低温对中波红外带通滤光片光谱特性的影响

为考察滤光片在低温环境下的可靠性,镀制了Ge基和宝石基中波带通滤光片,分别实施了5 min、15 min、25 min、35 min、120 min、300 min的液氮低温试验,并测试出其透过率曲线,考察低温对其光谱特性及膜层牢固度的影响。带通滤光片通带区透过率随低温时间增长有逐渐下降趋势,中心波长出现13 nm的微小偏移,是所镀制的膜料高、低折射率相对变化使中心波长和截止波长的比值发生变化所致。Ge基材料对温度更为敏感,在由常温到低温过渡期间,Ge基中波滤光片通带透过率降低幅度比宝石基底的中波带通滤光片大10%。在300 min以内的低温环境下,2种中波红外带通滤光片均未出现膜层脱落现象。     

镀窄带干涉滤光片用的直控极值法

直控极值法具有自动补偿各层膜的光学厚度的优点,至今仍被人们广泛采用.但在镀制窄带滤光片的最末几层时,有时会因出现反常现象而带来巨大误差,甚至失灵.本文用电脑模拟了滤光片的镀制过程,分析了出现反常现象的原因,从而提出了改进及消除这种现象的措施.结果表明:可以用带宽小于所镀滤光片的通带半宽度的光束来进行膜厚监控.     

中波红外3 μm～5 μm宽带通滤光片的研制

 中波红外宽带通滤光膜通常膜系层数多,膜层总厚度非常大（厚度达到10 μm左右）,膜层的镀制工艺难度较大。通过分析红外带通滤光片几种设计方法的特点,并结合实际镀制工艺技术,采用了长波通与短波通及非规整薄膜设计技术相结合的方法,设计了以锗材料为基底的中波3 μm～５ μm宽带通滤光膜。该设计大幅度降低了膜层的总厚度（约为8.65 μm）,缩短了膜层的镀制周期,提高了膜层的牢固度;在膜层的镀制工艺过程中,通过改变薄膜材料的蒸发速率、修正蒸发硫化锌材料时电子枪的扫描方式、调整蒸发材料在坩埚中的装载方法,使膜层获得了优异的光谱性能,其通带平均透过率大于96%,截止区域的平均透过率小于1%。     

可见光区大角度减反射光学薄膜制备工艺研究

为获得可见光波长范围的大角度减反射光学薄膜,采用电子束蒸发斜角蒸镀工艺,按照设计好的膜系,通过蒸镀一系列低折射率膜层,最终得到在380～780nm波长间,入射角0～70°,平均反射率低于1%的光学薄膜。实验结果表明利用斜角蒸镀工艺镀制出折射率从基底到空气的渐变多层膜结构以取得优良的减反射效果是可行的。     

DWDM用薄膜窄带滤光片的容差特性模拟分析

讨论了用于DWDM系统的薄膜窄带滤光片在镀制过程中的监控方法及误差产生的机理,利用自行建立的计算机膜厚容差模拟程序,分析了多FabryPerot腔窄带滤光片的容差特性.发现多腔窄带滤光片各腔的误差灵敏度与腔的位置有关,且各腔间隔层组成材料不同,其对误差最敏感的膜层位置也不相同.     

K9和石英玻璃基片上Au膜真空紫外反射特性研究

采用离子束溅射法,分别在经过不同前期清洗方法处理过的K9及石英玻璃光学基片上,选择不同的镀膜参量,镀制了多种厚度的Au膜。对镀制的Au膜在真空紫外波段较宽波长范围内的反射率进行了连续测量。测试结果表明:辅助离子源的使用方式、Au膜厚度对反射镜的反射率有重大影响。基片材料、镀前基片表面清洗工艺等对反射率也有一定影响。采用镀前离子轰击,可显著提高Au膜反射率及膜与基底的粘合力;获得最高反射率时的最佳膜厚与基片材料、镀膜工艺密切相关。对经过离子清洗的石英基片,膜厚在30 nm左右反射率最高;比较而言,石英基片可获得更高的反射率;辅助离子源的使用还显著影响获得最高反射率时对应的最佳膜厚值,且对K9基片的影响更显著。     

