光学工艺 微细加工技术与设备

TN305．7 2005043148 灰度狭缝扫描制作多台阶光栅的工艺研究=Research of fabrication muti-levels grating based on gray-slot scanning [刊,中]／魏国军(苏州大学信息光学工程研究所,江苏,苏州(215006)),徐兵…／／光学技术,-2005,31(2),-190- 192 采用灰度狭缝进行矢量化的直写,使平台沿着垂直狭缝的方向运动,获得了具有台阶结构的光栅槽型,编写了与DXF文件一致的接口直写控制程序。该方法对成像视场要求低,可以制作大面积光栅。以色分离光栅(CSG)为     

衍射光学平台建设

本平台建设围绕用于ICF的高衍射效率色散光栅CSG进行了元件的设计、镀膜、阈值判断、制作工艺等方面的研究和探索。搭建了衍射效率测试平台，并针对该系统作了误差定量分析。     

单级衍射量子点阵光栅的聚焦离子束直写法制备及光学性能检测

采用聚焦离子束直写技术,成功制作了面积为200μm×200μm,线密度500 mm 1,圆孔直径800 nm,金吸收体厚度为500 nm的单级衍射量子点阵光栅.研究了该光栅在波长442 nm激光下不同传输距离的衍射特性以及相对衍射效率.实验结果表明,量子点阵光栅不存在高级衍射,只保留了±1级和0级衍射,具有良好的单级衍射特性.1级衍射与0级衍射间距随传输距离的增大而增大,实测值与理论计算值相符.     

二维光栅制备及衍射特性研究

利用飞秒激光微加工平台,结合激光直写技术,在50 nm厚的金膜上制备出了二维光栅,研究了扫描速度和扫描间距固定时,飞秒激光能量密度的改变对二维光栅结构的影响。通过扫描电子显微镜(Scanning Electron Microscopy,SEM)对制备的二维光栅的形貌进行表征,并准确测量了光栅参数。利用氦氖激光分析了二维光栅的衍射效果,并与数值模拟得到的图案进行比较,分析了条纹缝宽和栅格尺寸对衍射点阵列光强分布的影响。研究表明飞秒激光直写技术可以方便快速地通过加工参数的改变制备不同尺寸分布的二维光栅。     

偏振光直写相位光栅的实验分析

设计了偏振光直写平台,基于此平台进行了相位光栅的刻写和研究.从实验上分析了不同的激光强度、偶氮高分子聚合物材料对相位光栅的衍射效率,重复刻写性,光栅表面起伏及偶氮聚合物折射率变化的影响.分析了光栅各衍射级次的偏振特性.这种相位光栅制作方法简便,刻写环境要求不高,室温下相对较稳定,而且光栅系数可以方便的调整,相比相位全息制作方法容易进行大范围光栅的刻写.在集成光学,光波导,光通讯领域有广泛的应用前景.     

一种适合中等教育的分光镜

原子结构和量子论,在中学物理教育中占有显著位置,因而与之密切相关的光谱实验也就显得很重要。出于教学需要,我们自制了一种分光镜,它较适合中等教育的特点,现介绍如下。仪器的光路如图1所示,其中P是狭缝,G是光栅。通常狭缝P到光栅G的垂直距离PO较光栅常数d大得多,因此,入射光束和衍射光束可近似看成平行光束,仍然近似满足光栅方程式中φ为衍射角,k为衍射级次,λ为衍射极大的波长。图2为组装仪器部分剖视图,图中,P是刻制的以产生入射光束的狭缝,G是600条/毫米的光栅,PG之间是暗腔。     

实际光栅系统的分辨本领

本文指出了传统的光栅分辨本领Ｒ＝ｋＮ只是在光源狭缝无限细的情况下的极限值。当光源狭缝还有一定宽度Ｗ时，衍射条纹将增宽，相应最小分辨角Δθｋ将增大，实际光栅系统的分辨本领将减小。文章运用衍射理论，给出了实际光栅系统分辨本领的修正公式。在实验中，在不同光栅宽度Ｄ的情况下，用ｋ＝１级衍射条纹，当测量恰能分辨钠黄光的双线结构的光源缝宽Ｗ时，这时光栅系统的分辨本领是λ／δλ≈１０００，与修正公式计算的理论值一致。     

平面透射光栅入射角为零的调节方法

一、引言光栅做为色散元件起着多狭缝衍射的作用,根据相互加强的干涉条件,可求得光栅公式     

飞秒激光辅助刻蚀制备蓝宝石光栅(特邀)

