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1.
应用磁控溅射法制备的非晶NiTi薄膜作阻挡层,在Si (100)衬底上构造了(La0.5Sr0.5)CoO3/ Pb(Zr0.4Ti0.6)O3/(La0.5Sr0.5)CoO3(LSCO/PZT/LSCO)铁电电容器异质结,研究了Pb(Zr0.4Ti0.6)O3铁电薄膜的结构和物理性能.实验发现LSCO/PZT/LSCO铁电电容器具有良好的电学性能,在417kV/cm的驱动场强下,PZT铁电电容器具有较低的矫顽场强(125kV/cm)和较高的剩余极化强度(19.0μC/cm2),良好电容-电压特性(C-V)和保持特性,铁电电容器经过1010次反转后,极化强度没有明显下降,表明了非晶NiTi薄膜可以用作高密度硅基铁电存储器的扩散阻挡层.  相似文献   

2.
采用磁控溅射法和脉冲激光沉积法,在SrTiO3(001)衬底上制备了La0.5Sr0.5CoO3(70 nm)/Pb(Zr0.4Ti0.6)O3(70 nm)/La0.5Sr0.5CoO3(70 nm) (LSCO/PZT/LSCO)铁电电容器异质结.X射线衍射结果表明:LSCO和PZT薄膜均为外延结构.在5 V的外加电压下, LSCO/PZT/LSCO电容器具有较低的矫顽电压(0.49 V),较高的剩余极化强度(41.7 μC/cm2 )和较低的漏电流密度(1.97×10-5 A/cm2),LSCO/PZT/LSCO电容器的最大介电常数为1073.漏电流的分析表明:当外加电压小于0.6 V时,电容器满足欧姆导电机制;当外加电压大于0.6 V时,符合空间电荷限制电流(SCLC)导电机制.  相似文献   

3.
采用Ni-Nb薄膜作为导电阻挡层,以La0.5Sr0.5CoO3(LSCO)为底电极,构建了LSCO/Pb(Zr0.4,Ti0.6)O3(PZT)/LSCO异质结电容器。使用X射线衍射仪和铁电测试仪对其进行结构表征和性能测试。实验发现:Ni-Nb薄膜为非晶结构,PZT薄膜结晶状况良好。LSCO/PZT/LSCO电容器在5 V外加电压测试下,电滞回线具有良好的饱和趋势,剩余极化强度Pr为35.5μC/cm2,矫顽电压Vc为1.42 V,电容器具有良好的抗疲劳特性和保持特性。  相似文献   

4.
采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上,制备了Pt/Pb(Zr,Ti)O3(PZT)/Pt和SrRuO3(SRO)/PZT/SrRuO3(SRO)异质结电容器,并研究了快速退火条件下SRO导电层对PZT结构和性能的影响.XRD测试表明,两种结构电容器中的PZT薄膜均为钙钛矿结构,SRO/PZT/SRO、Pt/PZT/Pt均具有较好的铁电性和脉宽依赖性,5 V电压下两电容器的剩余极化强度Pr和矫顽电压Vc分别为28.3 μC/cm2、1.2 V和17.4 μC/cm2、2.1 V.在经过1010次翻转后,SRO/PZT/SRO铁电电容器疲劳特性相对于Pt/PZT/Pt电容器有了较大的改善,但SRO导电层的引入也带来了漏电流增大的问题.  相似文献   

5.
分别采用磁控溅射法和溶胶-凝胶法(Sol-gel)制备了(La0.5Sr0.5)CoO3(LSCO)和Pb(Zr1-xTix)O3(PZT)薄膜,在Pt(111)/Ti/SiO2/Si基片上构架了LSCO/Pb(Zr0.4Ti0.6)O3(PZT(40/60))/LSCO和LSCO/Pb(Zr0.2Ti0.8)O3(PZT(20/80))/LSCO铁电电容器,研究了两种铁电电容器的结构和性能。XRD结构分析表明:两种四方相的不同Zr/Ti比例的PZT薄膜均为结晶良好的多晶钙钛矿结构。在5 V测试电压下,LSCO/PZT(40/60)/LSCO和LSCO/PZT(20/80)/LSCO两种铁电电容器的剩余极化强度(Pr)和矫顽场(Ec)分别为:28μC/cm2和1.2 V以及32μC/cm2和2 V。相对于PZT(40/60),PZT(20/80)具有较大的剩余极化强度和矫顽场,是由于其矩形度(c/a)较大。两种电容器都具有较好的脉宽依赖性和抗疲劳性。在5 V的测试电压下,LSCO/PZT(40/60)/LSCO电容器的漏电流密度为3.2×10-5A/cm2,LSCO/PZT(20/80)/LSCO电容器的漏电流密度为3.11×10-4A/cm2,经拟合分析发现:在0~5 V的范围内,两种电容器都满足欧姆导电机制。  相似文献   

