S弯曲聚合物热光型可变衰减器的特性

提出一种热光聚合物可变光衰减器(VOA)的设计分析,利用S弯曲的波导提高衰减效率,BPM法模拟中验证其衰减动态范围可达60 dB,实现60 dB的衰减计算功耗为60 mW,附加弯曲损耗小于0.3 dB.并且具有很好的极化独立性,串扰低,尺寸小,易于集成.     

超小型非硅基微机械可调光衰减器

研制了一种新型的超小型电磁驱动微机械可调光衰减器（VOA）.该器件采用电磁驱动器转动硅基微镜改变光路实现可调衰减,在结构上采用了全磁性回复,完全摆脱了通常的弹性回复造成的部件疲劳、零点偏移等器件重复性问题.驱动电压为0～5 V,工作范围0～40 dB,插入损耗小于0.8 dB,回波损耗小于－50 dB.器件重要部件采用微细电火花加工(EDM)技术制作,并应用FEA软件进行了结构优化,对衰减响应进行了详尽的理论分析.该VOA设计体积仅为25×10×7 mm3,可构成阵列应用于波分复用（WDM/DWDM）系统中各信道的动态信号平衡或网络保护.     

A Pixelized Variable Optical Attenuator Using Liquid Crystal on Silicon Technology for Tunable Filters

We apply liquid crystal on silicon (LCOS) in 0.8-$mUm standard complementary metal-oxide semiconductor (CMOS) technology to demonstrate a low-cost, high-performance pixelized liquid crystal variable optical attenuator (VOA) with pulse width modulation. We then build a prototype tunable filter by using this VOA along with a grating in the Littrow configuration. With the application of 5-V pulse width modulation, the proposed VOA achieves a 5.6-dB insertion loss, a dynamic range of more than 20 dB, a 50-GHz channel spacing capability, and a polarization-dependent loss (PDL) of less than 0.6 dB at 15-dB attenuation. Our VOA is suitable for applications such as dynamic channel gain equalizers, channel-blocking filters, sub-components of re-configurable add-drop modules, and wavelength selectors.     

位错型微机械可变光衰减器的研究

介绍了一种基于微机械技术实现的可变光衰减器,通过微电磁驱动器改变输入输出光纤之间的径向偏移量来调整衰减量。基于波导传输理论分析确定了器件的结构参量,并通过集成电路微细加工工艺实现了器件的制作和封装。测试结果表明,该可变光衰减器的插入损耗小于1dB,动态范围约35dB,工作电压小于5V,偏振相关损耗小于0.1dB,体积为20mm×15mm×8mm,有望为全光网提供一种低成本,高性能的光通信器件。     

光纤型热光可调光衰减器的设计及其衰减分析

提出了一种基于热光调节的可调光衰减器结构。该衰减器通过腐蚀光纤包层到一定厚度和长度后,在表面涂覆较大热光系数的聚合物材料得到。从模场变化角度分析了传输光束的衰减与涂覆材料折射率的关系,并从实验上测试了使用不同涂覆材料时的衰减。理论分析与实验结果均表明在涂覆材料折射率略大于原光纤包层材料折射率时,涂覆材料折射率微小的变化将引起传播光束衰减的大幅度变化,并且光纤被腐蚀的长度越长或包层材料剩余厚度越小,衰减越大。因此,由热光系数大、折射率略大于光纤包层的聚合物材料所组成的可调光纤衰减器,具有衰减调节范围大且功耗小、插入损耗小、成本低、低偏振特性、易于与其它光纤器件耦合或集成等特点。     

Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror

This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500 μm in diameter and a rotational resonance of 4.94 kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6 ms and 2.74 ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40 dB was obtained.     

