Applications of Acoustic Wave Devices for Sensing in Liquid Environments

Abstract

Acoustic wave devices such as thickness shear mode (TSM) resonators and shear horizontal surface acoustic wave (SH‐SAW) devices can be utilized for characterizing physical properties of liquids and for chemical sensor applications. Basic device configurations are reviewed and the relationships between experimental observables (frequency shifts and attenuation) and physical properties of liquids are presented. Examples of physical property (density and viscosity) determination and also of chemical sensing are presented for a variety of liquid phase applications. Applications of TSMs and polymer‐coated guided SH‐SAWs for chemical sensing and uncoated SH‐SAWs for “electronic tongue” applications are also discussed.     

Hypersound waves at the surface of CdZnTe crystals: The role of surface orientation and scattering at twin boundaries

The patterns of propagation of gigahertz surface acoustic waves (SAWs) are obtained for cuts of CdZnTe single crystals with different crystallographic orientations. By comparing the experimental patterns with the calculated ones, the existence of at least two SAW modes, one of which is a Rayleigh mode, is demonstrated. It is shown that the anisotropy of propagation of different SAW modes makes it possible to determine the local crystallographic orientation of the CdZnTe surface and detect local imperfections of the crystal structure. Strong anisotropic scattering of the Rayleigh wave by coherent twin boundaries is found.     

Dispersion and attenuation of surface shear acoustic waves with horizontal polarization on the free statistically rough surface of the hexagonal crystal

Expressions for dispersion of the phase velocity and inverse damping depth of surface acoustic waves with shear horizontal polarization are derived in an analytical form within perturbation theory using the modified mean-field method for the Z-cut hexagonal crystal with a free statically rough surface. Both two-and one-dimensionally rough surfaces are considered. The one-dimensionally rough surface is considered as a special case of the two-dimensionally rough surface. It is shown that shear surface waves with horizontal polarization cannot exist on the flat surface of the Z-cut hexagonal crystal. The derived expressions are studied analytically and numerically in the entire frequency range accessible in perturbation theory. The long-wavelength limit (most interesting from the experimental point of view) is considered, where the wavelength is much longer than the roughness correlation radius. The conditions for the existence of SH-polarized waves are determined for both roughness types. It is shown that dispersion and attenuation of SH polarized waves are qualitatively similar in character to those we considered previously for an isotropic medium.     

Performance of Non-Contact Linear Actuators Driven by Surface Acoustic Waves*

A new kind of non-contact linear actuator （motor） driven by surface acoustic waves （SAWs） is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid （water） layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.     

Incredible negative values of effective electromechanical coupling coefficient for surface acoustic waves in piezoelectrics

The extraordinary case of increase in velocity of surface acoustic waves (SAW) caused by electrical shorting of the surface of the superstrong piezoelectric crystal potassium niobate, KNbO3, is numerically found. The explanation of this effect is based on considering SAWs as coupled Rayleigh and Bleustein-Gulyaev modes. A general procedure of approximate decoupling of the modes is suggested for piezoelectric crystals of arbitrary anisotropy. The effect under study takes place when the phase velocity of uncoupled sagittally polarized Rayleigh waves is intermediate between the phase velocities of uncoupled shear-horizontal Bleustein Gulyaev waves at the free and metallized surfaces. In this case, the metallization of the surface by an infinitely thin layer may cause a crossover of the velocity curves of the uncoupled waves. The presence of the mode coupling results in splitting of the curves with transition from one uncoupled branch to the other. This transition is responsible for the increase in SAW velocity, which appears to be greater than its common decrease produced by electrical shorting of the substrate surface.     

Transmission of surface acoustic waves through the interface based on discontinuity of electrical boundary conditions on surface of potassium niobate

This paper presents theoretical investigation of the propagation of surface acoustic waves (SAWs) across the boundary between metallized (electrically shorted) and unmetallized (electrically open) regions on the surface of potassium niobate crystals. Potassium niobate is a very strong piezoelectric material and has the interesting property that only one type of SAW, namely a Rayleigh wave, can exist on unmetallized surface, where as two types of SAWs, namely Rayleigh and Bleustein-Gulyaev (BG), can exist on a metallized surface. Analysis shows that the Rayleigh wave propagates through the interface with very little change in amplitude or polarization. On the other hand, almost total reflection of the BG wave is expected. Details of the theoretical analysis and calculated results will be presented.     

