The Effect of Nonequilibrium Synthesis Conditions on the Structure and Optical Properties of Amorphous Carbon Films

Optics and Spectroscopy - Amorphous carbon (a-C) thin films are synthesized using a nonequilibrium method of ion-plasma sputtering of a graphite target under argon atmosphere at a constant plasma...     

非晶金刚石薄膜的X射线反射研究

利用过滤阴极真空电弧系统制备了不同衬底偏压下非晶金刚石薄膜,分别采用X射线反射法测定了相应的非晶金刚石膜密度,分析了薄膜密度与沉积能量之间的变化规律．建立了薄膜密度随衬底偏压的变化曲线。研究发现在-80V时非晶金刚石膜密度存在最大值3．26g／cm^2,随着偏压的增大和减小,薄膜的密度都相应的下降;当衬底偏压加到-2000V时,密度减小到2．63g／cm^2,相对于密度的最大值变化较小。通过薄膜sp^3能态杂化含量与密度的简单比例关系,近似推算出非晶金刚石膜中sp^3能态的含量最高可达80％以上。     

N掺杂对非晶C薄膜的电子结构与光学性质的影响

用直流磁控溅射法制备了非晶C薄膜及N掺杂非晶C(a-C∶N)薄膜,用紫外-可见分光光谱仪、椭圆偏振仪、俄歇电子能谱(AES)等对薄膜进行了检测。结果表明：随源气体中N气含量的增加,透过率和折射率变小, 而光学带隙先增大后减小; 当薄膜中N的含量很少,N的掺入对sp3杂化C起稳定作用,使得薄膜光学带隙E_g增大。而较高量N的掺入抑制了sp3杂化C的形成,提高了薄膜中sp2键含量,使得薄膜光学带隙变小。参数D定义为俄歇电子能谱(AES)中最大正峰和最低负峰之间的距离,用俄歇电子能谱中的D值来计算薄膜的sp2键的百分含量,俄歇电子能谱(AES)表征也表明：较高量的N的掺入抑制了sp3杂化C的形成。所以应该考虑在较低N分压条件下掺N来改善非晶C薄膜的光学性能。     

FeCrNi合金与非晶碳复合的颗粒膜的磁电阻效应

利用直流磁控溅射沉积的方法首先制作FeCrNi合金与碳的多层膜,然后进行真空高温退火,进而形成颗粒间断膜,利用自制的磁电阻测量系统测量了其磁电阻的大小,并利用Raman测试了样品中碳膜的成键结构,利用SEM观察了其样品的表面形貌.     

Effect of Dichloromethane on Transport,Thermal, and Thermal‐Mechanic Properties of Amorphous Glass Poly(Ether Imide) Films

Abstract

In this work the interaction effect of dichloromethane on amorphous glassy poly(ether imide) (PEI) films was analyzed from the correlation between transport, thermal, and mechanical properties. The resulting sorption curves were anomalous two‐stage in the solvent activity range 0–0.34 and pseudo‐Fickian for the solvent activity range 0.40–0.50. From a generalized diffusion equation to describe the combination of Fickian and Case II mechanisms we found that the velocity of solvent penetration (v) was higher than the diffusion coefficient (D) for all solvent activities studied. It was observed from the cluster function and the mean size cluster that solvent–solvent interactions may occur at higher solvent activities. Thermal differential scanning calorimetry (DSC) and thermal gravimetric analysis [(TGA) and thermal mechanical (DMTA)] characterization showed that the solvent clusters may act as an antiplasticizer, increasing the elastic modulus of the PEI matrix by 1.9 times. Therefore, a shifting of the β transition was observed at higher temperatures around the glass transition.     

Quantum Transport Properties for Amorphous Solids with Fracton-Electron Interactions

Based on the fracton-electron interaction, qu an t urn transport quantities are calculated by using the Hansch-Mahan quantum transport equation. Compared,with those given by the first-order and the second-order interactions of the fracton-electron, an exact conductivity expression at all temperatures for any fractal structure is'presented. In addition, the anomalous behaviour of Hall coefficient is reported.     

GeSe2非晶半导体薄膜中光致结构及性能变化

运用X射线衍射分析、红外光谱分析、扫描电镜分析和透射光谱分析，研究了GeSe2非晶半导体薄膜经514.5nm波长的氩离子激光辐照后的结构及性能变化。实验结果表明，经热处理和激光辐照后，薄膜的光学吸收边均移向短波长处，这种移劝随着辐照激光强度和辐照时间的增加而增大，并且在退火薄膜中是可逆的，扫描电镜分析结果表明，薄膜在激光辐照后有微晶析出，这种微晶的析出量随着辐照激光强度的增强而增加。     

非晶金刚石膜的性能及其应用

非品金刚石薄膜具有超高硬度等一系列优异的特殊性能，为工程界孜孜追求的材料表面镀膜。用百纳科技公司研发制造的过滤阴极真空电弧离子镀膜机镀制的非晶金刚石薄膜，SP^3金刚石结构量≥80％，硬度高，膜／基结合力高，摩擦系数小，耐磨损，耐腐蚀，透光率高，在电子，机械，光学，生物医学上有广泛应用前景。我们已在视窗玻璃，丝锥，模具，硬质合金刀头等产品上成功应用。     

