新颖的激光清洗技术

利用激光来清除各种器件及材料表面上吸附的各种微粒及污染物，是近年来激光技术应用的一个迅速发展的方向．文章概述了激光清洗技术的最新发展，介绍了激光清洗技术的基本工艺过程及物理机制，讨论了其应用及发展方向等有关问题．     

激光清洗陶瓷文物表面污染层的实验研究

近年来激光清洗技术逐渐应用在文物保护领域.针对陶瓷文物样品表面的黄色污染层(铁锈)和黑色污染层(CaSO4或PbCO3与灰尘的混合物),进行纳秒激光清洗文物的实验研究.实验上采用肉眼观察和激光共聚焦高倍显微镜测量等手段,通过改变激光功率、扫描速度和清洗次数等参数,控制陶瓷表面污染物的烧蚀作用和清洗效果,探索两种污染物的...     

激光微加工技术在集成电路制造中的应用

激光微加工技术以非接触加工方式,高效率、无污染、高精度、热影响区小的优点在微电子集成电路制造中得到了广泛应用.介绍了在集成电路制造封装中采用的激光微调、激光打孔、激光清洗、激光柔性布线和激光微焊技术.     

基于图像处理和LIPS分析的金属表面激光清洗过程监控

激光清洗过程监控是准确去除金属锈蚀层、有效避免金属基体损伤的关键.利用图像处理技术研究了30 mm×30 mm较大面积Q235B钢板在不同光斑搭接率下的清洗次数与清洗度的变化规律,得到50％的最佳光斑搭接率.利用激光诱导等离子体光谱研究了0.47 mm×0.47 mm微小面积Q235B钢板的皮尔逊相关系数随清洗次数的变...     

用激光清洗金膜表面硅油污染物

采用CO2激光对镀金K9玻璃表面的二甲基硅油污染物进行清洗,在激光器单点作用模式下,分别研究了激光功率和作用时间对清洗效果的影响;并研究了连续扫描工作模式下的激光清洗效果。采用光学显微镜和傅里叶变换红外光谱仪表征激光清洗效果,研究结果表明：通过良好的控制激光参数,采用CO2激光清洗二甲基硅油具有明显的效果;此种非接触式清洗方式可确保K9玻璃表面的金膜完好无损。采用有限元分析软件模拟计算了激光功率和作用时间对清洗过程中温度的影响,计算结果与实验结果规律一致。     

用激光清洗金膜表面硅油污染物

采用CO2激光对镀金K9玻璃表面的二甲基硅油污染物进行清洗,在激光器单点作用模式下,分别研究了激光功率和作用时间对清洗效果的影响;并研究了连续扫描工作模式下的激光清洗效果。采用光学显微镜和傅里叶变换红外光谱仪表征激光清洗效果,研究结果表明:通过良好的控制激光参数,采用CO2激光清洗二甲基硅油具有明显的效果;此种非接触式清洗方式可确保K9玻璃表面的金膜完好无损。采用有限元分析软件模拟计算了激光功率和作用时间对清洗过程中温度的影响,计算结果与实验结果规律一致。     

《光学与光电技术》参展首届中国国际应用激光、光电技术贸易博览会暨研讨会

首届中国国际应用激光、光电技术贸易博览会暨研讨会于3月21日至23日在上海新国际博览中心拉开帷幕。全场汇聚来自中、德、美、加、瑞以及中国台湾等18个国家和地区的163家展商参展。其中。国际展商占65％。展区分为激光元件和激光设备两大主题区域，涵盖了激光、光电子的整个产业链。展会期间还举办了国际应用激光技术中国研讨会等多场高质量的激光技术交流会议，触及激光产业最前沿。     

大理石文物样品皮秒激光清洗实验研究

随着超快激光“冷加工”技术的发展,超快激光逐渐开始应用于文物保护领域。针对古城墙文物表面污染物清洗的应用需求,制作类城墙的大理石文物及表面污染物模拟样品,进行基于皮秒激光的文物样品清洗实验研究,并与纳秒激光清洗的效果进行对比。实验中采用共聚焦显微镜观测和荧光能谱仪成分分析等手段,改变激光输出能量,清洗次数和扫描速度等激光清洗参数,在不损伤大理石基底并综合考虑清洗效率和清洗效果基础上,寻找优化实验参数。实验发现皮秒激光清洗优化参数为激光功率18W,扫描速度1000mm/s,清洗次数8次。清洗后主要污染物硫元素占比下降94.57%,清洗后区域表面粗糙度为1.267μm。综合考虑清洗后污染物成分占比、表面粗糙度等方面,皮秒激光清洗大理石文物样品的整体效果优于纳秒激光清洗区域。     

