共查询到19条相似文献,搜索用时 48 毫秒
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采用金属有机物化学气相淀积(MOCVD)方法设计并生长了应变多量子阱InGaAs/AlGaAs,并且对其进行了光致发光(PL)谱、双晶X射线衍射(DXRD)谱和电化学C-V等的测试。然后以InGaAs/AlGaAs作为有源层,以GaAs衬底作为透明衬底,p面金属电极AuBe合金作为镜面反射层,采用倒装技术制备了近红外发光二极管(LED)。在输入电流为20mA下的正向电压为1.2V左右,电致发光谱的峰值波长为938nm,10μA下的反向击穿电压为5-6V,在输入电流为50mA下得出输出功率3.5mW,对应电压为1.3V,在输入电流为300mA时得到最大输出功率为12mW。 相似文献
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InGaAs/GaAs应变量子阱激光器MOCVD生长研究 总被引:3,自引:2,他引:1
采用金属有机物化学气相淀积(MOCVD)方法生长了InGaAs/GaAs应变量子阱(QW),通过降低生长温度、提高生长速度以及采用应变缓冲层(SBL)结构,改善了应变QW生长表面质量和器件荧光(PL)谱特性,实验表明,通过优化工艺条件和采用SBL等手段提高了应变QW质量。生长的QW结构用于1054 nm激光器的制作,经测试,器件具有较低的阈值电流和较高的单面斜率效率,性能较好。 相似文献
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采用金属有机物化学气相淀积(MOCVD)技术,在蓝宝石衬底上生长了Al0.48Ga0.52N/Al0.54Ga0.36N多量子阱(MQWs)结构。通过双晶X射线衍射(DCXRD)、原子力显微镜(AFM)和阴极荧光(CL)等测试技术,分别对样品的结构和光学特性进行了表征。在DCXRD图谱中,可以观察到明显的MQWs衍射卫星峰,通过拟和,MQWs结构中阱和垒的厚度分别为2.1和9.4nm,Al组分分别为0.48和0.54。在AFM表面形貌图上,可以观察到清晰的台阶流,表明MQWs获得了二维生长;与此同时,MQWs结构存在一些裂缝,主要原因为AlGaNMQWs结构和下层GaN层间存在很大的应力。CL测试表明,AlGaNMQWs结构的发光波长为295nm,处于深紫外波段,同时观察到处于蓝光、绿光波段的缺陷发光。 相似文献
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生长温度对InGaN/GaN多量子阱LED光学特性的影响 总被引:1,自引:0,他引:1
利用低压MOCVD系统,在蓝宝石衬底上外延生长了InGaN/GaN多量子阱蓝紫光LED结构材料.研究了生长温度对有源层InGaN/GaN多量子阱的合金组分、结晶品质及其发光特性的影响.结果表明当生长温度从730℃升到800℃时,LED的光致发光波长从490nm移到380nm,室温下PL谱发光峰的半高全宽从133meV降到73meV,表明了量子阱结晶性的提高.高温生长时,PL谱中还观察到了GaN的蓝带发光峰,说明量子阱对载流子的限制作用有所减弱.研究表明,通过改变生长温度可以对LED发光波长及有源层InGaN的晶体质量实现良好的控制. 相似文献
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MOCVD生长源流量对p型GaN薄膜特性影响的研究 总被引:1,自引:1,他引:0
利用金属有机物化学气相淀积(MOCVD)技术在蓝宝石衬底上生长p型GaN:Mg薄膜,对不同二茂镁(CP2Mg)流量和Ⅴ族和Ⅲ族摩尔(Ⅴ/Ⅲ)比生长的p型GaN:Mg薄膜特性进行研究。研究表明,增加Ⅴ/Ⅲ比,可以降低螺旋位错密度,提高p型GaN晶体质量。当Ⅴ/Ⅲ比为3 800时,Cp2Mg流量最高为170sccm,获得p型GaN(002)面峰值半高宽(FWHM)最窄为232"。同时研究发现,单纯提高Ⅴ/Ⅲ比对降低刃型位错影响较不明显。 相似文献
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InGaN/GaN多量子阱蓝光LED电学特性研究 总被引:1,自引:0,他引:1
对不同温度(120~363 K)下InGaN/GaN多量子阱(MQW)结构蓝光发光二极管(LED)的电学特性进行了测试与深入的研究.发现对数坐标下I-V特性曲线斜率随温度变化不大.分别用载流子扩散-复合模型和隧道复合模型对其进行计算,发现室温下其理想因子远大于2,并且随着温度的下降而升高;而隧穿能量参数随温度变化不大.这说明传统的扩散-复合载流子输运模型不再适用于InGaN/GaN MQW蓝光LED.分析指出由于晶格失配以及生长工艺的制约,外延层中具有较高的缺陷密度和界面能级密度,导致其主要输运机制为载流子的隧穿. 相似文献
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MOCVD生长高反射率AlN/GaN分布布拉格反射镜 总被引:1,自引:0,他引:1
利用金属有机物化学气相沉积(MOCVD)方法在蓝宝石c面衬底上制备出高反射率AlN/GaN分布布拉格反射镜(DBR).利用分光光度计测量,在418 nm附近最大反射率达到99%.样品表面显微照片显示,有圆弧形缺陷和少量裂纹出现;在缺陷和裂纹以外的区域,DBR具有较为平坦的表面,其粗糙度在10μm×10μm面积上为3.3 m左右.样品的截面扫描电镜(SEM)照片显示,DBR具有良好的周期性.对反射率和表面分析的结果表明,该样品达到了制备GaN基垂直腔面发射激光器(VCSEL)的要求. 相似文献
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InGaN/GaN MQW双波长LED的MOCVD生长 总被引:1,自引:0,他引:1
利用金属有机物化学气相淀积(MOCVD)系统生长了InGaN/GaN多量子阱双波长发光二极管(LED).发现在20 mA正向注入电流下空穴很难输运过蓝光和绿光量子阱间的垒层,这是混合量子阱有源区获得双波长发光的主要障碍.通过掺入一定量的In来降低蓝光和绿光量子阱之间的垒层的势垒高度,增加注入到离p-GaN层较远的绿光有源区的空穴浓度,从而改变蓝光和绿光发光峰的强度比.研究了蓝光和绿光量子阱间垒层In组分对双波长LED的发光性质的影响.此外,研究了双波长LED发光特性随注入电流的变化. 相似文献
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Yu-Zung Chiou Yan-Kuin Su Shoou-Jinn Chang Yi-Chao Lin Chia-Sheng Chang Chin-Hsiang Chen 《Solid-state electronics》2002,46(12):2227-2229
InGaN/GaN multiquantum well (MQW) p–n junction photodetectors with semi-transparent Ni/Au electrodes were fabricated and characterized. It was found that the fabricated InGaN/GaN MQW p–n junction photodetectors exhibit a 20 V breakdown voltage and a 3.5 V forward 20 mA turn on voltage. It was also found that the photocurrent to dark current contrast ratio is higher than 105 when a 0.4 V reverse bias was applied to the InGaN/GaN MQW p–n junction photodetectors. Furthermore, it was found that the maximum responsivity was 1.28 and 1.76 A/W with a 0.1 and 3 V applied reverse bias, respectively. 相似文献
