Oxidation temperature dependent optical properties of bismuth oxide thin films: Effect of vapour chopping and air exposure

The optical properties of vapour chopped and nonchopped bismuth oxide thin films of two thicknesses 1500 Å and 2000 Å have been studied. The films were prepared by thermal oxidation in air; of vacuum evaporated vapour chopped and nonchopped bismuth thin films. As revealed by XRD studies, multiphase and polycrystalline bismuth oxide thin films were obtained. The refractive index was found to increase with the thickness and exposure to air for 40 days. The vapour chopped films showed higher refractive index, band gap and lower grain size than those of nonchopped films. The films showed high transmittance in the visible spectrum. The ageing effect on the vapour chopped films was found low.     

Oxidation temperature dependent properties of MgO thin film on alumina

The magnesium oxide thin films were prepared by thermal oxidation (in air) of vacuum evaporated magnesium thin film on alumina. It was found that oxidation temperature (623 K, 675 K and 723 K) and thickness (103 nm and 546 nm) dependent effects were prominently manifested in the surface morphology. Electrical and microwave properties (8-12 GHz) of the MgO thin films were also carried out. X-ray diffraction showed orientation along (2 0 0) and (2 2 0) directions. Flowerlike morphology was observed from SEM and flake like morphology for films of higher thickness oxidized at higher temperatures. The magnesium oxide thin film showed NTC behavior. Microwave transmittance was found to increase with increase in oxidation temperature but was lower than alumina. Frequency and oxidation temperature dependent microwave permittivity was obtained. The microwave dielectric constant varied in the range 8.3-15.3.     

Fabrication and characterization of polyethylene terephatate optical waveguides

In this paper, the fabrication and characterization of polyethylene terephatate (PET) thin film integrated optical waveguide is presented. Dip-coating technique has been used to fabricate the optical waveguide using PET. Various waveguide properties, such as mode effective refractive index, optical loss, dispersion and waveguide thickness as a function of temperature of waveguides have been reported. The optical loss are found to be <1 dB cm^–1.     

Plasma-based sputtering of indium tin oxide for the application of photovoltaic cells

Transparent and conducting indium tin oxide (ITO) thin films were deposited on soda lime glass substrates by RF plasma magnetron sputtering at room temperature. The effect of thickness (100, 200 and 300?nm) on the physical (structural, optical, electrical) properties of ITO thin films was investigated systematically. It is observed that with an increase in thickness, the X-ray diffraction data indicate polycrystalline films with grain orientations predominantly along (222) and (400) directions; the average grain size increases from 10 to 30?nm; the optical band gap increases from 3.68 to 3.73?eV and the transmission decrease from 80% to 70% . Four-point probes show a low resistivity (2.4×10^?5?Ω?cm) values for film with a thickness 300?nm. Present work shows that the ITO is a promising transparent conductive oxide material for the solar cell application.     

Adhesion and stress of magnesium oxide thin films: Effect of thickness, oxidation temperature and duration

Nanoscale magnesium oxide thin films have been deposited on glass substrate by thermal oxidation (in air) of vacuum evaporated magnesium films. X-ray diffraction (XRD) showed orientation along (2 0 0) and (2 2 0) directions. The mechanical properties of the MgO thin films were found to be the function of thickness (300, 450 and 600 nm), oxidation temperature (573, 623 and 673 K) and oxidation duration (90 and 180 min). As oxidation temperature and oxidation duration increases, adhesion and intrinsic stress were found to increase. Intrinsic stress decreased whereas adhesion increased due to increase in thin film thickness. The value of intrinsic stress was in range 28.902-73.212 (×10⁷ N/m²) and that of adhesion was 12.1-27.4 (×10⁴ N/m²) for the thin film of thickness 300 nm.     

Analysis and design of optically transparent antenna on photonic band gap structures

An optically transparent microstrip patch antenna is designed on photonic bandgap structures and its radiation characteristics are computed and analyzed in the visible spectrum region. The proposed antenna consists of indium tin oxide, a transparent conducting material used both as a radiating patch and a ground plane separated by the 5 μm thin glass substrate. The introduction of periodic cylindrical air cavity structures in the glass substrate leads to the formation of photonic band gap. The patch thickness is carefully selected based on the analysis of the optical transmission coefficient with respect to patch thickness. The effective dielectric constant of the photonic band gap loaded glass substrate is computed using the effective medium approach. The refractive index of the proposed antenna is presented and discussed. The radiation efficiency of the antenna is shown to improve significantly due to insertion of proposed photonic band gap structures. The proposed design has yielded a bandwidth of 2–2.3 THz for a return loss (S₁₁) of less than −15dB and achieved a peak gain of 4.97dB at 2.27 THz.     

