内窥式二维光纤扫描探头及其驱动方法

基于压电换能器技术设计了一种应用于光学相干层析成像的新型内窥式二维光纤扫描探头,即利用两片压电陶瓷片和一片薄导电基片驱动光纤探头.该探头利用光纤悬臂的共振特性,通过对压电陶瓷施加等于光纤共振频率的混频信号,能同时激发光纤悬臂两正交方向上的振动,可以实现光纤悬臂的二维扫描.建立了理论模型并进行了有限元仿真分析,最后搭建了实验系统,验证并获得了扫描图样.实验结果实现了光纤悬臂的二维扫描,扫描范围达到(500×500)μm,调节驱动信号振幅幅值可以调节扫描范围.实验结果与理论分析和仿真相吻合,验证了方案的可行性.     

采用DDS的近场扫描光学显微镜探针-样品的纳米距离检测

近场扫描光学显微术中, 近场距离的检测和控制是需要解决的核心技术之一. 本文研究了基于DDS驱动的压电传感器, 在一个压电陶瓷片上, 电极被分成相同的两部分, 分别用于振动驱动和振幅检测. 近场扫描的光纤探针固定于此压电陶瓷片上. 振动驱动信号采用DDS, 在样品的远场时, 可以通过频率扫描得到误差在0.006 Hz以内的压电陶瓷片谐振频率驱动信号, 而当光纤探针处于样品的近场距离之内时, 压电陶瓷片的谐振频率偏离驱动信号频率, 振幅明显减小, 从而检测出近场距离. 高精度振动驱动源DDS和高灵敏度压电传感器的采用提高了检测灵敏度和工作稳定性.     

用光纤光栅传感器研究压电陶瓷的特性

提出了一种利用光纤光栅传感器研究压电陶瓷特性的新方法.该方法采用非平衡Michelson扫描干涉仪对光纤光栅传感信号进行相位解调,通过观测波长漂移引起的相移,从而获得压电陶瓷的位移量与所加电压间的关系.实验分析了迟滞特性和蠕变现象,得到了压电陶瓷的电压-位移特性曲线以及蠕变特性曲线.实验表明,光源功率的波动对压电陶瓷迟...     

用光纤光栅传感器研究压电陶瓷的特性

提出了一种利用光纤光栅传感器研究压电陶瓷特性的新方法.该方法采用非平衡Michelson扫描干涉仪对光纤光栅传感信号进行相位解调,通过观测波长漂移引起的相移,从而获得压电陶瓷的位移量与所加电压间的关系.实验分析了迟滞特性和蠕变现象,得到了压电陶瓷的电压-位移特性曲线以及蠕变特性曲线.实验表明,光源功率的波动对压电陶瓷迟滞特性不能造成影响且压电陶瓷的蠕变特性与电压方向无关.     

用于内窥光学相干层析成像的小型化预标定Lissajous扫描光纤探头

基于非对称光纤悬臂结构的Lissaj ous扫描光纤探头可实现低电压驱动下的大范围扫描成像.本文研究了全封装的小型化预标定Liss ajous扫描光纤探头.通过优化设计与数值仿真,选择了能实现高填充率Liss ajous扫描的正交谐振频率,确定了非对称光纤悬臂的结构参数.全封装探头在5 mm工作距离处的焦点直径为25 μm,视场大小达到1.5 mm × 1.5 mm,总刚性长度和外径分别为35 mm和3.5 mm.研究了全封装探头扫描轨迹的稳定性、可重复性与扫描成像的旋转稳定性.结合实验室搭建的50 kHz扫频光学相干层析(OCT)系统,对硬币和生物组织进行高质量成像,验证了用于内窥OCT成像的小型化预标定Liss ajous扫描光纤探头具有良好的成像性能.     

2-D Fiber-optic Sensing Probe

给出了一种新颖的二维强度调制反射式光纤传感探头.导出了二维传感探头的调制函数.给出了特性调制曲线.设计并实现了5光纤传感探头.获得了与理论符合较好的实验结果.     

