PMN-PT single crystal focusing transducer fabricated using a mechanical dimpling technique

A ∼5 MHz focusing PMN-PT single crystal ultrasound transducer has been fabricated utilizing a mechanical dimpling technique, where the dimpled crystal wafer was used as an active element of the focusing transducer. For the dimpled focusing transducer, the effective electromechanical coupling coefficient was enhanced significantly from 0.42 to 0.56. The dimpled transducer also yields a −6 dB bandwidth of 63.5% which is almost double the bandwidth of the plane transducer. An insertion loss of the dimpled transducer (−18.1 dB) is much lower than that of the plane transducer. Finite element simulation also reveals specific focused beam from concave crystal surface. These promising results show that the dimpling technique can be used to develop high-resolution focusing single crystal transducers.     

Bonding and impedance matching of acoustic transducers using silver epoxy

Silver epoxy was selected to bond transducer plates on glass substrates. The properties and thickness of the bonding medium affect the electrical input impedance of the transducer. Thus, the thickness of the silver epoxy bonding layer was used as a design parameter to optimize the structure for the transducer input impedance to match the 50 Ω output impedance of most radio frequency (RF) generators. Simulation and experimental results show that nearly perfect matching is achieved without using any matching circuit. At the matching condition, the transducer operates at a frequency band a little bit below the half-wavelength resonant frequency of the piezoelectric plate. In experiments, lead titanate (PT) piezoelectric plates were employed. Both full-size, 11.5 mm × 2 mm × 0.4 mm, and half-size, 5.75 mm × 2 mm × 0.4 mm, can be well matched using optimal silver epoxy thickness. The transducer assemblies demonstrate high efficiency. The conversion loss from electrical power to acoustic power in soda-lime glass is 4.3 dB. This loss is low considering the fact that the transducers operate at off-resonance by 12%. With proper choice of silver epoxy thickness, the transducer can be matched at the fundamental, the 3rd and 5th harmonic frequencies. This leads to the possible realization of triple-band transducers. Reliability was assessed with thermal cycling test according to Telcordia GR-468-Core recommendation. Of the 30 transducer assemblies tested, none broke until 2900 cycles and 27 have sustained beyond 4050 cycles.     

High-frequency ultrasonic transducer based on lead-free BSZT piezoceramics

This paper describes the fabrication and evaluation of a high-frequency (40 MHz) transducer based on lead-free piezoceramics for ultrasonic imaging. The transducer with an aperture size of 0.9 mm has been fabricated using barium strontium zirconate titanate ((Ba_0.95Sr_0.05)(Zr_0.05Ti_0.95)O₃, abbreviated as BSZT) ceramics. The lead-free BSZT has a piezoelectric d₃₃ coefficient of 300 pC/N and an electromechanical coupling factor k_t of 0.45. High-frequency ultrasound transducers were fabricated and a bandwidth of 76.4% has been achieved with an insertion loss of −26 dB. Applications in high resolution biological and medical imaging could be possible with this lead-free material.     

Micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular array

This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9 × 9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm² with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and −6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about −35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.     

Design and in vitro evaluation of a real-time catheter localization system using time of flight measurements from seven 3.5 MHz single element ultrasound transducers towards abdominal aortic aneurysm procedures

Interventional surgical instrument localization is a crucial component of minimally invasive surgery. Image guided surgery researchers are investigating devices broadly categorized as surgical localizers to provide real-time information on the instrument’s 3D location and orientation only. This paper describes the implementation and in vitro evaluation of a prototype real-time nonimaging ultrasound-based catheter localizer system towards use in abdominal aortic aneurysm procedures. The catheter-tip is equipped with a single element ultrasound transducer which is tracked with an array of seven external single element transducers. The performance of the system was evaluated in a water tank and additionally in the presence of pork belly tissue and also a nitinol-dacron stent graft. The mean root mean square errors were respectively 1.94 ± 0.06, 2.54 ± 0.31 and 3.33 ± 0.06 mm. In addition, this paper illustrates errors induced by transducer aperture size and suggests a method for aperture error compensation. Aperture compensation applied to the same experimental data yielded mean root mean square errors of 1.05 ± 0.07, 2.42 ± 0.33 and 3.23 ± 0.07 mm respectively for water; water and pork; and water, pork and stent experiments. Lastly, this paper presents a video showing free-hand movement of the catheter within the water tank with data capture at 25 frames per second.     