包埋于氮化硅薄膜中的硅团簇的光致发光特性

采用等离子体增强化学气相沉积(PECVD)技术,在低温下制备了富硅氢化氮化硅薄膜。利用红外吸收(IR)谱,光电子能谱(XPS)和光致发光(PL)谱,研究了在不同温度下退火的薄膜样品的结构和发光特性。在经过低温退火的薄膜中观测到一个强的可见发光峰。当退火温度较高时,随着与硅悬键有关的发光峰消失,可见发光峰位发生了蓝移。讨论了退火对薄膜中硅团簇的形成及其对发光的影响。根据Raman谱,计算了氮化硅薄膜中硅团簇的尺寸大小。通过实验结果和分析,我们认为PL谱中较强的室温可见发光峰来自于包埋于氮化硅中的硅团簇。     

Off-axis Thermal Properties of Carbon Nanotube Films

Theoretical calculations have predicted that individual Single-Walled Carbon Nanotubes (SWNT) have extremely high thermal conductivity (around 6.6 × 10⁴ W/m-K). The feasibility of constructing practical devices using the above mentioned properties, is critically dependent on the ability to synthesize high-thermal-conducting films. Highly conducting films would be of great use as heat sinks for the next generation of integrated chips. Excessive heating is currently a very serious problem in the endeavor for achieving faster and smaller chips. Since it is still not possible to perfectly align SWNT in the macroscopic scale, the thermal properties of the nano-films are therefore expected to have a statistical effect and thus lower than the intrinsic thermal conductivity of a single nanotube. Also the thermal conductivity perpendicular to the tube direction is more significant from a practical point of view. Multi-Walled Carbon Nanotubes (MWNT) were synthesized by Chemical Vapor Deposition (CVD) technique and subsequently characterized. The thin MWNT films were deposited by a solution casting technique over a metallic substrate. The off-axis thermal properties of these nano-films were studied by AC-calorimetry studies. In this method, the sample is heated by an AC source and the measurement of the relaxation rate is used to determine the thermal properties. This technique is well established for studying the thermal properties of complex fluids. Our results are contrasted with other thermal conductivity measurements intrinsic and bulk carbon nanotube samples. We have also measured off-axis thermal properties of nano-films synthesized from more crystalline SWNT samples and have compared this result with that of the MWNT-film. A model to explain the thermal conduction for our system is proposed. George Muench: Presently at the Department of Physics, University of New Haven, West Haven, CT-06516, USA     

a-Si:H薄膜的表面光电压谱和光电化学特性研究

采用表面光电压谱和光电化学方法，对不同掺杂类型的氢化非晶硅(s-Si:H)薄膜的光伏响应和光电化学特性进行了研究，测定了a-Si:h薄膜的能带结构，为a-Si:H薄膜在太阳能电池上的应用提供了有用的基础数据和简单光伏测量方法。     

氢退火的BZO前电极对非晶硅薄膜太阳能电池性能的影响

采用低压化学气相沉积方法在玻璃衬底上制备了B掺杂的ZnO（BZO）薄膜,通过氢退火对BZO进行处理,然后作为前电极进行了非晶硅薄膜太阳能电池的制备及性能研究。结果表明：在氢气气氛下退火后,BZO薄膜的载流子浓度基本无变化,但Hall迁移率显著提高,这使得BZO薄膜的导电能力提高;当采用厚度较小、透光率较高的BZO薄膜进行氢退火后作为前电极结构时,非晶硅薄膜太阳能电池的短路电流密度提高0.3~0.4 mA/cm²,电池的转化效率提高0.2%。实验结果可为通过优化前电极结构来提高非晶硅薄膜太阳能电池转化效率提供一种简易的方法。     

椭偏法表征四面体非晶碳薄膜的化学键结构

采用自主研制的双弯曲磁过滤阴极真空电弧(FCVA)技术,在不同衬底负偏压下制备了四面体非晶碳(ta-C)薄膜。通过分光光度计和椭偏(SE)联用技术精确测量了薄膜厚度,重点采用椭偏法对不同偏压下制备的ta-C薄膜sp3 C键和sp2 C键结构进行了拟合表征,并与X射线光电子能谱(XPS)和拉曼光谱的实验结果相对比,分析了非晶碳结构的椭偏拟合新方法可靠性。结果表明,在-100V偏压时薄膜厚度最小,为33.9nm;随着偏压的增加,薄膜中的sp2 C含量增加,sp3 C含量减小,光学带隙下降。对比结果发现,椭偏法作为一种无损、简易、快速的表征方法,可用于ta-C薄膜中sp2 C键和sp3 C键含量的准确测定,且在采用玻璃碳代表纯sp2 C的光学常数及拟合波长选取250～1700nm时的椭偏拟合条件下,拟合数值最佳。     