激光清洗实时监测技术研究

针对目前在研激光清洗的实时监测问题进行实验和分析。得出两个结论:激光清洗具有传统方法无法具有的优越性,可以节省大量人力物力成为新型清洗方法而受到重视,激光清洗在设备维修保养中显示了良好的应用前景。激光清洗过程中产生的声发射信号包含了清洗过程的大量信息,利用声发射检测系统可以对激光清洗过程实时监控。     

超声清洗与激光预处理对减反膜阈值的影响

 研究了超声清洗和激光预处理两种后处理手段对减反膜的损伤特性的影响。采用电子束蒸发技术制备了1 064 nm减反膜,利用超声清洗及激光预处理的方法分别对样品进行处理,并对处理前后的样品分别进行激光损伤阈值测试及破斑深度测量。结果表明：处理后减反膜的损伤阈值均有所提升,但激光预处理的阈值增强效果更加明显;超声清洗前后的破斑深度没有大的变化,而激光预处理后的破斑深度比处理前浅得多;原因在于超声清洗只能去除表面杂质,激光预处理可减少和抑制膜层内较深处的缺陷。     

In-process monitoring techniques for laser cleaning

Diverse in-process monitoring techniques based on acoustic, chromatic and intelligent approaches have been developed for laser cleaning not only to achieve the sound-cleaned surface but also to control the process in an automatic manner. The cleaning of various materials such as copper, marble, paper have also been carried out by using Q-switched Nd:YAG radiation. The process was successfully monitored by detecting the acoustic emission induced by laser–surface interactions during laser cleaning. Novel surface monitoring was achieved by chromatic modulation technique. The monitoring of laser fluence based on neural network logic was carried out by means of the recognition of acoustic spectrum patterns. The prediction system of surface damage has been also developed using fuzzy rule base in the same way as a human expert. These techniques may provide unique information for characterising the process as well as a promise of successful applications for laser cleaning techniques in real practical fields.     

激光除锈过程的实时监测技术研究

对激光除锈过程中的实时监测技术进行了实验研究,结果表明:除锈过程中产生的声波强度会随着表面清洁度的变化而发生明显的变化,声波信号包含了除锈过程中的大量信息,可作为激光除锈实时监测的基本信号.     

Laser cleaning of contamination on sandstone surfaces in Yungang Grottoes

Laser cleaning is firstly used to remove the contaminations on the sandstone surfaces in Yungang Grottoes. A Q-switched Nd:YAG laser operated at 1064 nm with a pulse width of 10 ns is used to perform the experiments. Before experiments in Yungang Grottoes, the laboratory experiments on sandstone samples obtained from Shanxi province have been conducted. The laser induced damage thresholds of the uncontaminated sandstones and the laser cleaning thresholds of ink contaminated sandstones have been obtained in the laboratory. The difference between the cleaning effects of dry laser cleaning and steam laser cleaning has been compared. On the basis of the laboratory experimental data, the experiments in Yungang Grottoes have been conducted and the results indicate that laser cleaning is safe and effective for removal of graffiti ink and black smudges of smoke.     

Removal of graffiti from the mortar by using Q-switched Nd:YAG laser

This paper presents part of the larger study on microstructural features of mortars and it's effects on laser cleaning process. It focuses on the influence of surface roughness, porosity and moisture content of mortars on the removal of graffiti by Nd:YAG laser. The properties of this laser are as follows: wavelength (λ) 1.06 μm, energy: 500 mJ per pulse, pulse duration: 10 ns. The investigation shows that the variation of laser fluence with the number of pulses required for the laser cleaning can be divided into two zones, namely effective zone and ineffective zone. There is a linear relationship observed between number of pulses required for laser cleaning and the laser fluence in the effective zone, while the number of pulses required for the laser cleaning is almost constant even though the laser fluence increases in the ineffective zone. Moreover, surface roughness, porosity and moisture content of mortar samples have influence on the laser cleaning process. The effect of these parameters become however negligible at the high level of laser fluence. The number of pulses required for the laser cleaning is low for smooth surface or less porous mortar. Furthermore, the wetness of the samples facilitates the cleaning process.     