Time reversal in ultrasound focusing transmitters and receivers

The ability of a single-channel time reversal acoustic systems to focus and receive ultrasound radiation is considered. The basic element of these systems is a liquid-filled acoustic reverberator. Two types of the reverberators have been experimentally studied; one of them is a thin-wall cylindrical balloon used in ultrasound catheters for treatment of cardiac fibrillation, and the other consists of plane-parallel foil layers. It is demonstrated that such systems can effectively focus ultrasound using only one radiation channel. Random deformation of balloon walls and foil layers leads to a noticeable improvement of focusing quality and helps to overcome the limitations imposed by a spatial symmetry of a system. The use of a binary radiation mode increases the focal field intensity as compared to the conventional mode. The possibility of spatial localization of external sources with the use of the time reversal focusing system as a receiver is demonstrated.     

Microfabrication of stacks of acoustic matching layers for 15 MHz ultrasonic transducers

This paper presents a novel method used to manufacture stacks of multiple matching layers for 15 MHz piezoelectric ultrasonic transducers, using fabrication technology derived from the MEMS industry. The acoustic matching layers were made on a silicon wafer substrate using micromachining techniques, i.e., lithography and etch, to design silicon and polymer layers with the desired acoustic properties. Two matching layer configurations were tested: a double layer structure consisting of a silicon–polymer composite and polymer and a triple layer structure consisting of silicon, composite, and polymer. The composite is a biphase material of silicon and polymer in 2-2 connectivity. The matching layers were manufactured by anisotropic wet etch of a (1 1 0)-oriented Silicon-on-Insulator wafer. The wafer was etched by KOH 40 wt%, to form 83 μm deep and 4.5 mm long trenches that were subsequently filled with Spurr’s epoxy, which has acoustic impedance 2.4 MRayl. This resulted in a stack of three layers: The silicon substrate, a silicon–polymer composite intermediate layer, and a polymer layer on the top. The stacks were bonded to PZT disks to form acoustic transducers and the acoustic performance of the fabricated transducers was tested in a pulse-echo setup, where center frequency, −6 dB relative bandwidth and insertion loss were measured. The transducer with two matching layers was measured to have a relative bandwidth of 70%, two-way insertion loss 18.4 dB and pulse length 196 ns. The transducers with three matching layers had fractional bandwidths from 90% to 93%, two-way insertion loss ranging from 18.3 to 25.4 dB, and pulse lengths 326 and 446 ns. The long pulse lengths of the transducers with three matching layers were attributed to ripple in the passband.     

Lead-free KNLNT piezoelectric ceramics for high-frequency ultrasonic transducer application

This paper presents the latest development of a lead-free piezoelectric ceramic and its application to transducers suitable for high-frequency ultrasonic imaging. A lead-free piezoelectric ceramic with formula of (K_0.5Na_0.5)_0.97Li_0.03(Nb_0.9 Ta_0.1)O₃ (abbreviated as KNLNT-0.03/0.10) was fabricated and characterized. The material was found to have a clamped dielectric constant ε₃₃^S/ε₀ = 890, piezoelectric coefficient d₃₃ = 245 pC/N, electromechanical coupling factor k_t = 0.42 and Curie temperature T_c > 300 °C. High-frequency (40 MHz) ultrasound transducers were successfully fabricated with the lead-free material. A representative lead-free transducer had a bandwidth of 45%, two-way insertion loss of -18 dB. This performance is comparable to reported performances of popular lead-based transducers. The comparison results suggest that the lead-free piezoelectric material may serve as an alternative to lead-based piezoelectric materials for high-frequency ultrasonic transducer applications.     

High-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler

This work reports the potential use of high-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler. By using harmonic frequencies of a thick bulk Lead Zirconate Titanate (PZT) transducer with a novel air-reflector Fresnel lens, we obtained strong ultrasound signals at 60 MHz (3rd harmonic) and 100 MHz (5th harmonic). Both experimental and theoretical analysis has demonstrated that the transducers can be applied to Doppler systems with high frequencies up to 100 MHz.     

