Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

A comparison of experimental and simulated propagators in porous media using confocal laser scanning microscopy, lattice Boltzmann hydrodynamic simulations and nuclear magnetic resonance

Confocal laser scanning microscopy has been used to obtain 3D optical image stacks of packings of glass ballotini in various fluorescent dye-containing fluids inside a 3D micromodel. The fluids' refractive index was matched to that of the glass ballotini so that clear images at an appreciable depth (approximately 400 microm) inside the packings were obtained. The lattice Boltzmann method was then used to produce 3D velocity fields through the 3D image stacks of the packed ballotini. These have been used in conjunction with a stochastic random-walk algorithm to produce simulated displacement propagators, which have been shown to be in qualitative agreement with experimental propagators, obtained using nuclear magnetic resonance, of water flowing through the exact same micromodel.     

Threshold effect in femtosecond laser induced nanograting formation in glass: influence of the pulse duration

Recently, femtosecond laser direct writing in porous glass is emerging as a powerful technique for building arbitrary 3D hollow micro/nanostructures in bulk glass materials. In this study, we investigate the pulse duration dependence of laser intensity window for inducing a single nanocrack inside porous glass by femtosecond laser direct writing. We find that the window for a single nanocrack increases with the pulse duration, while the roughness of side walls in the nanocracks becomes higher for pulses longer than ~300 fs. When the femtosecond laser pulses of an optimized duration of ~200 fs are chosen, a sufficiently broad range of laser intensity (~44 % of the structuring threshold) for creating a single nanocrack can be obtained, while smooth sidewalls required by nanofluidic applications can still be maintained. The reported results will be beneficial not only for the development of the 3D femtosecond laser micro/nanostructuring techniques, but also for gaining a deeper understanding of the physical mechanism behind the nanograting formation induced by femtosecond laser irradiation in glass and other transparent materials.     

Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Femtosecond laser application for high capacity optical data storage

A femtosecond (fs) laser application for multi-layer optical recording is investigated. Information patterns at different layer depths were written inside a transparent glass substrate due to micro-void formation by fs laser ablation, which causes re-distribution in glass materials and a refractive index modification. The information bits recorded in a single layer can be retrieved clearly without interference from the neighboring layers. A fs laser irradiation of a transparent polymer matrix (doped with fluorescent materials for use as low-cost recording media) is also studied. A fs laser induced photo-chemical reaction changes the chemical properties of the fluorescent materials and records information bits inside the matrix. With an ultra-fast laser as a new light source, 3D optical recording can be available for high capacity data storage up to 1 TB per disc. PACS 82.50.-m; 42.65. Re; 72.70.Jk.     

Optical contrastivity of complicated materials: finite layered structures

We define the intrinsic optical contrastivity of a complicated layered structure as the relative total gap taken inside the total internal reflection region over a chosen range of frequencies. The notion introduced for ordered 1D systems retains its meaning for 2D and 3D ordered optical systems, as well as for disordered structures. The parametric maps of contrastivity and sensitivity are calculated for 1D comb matrices based on glass, silicon, and microporous silicon with various fillings, comb sizes, and densities of a gaseous filling. The existence of areas on a parametric map which are highly sensitive to deviations in the contrastivity is shown for different materials. In the case of a gaseous filling of voids between the matrix material layers, the areas of a very high sensitivity are also found.     

飞秒激光湿法刻蚀微纳制造

飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 m,球冠高6.7 m,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 m,长径比超过100。     

Planar defects in three-dimensional chalcogenide glass photonic crystals

Here we report on the direct laser writing fabrication of Fabry-Perot-type planar microcavities in a three-dimensional (3D) photonic crystal (PhC) embedded within a high-refractive nonlinear chalcogenide glass (ChG) film. The fabricated planar microcavities in a nonlinear ChG 3D PhC facilitate the observation of resonant modes inside the stop gap. The experimental results show that the length of the planar cavity can be well controlled by the fabrication power and thus be used to tune the defect modes. The tunability of the observed defect modes is confirmed by the theoretical prediction.     

Embedded dots inside glass for optical film using UV laser of ultrafast laser pulse

Microstructures are usually fabricated on the surface of optical sheets to improve the optical characteristics. In this study, a new fabrication process with UV (ultraviolet) laser direct writing method is developed to embed microstructures inside the glass. Then the optical properties of glass such as reflection and refraction indexes can be modified. Single- and multi-layer microstructures are designed and embedded inside glass substrate to modify the optical characteristics. Both luminance and uniformity can be controlled with the embedded microstructures. Thus, the glass with inside pattern can be used as a light guide plate to increase optical performance. First, an optical commercial software, FRED, is applied to design the microstructure configuration. Then, UV laser direct writing with output power 2.5-2.6 W, repetition rate 30 kHz, wave length: 355 nm, and pulse duration 15 ns is used to fabricate the microstructures inside the glass. The effect of dot pattern in the glass such as the dot pitch, the layer gap, and the number of layer on the optical performance is discussed. Machining capacity of UV laser ranges from micron to submicrometer; hence with this ultrafast laser pulse, objectives of various dimensions such as dot, line width, and layers can be easily embedded in the glass by one simple process. In addition, the embedded microstructures can be made with less contamination. Finally, the optical performance of the glasses with various configurations is measured using a Spectra Colorometer (Photo Research PR650) and compared with the simulated results.     

Femtosecond laser-assisted three-dimensional microfabrication in silica

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10mum -diameter channels in a 100mum -thick silica slab).     