Peculiarities of the formation of the X-ray diffraction image of a surface acoustic wave in grazing geometry

The x-ray diffraction image of a Bluestein-Gulyaev surface acoustic wave (SAW) at grazing angles of incidence is considered in the noncoplanar symmetric Laue geometry. It is assumed that the SAW propagation direction makes a small angle with the diffraction vector. It is shown that small deviations from the Bragg angle (～0.01″) due to SAWs that do not lead to a change in the reflection coefficient result in the formation of diffraction satellites for both standing and traveling SAWs. The recorded x-ray diffraction image representing the time-averaged intensity distribution has characteristic profiles for even-and odd-order satellites.     

Exfoliation of metal-organic framework nanosheets using surface acoustic waves

Two-dimensional (2D) metal–organic framework (MOF) nanosheets have recently received extensive attention due to their ultra-thin thickness, large specific surface area, chemical and functional designability. In this study, an unconventional method using surface acoustic wave (SAW) technology is proposed to exfoliate large quantities and uniform layers of 2D MOF-Zn₂(bim)₄ nanosheets in a microfluidic system. We successfully demonstrated that the thickness of 2D MOF is effectively and accurately controlled by optimizing the SAW parameters. The mechanisms for the efficient exfoliation of 2D MOF nanosheets is attributed to both the electric and acoustic fields generated by the SAWs in the liquid. The electric field ionizes the methanol to produce H⁺ ions, which intercalate Zn₂(bim)₄ sheets and weaken the interlayer bonding, and the strong shear force generated by SAWs separates the MOF sheets. A yield of 66% for monolayer MOFs with a maximum size of 3.5 μm is achieved under the combined effect of electric and acoustic fields. This fast, low-energy exfoliation platform has the potential to provide a simple and scalable microfluidic exfoliation method for production of large-area and quantities of 2D MOFs.     

Reflection and mode conversion of surface acoustic waves studied by scanning acoustic force microscopy

We present measurements of the reflection and mode conversion of surface acoustic waves (SAWs) by scanning acoustic force microscopy (SAFM). The SAFM offers a unique combination of high lateral resolution and high sensitivity towards acoustic modes of all polarizations. Since a SAW mixing experiment of two waves can be performed even if the amplitude difference between both waves is 40 dB, wavefields of extremely small amplitudes can be investigated. Using SAFM, the reflection of SAWs from a metallic wedge is investigated with submicron lateral resolution. We are able to identify two reflected wave modes, a Love and a non-coupling Rayleigh mode, by measuring their phase velocities. Received: 4 December 2000 / Accepted: 6 December 2000 / Published online: 9 February 2001     

Characteristics of fundamental acoustic wave modes in thin piezoelectric plates

The characteristics of the three lowest order plate waves (A(0), S(0), and SH(0)) propagating in piezoelectric plates whose thickness h is much less than the acoustic wavelength lambda are theoretically analyzed. It is found that these waves can provide much higher values of electromechanical coupling coefficient K(2) and lower values of temperature coefficient of delay (TCD) than is possible with surface acoustic waves (SAWs). For example, in 30Y-X lithium niobate, the SH(0) mode has K(2)=0.46 and TCD=55 ppm/degrees C. The corresponding values for SAW in the widely used, strong coupling material of 128Y-X lithium niobate are K(2)=0.053 and TCD=75 ppm/degrees C. Another important advantage of plate waves is that, unlike the case of SAWs, they can operate satisfactorily in contact with a liquid medium, thus making possible their use in liquid phase sensors.     