Thickness dependence of structural, electrical and optical properties of indium tin oxide (ITO) films deposited on PET substrates

Without intentionally heating the substrates, indium tin oxide (ITO) thin films of thicknesses from 72 nm to 447 nm were prepared on polyethylene terephthalate (PET) substrates by DC reactively magnetron sputtering with pre-deposition substrate surfaces plasma cleaning. The dependence of structural, electrical, and optical properties on the films thickness were systematically investigated. It was found that the crystal grain size increases, while the transmittance, the resistivity, and the sheet resistance decreases as the film thickness was increasing. The thickest film (∼447 nm) was found of the lowest sheet resistance 12.6 Ω/square, and its average optical transmittance (400-800 nm) and the 550 nm transmittance was 85.2% and 90.4%, respectively. The results indicate clearly that dependence of the structural, electrical, and optical properties of the films on the film thickness reflected the improvement of the film crystallinity with the film thickness.     

新型杂萘联苯型聚芳醚砜硐聚合物光子材料成膜和光学特性

对新型聚合物光子材料杂萘联苯型聚芳醚砜硐(PPESK)波导薄膜的成膜工艺进行了系统的研究。分析了溶剂吸水性对成膜质量的影响,并通过氮气保护的方法获得了具有良好均一性的波导薄膜,其厚度一致性可优于1%,折射率一致性优于0.03%。采用棱镜耦合技术测量分析了PPESK波导薄膜的折射率、双折射、热光系数等光学特性,测量得到该材料在1310 nm波长处的损耗小于0.24 dB/cm,在1550 nm波长处的损耗小于0.52 dB/cm,表明该材料是一类性能良好的聚合物光子材料。     

Optical properties of polymer poly(phthalazinone ether sulfone ketone) film waveguide

The optical properties of novel polymer poly(phthalazinone ether sulfone ketone, PPESK) film waveguide are studied by prism coupler. The optical properties of PPESK-8020, including refractive index, birefringence, thermo-optical coefficient and optical loss, are demonstrated. This kind of material has the advantages of low optical loss (less than 0.24 dB/cm at 1310 nm and 0.52 dB/cm at 1550 nm) and high thermal stability (1% weight loss temperature: 488 ℃). Due to these excellent properties, it may have great potential in optical waveguide applications.     

Long range surface plasmon polariton waveguides at 1.31 and 1.55 μm wavelengths

We investigate characteristics of gold metal strip waveguides based on long range surface plasmon polaritons (LRSPPs) along thin metal strips embedded in a polymer for practical applications at the telecommunication wavelengths of 1.31 and 1.55 μm. Guiding properties of the gold strip waveguides are theoretically and experimentally evaluated with the limited thickness and width up to ∼20 nm and ∼10 μm, respectively. The lowest propagation loss of ∼1.4 dB/cm is obtained with a 14.5-nm-thick and 2-μm-wide gold strip at 1.55 μm. With a single-mode fiber, the lowest coupling loss of ∼0.4 dB/facet is achieved with a 14.5-nm-thick and 5-μm-wide gold strip at 1.55 μm. The lowest insertion losses are obtained 8-9 dB with 1.5 cm-long gold strips of a limited thickness and width at both the wavelengths. We demonstrate a 10 Gbps optical signal transmission via the LRSPP waveguide with a 14 nm-thick, 2.5 μm-wide, and 4 cm-long gold strip. These LRSPP waveguides have potential applications for optical interconnects and communications.     