利用光纤共焦扫描显微镜的轴向响应曲线测定压电陶瓷的逆压电伸缩效应

在光纤共焦扫描显微镜（FOCSM）的基础上,利用其轴向响应曲线的线性部分,给出了一种测定物体微位移的新方法。并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应,分辨率可以达到5nm。     

光纤投影双频自动轮廓测量术

提出一种双频光纤投影自动轮廓测量技术；用一分二单模光纤耦合器产生正弦光强分布的投影光栅场；将光纤一臂绕在压电陶瓷（ＰＺＴ）环上述旁瓣通过压电陶瓷环引入相移值；以改变出射端两光纤间的距离来发迹投影光栅场的空间频率，用双频光栅技术实现复杂表面自动轮廓测量。     

光纤光栅双折射效应的实验研究

本文对均匀光纤光栅和线性啁啾光纤光栅的双折射效应分别进行了实验研究. 利用压电陶瓷的压电效应实施对均匀光纤光栅和线性啁啾光纤光栅的侧向挤压, 使之产生双折射, 通过改变施加在压电陶瓷上的电压值, 可以实现对光纤光栅双折射大小的控制. 侧向挤压线性啁啾光纤光栅可以补偿光纤通信系统中的偏振模色散.     

弯曲光纤针尖及其法向力压电探测技术

本文介绍一种弯曲光纤针尖及其法向力压电探测的新技术.与目前普遍采用的方法不同,弯曲针尖的制作是先利用电阻丝加热,将光纤弯曲成所需的角度,然后再在缓冲氢氟酸中腐蚀成针尖,得到曲率半径为300μm,弯曲角度为120°,长度为500μm的弯曲针尖.同激光或电弧熔拉、弯曲的方法相比,这种方法工艺简单,成本低廉.由弯曲针尖与蜂鸣器压电片组成的悬臂,利用压电片的正、逆压电效应实现弯曲针尖法向力的非光学法探测.实验表明,这种弯尖法向力的探测较直尖切变力具有更高灵敏度,探测距离提高了一倍以上,给实际应用带来很大的便利.     

新型AFM探针的制备及应用

采用熔拉 -腐蚀复合方法 ,将普通单模石英光纤制成直锥形光纤探针。利用自制工具将探针打弯 ,制成悬臂式光纤探针 ,在AFM上取得了较理想的测试结果。将自制光纤探针和商用硅材料探针获得的两种扫描图像进行了对比 ,分析了悬臂式光纤探针的特点     

Sensitivity analysis of scanning near-field optical microscope probe

In this paper, we study the dynamic modes of a scanning near-field optical microscope (SNOM) which uses an optical fiber probe; and the sensitivity of flexural and axial vibration modes for the probe were derived and the closed-form expressions were obtained. According to the analysis, as expected each mode has a different sensitivity and the first mode is the most sensitive mode of flexural and axial vibration for the SNOM probe. The sensitivities of both flexural and axial modes are greater for a material surface that is compliant with the cantilever probe. As the contact stiffness increases, the high-order vibration modes are more sensitive than the lower-order modes. Furthermore, the axial contact stiffness has a significant effect on the sensitivity of the SNOM probe, and this should be noted when designing new cantilever probes.     

一种探针-样品距离的切变力控制新方法

报道了近场扫描光学显微镜(Near-filed Scanning Optics Microscope NSOM)中一种基于切变力的探针 样品间距控制新方法.条形压电蜂鸣器片的上表面电极被沿着中心线分成两半,一半用于驱动,其上施加振荡源谐振频率进行激励,另一半上粘附光纤探针,并利用压电效应作为光纤探针的振幅传感器.当受振动激励的光纤探针由远处逐渐接近样品表面时,由于样品与探针之间的切变力阻尼作用使得探针的振幅减小,通过检测探针振幅的变化可以控制探针与样品的间距.我们建立了一套探针 样品间距探测控制系统并利用该系统获得了CD盘片表面8μm×8μm范围内的切变力形貌图.     

Two-dimensional scanning probe driven by a solenoid-based single actuator for optical coherence tomography

We propose the two-dimensional scanning probe operating with a single actuator, which is thought useful as a sample probe for optical coherence tomography (OCT). The probe was designed to use a single-body lensed fiber cantilever loaded with an iron-bead and driven by a single-solenoid actuator. Elliptic spiral trace patterns were achieved using off-axis magnetic fields of the solenoid. A three-dimensional OCT image was obtained for a scanning area of 3.8 mm × 3.4 mm at an acquisition speed of 16.7 s/V. Up to 27 Hz B-scan rate, the proposed probe worked well, and 1000 A-scans were made per each B-scan.     