Acoustic emission monitoring during laser shock cleaning of silicon wafers

A laser shock cleaning is a new dry cleaning methodology for the effective removal of submicron sized particles from solid surfaces. This technique uses a plasma shock wave produced by laser-induced air breakdown, which has applied to remove nano-scale silica particles from silicon wafer surfaces in this work. In order to characterize the laser shock cleaning process, acoustic waves generated during the shock process are measured in real time by a wide-band microphone and analyzed in the change of process parameters such as laser power density and gas species. It was found that the acoustic intensity is closely correlated with the shock wave intensity. From acoustic analysis, it is seen that acoustic intensity became stronger as incident laser power density increased. In addition, Ar gas has been found to be more effective to enhance the acoustic intensity, which allows higher cleaning performance compared with air or N₂ gas.     

高功率脉冲TEA CO2激光除漆的研究

选用高功率脉冲TEA CO2激光器,对不同颜色不同种类的油漆进行了清洗实验,运用数码照片分析程序计算出清洁率,找出了完全清洗阈值和损伤阈值.实验结果较为清晰地给出了激光输出能量和重复频率对清洗效果的影响.对红色醇酸漆来说,完全清洗阈值为10.37J/cm2,而损伤阈值为11.43 J/cm2;红色金属喷漆的完全清洗阈值为9.66 J/cm2,其损伤阈值达10.37 J/cm2;黄色金属喷漆的完全清洗阈值为10.71 J/cm2,损伤阈值则为11.07 J/cm2.输出能量和重复频率未达指定参数时,激光清洗清洁率则低于100%.     

Laser plasma shockwave cleaning of SiO2 particles on gold film

A Nd:YAG laser (1064 nm) induces optical breakdown of the airborne above the gold-coated K9 glass surface and the created shockwave removes the SiO₂ particles contaminated on the gold films. The laser cleaning efficiency has been characterized by optical microscopy, dark field imaging, ultraviolet-visible-near infrared spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy and the Image-pro software. The relationships between removal ratio and particle position and laser gap distance have been studied in the case of single pulse laser cleaning. The results show that the 1064 nm laser induced plasma shockwave can effectively remove the SiO₂ particles. The removal ratio can reach above 90%. The effects of particle position and laser gap distance on the cleaning efficiency are simulated for the single pulse laser cleaning. The simulated results are consistent with the experimental ones.     

铝合金焊前激光清洗的等离子体光谱在线检测

铝合金焊接技术在工业生产、制造和维修等领域有广泛的应用,焊缝内存在气孔导致焊接质量降低是铝合金焊接技术的常见问题。由于铝合金表面金属氧化物是导致气孔生成的主要来源,对激光清洗过程进行在线检测,不但可以实时分析表面氧化物的清洗状态,而且可以避免基体表面因为过度清洗造成损伤或二次氧化。提出采用激光诱导等离子体光谱(LIBS)在线检测铝合金焊前激光清洗过程,表征清洗后铝合金基体的表面状态。LIBS技术可以对多元素成分同时检测,拥有较低的检出限和较高的准确性。搭建基于Andor Mechelle 5000光谱仪的铝合金焊前激光清洗在线检测系统,剔除空气环境对实验结果的影响,测试6061铝合金表面氧化物和铝合金基体的LIBS光谱,分析两者独特的元素特征谱线,采用X射线能谱(EDS)测试结果验证元素特征谱线的准确性,并探讨激光清洗过程LIBS技术在线检测的可行性。实验测试等离子体光谱谱线强度与激光能量密度之间的关系,获得单次脉冲激光去除铝合金表面氧化物的损伤阈值,结合X射线能谱的检测结果研究激光损伤阈值的成因及影响。研究激光清洗过程等离子体光谱特征谱线与脉冲次数之间的关系,提出基于O/Al特征谱线强度比值作为在线检测清洗效果及二次氧化损伤的评判依据。为验证该评判依据的准确性,将O/Al特征谱线强度比值随清洗次数的变化趋势与X射线能谱测试获得的氧元素原子百分比变化趋势进行对比。实验结果表明:采用200~700 nm范围内激光诱导等离子体谱线特征分析激光清洗状态,可以剔除空气环境的影响;氧元素和铝元素特征谱线准确反映出表面氧化膜与铝合金基体的成分差异;X射线能谱检测元素成分和含量表明氧元素含量随着激光清洗能量密度先减后增,单次清洗铝合金的二次氧化损伤的激光能量阈值为11.46 J·cm-2,小于损伤阈值的激光能量密度对铝合金基体的多次清洗未造成损伤,等离子体光谱特征谱线强度与表面清洗状态相关, 656.5 nm(OⅡ)/396.2 nm(AlⅠ)谱线强度比值≤1.5%为激光清洗干净的依据。研究结果有利于铝合金的激光清洗实时控制技术和焊接装置集成化。