硅微机械陀螺仪的机电接口模型分析

建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响.结果表明,合理的接口电路不仅消除了大部分的寄生电容的影响,而且减小了信号的衰减幅度,抑制了大部分的耦合信号和噪声信号.最后对接口电路进行了改进,除了保留以上的一些优点外,还减小了载波信号的变化和电源变化对电容分辨率的影响,提高了整个电路的分辨率.     

基于电容检测接口ASIC的闭环微机械加速度计

对于采用微传感器和接口ASIC两芯片方案来实现的电容式微机械加速度计来说,寄生电容是影响其性能的重要因素之一。采用采样电荷结构,设计实现了电容检测接口ASIC电路,该电路具有对寄生电容不敏感的特点,并在0.35-μm CMOS标准工艺下流片实现。基于流片得到的电容检测ASIC样片,以梳齿式硅微传感器为敏感元件,采用滞后比例积分调节器,通过力平衡反馈方案设计实现了一种闭环微机械加速度计。实验结果表明:该闭环微加速度计的灵敏度为650 mV/g,噪声基底为23.17μg Hz。     

电容式微机械陀螺敏感信号采样检测

驱动轴与敏感轴的刚度耦合是硅微陀螺的机械耦合干扰是主要因素.敏感方向的电容对所有间隙变化进行检测,机械耦合造成了虚假的敏感信号输出,这种输出也会带来后续放大器的饱和问题.以往诸多相关检测方法,将敏感信号与耦合干扰一起送入乘法器.使有用的敏感信号的最后提取产生困难.文中分析指出存在干扰影响最小的可供对敏感信号采样时刻.这个采样时刻靠近敏感信号的峰值点.用取样积分的方法可以进一步提高信噪比.驱动电压也对敏感信号存在严重的干扰,因此使用了在采样时关断驱动信号的方法去除这种电气干扰.两方法结合减少了机械耦合干扰和电气耦合干扰,减少了系统误差.     

双输入轴微机械陀螺仪的研究与进展

微机械陀螺仪是微机电系统（MEMS）研究的重要内容。双输入轴微机械陀螺仪可最大限度地发挥微结构的固有功能并实现最低成本。本综合了国内外在这方面的主要研究报道，概述各自的结构、工艺、测试和性能特点，以展示双输入轴微机械陀螺仪的发展历史与研究现状。     

基于双通道解调相位校准技术的MEMS陀螺仪接口电路芯片

MEMS陀螺仪传感器件的机械正交误差信号会造成陀螺仪灵敏度、偏置稳定性等系统关键性能下降,甚至使陀螺仪工作失效。同步解调可以有效消除机械正交误差信号,但需要精准控制校准相位。设计了一款基于双通道解调相位校准技术的陀螺仪接口电路芯片,采用0.35μm CMOS工艺。芯片检测通路中设计了中心频率可调的开关电容型带通滤波器,用模拟方式粗调相位误差,并消除低频振动噪声与高频耦合噪声;解调信号产生通路中设计了可调相移分频器,用数字方式精调相位误差。实验结果表明,本芯片的相位校准精度要明显高于仅采用数字相位校准技术的对比芯片,并且将系统噪声降低了一个数量级以上,偏置稳定性性能也从100(°)/h提高到了6(°)/h。     

硅微机械谐振陀螺仪的非线性分析

给出了硅微机械谐振陀螺仪的结构,介绍了硅微机械谐振陀螺仪的工作原理,详细推导并给出了陀螺仪的输出频率和标度因数非线性的计算公式;基于影响谐振陀螺仪标度因数的参数,分析了由谐振器的振幅和梳齿静电驱动力引起的硅微机械谐振陀螺仪的非线性特性,给出了振动幅度与谐振频率关系的表达式.实验结果表明,陀螺仪的整体性能主要取决于谐振器振动幅度的稳定性.     

硅微机械谐振式陀螺仪

介绍了硅微机械谐振式陀螺仪的工作原理，给出了硅微机械谐振式陀螺仪的动力学方程详尽推导。针对此方程进行仿真研究，对结构设计参数进行了估计。研究表明，硅微机械谐振式陀螺仪是一种很有发展前途的新型陀螺仪。     

振动轮式硅微陀螺仪检测轴的闭环特性

研究了振动轮式硅微陀螺仪敏感结构的谐振特性,重点进行了检测轴的闭环控制系统分析和测试。通过对不同气压条件下检测轴谐振特性的研究及驱动轴和检测轴谐振频率匹配的试验,分析了静电力反馈控制系统中的变刚度问题,进行了硅微陀螺仪检测轴的闭环控制系统设计,给出了检测轴闭环控制系统的原理框图和传递函数,同时分析了闭环条件下驱动轴回路和检测轴回路各部分的相位关系以及正交分量的消除方法。试验结果表明闲环控制提高了硅微陀螺仪的精度指标。     

硅微机械陀螺仪的新进展及其方案分析

介绍了国外硅微机械陀螺仪的新进展，综述了梳状驱动振动陀螺仪、压电棒式振动陀螺仪、电磁驱动音叉陀螺仪、振环陀螺仪、静电悬浮转于陀螺仗和微机械加速度计陀螺仪的结构、原理及性能。关键词     

