激光等离子体极紫外光刻光源

研究并讨论了下一代光刻的核心技术之一—激光等离子体极紫外光刻光源。简要介绍了欧美和日本等国极紫外光刻技术的发展概况,分析了新兴的下一代13.5 nm极紫外光刻光源的现状,特别讨论了国内外激光等离子体极紫外光刻光源的现状,指出目前其存在的主要问题是如何提高光源的转化效率和减少光源的碎屑。文中同时概述了6.x nm（6.5～6.7 nm）极紫外光刻光源的最新研究工作。最后,介绍了作者所在研究小组近年来在极紫外光源和极紫外光刻掩模缺陷检测方面开展的研究工作。     

Widely tunable extreme UV frequency comb generation

Extreme UV (XUV) frequency comb generation in the wavelength range of 51 to 85 nm is reported based on high-order harmonic generation of two consecutive IR frequency comb pulses that were amplified in an optical parametric chirped pulse amplifier. The versatility of the system is demonstrated by recording direct XUV frequency comb excitation signals in He, Ne, and Ar with visibilities of up to 61%.     

脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究

采用波长13.5 nm的极紫外光作为曝光光源的极紫外光刻技术是最有潜力的下一代光刻技术之一, 它是半导体制造实现10 nm及以下节点的关键技术. 获得极紫外辐射的方法中, 激光等离子体光源凭借转换效率高、收集角度大、碎屑产量低等优点而被认为是最有前途的极紫外光源. 本文开展了脉冲TEA-CO₂激光和Nd:YAG激光辐照液滴锡靶产生极紫外辐射的实验, 对极紫外辐射的谱线结构以及辐射的时空分布特性进行了研究.实验发现: 与TEA-CO₂激光相比, 较高功率密度的Nd:YAG激光激发的极紫外辐射谱存在明显的蓝移; 并且激光等离子体光源可以认为是点状光源, 其极紫外辐射强度随空间角度变化近似满足Lambertian分布.     

Conical-wave nonlinear optics: From Raman conversion to extreme UV generation

Conical waves (CW) are a particular class of wavepackets that exhibit the notable feature of being stationary solutions for both linear and nonlinear propagation equations. The possibility of independently tuning the phase and group velocities of a CW is a unique feature that opens the possibility of a number of applications, in particular, we shall consider frequency conversion processes and divide the discussion into two parts: group velocity (GV)-matched and phase-matched nonlinear processes. As a GV-matched process, we consider stimulated raman scattering within optical filaments and we highlight the role of cross-phase modulation in the formation of GV-matched X-wave pulses, leading to high Raman conversion efficiencies and the formation of 15-fs compressed pulses. Conical waves, in particular, pulsed-Bessel beams, are then considered for phase-matching higher-order harmonic generation in the extreme UV region.     

激光等离子体13.5 nm极紫外光刻光源进展

半导体产业是高科技、信息化时代的支柱。光刻技术,作为半导体产业的核心技术之一,已成为世界各国科研人员的重点研究对象。本文综述了激光等离子体13.5 nm极紫外光刻的原理和国内外研究发展概况,重点介绍了其激光源、辐射靶材和多层膜反射镜等关键系统组成部分。同时,指出了在提高激光等离子体13.5 nm极紫外光源输出功率的研究进程中所存在的主要问题,包括提高转换效率和减少光源碎屑。特别分析了目前已实现百瓦级输出的日本Gigaphoton公司和荷兰的ASML公司的极紫外光源装置。最后对该项技术的发展前景进行了总结与展望。     

极端远紫外光刻的等离子体光源及其光学性质研究进展

现代技术的飞速发展需要集成电路不断小型化，因而开发下一代光刻光源以满足小型化的要求成为当前的一项紧迫任务。目前工业界确定的下一代光刻光源是波长为13．5nm的极端远紫外（EUV）光源，它能够把光刻技术扩展到32nm以下的特征尺寸，氙和锑材料的等离子体光源被认为是这种光源的最佳候选者。文章在介绍EUV光刻原理和EUV光源基本概念的基础上，讨论了目前研究得最多、技术最成熟的激光产生的和气体放电产生的等离子体EUV光源，对EUV光源的初步应用进行了简单介绍，并着重对氙和锑材料产生的等离子体发射性质和吸收性质的实验与理论研究进展进行了详细介绍与讨论。目前的理论研究进展表明，统计物理模型还不能很好地预测氙和锑等离子体的发射与吸收光谱，因此迫切需要发展细致能级物理模型，以得到更为精确的等离子体光学性质参数，并用于指导实验设计。提高EUV转换效率。     

极端远紫外光刻的等离子体光源及其光学性质研究进展

现代技术的飞速发展需要集成电路不断小型化,因而开发下一代光刻光源以满足小型化的要求成为当前的一项紧迫任务。目前工业界确定的下一代光刻光源是波长为13.5nm的极端远紫外（EUV）光源,它能够把光刻技术扩展到32nm以下的特征尺寸,氙和锑材料的等离子体光源被认为是这种光源的最佳候选者。文章在介绍EUV光刻原理和EUV光源基本概念的基础上,讨论了目前研究得最多、技术最成熟的激光产生的和气体放电产生的等离子体EUV光源,对EUV光源的初步应用进行了简单介绍,并着重对氙和锑材料产生的等离子体发射性质和吸收性质的实     