Feasibility of using ultrasound contrast agents to increase the size of thermal lesions induced by non-focused transducers: in vitro demonstration in tissue mimicking phantom

Miniature flat ultrasound transducers have shown to be effective for a large variety of thermal therapies, but the associated superficial heating implicates developing original strategies in order to extend therapeutic depth. The goal of the present paper is to use ultrasound contrast agents (UCA) to increase remote attenuation and heating. Theoretical simulations demonstrated that increasing attenuation from 0.27 to 0.8 Np/cm at 10 MHz beyond a distance of 18 mm from the transducer should result in longer thermal damages due to protein coagulation in a tissue mimicking phantom. Contrast agents (BR14, Bracco, Plan-les-Ouates, Switzerland) were embedded in thermo-sensitive gel and attenuations ranging from 0.27 to 1.33 Np/cm were measured at 10 MHz for concentrations of BR14 between 0 and 4.8%. Thermal damages were then induced in several gels, which had different layering configurations. Thermal damages, 12.8 mm in length, were obtained in homogeneous gels. When mixing contrast agents at a concentration of 3.2% beyond a first 18 mm-thick layer of homogeneous gel, the thermal damages reached 21.5 mm in length. This work demonstrated that contrast agents can be used for increasing attenuation remotely and extending therapeutic depth induced by a non-focused transducer. Additional work must be done in vivo in order to verify the remote-only distribution of bubbles and associated increase in attenuation.     

Dual-mode transducers for ultrasound imaging and thermal therapy

Medical imaging is a vital component of high intensity focused ultrasound (HIFU) therapy, which is gaining clinical acceptance for tissue ablation and cancer therapy. Imaging is necessary to plan and guide the application of therapeutic ultrasound, and to monitor the effects it induces in tissue. Because they can transmit high intensity continuous wave ultrasound for treatment and pulsed ultrasound for imaging, dual-mode transducers aim to improve the guidance and monitoring stages. Their primary advantage is implicit registration between the imaging and treatment axes, and so they can help ensure before treatment that the therapeutic beam is correctly aligned with the planned treatment volume. During treatment, imaging signals can be processed in real-time to assess acoustic properties of the tissue that are related to thermal ablation. Piezocomposite materials are favorable for dual-mode transducers because of their improved bandwidth, which in turn improves imaging performance while maintaining high efficiency for treatment. Here we present our experiences with three dual-mode transducers for interstitial applications. The first was an 11-MHz monoelement designed for use in the bile duct. It had a aperture that was cylindrically focused to 10 mm. The applicator motion was step-wise rotational for imaging and therapy over a 360°, or smaller, sector. The second transducer had 5-elements, each measuring for a total aperture of . It operated at 5.6 MHz, was cylindrically focused to 14 mm, and was integrated with a servo-controlled oscillating probe designed for sector imaging and directive therapy in the liver. The last transducer was a 5-MHz, 64-element linear array designed for beam-formed imaging and therapy. The aperture was with a pitch of 0.280 mm. Characterization results included conversion efficiencies above 50%, pulse-echo bandwidths above 50%, surface intensities up to , and axial imaging resolutions to 0.2 mm. The second transducer was evaluated in vivo using porcine liver, where coagulation necrosis was induced up to a depth of 20 mm in 120 s. B-mode and M-mode images displayed a hypoechoic region that agreed well with lesion depth observed by gross histology. These feasibility studies demonstrate that the dual-mode transducers had imaging performance that was sufficient to aid the guidance and monitoring of treatment, and could sustain high intensities to induce coagulation necrosis in vivo.     

