic devices. The predominant PDMS fabrication method, soft lithography, relies on photolithography for fabrication of micropatterned molds. In this technical note, we report an alternative molding technique using microscale PLasma Activated Templating (microPLAT). The use of photoresist in soft lithography is replaced by patterned water droplets created using microPLAT. When liquid PDMS encapsulates patterned water and then solidifies, the cavities occupied by water become structures such as microchannels. Using this method, device fabrication is less time consuming, more cost efficient and flexible, and ideal for rapid prototyping. An additional important feature of the water-molding process is that it yields structural profiles that are difficult to achieve using photolithography.  相似文献   

9.
5-硝基二氢苊的光氧化作用在无显影气相光刻中起着重要作用。我们通过红外,核磁共振、色质联用等手段对其光氧化产物进行了分析,并合成了有关化合物进行对照,确认5-硝基二氢苊的主要光氧化产物是5-硝基苊、5-硝基二氢苊酮、羟基-5-硝基二氢苊。  相似文献   

10.
Multiwalled carbon nanotubes (MWNTs) covalently bound to monocrystalline p-type Si(111) surfaces have been prepared by attaching soluble amine-functionalized MWNTs onto a preassembled undecanoic acid monolayer using carbodiimide coupling. SEM analysis of these functionalized surfaces shows that the bound MWNTs are parallel to the surface rather than perpendicular. The voltammetric and electrochemical impedance spectroscopy measurements reveal that the electron transfer at the MWNT-modified surface is faster than that observed at a MWNT-free alkyl monolayer. We have also demonstrated that it is possible to prepare MWNT micropatterns using this surface amidation reaction and a "reagentless" UV photolithography technique. Following this approach, MWNT patterns surrounded by n-dodecyl areas have been produced and the local electrochemical properties of these micropatterned surfaces have been examined by scanning electrochemical microscopy. In particular, it is demonstrated that the MWNT patterns allow a faster charge transfer which is consistent with the results obtained for the uniformly modified surfaces.  相似文献   

11.
Chen W  Lam RH  Fu J 《Lab on a chip》2012,12(2):391-395
A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS.  相似文献   

12.
A new technique of synthesizing single-walled carbon nanotubes (SWCNTs) has been developed by means of the catalytic chemical vapor deposition (CVD) method from ethanol over MgO supported catalyst using fluidized-bed. Ethanol vapor was introduced into the fluidized-bed from a temperature-controlled bubbler by the flow of Ar without rotary pump. With this technique, the reaction conditions can be controlled simply. The fluidized-bed was applied as the reactor instead of quartz boats. Ethanol vapor and the powder of catalyst can be mixed with each other more sufficiently. MgO support can be easily removed from SWCNTs by acid solution. Characteristics of as-grown SWCNTs were presented using Raman spectroscopic and transmission electron microscopy (TEM), revealing that the SWCNTs produced by this method possess the significant quality of being free from amorphous carbons and having uniform diameter.  相似文献   

13.
刘莉  李瑛  王福会 《电化学》2009,15(2):179
应用电偶电流测试法研究在中温固态NaCl盐膜-水蒸气协同作用下,纯铁的腐蚀电化学反应机理.交流阻抗(EIS)法和SEM测试表明,阻抗谱能有效地表征材料表面氧化膜的存在以及反应过程氧化物的变化趋势,其中金属的氧化层电阻与腐蚀速率之间有较好的对应关系.  相似文献   

14.
As is apparent from the literature devoted to the analytical atomic spectrometry, chemical vapor generation (CVG) of noble metals by reaction with tetrahydroborate in acidic media may enhance the introduction of these elements into different atomic spectrometric sources. Recent developments in the CVG of noble metals species by reaction with tetrahydroborate in acidic medium are surveyed. Different aspects of this novel technique are discussed, including type of instrumentation used for the reaction, separation and transport of the species, effect of chemical and physical factors, identification of the species, and the efficiency of the process. Limitations and future prospects of the CVG technique are discussed.  相似文献   