Radiation heat transfer in axisymmetric quartz glass tubes

A mathematical model is proposed to describe the heat transfer in quartz glass axisymmetric tubes. Heat is transferred inside the glass by radiation and conduction. Scattering of thermal radiation inside the glass is ignored. At the boundaries of the tube the radiative intensity is specularly reflected. The spectral dependent radiative intensity and the temperature distribution inside the tube are determined. The model is applied to simulate the cooling process of a quartz glass tube. The calculated temperature is in agreement with that obtained from an experiment. Furthermore, steady-state temperature distributions in quartz glass tubes of different lengths have been determined.     

Development of three-dimensional microfabrication method using thermo-sensitive resin

We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This method exploits the fact that polymerization of thermo-sensitive resins does not obey the law of linear superposition. Three-dimensional (3D) objects are created inside the thermo-sensitive resin by 3D scanning of the volume with a focused laser. Fabrication with the focus of the laser inside the resin can achieve good accuracy and high resolution of the structure. A fabrication system, which consisted of a CD-R pick-up laser and an XYZ stage, was built. Nonlinear polymerizations of the thermo-sensitive resin were verified by fabrication in various conditions of laser intensity and exposure time. In order to demonstrate the present method, a simple 3D microstructure was fabricated inside the resin. PACS 42.62.Cf; 42.70.Jk; 42.82.Cr     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Transverse Writing of Multimode Interference Waveguides inside Silica Glass by Femtosecond Laser Pulses

Multi-mode interference waveguides are fabricated inside silica glass by transverse writing geometry with femtosecond laser pulses. The influences of several writing and reading factors on the output mode are systematically studied. The experimental results of straight waveguides are in good agreement with the simulations by the beam propagation method. By integrating a straight waveguide with a bent waveguide, a 1× 2 multi-mode splitter is formed and 2×3 lobes are observed in the output mode.     

Structural changes in fused silica after exposure to focused femtosecond laser pulses

Using in situ Raman scattering in a confocal microscopy setup, we have observed changes in the network structure of fused silica after modifying regions inside the glass with tightly focused 800-nm 130-fs laser pulses at fluences of 5-200 J cm(-2). The Raman spectra show a large increase in the peaks at 490 and 605cm(-1), owing to 4- and 3-membered ring structures in the silica network, indicating that densification occurs after exposure to the femtosecond laser pulses. The results are consistent with the formation of a localized plasma by the laser pulse and a subsequent microexplosion inside the glass.     

Self-assembled volume vortex grating induced by femtosecond laser pulses in glass

We presented a microfabrication process for optical volume vortex grating inside glass by femtosecond laser pulses. The self-trapped filament of femtosecond laser pulses can induce hundreds μm-long region refractive-index changes in glass. We realized the restructured optical vortex beams using a collimated He–Ne laser beam. The maximum first-order diffraction efficiency was about 19.6%. The volume vortex grating structure fabricated in glass is polarization dependent.     

Diffusion and thermal diffusion of semidilute to concentrated solutions of polystyrene in toluene in the vicinity of the glass transition

The approaching glass transition in polystyrene/toluene solutions leads to a sharp decay of both the collective diffusion coefficient D and the thermal diffusion coefficient D(T) at concentrations above 0.2 g/cm(3). The Soret coefficient S(T) = D(T)/D follows power-law scaling from semidilute to concentrated and is not influenced by the slowing down of the dynamics associated with the glass transition. Both D and D(T) are governed by the same friction coefficient. The scaling behavior of S(T) with concentration on approach of the glass transition is compared to the divergence of S(T) near a consolute critical point.     

Recording and reading of three-dimensional optical memory in glasses

We report on three-dimensional (3D) optical memory recording and reading in glass by femtosecond pulses. Optically induced dielectric breakdown of glass is a mechanism of recording. The formulae of dielectric breakdown presented are applicable, in principle, for any crystalline or amorphous dielectric material. Scaling dependences of the probabilities of multi-photon and impact ionization are given. The measured threshold of an in-bulk dielectric breakdown of silica was reproduced numerically by implementing the ionization potential of Si (8.15 eV) for calculations. Exact measures of focal spot size and pulse duration at the focus allowed us to evaluate the intensity of a pulse during recording of 3D optical memory bits with high accuracy. The readout of the 3D optical memory was carried out by the white-light continuum generated from the previously damaged sites (recorded memory bits). The mechanism of the readout was a four-photon parametric interaction. PACS 42.65.Jx; 42.65.Ky; 42.70.Ce; 42.79.Vb     

Local phase-structure modification inside of lithium silicate glass by combined double-wavelength laser action

The process of local structure modification inside of lithium silicate glass under the combined laser action of two different wavelengths is considered. The first step is laser irradiation of ultrashort laser pulses with 532 nm wavelength, which is used to create of nucleation centers inside of the optically transparent glass. The crystallization of the structural modification areas was carried out by a photothermal action of CO₂ laser radiation with a 10.6 μm wavelength. The range of crystallization temperatures was defined and the kinetics of the phase transformations of the modified regions inside of the glass were studied. Duration of crystallization was about 10 min with a slow heating and 25 s at the fast heating to crystallization temperature.     

Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses

By moving silica glass in a preprogrammed structure, we directly produced three-dimensional holes with femtosecond laser pulses in single step. When distilled water was introduced into a hole drilled from the rear surface of the glass, the effects of blocking and redeposition of ablated material were greatly reduced and the aspect ratio of the depth of the hole was increased. Straight holes of 4-mu;m diameter were more than 200 microm deep. Three-dimensional channels can be micromachined inside transparent materials by use of this method, as we have demonstrated by drilling a square-wave-shaped hole inside silica glass.