等离子体尺寸对放电极紫外光源影响

计算了放电等离子体极紫外光刻光源中,不同等离子体长度条件下的收集效率,实验上研究了等离子体长度对Xe气放电极紫外辐射的影响。结合本系统光学收集系统设计参数和理论计算结果,给出了不同等离子体长度条件下中间焦点处13.5 nm（2%带宽）光功率。结果表明等离子体长度为3~6 mm时毛细管光源中间焦点光功率和尺寸最优。     

Highly efficient single-pass source of pulsed single-mode twin beams of light

We report the realization of a bright ultrafast type II parametric down-conversion source of twin beams free of any spatiotemporal correlations in a periodically poled KTiOPO4 (PP-KTP) waveguide. From a robust, single-pass setup it emits pulsed two-mode squeezed vacuum states: photon-number entangled pairs of single-mode pulses or, in terms of continuous variables quantum optics, pulsed Einstein-Podolsky-Rosen states in the telecom wavelength regime. We verify the single-mode character of our source by measuring Glauber correlation functions g(2) and demonstrate with a pump energy as low as 75 pJ per pump pulse a mean photon number of 2.5.     

Highly-efficient fully-fiberized mid-infrared differential frequency generation source and its application to laser spectroscopy

Widely-tunable, fully-monolithic, mid-infrared (mid-IR) deference frequency generation source (DFG) is presented. By using a custom designed fiber-pigtailed periodically poled lithium niobate (PPLN) crystal module the idler beam was generated with an efficiency of 21%/W, yielding 2.6 mW of optical output power. The proposed all-fiber configuration radically simplified the optical frequency conversion setup, making it robust and easily configurable. The usefulness of the constructed source was verified by performing simultaneous wavelength modulation spectroscopy (WMS) laser trace gas detection of methane, near 2999 cm^?1, and ethane, near 2997 cm^?1, via two independently generated, tunable idler beams.     

Diode-pumped green light source based on intracavity sum frequency generation

We report a continuous-wave (CW) green laser emission by sum-frequency mixing in Nd:YVO₄ and Nd:YLF crystals. Using type-II critical phase-matching (CPM) KTP crystal, a green laser at 539 nm is obtained by 914 and 1313 nm intracavity sum-frequency mixing. The maximum laser output power of 388 mW is obtained when an incident pump laser of 18.2 W is used. At the output power level of 388 mW, the output stability is better than 4.6%.     

An efficient inversion algorithm for atmospheric remote sensing with application to UV limb observations

In this paper we present a retrieval algorithm for atmospheric remote sensing. The algorithm combines Tikhonov regularization and the iteratively regularized Gauss-Newton method and is devoted to the solution of multi-parameter inverse problems with simple bounds on the variables. The basic features of the algorithm: the solution of the bound-constrained minimization problem, the selection of the optimal regularization parameter, the derivation of the global regularization matrix and the characterization of the solution (error analysis) are discussed in detailed. The inversion algorithm is applied to ozone retrieval from SCIAMACHY limb scatter measurements in the ultraviolet spectral range.     

基于强激光辐照固体锡靶产生极紫外光源的实验研究

建立了一套利用高功率YAG激光器辐照固体锡靶产生高转换效率极紫外光 (extreme ultraviolet) 源的实验装置.利用建立的实验装置开展了极紫外光源的强度和转换效率与抽运激光强度关系的实验研究,发现极紫外光源的转换效率随抽运激光强度的变化具有饱和效应.实验发现：当抽运激光能量达到250mJ时,极紫外光源的转换效率最高,波长为13.5nm处0.27nm带宽范围内的极紫外光源的能量转换效率为1.6%,此时对应的激光强度为1.8×10¹¹W/cm². 关键词： 极紫外光 转换效率     

Extreme supercontinuum generation to the deep UV

We report the formation of an ultrabroad supercontinuum down to 280 nm in the deep UV by pumping sharply tapered (5-30 mm taper lengths) solid-core photonic crystal fibers with 130 fs, 2 nJ pulses at 800 nm. The taper moves the point of soliton fission to a position where the core is narrower, a process that requires normal dispersion at the input face of the fiber. We find that the generation of deep-UV radiation is limited by strong two-photon absorption in the silica.     

An extreme ultraviolet radiation source based on plasma heated by millimeter range radiation

An extreme ultraviolet (EUV) radiation source based on a low-pressure discharge sustained in a magnetic trap by high-power electromagnetic radiation at a frequency of 75 GHz is discussed. The experimental radiation power in the wavelength range of 13.5 nm ±1% was as high as 50 W. The conversion of microwave radiation into EUV radiation was about 1%.     

Demonstration of fiber pulsed light source at 1.6 μm with adjustable pulse duration

A novel practical 1.66-μm pulse light source with adjustable pulse duration is proposed. A 2.5-km Raman fiber is placed into a ring type Q-switched erbium-doped fiber laser (Q-EDFL), serving as both delay line fiber and Raman gain medium so that in addition to the wavelength shifted to 1.6μm, the pulse duration and the buildup time can be relatively extended. By properly controlling the fall edge of the acousto-optic switch (AOS), the pulse duration of 30-345 ns for ～ 770-Hz repetition frequency with power of 1-1.6 W is achieved.     

The efficient generation of tunable near UV radiation using a N2 pumped dye laser

Power tuning curves are presented for a variety of dyes which lase, under nitrogen laser excitation, within the wavelength range 3600–4500 Å. These curves may be used to determine the best choice of dye to generate radiation at any given wavelength within this interval.