Analysis of 2-D motion tracking in ultrasound with dual transducers

We study displacement and strain measurement error of dual transducers (two linear arrays, aligned orthogonally and coplanar). Displacements along the beam of each transducer are used to obtain measurements in two-dimensions. Simulations (5 MHz) and experiments (10 MHz) are compared to measurements with a single linear array, with and without angular compounding. Translation simulations demonstrate factors of 1.07 larger and 8.0 smaller biases in the axial and lateral directions respectively, for dual transducers compared to angular compounding. As the angle between dual transducers decreases from 90° to 40°, for 1% compression simulations, the lateral RMS error ranges from 2.1 to 3.9 μm compared to 9 μm with angular compounding. Simulation of dual transducer misalignment of 1 mm and 2° result in errors of less than 9 μm. Experiments demonstrate factors of 3.0 and 5.2 lower biases for dual transducers in the axial and lateral directions respectively compared to angular compounding.     

Simultaneous optical second harmonic and sum frequency intensity image observation of hydrogen deficiency on a H-Si(1 1 1) 1 × 1 surface after IR light pulse irradiation

In this study, we developed a microscope for the simultaneous acquisition of optical sum frequency (SF) and second harmonic (SH) intensity images in UHV conditions, and observed resonant electronic and vibrational images of the H-Si(1 1 1) surface after IR light irradiation of pulse width ∼6 μs. The SH intensity images showed a spatial distribution of resonant electronic states, associated with the dangling bonds formed after hydrogen desorption induced by the IR light pulses. This result indicates that the hydrogen coverage decreased to less than ∼0.6 ML in the irradiated area. The SF intensity images before the IR light pulse irradiation showed signals attributed to Si-H stretching vibration on the H-Si(1 1 1) surface. After the IR light pulse irradiation, non-resonant SF signals appeared in the irradiated area. The non-resonant SF signals may originate from a nonlinear optical transition involving the surface electronic levels in the dangling bonds. We also found an unidentified bonding state on the edges of the irradiated area in some light conditions. Both the resonant and non-resonant signals were very weak in this area.     

Assessing the relationship between the inter-rod coupling and the efficiency of piezocomposite high-intensity focused ultrasound transducers

The electroacoustic conversion efficiency of the ultrasonic transducer is a critical performance index for high-power applications. The material properties, volume fraction (VF) and aspect ratio (AR) are typically regarded as the design parameters of the piezocomposite transducer. We hypothesized that the spacing between piezoelectric rods was also a dominant factor. Therefore, the inter-rod coupling effects on the efficiency of 1–3 piezocomposite ultrasonic transducers were investigated in this study. The efficiencies of six flat and three curved 1.0 MHz PZT4 epoxy composite transducers with different geometric parameters were measured. Finite element transient analyses of the inter-rod electrical-mechanical coupling in the composites were carried out to explain the measured results. The experimental results showed that for 0.47 AR, the 79% VF transducers had lower efficiency than the 64% VF and 53% VF transducers. For 0.19 AR, the efficiency of the 59% VF transducer was not greater than the efficiency of the 39% VF transducer. Numerical analyses demonstrated that the positive peak voltage induced by the coupling of the side rods was more than twice the level induced by the coupling of the diagonal rods for any spacing. The diagonal coupling voltage peak did not change for spacings larger than 0.2 mm. Moreover, for spacings of 0.05 and 0.1 mm, the inter-rod coupling caused 24% and 20% waveform shifts of the driving voltage, respectively, while the 0.2 mm spacing coupling caused a 14% reduction in the amplitude of the driving voltage. As a result, the asymmetry of the driving voltage degraded the efficiency of the composite transducers and became more severe when the spacing was decreased. We concluded that the efficiency loss induced by inter-rod coupling as a function of spacing should be considered when designing piezocomposite transducers.     

Reflector-based phase calibration of ultrasound transducers

Recently, the measurement of phase transfer functions (PTFs) of piezoelectric transducers has received more attention. These PTFs are useful for e.g. coding and interference based imaging methods, and ultrasound contrast microbubble research. Several optical and acoustic methods to measure a transducer’s PTF have been reported in literature. The optical methods require a setup to which not all ultrasound laboratories have access to. The acoustic methods require accurate distance and acoustic wave speed measurements. A small error in these leads to a large error in phase, e.g. an accuracy of 0.1% on an axial distance of 10 cm leads to an uncertainty in the PTF measurement of ±97° at 4 MHz. In this paper we present an acoustic pulse-echo method to measure the PTF of a transducer, which is based on linear wave propagation and only requires an estimate of the wave travel distance and the acoustic wave speed. In our method the transducer is excited by a monofrequency sine burst with a rectangular envelope. The transducer initially vibrates at resonance (transient regime) prior to the forcing frequency response (steady state regime). The PTF value of the system is the difference between the phases deduced from the transient and the steady state regimes. Good agreement, to within 7°, was obtained between KLM simulations and measurements on two transducers in a 1-8 MHz frequency range. The reproducibility of the method was ±10°, with a systematic error of 2° at 1 MHz increasing to 16° at 8 MHz. This work demonstrates that the PTF of a transducer can be measured in a simple laboratory setting.     