微机械陀螺仪的研制现状

介绍了当前国内外微机械陀螺仪的研制现状，阐述了微机械陀螺仪的两种典型结构，指出了微机械陀螺仪的发展方向。微机械陀螺仪正朝着小型化和低成本方向发展，将会在集成式导航系统和运动控制系统中大量使用。     

Tuning of a vibration absorber with shunted piezoelectric transducers

In order to reduce structural vibrations in narrow frequency bands, tuned mass absorbers can be an appropriate measure. A quite similar approach which makes use of applied piezoelectric elements, instead of additional oscillating masses, are the well-known resonant shunts, consisting of resistances, inductances, and possibly negative capacitances connected to the piezoelectric element. This paper presents a combined approach, which is based on a conventional tuned mass absorber, but whose characteristics can be strongly influenced by applying shunted piezoceramics. Simulations and experimental analyses are shown to be very effective in predicting the behavior of such electromechanical systems. The vibration level of the absorber can be strongly attenuated by applying different combinations of resistant, resonant, and negative capacitance shunt circuits. The damping characteristics of the absorber can be changed by applying a purely resistive or resonant resistant shunt. Additionally, the tuning frequency of the absorber can be adapted to the excitation frequency, using a negative capacitance shunt circuit, which requires only the energy to supply the electric components.     

电流比较仪电桥在静电陀螺转子位移测量中的应用

用耦合电感原理研究了电流比较仪电桥非平衡测量的原理及特性,导出了在不同激励信号(电压或电流)和不同输出信号(电压或电流)情况下电桥测量输出的表达式,并据此提出了现有静电陀螺转子位移测量电路的改进措施.研究表明,采用电流输出模式时,变压器的电感大小对检测结果没有影响,且能消除后续电路输入端寄生电容的影响;电流激励、电流输出模式具有最好的综合性能,但高精度交流恒流源的实现较为困难;电压激励、电流输出模式兼具两者的优点,是比较仪电桥较为理想的工作模式.     

Periodic set of limited electrically permeable interface cracks with contact zones

Plane problem for an infinite space composed of two different piezoelectric or piezoelectric/dielectric semi-infinite spaces with a periodic set of limited electrically permeable interface cracks is considered. Uniformly distributed electromechanical loading is applied at infinity. The frictionless contact zones at the crack tips are taken into account. The problem is reduced to the combined Dirichlet–Riemann boundary value problem by means of the electromechanical factors presentation via sectionally analytic functions, assuming that the electric flux is uniformly distributed inside the cracks. An exact solution of the problem is proposed. It permits to find in a closed form all necessary electromechanical characteristics at the interface and to formulate the equation for the determination of the electric flux value. Analysis of this equation confirms the correctness of the assumption concerning the uniform distribution of the electric flux in the crack region.Formulae for stresses, electric displacement vector, elastic displacements and electric potential jump at the interface as well as the intensity factors at the crack tips are given. Equation for the contact zone length determination is presented. Calculations for certain material combinations are carried out. The influence of electric permeability of cracks on electromechanical fields and the fracture mechanical parameters is analyzed.     

Anti-plane time-harmonic Green's functions for a circular inhomogeneity in piezoelectric medium with a spring- or membrane-type interface

The present work focuses on the two-dimensional anti-plane time-harmonic dynamic Green's functions for a circular inhomogeneity immersed in an infinite matrix with an imperfect interface, where both the inhomogeneity and matrix are assumed to be piezoelectric and transversely isotropic. Two types of imperfect interface, the spring-type interface with electromechanical coupling and the membrane-type interface, are considered. The former type is often used to model the electromechanical damage along the interface while the latter is largely employed to simulate surface/interface effect of nano-sized inhomogeneity. By using the Bessel function expansions, explicit solutions for the electromechanical fields induced by a time-harmonic anti-plane line force and line charge located in an unbounded matrix as well as the circular inhomogeneity are respectively derived. The present solutions can recover the anti-plane Green's functions for some special cases, such as the dynamic or quasi-static Green's functions of piezoelectricity with perfect interface as well as the dynamic or quasi-static Green's functions of pure elasticity with imperfect interface. For detailed discussions, selected analytical results are presented. Dependence of the electromechanical fields on circular frequency as well as interface properties is examined. The size effect related to interfacial imperfection is also discussed.     