中心波长121.6nm的真空紫外窄带滤光片设计和制备

采用双半波法布里-珀罗(F-P)干涉滤光片结构设计了中心波长在121.6 am的窄带滤光片,其峰值透射率为6.78%,通带半宽度为10.7 nm.通过设计、制备和测量峰值波长在217 nm的滤光片验证了设计用到的光学常数和膜厚定标都比较精确.在此基础上制备了121.6 nm的窄带滤光片,到合肥同步辐射实验室测量的结果是中心波长在120.74 nm,峰值透射率为5.94%,通带半宽度为12 nm.可以看出实际制备的滤光片和预先设计的基本吻合但还是有一定的偏差,最后对实际测量的和理论设计的偏差进行了分析.     

波长1315nm的石英窗口增透膜

用Ta2O5／SiO2膜系镀制了石英窗口增透膜。并在优化膜系,改进膜厚控制后,使得1315nm波长单面剩余反射率降到0.050％。     

等离子体辅助制备窄带滤光片

研究了采用等离子辅助技术制备窄带滤光片的工艺。介绍了等离子辅助蒸镀系统的基本工作原理,描述了优化膜厚均匀性的过程。在有色玻璃上制备了由多层TiO2和SiO2薄膜组成的窄带滤光片,测试并分析了窄带滤光片的性能。试验结果表明,采用等离子体辅助蒸镀技术能够批量制备具有优良光学性能的窄带滤光片。     

中心波长14.95μm超窄带滤光片的研制

讨论了大气探测红外分光辐射计第1光谱通道超窄带滤光片的研制情况。采用富碲碲化铅材料作为高折射率膜层材料,通过控制沉积速率、沉积温度、真空度等工艺参数,镀制的膜层具有小的自由载流子浓度,整个膜系具有低的光吸收和高的透射能量。研制出入射光束半锥角Φ为18°时,中心波长14.95μm、带宽0.065μm、相对带宽小于0.5%的长波CO2超窄带滤光片。该超窄带滤光片已实现空间应用5年,在天气预报数据获取中工作稳定。     

中波红外8通道微型集成滤光片的研制

利用组合刻蚀法布里珀罗（F－P）干涉滤光片的谐振腔间隔层的方法,制备了集成在一个基片上的8通道中波红外（λ₀=2.8 μm）窄带滤光片,通道线宽为0.7 mm,光谱通道定位精度优于1%,各通道相对半峰宽为1%,此法有效提高了成品率,并可满足实现通道数更多,集成度更高的滤光器件发展的需求,     

Authentication labels based on guided-mode resonant filters

A guided-mode resonance (GMR) filter with wide angular tolerances is experimentally demonstrated as an authentication label illuminated with unpolarized white light. The proposed filter, based on a free-standing silicon nitride membrane suspended on a silicon substrate, is fabricated by using anisotropic wet etching to remove the substrate beneath the silicon nitride layer. Both grating and waveguide structures without a lower cladding layer, i.e., a substrate, are fabricated simultaneously on a silicon nitride membrane. Since the silicon nitride is transparent within the spectra of visible and infrared light, such suspended-membrane-type GMR filters are well suited for applications within the visible spectrum. Moreover, the high refractive index of silicon nitride allows the proposed filters to have strongly modulated gratings and an immunity to high angular deviation. The measured reflection resonance has an angular tolerance up to +/-5 degrees under normal incidence for the wavelength of 629.5 nm.     

Split spectrum processing: a new filtering approach for improved signal-to-noise ratio enhancement of ultrasonic signals

Split spectrum processing is a frequency diversity technique used to enhance the signal-to-noise ratio of ultrasonic signals. Traditionally, many Gaussian bandpass filters are used to achieve frequency diversity. This paper introduces an alternative method of obtaining frequency diversity wherein raised-cosine bandpass filters with flat-tops are recommended for use. The reasoning behind the use of raised-cosine filters is outlined. Experimental results are provided to demonstrate the advantages of the raised-cosine filters over Gaussian filters. Finally, the limitation of the new filters is experimentally shown.     