溶胶-凝胶法制备SiO2-TiO2平板光波导工艺研究

采用溶胶-凝胶法制备了SiO₂-TiO₂平板光波导,计算了平板光波导通光条件,分析了硅/钛溶胶-凝胶材料的热性能,观测了平板光波导的结构形貌,并测试了其通光损耗。结果表明：经过200℃,30 min干燥处理的凝胶薄膜呈疏松多孔状态,对于非对称平板波导,存在芯层通光截止厚度,而且当SiO₂-TiO₂芯层厚度为0.5 μm时,SiO₂下包层厚度至少有6 μm才能防止1550 nm波长光泄露入单晶硅衬底中。制备的光波导对于1550 nm波长光传输损耗最小值为0.34 dB/cm。     

Effects of annealing on properties of ZnO thin films prepared by electrochemical deposition in chloride medium

The development of cost-effective and low-temperature synthesis techniques for the growth of high-quality zinc oxide thin films is paramount for fabrication of ZnO-based optoelectronic devices, especially ultraviolet (UV)-light-emitting diodes, lasers and detectors. We demonstrate that the properties, especially UV emission, observed at room temperature, of electrodeposited ZnO thin films from chloride medium (at 70 °C) on fluor-doped tin oxide (FTO) substrates is strongly influenced by the post-growth thermal annealing treatments. X-ray diffraction (XRD) measurements show that the films have preferably grown along (0 0 2) direction. Thermal annealing in the temperature range of 150-400 °C in air has been carried out for these ZnO thin films. The as-grown films contain chlorine which is partially removed after annealing at 400 °C. Morphological changes upon annealing are discussed in the light of compositional changes observed in the ZnO crystals that constitute the film. The optical quality of ZnO thin films was improved after post-deposition thermal treatment at 150 °C and 400 °C in our experiments due to the reducing of defects levels and of chlorine content. The transmission and absorption spectra become steeper and the optical bandgap red shifted to the single-crystal value. These findings demonstrate that electrodeposition have potential for the growth of high-quality ZnO thin films with reduced defects for device applications.     

Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Experiments were conducted using pulse magnetron sputtering (PMS) to deposit transparent conducting indium tin oxide (ITO) thin film onto flexible polyethersulfone (PES) plastic substrates. The thin film microstructure, optoelectronic and residual stress were analyzed using the modulating PMS power, work pressure, pulse frequency, duty cycle and cycle time process parameters. The residual stress of the thin film was determined by scanning electron microscopy (SEM) combined with the Sony equation. The experimental results show that PMS has a lower process temperature, higher deposition rate and lower resistivity compared with the radio frequency process at the same output power. The duty cycle increase produces the optimum optoelectronic characteristics. When the pressure, power, duty cycle and sputter time are increased, the thin film stress will also increase, causing flexural distortion in the PES plastic substrate. When the deposition thickness reaches 1.5 μm, ITO thin film will appear with a distinct split. Under 5 mtorr work pressure, 60 W power, 33 μs duty time and 2 μs pulse reverse time at duty cycle 95%, thin film with an optimized electrical 3.0 × 10⁻⁴ Ω-cm, RMS surface roughness of 0.85 nm and visible region optical transmittance will be achieved with acquisition of over 85%.     

Polarisation-insensitive strip-loaded waveguide for electro-optic modulators and switches

A polarisation-insensitive electro-optic (EO) waveguide consisting of a dye-doped TiO₂/SiO₂ slab and a SU-8 strip-loaded rib is designed and fabricated. By optimizing the refractive index and size of waveguide, a trade-off between polarisation-insensitive condition and large EO efficiency (optical field interaction with the EO material) is obtained. The average transmission loss of the waveguide is less than 2.0 dB/cm. A Mach-Zehnder (M-Z) interferometer intensity modulator based on this waveguide with excellent poling stability is fabricated and measured, exhibiting 7 V half-wave voltage with 1.8 cm EO interaction length and 2.7 cm total length. This strip-loaded structure is proved to be a valuable application in EO modulators and switches.     

Effect of thickness on structural, optical and electrical properties of nanostructured ZnO thin films by spray pyrolysis

Transparent conducting zinc oxide thin films were prepared by spray pyrolytic decomposition of zinc acetate onto glass substrates with different thickness. The crystallographic structure of the films was studied by X-ray diffraction (XRD). XRD measurement showed that the films were crystallized in the wurtzite phase type. The grain size, lattice constants and strain in films were calculated. The grain size increases with thickness. The studies on the optical properties show that the direct band gap value increases from 3.15 to 3.24 eV when the thickness varies from 600 to 2350 nm. The temperature dependence of the electrical conductivity during the heat treatment was studied. It was observed that heat treatment improve the electrical conductivity of the ZnO thin films. The conductivity was found to increase with film thickness.     