6.
应用磁控溅射法在以SrRuO3 (SRO)薄膜为缓冲层的Pt/TiO2/SiO2/Si(001)基片上制备了多晶BiFeO3 (BFO)薄膜,构架了SRO/BFO/SRO异质结电容器.采用X射线衍射、铁电测试仪等研究沉积温度对BFO薄膜结构和性能的影响.X射线衍射图谱显示BFO薄膜为多晶结构.在2.5 kHz测试频率下,500℃生长的BFO薄膜呈现比较饱和的电滞回线,2Pr为145μC/cm2,矫顽场Ec为158 kV/cm,漏电流密度约为2.4×104 A/cm2.漏电机制研究表明,在低电场区,SRO/BFO/SRO电容器满足欧姆导电机制,在高电场区,满足普尔-弗兰克导电机理.实验发现:SRO/BFO/SRO电容器经过109翻转后仍具有良好的抗疲劳特性.  相似文献   

7.
以射频磁控溅射法生长的La0.5Sr0.5CoO3( LSCO)为电极,采用溶胶-凝胶法在以Ti-Al为导电阻挡层的Si基片上生长了用不同Pb过量前驱体溶液(溶胶)制备的LSCO/Pb( Zro4Ti0.6)O3(PZT)/LSCO电容器,以此构造了Pt/LSCO/PZT/LSCO/Ti-Al/Si异质结.Pb过量对LSCO/PZT/LSCO电容器极化翻转性能的影响表明:不同Pb过量溶胶对电容器的极化翻转性能影响很大,其中Pb过量15;的溶胶制备的样品在550℃常规退火1h后相对具有较好的翻转性能.在5V的外加电场下,LSCO/PZT/LSCO电容器的矫顽电压和剩余极化强度分别为1.25V和24.6μC/cm2.疲劳和电阻率测试分析表明:在经过109翻转后,不同样品的抗疲劳性能均很好,而电阻率随前驱体溶液Pb过量的增加呈现下降的趋势.  相似文献   

8.
采用溶胶-凝胶的方法在(001)取向的SrRuO3/SrTiO3 (SRO/STO)异质结上制备了外延BiFen95 Mn0.05O3(BFMO)薄膜,并以氧化铟锡(ITO)作为上电极构架了ITO/BFMO/SRO型电容器.研究表明,BFMO薄膜为良好的外延生长,当波长为404 nm的紫光入射到电容器表面,产生光电导,漏电流密度变大;测试电压为5V时,无光和光照时的漏电流密度分别为2.92 mA/cm2和10.10 mA/cm2.通过对电流密度的拟合发现:欧姆传导为外延ITO/BFMO/SRO电容器的主要漏电机制,并且光照没有改变电容器的导电机制.在紫光照射下,外延ITO/BFMO/SRO电容器的电滞回线发生变化,这是由于光照在薄膜内部产生光生载流子的缘故.由于光辐射的作用,外延ITO/BFMO/SRO电容器的电容增大.  相似文献   

9.
采用磁控溅射法制备SrRuO3(SRO)薄膜、脉冲激光沉积法制备BiFeO3(BFO),构架了Pt/SRO/BFO/SRO/SrTiO3(001)异质结,采用X射线衍射仪(XRD)、铁电测试仪研究了沉积温度对BFO薄膜结构和性能的影响.研究结果表明,随着温度的升高,BFO(001)和(002)衍射峰强度逐渐增强,BFO(110)和Bi2O3衍射峰强度逐渐减小,不同沉积温度下生长的样品都具有铁电性,在800 kV/cm的电场下,640 ℃下生长的BFO薄膜的剩余极化强度为65 μC/cm2.采用数学拟合的方法研究了Pt/SrRuO3/BiFeO3/SrRuO3/SrTiO3的漏电机理,结果表明BFO薄膜导电机理为普尔-弗兰克导电机理.  相似文献   