The attenuation of rayleigh surface waves by surface roughness

This paper presents a calculation of the attenuation length of Rayleigh surface waves in the presence of surface roughness. We consider Rayleigh waves on the surface of a semi-infinite isotropic elastic continuum, and the method we use produces the contribution to the attenuation rate proportional to the square of the rms amplitude of the roughness. We obtain explicit expressions for the contribution to the attenuation rate from roughness-induced scattering into bulk transverse and longitudinal acoustic waves, and into Rayleigh waves. Our derivation makes use of a Green's function method. When the wavelength λ of the Rayleigh wave is long compared to the transverse correlation length a that characterizes the surface roughness, all contributions to the attenuation rate are proportional to the fifth power of the frequency. When λ is comparable to or smaller than a, the attenuation constant varies more slowly with frequency. For a model of the surface roughness, we present numerical calculations of the relative magnitude and frequency dependence of the various contributions to the attenuation rate. The Green's functions used here may be applied to a number of calculations. A derivation of their form is provided in an Appendix.     

Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

Propagation characteristics of surface acoustic waves(SAWs) in ZnO films/glass substrates are theoretically investigated by the three-dimensional(3D) finite element method. At first, for(11ˉ20) ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1ˉ100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k~2 of 2.4% in(90°, 56.5°, 0°) ZnO film/glass substrate structure; Love wave has a maximum k~2 of 3.81% in(56°, 90°, 0°) ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency(TCF) can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k~2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.     

Acoustic study of adsorbed liquid layers

Interference measurements of small variations in the velocity and attenuation of surface acoustic waves (SAWs) are used to investigate water layers up to 15 nm thick adsorbed on the surface of a lithium niobate crystal. The frequency dependence of the relative variation of the SAW velocity with the adsorption of water vapor is measured in the range from 40 to 400 MHz. Acoustic techniques are used to experimentally estimate the frequency dependence of the dielectric constant of adsorbed water and its dipole relaxation frequency along with the dependence of the adsorption layer thickness on the water vapor pressure in the surrounding medium. A simple expression is proposed for calculating the dispersion of the SAW velocity in a solid loaded with a thin liquid layer.     

Dispersion and attenuation of Rayleigh waves at a one-dimensional random roughness of the free surface of a hexagonal crystal

Analytical expressions are derived for dispersion and attenuation of Rayleigh waves propagating along the statistically rough free surface of a hexagonal crystal (Z cut). The roughness under consideration is one-dimensional (the profile function of the roughness depends on one coordinate) and has the form of hollows of a random lattice. The results obtained earlier in the solution of an analogous problem for a two-dimensional roughness are used in the one-dimensional case. The relationships derived for the dispersion and attenuation of Rayleigh waves are treated analytically and numerically over the entire range of frequencies acceptable in the framework of the perturbation theory. It is shown that the dispersion and attenuation of Rayleigh waves are qualitatively similar to those observed in an isotropic medium.     

Rayleigh wave dispersion and attenuation on a statistically rough free surface of a hexagonal crystal

Dispersion and attenuation of Rayleigh surface acoustic waves on a statistically rough free surface of a Z-cut hexagonal crystal were analytically studied using a modified mean-field method within the perturbation theory. Numerical calculations were carried out in the frequency range accessible for the perturbation theory using expressions for the real and imaginary parts of the complex frequency shift of Rayleigh waves caused by a slight surface roughness. The Rayleigh wave dispersion and attenuation in the Z-cut hexagonal crystal were shown to coincide qualitatively with those in an isotropic medium, differing only quantitatively. In the long-wavelength limit λ?a, where a is the lateral roughness correlation length, explicit analytical expressions for the relative change in the phase velocity and the inverse damping depth of Rayleigh waves were derived and used in numerical calculations.     