一种非均匀厚度压电复合材料片宽带换能器的实验研究

本文利用１－３压电复合材料作为换能元件，通过特殊工艺制备成一面是平面，一面是球面的非均匀厚度压电振子，这种压电晶片加上激励电压后，不同厚度处以不同的共振频率振动，从而使压电晶片的振动频带加宽，本文介绍了这种压电晶片的机电特性，以及用这种压电晶片制成的宽带聚焦超声换能器的脉冲回波特性，此外，文中还对这种换能器与均匀厚度压电晶片换能器的脉冲回波特性进行了比较。     

Acoustic characterization of a new trisacryl contrast agent. Part I: In vitro study

The objective of the study was to acoustically characterize trisacryl polymeric microparticles (TMP), which are derived from biocompatible embolic agents.With significant acoustic properties, these polymeric particles could be potentially used as targeted ultrasound contrast agents, directed towards a specific site, with ligands conjugation on the polymeric network surface. In the in vitro study, a pulser/receiver (PRF of 1 kHz), associated to different transducers (5, 10 and 15 MHz), was used to measure the acoustic properties of the TMP inserted in a Couette flow device. Acoustic characterization according to TMP concentration (0.12-15.63 mg/ml), frequency (4.5-17 MHz, defined by each transducer bandwidth), ultrasound pressure (137-378 kPa) and exposure time (0-30 min) was conducted. Particle attenuation was also evaluated according to TMP concentration and emission frequency. Backscattering increased non linearly with concentration and maximum enhancement was of 16.4 dB ± 0.89 dB above 7.8 mg/ml. This parameter was found non-linear with increasing applied pressure and no harmonic oscillation could be noticed. Attenuation reached approximately 1.4 dB/cm at 15 MHz and for the 15.6 mg/ml suspension.The TMP have revealed in vitro ultrasound properties comparable to those observed with known contrast agents, studied in similar in vitro systems. However, such set-ups combined with a rather aqueous suspending medium, have some limitations and further investigations need now to be conducted to approach in vivo conditions in terms of flow and blood environment.     

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

The influence of the thickness of non-piezoelectric pieces on pre-stressed piezotransducers

The mechanical pre-stress applied in piezotransducers used to generate high power ultrasound is needed to avoid ceramics fracture on traction cycle. Pre-stress levels inferior to 50 MPa can yield resonance shifting due to effectiveness of acoustic coupling between transducer pieces. Symmetrical transducers with different thickness of passive parts were submitted to axial mechanical pre-stress up to 50 MPa and their resonances were measured. The experimental results show the increasing of the resonances frequencies with the level of applied pre-stress. Similar effect is verified in simulations by using a model based on Mason's equivalent electric circuit. Due to the similarity of these effects, a relation between applied pre-stress and pieces coupling was proposed for the transducer assembled. In addition, the dependence of the thickness of non-piezoelectric pieces on the coupling effectiveness between them is discussed. The results show that transducers with small thickness present more expressive shifting resonance ratio.     

The resonance frequencies on mechanically pre-stressed ultrasonic piezotransducers

The piezotransducers employed in high power ultrasound are composed of piezoelectric ceramics and metallic pieces. These transducers are mechanically pre-stressed in order to avoid the ceramic fractures when high voltage is applied under resonance. The resonance and anti-resonance frequencies are shifted depending on the level of applied mechanical pre-stressing. This paper discusses some causes of this shifting on a experimental study. The discussion takes into account the variations on characteristic parameters of the ceramics and the acoustic coupling between parts of the transducer.