InAs量子点引入应力对调制掺杂结构中二维电子气输运特性的影响

系统研究了在调制掺杂AlGaAs/GaAs异质结中嵌入InAs量子点后对二维电子气输运特性的影响。使用分子束外延设备生长了量子点层与二维电子气沟道距离（T_ch）不同的3个样品,霍尔测试结果表明,二维电子气的电子迁移率和载流子浓度都随T_ch的减小而降低。基于几何相位分析算法对部分样品的高分辨透射电镜图像进行了处理,得到了其应变分布图。结果表明,应变主要分布在量子点的周围,并延伸到了量子点的上方。该不均匀的应力场可能是除库伦散射外影响电子迁移率降低的另一个重要因素。     

沉积压力对氢化非晶硅薄膜特性的影响

采用等离子增强化学气相沉积(PECVD)系统,以乙硅烷和氢气为气源,普通钠钙玻璃为衬底制备了氢化非晶硅(a-Si∶H)薄膜,研究了沉积压力对非晶硅薄膜的沉积速率、光学带隙以及结构因子的影响。采用台阶仪、紫外可见分光光度计、傅里叶变换红外光谱仪和扫描电子显微镜等手段分别表征了a-Si∶H薄膜的沉积速率,光学带隙、结构因子和表面形貌。结果表明： 随着沉积压力的增加,沉积速率呈现先上升后下降的趋势,光学带隙不断下降。当沉积压力小于210 Pa时,以SiH键存在的H原子较多,而以SiH₂或SiH₃等形式存在的H较少; 当沉积压力大于210 Pa时,以SiH₂,(SiH₂)_n或SiH₃等形式存在的H较多。通过结构因子的计算,发现沉积压力在110～210 Pa的范围内沉积的薄膜质量较好。     

超薄氢化非晶锗膜的结构与光电性质

通过PECVD制备出了不同厚度的a-Ge∶H膜,采用Raman光谱对样品进行了结构表征,由椭圆偏振光谱仪得到样品的厚度和光学常数,并计算了样品的光学带隙。由变温电导率分析了薄膜的电学输运性质,结果表明,载流子的传输机制为扩展态电导。进而利用变温PL谱研究了薄膜的发光性能,发现其发光峰在1.63 μm处;随着膜厚的减小,峰位和峰形都有改变,且强度明显提高。进一步分析发现,随着膜厚的减小非辐射复合跃迁的激活能增大,从而导致辐射复合过程增强。     

Structural, Optical and Electrical Properties of Hydrogen-Doped Amorphous GaAs Thin Films

Amorphous CaAs films are deposited on substrates of quartz glass and sificon by rf magnetron sputtering technique in different gas ambient. First, the amorphous structure of the prepared samples is identified by x-ray diffraction. Second, analysis by radial distribution function and pair correlation function method is established to characterize the microstructure of the samples. Then, the content and bond type of hydrogen are analysed using Fourier transform infrared absorption spectroscopy. It is found that the bonded hydrogen content increases with increasing partial pressure PH of H2. However, the hydrogen content saturates at PH 〉 1 × 10^-1 Pa. Hydrogen addition shills the optical absorption edge to higher energy, decreases the dark conductivity and improves the photo-sensitivity. The optical gap, dark conductivity and photo-sensitivity of the films are dependent on the bonded hydrogen content. These results demonstrate that hydrogen has obvious passivation effects on rf sputtered amorphous GaAs thin films.     

氢稀释制备的非晶碳膜的绿光和蓝光发射

在电容耦合式PECVD系统中,以CH4和H2为气源,通过控制H2的流量制备了一系列氢化非晶碳膜（a-C:H)样品。利用傅里叶变换红外光谱（FTIR）、光致发光谱（PL）和吸收谱对a-C:H膜的结构及光学性质进行了研究。结果表明：氢稀释可以在一定程度上减少碳的sp^2团簇的形成,增大它的光学带隙,并改变薄的微结构。与此同时,光致发光峰随郑 光学带隙的增大而蓝移;当光学带隙增大2．72eV时,出现了2．4eV（绿光）和2．97eV(蓝光）组成的发光峰。     

Effect of Vibration on Water Transport through Carbon Nanotubes

We study the response of water permeation properties through a carbon nanotube on the time-dependent mechanical signals. It is found that there is a critical frequency of vibrating fc （about 1333 GHz） which plays a significant role in the water permeation properties. The total water flow, the net flux, the number of hydrogen bonds and the dipole flipping frequency of the single-file water chain inside the nanotube are almost unchanged for the frequency of vibrating f 〈 fc. Simulation results show that the nanotube can be effectively resistant to the mechanical noise. Such excellent effect of noise screening is attributed to the exceptional property of water molecules connected by strong hydrogen bonds with each other and forming a one-dimensional water chain inside the nanotube. Our findings are important for the understanding of why biological systems can achieve accurate information transfer in an environment full of fluctuations.