基于等效电路法的变三角截面驰振压电能量收集研究

随着能源危机的逐渐加剧,人们对压电俘能器研究的投入也与日俱增,目前常见的研究压电俘能器的模拟方法只能研究其接入简单的单一电阻负载电路时的性能,且不能解决压电俘能器的高强度直流电路耦合问题。因此,本文借助二阶范德波尔控制方程将压电俘能器的主要部件等效为电子元件,进而基于等效电路法建立了与变三角截面驰振压电振动俘能器相对应的等效电路模型。借助风洞实验验证了所建立的等效电路模型的准确性。采用该模型研究了外接电路,钝体顶角,外接电阻和来流速度对变三角截面驰振压电俘能器输出电压,输出功率和响应位移的影响,结果表明,随着电阻的增大,输出电压逐渐增大且增长率逐渐减小。交直流电路的最佳负载分别为1.05 MΩ和1.4 MΩ,当风速为7.03 m/s,钝体顶角为90°时,交直流电路输出电压和输出功率的峰值分别为41.34 V,0.974 mW和50.8 V,0.616 mW。随着钝体顶角的增大,输出电压,输出功率和响应位移均逐渐增大且增大的速度逐渐减小。等效电路模型可以高效,准确地对不同结构参数下和外界电路下的压电振动俘能器的输出功率,输出电压,响应位移及其影响因素进行研究,所提出的等效电路模型于加快对压电振动俘能器的研究与推广应用具有一定意义。     

悬臂梁挠曲电俘能器的力电耦合模型及性能分析

挠曲电效应指应变梯度在电介质中引起的电极化现象,是一种普遍存在的力电耦合行为。应变梯度与材料的尺寸成反比,因此挠曲电效应有望在纳米尺度主导材料的物理性质,尤其是力电耦合性能。本文建立了悬臂梁挠曲电俘能器的理论模型,基于哈密顿原理得到了悬臂梁挠曲电俘能器的控制方程和相应的边界条件;进一步,得到了悬臂梁挠曲电俘能器的输出电压频率响应和功率密度频率响应随悬臂梁的振动频率、外电路阻抗、挠曲电层厚度以及弹性层模量的变化规律。聚偏氟乙烯和环氧树脂层合挠曲电悬臂梁俘能器模型的数值结果表明输出电压频率响应和功率密度频率响应在共振频率点取得最大值,且随着各阶模态对应的共振频率的增加悬臂梁挠曲电俘能器的输出电压和功率密度均增加。此外,计算结果还表明悬臂梁俘能器存在最佳匹配阻抗,在匹配阻抗附近悬臂梁俘能器的输出功率密度随挠曲电层厚度的减小而增大,表现出明显的尺寸效应。本文工作提供了一种基于挠曲电效应的悬臂梁俘能器的理论模型,为悬臂梁俘能器的设计提供了理论依据。     

压电层合圆板传感器的非线性静力耦合分析

本文基于von Karman薄板非线性理论，压电基本方程和经典层合板理论，对上，下表面粘有压电传感膜层的圆薄板压力传感器的力-电耦合特性进行了定理分析。首先，针对压电层合圆板传感器件建立了考虑几何非线性变形的力-意耦合模型。给出了压电薄膜层感应电量的计算公式；然后，采用级数解法进行了求解，得到了非线性静力耦合问题的幂级数精确解，给出了传感器静态测量过程中所关心的压力-电量特征曲线和中心挠度，电量特征曲线；同时，定量讨论了压电二次效应对感应电量和层合结构中心挠度的影响。通过所得结果，在压电式压力传感器设计中，为采用电信号直接输出有关结构的变形和外界载荷等待测参量提供了依据。     

悬臂梁挠曲电俘能器的力电耦合模型及性能分析

挠曲电效应指应变梯度在电介质中引起的电极化现象，是一种普遍存在的力电耦合行为。应变梯度与材料的尺寸成反比，因此挠曲电效应有望在纳米尺度主导材料的物理性质，尤其是力电耦合性能。本文建立了悬臂梁挠曲电俘能器的理论模型，基于哈密顿原理得到了悬臂梁挠曲电俘能器的控制方程和相应的边界条件；进一步，得到了悬臂梁挠曲电俘能器的输出电压频率响应和功率密度频率响应随悬臂梁的振动频率、外电路阻抗、挠曲电层厚度以及弹性层模量的变化规律。聚偏氟乙烯和环氧树脂层合挠曲电悬臂梁俘能器模型的数值结果表明输出电压频率响应和功率密度频率响应在共振频率点取得最大值，且随着各阶模态对应的共振频率的增加悬臂梁挠曲电俘能器的输出电压和功率密度均增加。此外，计算结果还表明悬臂梁俘能器存在最佳匹配阻抗，在匹配阻抗附近悬臂梁俘能器的输出功率密度随挠曲电层厚度的减小而增大，表现出明显的尺寸效应。本文工作提供了一种基于挠曲电效应的悬臂梁俘能器的理论模型，为悬臂梁俘能器的设计提供了理论依据。     

MESO-MECHANICAL ANALYSIS OF SHAPE MEMORY ALLOY REINFORCED SMART STRUCTURE WITH DAMAGE

The mechanical behaviors of shape memory alloy (SMA) wires reinforced smart structure with damage were analyzed through the variational principle, a governing equation for the structure was derived, mathematical expressions for the meso-displacement field, stress-strain field of typical element with damage were presented, and a failure criterion for interface failure between SMA wires and matrix was established under two kinds of actuation which are dead-load and temperature, where the temperature is included in effective free restoring strain. In addition, there are some other composing factors in the failure criterion such as the interface properties, dynamical properties of SMA, initial debonding length L-l etc. The results are significant to understand structural strength self-adapted control and failure mechanism of SMA wires reinforced smart structure with damage.