Application of a self-sensing conductive probe for Si device imaging

For the evaluation of two-dimensional carrier profiles in semiconductor devices, we have developed a novel form of probe–sensor combined unit that uses an etched tungsten wire as a conductive probe, and commercially available quartz tuning fork as the force sensor. This unit has a self-sensing capability due to the piezoelectric effect of quartz tuning fork, thus obviating optical setup, and its conductivity is higher and more stable than that of conventional metal-coated Si cantilever. In addition, this probe–sensor combined unit is inexpensive and easy to use, when compared to the well-known optical methods of Si-based cantilever vibration detection system. Our scanning probe microscope using this probe–sensor combined unit is able to mapping the capacitive gradient signal (dC/dZ image) and internal damping of quartz tuning fork oscillation (dissipation image) while scanning the sample surface. In this letter, we show the results of visualization of the p–n junction locus of a Si metal–oxide–semiconductor field effect transistor in both dC/dZ and dissipation images.     

Electroless nickel plating on optical fiber probe

As a component of near-field scanning optical microscope （NSOM）, optical fiber probe is an important factor influncing the equipment resolution. Electroless nickel plating is introduced to metallize the optical fiber probe. The optical fibers are etched by 40% HF with Turner etching method. Through pretreatment, the optical fiber probe is coated with Ni-P film by electroless plating in a constant temperature water tank. Atomic absorption spectrometry （AAS）, scanning electron microscopy （SEM）, and energy dispersive X-ray spectrometry （EDXS） are carried out to characterize the deposition on fiber probe. We have reproducibly fabricated two kinds of fiber probes with a Ni-P film： aperture probe and apertureless probe. In addition, reductive particle transportation on the surface of fiber probe is proposed to explain the cause of these probes.     

Laser-induced implantation of organic molecules into sub-micrometer regions of polymer surfaces

Organic molecules adhered to the point of a micropipette were transferred onto the surface of a polymer film by pulsed laser light guided through a quartz optical fiber which was inserted into the micropipette. Controlled by a high-resolution piezoelectric driver designed for scanning probe microscopy, the distance between the micropipette point and the polymer surface was kept to a few tens of nm. After laser irradiation, the deposited molecules on the polymer surface were examined with optical transmission, fluorescence, atomic force, and scanning near-field optical microscopy. It was demonstrated that various kinds of organic molecules can be implanted into sub-micrometer regions at the surfaces of polymer films without their decomposition. The hypothetical mechanism of the molecular transfer is discussed in relation to the morphology of crystalline molecules adhered at the micropipette apertures.     

Low-voltage polymer-based scanning cantilever for in vivo optical coherence tomography

Novel hand-held optical coherence tomography (OCT) probes with polymer cantilevers have been developed for clinical oral and skin imaging. An electroactive ionic polymer-metal composite cantilever was used to generate 3-mm transverse scanning movement of an optical fiber with applied 2-V linear alternating voltage at 1 Hz. Low driving voltage ensures safety. Two different optical designs achieve both forward and sidewise scanning and make it possible to image everywhere within the human oral cavity. In vivo OCT imaging of the human tongue is demonstrated.     

SFM/SNOM结合的扫描探测显微镜

采用光纤探针的扫描近场光学显微镜 (SNOM)存在某些弱点 ,如探针特别脆 ,不易贴近样品表面扫描 ,探针的转输效率低等。近年来发展了将SFM /SNOM结合起来的扫描探测显微镜。利用微加工工艺技术 ,将小孔集成在悬臂探针中 ,使探针既能批量制备 ,又具有很好的重复性。探针悬臂在垂直于样品表面方向上的弹性常数较小 ,针尖不易损坏。在接触模式中利用这种SFM /SNOM组合探针可将样品的形貌像、摩擦力和光学透射像等信息同时记录下来。对于综合研究样品表面的介观性质十分有利。