Oxidation of Zn in UHV environment at low temperature

Thermal oxidation of polycrystalline Zn foils at 5 × 10⁻⁷ Torr oxygen pressure and at room temperature, 50 °C, 70 °C, 90 °C and 110 °C was studied. In situ photoemission spectroscopy using synchrotron light with photon energy of 57 eV was used to monitor the formation of ZnO and to determine the thickness of the oxide overlayer. At the initial oxidation, the oxidation rate follows a two-stage logarithmic equation and later trends to saturate at a certain thickness depending on the oxidation temperature. The saturated thickness was found to increase with the oxidation temperature. The two-stage oxidation process may be governed by two kinds of space charge presumably formed in the thin oxide overlayer.     

Molecular dynamics and experimental studies on deposition mechanisms of ion beam sputtering

Molecular dynamics (MD) simulation and experimental methods are used to study the deposition mechanism of ionic beam sputtering (IBS), including the effects of incident energy, incident angle and deposition temperature on the growth process of nickel nanofilms. According to the simulation, the results showed that increasing the temperature of substrate decreases the surface roughness, average grain size and density. Increasing the incident angle increases the surface roughness and the average grain size of thin film, while decreasing its density. In addition, increasing the incident energy decreases the surface roughness and the average grain size of thin film, while increasing its density. For the cases of simulation, with the substrate temperature of 500 K, normal incident angle and 14.6 × 10⁻¹⁷ J are appropriate, in order to obtain a smoother surface, a small grain size and a higher density of thin film. From the experimental results, the surface roughness of thin film deposited on the substrates of Si(1 0 0) and indium tin oxide (ITO) decreases with the increasing sputtering power, while the thickness of thin film shows an approximately linear increase with the increase of sputtering power.     

Fabrication of ultralow-loss Si/SiO(2) waveguides by roughness reduction

We demonstrate 0.8-dB/cm transmission loss for a single-mode, strip Si/SiO(2) waveguide with submicrometer cross-sectional dimensions. We compare the conventional waveguide-fabrication method with two smoothing technologies that we have developed, oxidation smoothing and anisotropic etching. We observe significant reduction of sidewall roughness with our smoothing technologies, which directly results in reduced scattering losses. The rapid increase in the scattering losses as the waveguide dimension is miniaturized, as seen in conventionally fabricated waveguides, is effectively suppressed in the waveguides made with our smoothing technologies. In the oxidation smoothing case, the loss is reduced from 32 dB/cm for the conventional fabrication method to 0.8 dB/cm for the single-mode waveguide width of 0.5 microm . This is to our knowledge the smallest reported loss for a high-index-difference system such as a Si/SiO(2) strip waveguide.     

Boron doped ZnO thin films fabricated by RF-magnetron sputtering

By using the radio frequency-magnetron sputtering (RF-MS) method, both pure ZnO and boron doped ZnO (ZnO:B) thin films were deposited on glass substrates at ambient temperature and then annealed at 450 °C for 2 h in air. It is found that both ZnO and ZnO:B thin films have wurtzite structure of ZnO with (0 0 2) preferred orientation and high average optical transmission (≥80%). Compared with the resistivity of 6.3 × 10² Ω cm for ZnO film, both as-deposited and annealed ZnO:B films exhibit much lower resistivity of 9.2 × 10⁻³ Ω cm and 7.5 × 10⁻³ Ω cm, respectively, due to increase in the carrier concentration. Furthermore, the optical band gaps of 3.38 eV and 3.42 eV for as-deposited and annealed ZnO:B films are broader than that of 3.35 eV for ZnO film. The first-principles calculations show that in ZnO:B thin films not only the band gap becomes narrower but also the Fermi level shifts up into the conduction band with respect to the pure ZnO film. These are consistent with their lower resistivities and suggest that in the process of annealing some substituted B in the lattice change into interstitial B because of its smaller ion radius and this transformation widens the optical band gap of ZnO:B thin film.     

Preparation and study on radar-absorbing materials of cupric oxide-nanowire-covered carbon fibers

This paper firstly reports that cupric oxide nanowires (CNWs) were synthesized by thermal oxidation of copper coated carbon fibers (Cu/CFs). The results of transmission electron microscope images indicate that the nanowires are about 50 nm in diameter and several microns in length. The optimum growth conditions of the nanowires are found when the film of Cu/CFs is annealed at 400 °C for 4 h in air. The results show that the reflectivity of cupric oxide-nanowire-covered carbon fibers (1-1.3 mm in thickness) is less than −4 dB over the range of 8.6-18 GHz. Furthermore, the possible growth mechanism of CNWs is discussed.