基于量子级联激光器照明的高对比度红外内窥成像

对单丝直径为20μm,12×9阵列方形面阵的Ge-As-Te-Se组分光纤束进行了测试,并开展红外成像研究。利用5~11μm连续可调谐红外量子级联激光器作为光源,对光纤束损耗进行检测,传输损耗平均为1 dB/cm。设计并加工了基于像方远心成像的紧凑型物镜,总长13.6 mm,直径6 mm,最终实现了2 mm×2 mm视场内100μm分辨率传像。分别在量子级联激光器和非相干黑体光源的照明下,进行了环境温度对成像对比度影响的研究,结果表明,在环境温度较高(>40℃)的条件下,基于量子级联激光器照明可实现高对比度内窥成像。本文对于深入开展红外生物效应研究具有指导意义和实用价值。     

Low power consumption 4-channel variable optical attenuator array based on planar lightwave circuit technique

The power consumption of a variable optical attenuator(VOA) array based on a silica planar lightwave circuit was investigated. The thermal field profile of the device was optimized using the finite-element analysis. The simulation results showed that the power consumption reduces as the depth of the heat-insulating grooves is deeper, the up-cladding is thinner,the down-cladding is thicker, and the width of the cladding ridge is narrower. The materials component and thickness of the electrodes were also optimized to guarantee the driving voltage under 5 V. The power consumption was successfully reduced to as low as 155 mW at an attenuation of 30 dB in the experiment.     

Polymeric PLC-type thermo-optic optical attenuator fabricated by UV imprint technique

A planar lightwave circuit-type polymer thermo-optic optical attenuator was fabricated via a UV imprint technique. In order to reduce the step for filling of cores and minimize the detrimental residual slab waveguide, convex ridge-type micro cores for guidance of light were defined with an accuracy of ±0.5 μm on the under-clad by a single step of imprinting. The voltage-controlled polymer optical attenuator showed 30-dB attenuation with 80-mW electrical input power at a wavelength of 1.55 μm. The rise and fall times are less than 5 ms. It displays about 0.2- and 1-dB polarization dependence at 0- and 10-dB attenuations, respectively.     

一种MEMS可调光衰减器性能测试及动态响应分析

一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.     

The 650-nm variable optical attenuator based on polymer/silica hybrid waveguide

Visible light variable optical attenuators(VOA) are essential devices in the application of channel power regulation and equalization in wavelength-division multiplexing cross-connect nodes in plastic optical fiber(POF) transmission systems.In this paper, a polymer/silica hybrid waveguide thermo–optic attenuator based on multimode interference(MMI) coupler is designed and fabricated to operate at 650 nm. The single-mode transmission condition, MMI coupler, and transition taper dimensions are optimized through the beam propagation method. Thermal analysis based on material properties provides the optimized heater placement angle. The fabricated VOA presents an attenuation of 26.5 dB with a 21-mW electrical input power at 650 nm. The rise time and fall time are 51.99 and 192 μs, respectively. The time–stability measurement results prove its working reliability.     

基于内反射效应的可变光学衰减器

提出一种基于内反射原理的可变光学衰减器，这种利用一加长的棱镜和涂于棱镜上下两底面的SiO2薄膜的简单结构，使随入射角变化的反射光实现弱偏振相关和大动态范围的衰减。     

Fabrication of Variable Optica l Attenuator With Low Inse rtion Loss

Avoltage -controlled variabl optical attenuator (VOA) based on silica-b a sed planar ligh t wa ve circu its (P LC) was fabricated by flame hydrolysis deposition (FHD). The variable attenuator with Cr heater achieves 20dB attenuation with 318mW electrical power at 1550 nm. The insertion loss and the polarization dependent loss (PDL) at 0 attenuation are 1dB and 0.23dB, respectively.     

Flexible integration of optical switch with optical power splitting and attenuating functions for optical fiber-based networking applications

A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9 ms at 31 V. The excess loss of the device is less than 3 dB and the controllable attenuation range is up to 38 dB at 139 V, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation and splitting range.     

Integrated optical and MEMS based design process for a variable optical attenuator

This paper presents the design, fabrication and characterization of a Variable Optical Attenuator (VOA). The VOA is based on a device known as the Mechanical Anti-reflection Switch (MARS) that has been well studied for modulation applications. Therefore, the requirements of the MEMS device need to be freshly ascertained and are done so in this paper taking the optical and MEMS parameters into account. In addition, the effect of the MEMS parameters on the optical ones and vise versa were also exploited in the design process. A good VOA should have a linear variation of attenuation with voltage and a large change in attenuation with a small change in voltage. In addition, the device should have as small an insertion loss as possible. Keeping this in mind, the dimensions of the device were chosen to achieve maximum performance. Four design variables were used to design MARS for the VOA application. This paper will discuss how they are related. A surface micro-machining fabrication method was developed using thermal evaporation and Plasma Enhanced Chemical Vapor Deposition (PECVD) techniques. It includes a fluoroform (CHF3) based reactive ion etching for silicon nitride. The devices were released using low surface tension liquids and Rapid Thermal Annealing (RTA). The achieved process yield was over 90%. Several devices were tested and attenuation up to 5.6 dB was observed experimentally.     