15.
Stable, ultrathin DNA micropatterns were fabricated from photosensitive polymer diazoresin (DR) through a self-assembly technique. The micropatterns were achieved on LBL ultrathin film after UV exposure through a photomask. The patterns were characterized systematically with scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and fluorescence microscopy. All of the results indicate that the combined LBL self-assembly and photolithography technique is a promising method for constructing stable, well-defined micropatterns with a nanoscale thickness.  相似文献   

16.
The purpose of this work is to introduce a new method for quantitatively analyzing water absorption capacity in wheat flour by a headspace gas chromatographic technique. This headspace gas chromatographic technique was based on measuring the water vapor released from a series of wheat flour samples with different contents of water addition. According to the different trends between the vapor and wheat flour phase before and after the water absorption capacity in wheat flour, a turning point (corresponding to water absorption capacity in wheat flour) can be obtained by fitting the data of the water gas chromatography peak area from different wheat flour samples. The data showed that the phase equilibrium in the vial can be achieved in 25 min at desired temperature (35°C). The relative standard deviation of the reaction headspace gas chromatographic technique in water absorption capacity determination was within 3.48%, the relative differences has been determined by comparing the water absorption capacity obtained from this new analytical technique with the data from the reference technique (i.e., the filtration method), which are less than 8.92%. The new headspace gas chromatographic method is automated, accurate and be a reliable tool for quantifying water absorption capacity in wheat flour in both laboratory research and mill applications.  相似文献   

17.
Numerous studies have demonstrated the bottom-up assembly of complex structures such as colloidal crystals, close-packed aggregates, and even rings and tetramers. In this paper we produce a simple localized and nanoscale charge distribution on the surfaces of individual colloidal microspheres using our technique of "particle lithography". In this technique parts of the microspheres are masked off, while polyelectrolytes (or other molecules) cover the remaining portions of the microspheres. The effectiveness of this process is demonstrated by the accurate and reproducible production of colloidal heterodoublets composed of oppositely charged microspheres. These "colloidal molecules" have the potential for significantly higher information content than previous attempts in the literature. The particle lithography technique is advantageous because it is not limited by the resolution of photolithography or by functionalizing chemistries, and the technique opens the door for complex site-specific functionalization of particles.  相似文献   

18.
气相硝化制备硝基苯的研究   总被引:17,自引:0,他引:17  
研究了各种负载型杂多酸及其盐类对苯气相硝化的催化活性 ;探讨了载体、杂多酸类型、杂多酸负载量、反应温度、苯 /硝酸的摩尔比对硝化率的影响 .并用 ESR技术对催化剂进行了表征 .结果表明 ,二氧化硅负载杂多酸 (HPA)对苯气相硝化具有很好的催化活性 .对于 2 0 % H3PW1 2 O40 /Si O2 催化剂 ,苯 /硝酸的摩尔比为 2 ,反应温度为 15 5~ 16 0℃ ,空速 (SV)为 6 82 m L/(g cat.· h) ,硝基苯产率可达 90 .6 % ,硝基苯的时空收率 (STY)为0 .70 kg/(kg cat.· h) .  相似文献   

19.
水蒸气对有机污染物微波光催化氧化反应的影响   总被引:5,自引:0,他引:5  
郑宜  李旦振  付贤智 《催化学报》2001,22(2):165-167
 以C2H4和C2HCl3为模型有机污染物,考察了不同反应条件下水蒸\r\n气对微波催化反应性能的影响.结果表明,水蒸气的存在是影响微波光\r\n催化反应性能的重要因素.由于微波对物质的极化作用不同,在加水的\r\n微波光催化反应过程中微波能量主要被水吸收,微波场对水的脱附有利\r\n于提高加水条件下C2H4微波光催化氧化活性,但不利于需要水的C2HCl\r\n3氧化反应的进行.  相似文献   

20.
采用氧(或空气)-水蒸汽混合气氛下的固相反应,可合成无任何SrRuO3杂相的纯相化合物Sr2GdRuO6.当由Sr2GdRuO6作先驱物,类似的固相反应体系,可成功合成无任何SrRuO3杂相的纯相RuSr2GdCu2O8化合物.此外,还讨论了有水蒸汽参与的固相反应合成Sr2GdRuO6的反应机理.结果表明,水蒸气的作用是抑制SrRuO3的形成,而不是有利于把SrRuO3杂相转化为Sr2GdRuO6相.  相似文献   

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