A new class of optimum amplitude filters

This paper presents a new class of optimum amplitude filters for the maximization of the factor of encircled energy within a pre-specified central core area of the far-field diffraction pattern. The filters are composed of finite uniformly transmitting zones with variations between them. The analysis is based on the known technique of indirect search for the optimum filter by “the method of sets of screens” utilising the complete set of normal orthogonal Walsh functions as a system of base functions. Some numerical results are presented.     

The influence of the group delay of digital filters on acoustic decay measurements

In this paper the error due to the phase response of digital filters on acoustic decay measurements is analyzed. There are two main sources of errors when an acoustic decay is filtered: the error due to the bandwidth of the filters related to their magnitude response, and the error due to their phase response. In this investigation the two components are separated and the phase error analyzed in terms of the group delay of the filters. Linear phase FIR filters and minimum phase IIR filters fulfilling the class 1 requirements of the IEC 61260 standard have been designed, and their errors compared. This makes it possible to explain the behavior of the phase error and develop recommendations for the use of each filtering technique. The paper is focused on the filtering techniques covered by current versions of the standards for measurement of acoustic decays and in the evaluation of the acoustic decay for narrow filters at low frequencies and low reverberation times (BT < 16).     

Performance of conformal guided mode resonance filters

Guided mode resonance (GMR) filters are highly functional micro-optics capable of narrowband spectral filtering. GMR devices have previously been demonstrated on flat substrates using a wide range of materials and configurations. In this Letter, we apply a soft lithographic technique followed by the deposition of dielectric layers to generate GMR filters on a concave lens surface. Resonances of the resulting conformal GMR filters are experimentally measured and characterized, and the results are compared to the performance of similar GMR filters fabricated on flat surfaces.     

Compact waveguide bandpass f ilter employing two-dimensional metallic photonic crystals for millimeter to terahertz frequencies

Two-dimensional metallic photonic crystal slabs with square lattice are proposed to be used for the design of waveguide bandpass filters operating in millimeter to terahertz region. Filter characteristics are studied when rod radii and lattice constants are changed. Based on the frequency scaling technique, a series of higher frequency filters has been designed. By using laser drilling and welding processing techniques, a compact waveguide filter embedded in an EIA-WR10 waveguide with central frequency 145.5 GHz and 3-dB bandwidth of 5.26 GHz is fabricated and measured. The measurement data agree well with the simulation prediction.     

组合刻蚀法制备窄带滤光片列阵

介绍了组合刻蚀法制备窄带滤光片列阵的基本原理和制备工艺,这是一种效率非常高的制备方法,只需N次刻蚀就可以完成2N通道窄带滤光片列阵的制备,而且可以用于制备不同波段窄带滤光片列阵。展示了可见-近红外波段32通道窄带滤光片列阵和中红外波段16通道窄带滤光片列阵的实验结果,其中32通道窄带滤光片列阵的带通峰位基本呈线性分布在774.7~814.2 nm之间,所有滤光片的半峰全宽都非常窄(δλ<1.5 nm),相应于δλ/λ<0.2%,半峰全宽最窄的滤光片达到0.8 nm,相应于δλ/λ<0.1%,其带通峰位λ=794.3 nm;各通道的带通透过率在21.2%~32.4%之间,大部分在30%左右。     

Wide-range tuning of polymer microring resonators by the photobleaching of CLD-1 chromophores

We present a simple and effective method for the postfabrication trimming of optical microresonators. We photobleach CLD-1 chromophores to tune the resonance wavelengths of polymer microring resonator optical notch filters. A maximum wavelength shift of -8.73 nm is observed. The resonators are fabricated with a soft-lithography molding technique and have an intrinsic Q value of 2.6 x 10(4) and a finesse of 9.3. The maximum extinction ratio of the resonator filters is -34 dB, indicating that the critical coupling condition has been satisfied.     

电压压调谐多级液晶滤光片的理论研究

依据电压调谐多级液晶滤光片的设计原理,给出了设计实例。主要讨论了三片液晶盒组成的多级滤光片,在滤光片系统中液晶盒可以采用相同厚度,也可以使厚度成一定比例。厚度成比例的多级滤光片,其透射波长可通过调节外加电压而连续改变,调谐范围400~800 nm,覆盖整个可见光区;采用相同厚度液晶盒组成的多级滤光片可以从多条谱线中滤出所需要的波长。原理上两种形式都可以获得性能良好的滤光片。