利用飞秒激光辅助刻蚀技术,在蓝宝石表面实现了周期、占空比及高度可调的光栅结构。解决了飞秒激光加工硬脆材料时表面质量较差、碎屑堆积导致的加工精度降低和难以制备深结构的问题。蓝宝石光栅结构的粗糙度从78 nm(激光直写后)降低到了7 nm(干法刻蚀后),实现了周期为800 nm光栅,以及深宽比为4的蓝宝石微结构的制备。飞秒激光辅助刻蚀技术能够制备蓝宝石表面高平滑光栅,并对光栅各级次衍射效率进行提升。     

扩展光源照明的双光栅系统滤波狭缝对成象莫尔条纹的作用与影响

本文用衍射理论定量分析了扩展光源照明的双光栅系统中滤波狭缝对成象莫尔条纹形成的影响及作用,给出了狭缝的面内及离面位移量与条纹手移量及倾斜角间的关系.     

Diffraction of spherical waves at an annular aperture in the use of the boundary diffraction wave theory: A comparison of different diffraction integral approaches

The integral expression for divergent spherical waves diffracted at an annular aperture is derived based on the theory of the boundary diffraction wave. The expressions for divergent spherical waves diffracted at a circular aperture and a disk, and the axial field are treated as the special cases of our general one. Numerical calculation results for axial and transversal intensity distributions are given to compare our results with the Kirchhoff diffraction integral, first and second Rayleigh diffraction integrals. As expected, our results are in agreement with those in the use of the Kirchhoff diffraction integral, but the computer time is reduced greatly by using the boundary diffraction wave theory. The four diffraction formulae are shown to be consistent for axial and transversal intensity distributions, if the source and observation points are positioned equally from the aperture, or the observation point is located enough far from the aperture. Otherwise, the mean value of the first and second Rayleigh diffraction integrals is equal to the result of the boundary diffraction wave theory.     

Angle Compensation and Asymmetry Effect of Light Diffracted by Millimeter Liquid Surface Slosh Wave

The angle compensation method is adopted to detect sloshing waves by laser diffraction,in the case that the wavelength of the sloshing waves is much greater than that of the incident light.The clear diffraction pattern is observed to be of asymmetry,involving orders,position and interval of the diffraction spots that are discovered during the light grazing incidence.It is found that the larger the angle of incidence is,the more obvious the asymmetry is.The higher the negative diffraction orders are,the smaller the intervals between spots are.On the contrary,in the positive region,the higher the diffraction orders are,the larger the spot intervals are.The positive interval is larger than that of the same negative diffraction order.If the incident angle reaches 1.558 rad in the experiment,all positive diffraction orders completely vanish.Based on the mechanism of phase modulation and with the Fourier transform method,the relations between the incident angle and position,interval spaces,and orders of diffraction spots are derived theoretically.The theoretical calculations are compared with the experimental data,and the comparison shows that the theoretical calculations are in good agreement with the experimental measurement.     

一维丝室气体探测器衍射像差的修正方法研究

一维位置灵敏单丝气体探测器采用单根镀金钨丝和200根阴极感应条的探测结构, X射线在阳极丝上产生的信号被多个阴极条感应, 利用重心法得到X射线的原初电离点的位置信息, 位置分辨率达到160 μm(半高全宽). 在同步辐射衍射实验中, X射线通过样品后会形成不同大小的衍射环, 本实验中测量得到11.148°和14.201°的两组衍射角位置信息; 通过平行移动一维探测器在衍射环范围内多次扫描, 可以重建得到二维衍射环. 由于一维探测器的气体厚度和入射窗宽度会给测量结果带来像差, 分析发现像差的影响大于一维探测器的位置分辨. 基于相应的物理分析对测量到的衍射位置进行修正, 修正后的衍射位置相比修正前的衍射位置的相对像差最大改善达到7%, 该方法实现了无像差二维衍射环的重建.     

Light diffraction features in an ordered monolayer of spheres

The structure and optical diffraction properties of monolayers of monodisperse spheres crystallized on transparent dielectric substrates are studied. Two types of diffraction phenomena are considered: surface light diffraction on the lattice of spheres and waveguide resonances in the monolayer plane. For experimental study of these phenomena, optical retroreflection and transmission spectra are measured as functions of the light incidence angle and azimuthal orientation of the incidence plane. The monolayer structures determined by scanning electron microscopy and light diffraction methods are in quantitative agreement. It is concluded that one-dimensional Fraunhofer diffraction is applicable to describe surface diffraction in the hexagonal lattice of spheres. In the case of oblique light incidence, anisotropy of diffraction and transmission spectra depending on the light incidence plane orientation with respect to the sphere lattice and linear polarization of incident light is detected. Waveguide resonances of the planar two-dimensional photonic crystal are approximated within the light diffraction model in the “empty” hexagonal lattice. The best approximation of the waveguide resonance dispersion is achieved using the effective refractive index, depending on the wavelength. Surface diffraction suppression by waveguide resonances of the photonic crystal is demonstrated. Surface diffraction orders are identified as diffraction at singular points of the Brillouin zone of the planar twodimensional photonic crystal.     

EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si3N4 SUBSTRATE

Experimental results are presented for the diffractive properties of wavelength-sized single groove in Si-Si₃N₄ substrate. The experimental results show that the diffraction of wavelength-sized single grooves in a non-perfectly conducting material is more complex than that of perfectly conducting material. The diffraction intensities change with the change of polarization angle of the incident light. The diffraction intensities for TM polarization light are larger as the groove width is larger. The diffraction intensities of TM polarization light decrease gradually and that of TE polarization light increase gradually when the groove width is close to the wavelength of the incident light. The variations of diffraction intensities are quite different not only for various grooves with different widths but also for different diffraction angles for the same groove. Although the intensity variation of each diffraction order has a very regular sinusoidal dependence on the polarization angles of the incident light, the variation phase of each diffraction order is not all the same.     

EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si3N4 SUBSTRATE

Experimental results are presented for the diffractive properties of wavelength-sized single groove in Si-Si₃N₄ substrate. The experimental results show that the diffraction of wavelength-sized single grooves in a non-perfectly conducting material is more complex than that of perfectly conducting material. The diffraction intensities change with the change of polarization angle of the incident light. The diffraction intensities for TM polarization light are larger as the groove width is larger. The diffraction intensities of TM polarization light decrease gradually and that of TE polarization light increase gradually when the groove width is close to the wavelength of the incident light. The variations of diffraction intensities are quite different not only for various grooves with different widths but also for different diffraction angles for the same groove. Although the intensity variation of each diffraction order has a very regular sinusoidal dependence on the polarization angles of the incident light, the variation phase of each diffraction order is not all the same.     

反射式单级衍射光栅

介绍了单级衍射光栅的发展趋势, 从理论上论证了单级衍射光栅的可行性, 引入了一种新型衍射光学元件—-准正弦反射式单级衍射光栅(QSRG). 它能有效抑制高级衍射, 可用于提高光谱系统的信噪比和精度. 而通过QSRG的实验结果也验证了此新型色散元件确实具有良好的单级衍射特性, 二级及以上的高级衍射被有效地抑制, 与理论预测几乎一致. 本文的结果可望在反射式光谱测量系统中得到广泛应用.     

不同结构的电控双折射无刻痕光栅研究

用MLC-7700-100向列相液晶制备了不同结构的电控双折射无刻痕液晶光栅.用波长为632.8 nm的He-Ne激光为光源,测量两种液晶光栅的光学衍射特性,用偏光显微镜观察不同电压下两种液晶光栅的液晶分子偏转状态和织构态改变的情况,并进行分析对比.发现双面电极条纹液晶光栅的电控衍射特性比单面电极条纹液晶光栅好.此结果...     

High pressure x-ray diffraction techniques with synchrotron radiation

This article summarizes the developments of experimental techniques for high pressure x-ray diffraction(XRD) in diamond anvil cells(DACs) using synchrotron radiation. Basic principles and experimental methods for various diffraction geometry are described, including powder diffraction, single crystal diffraction, radial diffraction, as well as coupling with laser heating system. Resolution in d-spacing of different diffraction modes is discussed. More recent progress, such as extended application of single crystal diffraction for measurements of multigrain and electron density distribution, timeresolved diffraction with dynamic DAC and development of modulated heating techniques are briefly introduced. The current status of the high pressure beamline at BSRF(Beijing Synchrotron Radiation Facility) and some results are also presented.     

实验研究探测器大小与散焦长度对无透镜鬼衍射的影响

无透镜鬼衍射是一种特殊的非局域关联成像技术,通过对包含物体信息的测试光路和不含物体信息的参考光路的光场强度涨落关联进行测量,在参考光路上可得到物体的衍射图样。利用赝热光源实验研究了探测器尺寸大小和光路散焦长度对无透镜鬼衍射质量的影响。实验以四缝物体为例,定量研究了探测器大小和散焦是如何改变无透镜鬼衍射的成像结果,并和理论模拟进行了比较,获得了比较一致的结果。利用图像相关度定量分析了实验结果与理想无透镜鬼衍射图像的差别,发现这两者都会使无透镜鬼衍射的质量变差。