10.
采用磁控溅射的方法在SrRuO3/SrTiO3(001)衬底上外延生长BiFeO3薄膜,研究以不同金属或氧化物做顶电极时的铁电、铁磁性质和漏电流及其导电机制。X射线衍射图谱和Φ扫描图结果显示BiFeO3薄膜沿c轴外延生长,以Pt、Al做顶电极的薄膜剩余极化强度2Pr为68μC/cm2,生长Pt/SRO、FePt顶电极的薄膜剩余极化强度较小,2Pr为44μC/cm2,矫顽场2Ec约为370±20 kV/cm。薄膜的漏电流密度较小而且趋于饱和,在U=12 V时最大为1.94×10-3A/cm2,体传导普尔弗兰克导电为BiFeO3薄膜主要的导电机制。BFO薄膜展现出弱磁性,饱和磁化强度为9.3 emu/cm3,矫顽场为338 Oe。  相似文献   

11.
《Journal of Crystal Growth》2003,247(3-4):381-386
A Ruddlesden–Popper-type planar fault was introduced at the SrRuO3/BaTiO3 interface of a SrRuO3/BaTiO3/SrRuO3 heterofilm system using different processing conditions for the individual film layer. This fault occurs continuously and homogeneously along the interface, forming an extra Sr-rich sub-nanometer layer. The structure of the fault and the lattice behavior in the interface area were characterized on an atomic scale by properly imaging all types of atomic columns, especially the pure oxygen columns, by means of spherical-aberration-corrected high-resolution transmission electron microscopy. Information on local interdiffusion and lattice strain at the interface was obtained by quantitative evaluation of the atomic resolution images.  相似文献   

12.
采用固相法制备了(0.8 -x)Na0.5 Bi0.5TiO3 -0.2K0.5Bi0.5TiO3-xBaMnO3(简称NBT-KBT-BM)无铅压电陶瓷,研究了不同BM含量(x=0,0.25%,0.50%,0.75%,1.00%,1.25%,物质的量分数)样品的物相组成、显微结构及电性能.结果表明:所制备的NBT-KBT-BM陶瓷样品均为单一的钙钛矿结构.与纯NBT-KBT陶瓷相比,掺BM陶瓷的烧结温度降低,相对密度ρr得到提高.随x的增加,材料的压电常数d33、平面机电耦合系数kp与机械品质因子Qm先增大后减小,而介电损耗tanδ以及退极化温度Td一直降低.BM的掺入降低了材料的矫顽场Ec,提高了剩余极化强度Pr,从而增强了铁电性.当x=0.75%时,陶瓷获得最佳性能:d33=167 pC/N,kp=0.269,Qm=133,εr=774,tanδ=2.93%.  相似文献   

13.
A study of infrared absorption in the 250–4000 cm?1 region has been carried out for 0.5 As2Se30.5 GeSe2 glasses quantitatively doped with oxide impurity. The frequencies of the intrinsic 2- and 3-phonon absorption bands at 490 and 690 cm?1 correspond well to those predicted from combinations of the high frequency bands in the first order IR and Raman spectra of As2Se3 and GeSe2 glasses.Glasses doped with As2O3 exhibit the same oxide impurity absorptionbands as those doped with GeO2. Unlike As2Se3 glass, at impurity concentrations up to 1000 ppm As2O3, 0.5 As2Se30.5 GeSe2 glass exhibits only one major oxide impurity species, characterized by absorption bands at 780 and 1260 cm?1 and due to oxygen bonded to network Ge. The observation of a much weaker network AsO vibration band at 670 cm?1 confirms that oxygen bonds preferentially to Ge in this glass. The same minor oxide species appears to determine excess IR absorption at the CO2 laser wavelength of 10.6 μm in both As2Se3 and 0.5 As2Se3 0.5 GeSe2 glasses. The frequencies and intensities of absorption bands due to hydrogen impurities are also quite comparable for these two materials.  相似文献   