Diagnostics of elastic properties of a planar interface between two rough media using surface acoustic waves

The results of experimental studies on the nonlinear elastic properties of a planar interface between two media are presented—an optically polished glass substrate and flat samples with different degrees of roughness. The nonlinear elastic properties of the interfaces between two media were investigated by the spectral method using surface acoustic waves (SAWs). The effect of external pressure applied to the interface on the efficiency of the generation of the second SAW harmonic was studied. Using the measured amplitudes of the first and second harmonics of the SAW that passes along the interface, the second-order nonlinear acoustic parameter was calculated as a function of the external pressure applied to the sample at a fixed amplitude of a probing wave. It was revealed that the nonlinear parameter of the SAW is a nonmonotonic function of the pressure at the boundary. The results were analyzed on the basis of an elastic contact nonlinearity, and it is concluded that these results can be used in nondestructive testing for roughness and waviness of surfaces of flat solids.     

Effective impedance spectra for predicting rough sea effects on atmospheric impulsive sounds

Two methods of calculating the effective impedance spectra of acoustically hard, randomly rough, two-dimensional surfaces valid for acoustic wavelengths large compared with the roughness scales have been explored. The first method uses the complex excess attenuation spectrum due to a point source above a rough boundary predicted by a boundary element method (BEM) and solves for effective impedance roots identified by a winding number integral method. The second method is based on an analytical theory in which the contributions from random distributions of surface scatterers are summed to obtain the total scattered field. Effective impedance spectra deduced from measurements of the complex excess attenuation above 2D randomly rough surfaces formed by semicylinders and wedges have been compared to predictions from the two approaches. Although the analytical theory gives relatively poor predictions, BEM-deduced effective impedance spectra agree tolerably well with measured data. Simple polynomials have been found to fit BEM-deduced spectra for surfaces formed by intersecting parabolas corresponding to average roughness heights between 0.25 and 7.5 m and for five incidence angles for each average height. Predicted effects of sea-surface roughness on sonic boom profiles and rise time are comparable to those due to turbulence and molecular relaxation effects.     

X-ray diffraction analysis of the surface acoustic wave propagation in langatate crystal

X-ray diffraction on a langatate crystal (La₃Ga_5.5Ta_0.5O₁₄, LGT) modulated by a Λ=12 μm Rayleigh surface acoustic wave (SAW) was studied in a double axis X-ray diffractometer scheme at the BESSY synchrotron radiation source. SAW propagation in the crystal causes sinusoidal modulation of the crystal lattice and the appearance of diffraction satellites on the rocking curves, with their number, angular positions, and intensities depending on the wavelength and amplitude of acoustic vibrations of the crystal lattice. Strong absorption of X-ray radiation in LGT enables the observation of the diffraction spectra extinction at certain SAW amplitudes. X-ray diffraction spectra analysis makes it possible to determine SAW amplitudes and wavelengths, to measure the power flow angles, and investigate the diffraction divergence in acoustic beam in LGT.     

表面声波传感器及其应用

本文简要介绍多种表面声波传感器的结构、特点、应用及其研究进展概况。表面声波传感器依其波型分类,主要包括瑞利波、水平切变声板波、乐甫波和兰姆波传感器;其应用领域根据作用特点大致可分为物理传感器和化学、生物传感器,前者较易实现,后者特异性强,需要针对具体情况作更细致研究。由于表面声波的传播速度和相位对周围环境的参量变化极为敏感,因此有关传感器具有很高的灵敏度和广泛的应用领域。     

Elastic model for simulating ultrasonic inspection of smooth and rough defects

A model is presented for the scattering of ultrasonic waves from smooth and randomly rough defects. The model uses Kirchhoff theory and is elastic, such that mode-conversion between compressional and shear waves is included in the formulation. The model is designed to simulate ultrasonic non-destructive testing situations, by specifying the location and orientation of a defect within an isotropic material, together with transmitter and receiver locations on an inspection surface. Results are presented for the scattering of both monochromatic waves and of pulses. It is shown how small levels of roughness can affect echodynamic curves and how diffracted signals may become lost due to scatter from the rough faces of defects. It is also shown that the usual rules for coupling between waves of all three modes no longer hold when roughness is present. In particular, roughness leads to coupling between horizontally polarized shear (SH) waves and the other two wave modes. The model predictions are also compared with an earlier acoustic model, indicating the importance of mode-conversion effects when considering rough defects embedded within solids.