Ku波段微波单片集成电路6位数字衰减器设计

基于GaAs 0.25 μm增强/耗尽型（E/D）赝配高电子迁移率晶体管（pHEMT）工艺,研制了一款Ku波段6位数字衰减器微波单片集成电路（MMIC）。该6位数字衰减器由6个基本衰减位级联组成,可实现最大衰减量为31.5 dB、步进为0.5 dB的衰减量控制。采用简化的T型衰减结构,实现了0.5 dB和1 dB的衰减位。16 dB衰减位采用开关型衰减拓扑,在提高衰减平坦度的同时,有效降低其附加相移。测试结果表明,在12～18 GHz的频率内,数字衰减器衰减64态均方根误差（RMS）小于0.25 dB,附加相移为?0.5°～＋9.5°,插入损耗小于4.9 dB,输入输出驻波比均小于1.5∶1。芯片尺寸为3.00 mm×0.75 mm。该芯片电路具有宽频带、高衰减精度、小尺寸的特点,主要用于微波相控阵收发组件、无线通讯等领域。     

折/衍混合增强现实头盔显示器光学系统设计

利用衍射光学元件独有的负色散性质和可实现光波面任意相位调制的特点 ,在光学系统中引入衍射面 ,设计了出瞳距离为 2 6mm ,出瞳直径为 12mm ,视场角为 2 0°(H)× 15 .4°(V)的用于增强现实的折 /衍混合穿透式双通道头盔显示器的光学系统。设计的系统内、外两个光通道的光能量利用率分别达到 1/4和 1/2。系统分辨力适合采用分辨率为 80 0× 6 0 0、像元尺寸为 33μm的图像源。设计结果 ,系统镜头直径小于 4 6mm ,满足用于双目显示的要求。设计结果表明 ,该系统不仅在结构上满足使用者因素的要求 ,而且成像质量接近衍射极限 ,具有很高的分辨率 ,色差和畸变非常小。设计结果完全满足用于增强现实的要求。     

可调光衰减器的光衰减量线性补偿

设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器.与传统可调光衰减器相比,该器件不仅可实现光衰减量数字化电控调节,并且可通过器件结构的优化设计,对光衰减量的非线性进行补偿,最终得到线性衰减.器件性能测试表明,插入损耗IL＜0.3 dB,偏振相关损耗PDL＜0.1 dB,波长相关损耗WDL＜0.2 dB,衰减范围0～40 dB,回波损耗RL＞50 dB.     

A high performance tunable optical filter based on cascaded polarization interference filter

A new kind of tunable optical filter is proposed for DWDM optical communication application. It is based on cascaded polarization interference filter (PIF). The period and bandpass width of each PIF are decided by its optical path difference between o-ray and e-ray (OPDOE). When their OPDOEs are proportionately designed, the tuning range and bandpass width depend on OPDOE in the first and the last PIF, respectively. The tuning range, bandpass width and crosstalk are independent each other. The crosstalk is related to the OPDOE ratios among PIFs and can be suppressed by designing the PIF's 15 × 2N-7 × l1, 10 × 2N-6 × l1 and 2N-2 × l1 from the first to the last. This suggested OPDOEs can yield -50-dB crosstalk for any tuning range and bandpass width. The insert loss is less than i dB. As its loose alignment requirement, there is no limitation on cascaded PIF number. When 11 PIFs are cascaded, it can achieve 170-nm tuning range, -50-dB crosstalk, bandpass width applicable to 25-GHz channel spacing and 1 dB insert loss.     

Liquid crystal enabled multi-channel power equalizer and stabilizer

Automatic power equalization and stabilization of a liquid crystal enabled channel-selectable optical demultiplexer is demonstrated. The variation among output signals from different channels was reduced from ∼10 dB to 0.15 dB with feedback control. The minimum ripple level of a single channel is ∼0.05 dB. As a variable optical attenuator (VOA), the attenuation range of the device is ∼12.6 dB.