14.
采用溶胶-凝胶法制备(1-x)Na0.5Bi0.5 TiO3-xK0.5Bi0.5TiO3体系无铅压电陶瓷.XRD分析表明,用溶胶-凝胶法可以在650℃下合成具有钙钛矿结构的(1-x)Na0.5Bi0.5TiO3-xK0.5Bi0.5TiO3粉体,且在x=0.18~0.30之间存在三方-四方准同型相界(MPB).陶瓷的压电性能参数表明,该体系在MPB组成范围内具有最佳的压电性能:x=0.30时,压电常数d33达到最大值(d33=150 Pc·N-1),平面机电耦合系数kp与介电常数εH33T/ε0均在x=0.26时达到最大值,分别为36.7;和1107.  相似文献   

15.
K0.5Na0.5NbO3 powders have been directly synthesized by an alternative solid–state method. Stoichimometric mixture of ammonium niobium oxalate and C4H4O6KNa·4H2O were calcined in temperature range from 500 to 800 °C for 3 h. The precursor and calcination products were characterized with respect to stoichiometry, purity, crystalline structure, particle size and powder morphology using X–ray diffraction (XRD), X‐ray fluorescence (XRF) spectrometer, scanning electron microscope (SEM), Fourier transform infrared (FTIR) spectra, thermogravimetric (TG) analysis, differential scanning calorimetry (DSC) and UV–Vis diffuse reflectance (UV–Vis) spectroscopy. XRD and XRF results reveal that stoichiometric K0.5Na0.5NbO3 powders could be synthesized by the method. The particle size is about 68 nm for the precursor calcined at 500 °C according to XRD data, which is in good agreement with SEM data. The average band gap energy is estimated to be 3.18 eV by UV–vis diffuse reflectance spectra. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)  相似文献   

16.
采用固相反应合成法制备了(1-x)(0.96Bi0.5Na0.5TiO3-0.04BaTiO3)-xBi(Zn0.5 Ti0.5)O3陶瓷(x≤0.10).通过X射线衍射,介电温度谱等对该体系陶瓷的相结构及弛豫特性进行了研究.结果发现,该陶瓷在Bi(Zn0.5Ti05)O3加入量低于0.05时呈现纯钙钛矿结构.此外,随着Bi(Zn0.5Ti0.5)O3加入量的增加,其相结构由三方-四方共存向赝立方结构转变;同时,陶瓷的弥散因子上升,偶极子取向冻结活化能下降,表明BZT的加入明显地增加了0.96Bi0.5Na0.5TiO3-0.04 BaTiO3陶瓷的弛豫性.  相似文献   

17.
采用高温自助熔剂法制备了(Na0.5Bi0.5) TiO3-(K0.5Bi0.5) TiO3(简称:NBT-KBT)无铅铁电单晶,晶体尺寸为5mm×6 mm×1 mm.利用X射线衍射(XRD)手段研究了NBT-KBT单晶的相结构,结果表明晶体样品为钙钛矿四方相结构.Raman散射结果也表明了NBT-KBT单晶的拉曼振动模式具有四方相结构特征.利用扫描电镜(SEM)和透射电镜(TEM)研究了单晶的表面形貌和微结构特征.另外,单晶介电常数随温度以及频率的变化关系显示单晶具有弛豫铁电体特性.  相似文献   

18.
This study examined the potential applications of microwave dielectric properties of La(1‐2x/3)Bax(Mg0.5Sn0.5)O3 ceramics in rectenna. The La(1‐2x/3)Bax(Mg0.5Sn0.5)O3 ceramics were prepared by the conventional solid‐state method with various sintering temperatures. An apparent density of 6.62 g/cm3, a dielectric constant of 20.3, a quality factor of 51,700 GHz, and a temperature coefficient of resonant frequency of ‐78.2 ppm/K were obtained for La2.98/3Ba0.01(Mg0.5Sn0.5)O3 ceramics that were sintered at 1550 °C for 4 h. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)  相似文献   

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