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L. W. Wu S. J. Chang Y. K. Su T. Y. Tsai T. C. Wen C. H. Kuo W. C. Lai J. K. Sheu J. M. Tsai S. C. Chen B. R. Huang 《Journal of Electronic Materials》2003,32(5):411-414
Nitride-based light-emitting diodes (LEDs) with Si-doped n+-In0.23Ga0.77N/GaN short-period superlattice (SPS) tunneling contact top layer were fabricated. It was found that although the measured
specific-contact resistance is around 1 × 10−2 Ω-cm2 for samples with an SPS tunneling contact layer, the measured specific-contact resistance is around 1.5×100 Ω-cm2 for samples without an SPS tunneling contact layer. Furthermore, it was found that one could lower the LED-operation voltage
from 3.75 V to 3.4 V by introducing the SPS structure. It was also found that the LED-operation voltage is almost independent
of the CP2Mg flow rate when we grow the underneath p-type GaN layer. The LED-output intensity was also found to be larger for samples
with the SPS structure. 相似文献
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We have demonstrated the growth of quaternary AIlnGaN compounds at different growth temperatures and pressures with metalorganic chemical vapor deposition (MOCVD). The optical properties of the samples have been investigated by photoluminescence (PL) at different temperatures. The results show that the sample grown at higher temperature (850℃) exhibits the best optical quality for its sharp band edge luminescence and weak yellow luminescence. The AlInGaN exhibited three-dimensional (3D) growth mode at higher pressure. The band edge emission almost disappeared. With the optimization of AlInGaN growth parameters, we replaced the traditional barrier in InGaN/GaN multiple quantum wells (MQWs) with AlInGaN barriers. The peak wavelength for the InGaN/AlInGaN-MQW based light emitting diodes (LEDs) was very stable at various injection current levels because of the polarization-matched InGaN/AlInGaN MQWs. 相似文献
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AlN/GaN high-electron-mobility transistors (HEMTs) on SiC substrates were fabricated by metalorganic chemical vapor deposition (MOCVD) and then characterized. An Si/Ti/Al/Ni/Au stack was used to reduce ohmic contact resistance (0.33 g2.mm) at a low annealing temperature. The fabricated devices exhibited a maximum drain current density of 1.07 A/mm (Vows = I V) and a maximum peak extrinsic transconductance of 340 mS/mm. The off-state breakdown voltage of the device was 64 V with a gate-drain distance of 1.9 μm. The current gain extrinsic cutoff frequency fT and the maximum oscillation frequency fmax were 36 and 80 GHz with a 0.25 μm gate length, respectively. 相似文献
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AlN/GaN high-electron-mobility transistors(HEMTs)on SiC substrates were fabricated by metalorganic chemical vapor deposition(MOCVD)and then characterized.An Si/Ti/Al/Ni/Au stack was used to reduce ohmiccontactresistance(0.33 mm)atalowannealingtemperature.Thefabricateddevicesexhibitedamaximum drain current density of 1.07 A/mm(VGS D1 V)and a maximum peak extrinsic transconductance of 340 mS/mm.The off-state breakdown voltage of the device was 64 V with a gate–drain distance of 1.9 m.The current gain extrinsic cutoff frequency fT and the maximum oscillation frequency fmax were 36 and 80 GHz with a 0.25 m gate length,respectively. 相似文献