基于Mueller矩阵椭偏仪的纳米压印模板与光刻胶光栅结构准确测量

在纳米压印工艺中,对模板和压印结构的几何参数进行快速、低成本、非破坏性地准确测量具有非常重要的意义.与传统光谱椭偏仪只能改变波长和入射角2个测量条件并且在每一组测量条件下只能获得振幅比和相位差2个测量参数相比,Mueller矩阵椭偏仪可以改变波长、入射角和方位角3个测量条件,而且在每一组测量条件下都可以获得一个4×4阶Mueller矩阵共16个参数,因此可以获得更为丰富的测量信息.通过选择合适的测量条件配置,充分利用Mueller矩阵中的测量信息,有望实现更为准确的纳米结构测量.基于此,本文利用自主研制的Mueller矩阵椭偏仪对硅基光栅模板和纳米压印光刻胶光栅结构进行了测量.实验结果表明,通过对Mueller矩阵椭偏仪进行测量条件优化配置,并且在光学特性建模时考虑测量过程中出现的退偏效应,可以实现压印工艺中纳米结构线宽、线高、侧壁角以及残胶厚度等几何参数更为准确的测量,同时对于纳米压印光刻胶光栅结构还可以直接得到光斑照射区域内残胶厚度的不均匀性参数.     

Dealing depolarization of light in Mueller matrices with scalar metrics

A number of depolarization metrics is applied to a series of reported Mueller matrices. It is shown the depolarization scalar metric Q(M) provides consistent results with the reported scalar metrics like the depolarization index and the degree of polarization. It is shown Q(M) provides additional information about the internal nature of the Mueller matrices, specifically when the upper limit, 3, is reached. It is also shown the depolarization index and the Q(M) metric are only necessary but not sufficient conditions for the physical realizability of Mueller matrices. Finally, Q(M) is proven to be consistent in all cases studied here.     

From weak to strong pinning I: A finite size study

We have used linear stability analysis to study the depinning of an elastic chain with long range interactions submitted to a random pinning potential. In this paper, we provide, for the first time, evidence of a pronounced change from a strong pinning regime to a weak pinning regime. This change depends on the strength of disorder, and takes place only in finite size systems. For a given disorder, we show a characteristic length separating the weak pinning regime from the strong pinning regime. This length depends on the long range of the algebraic decay of the elastic couplings. The weak pinning regime is very well described by perturbation theory. As an example, we discuss more specifically the case of wetting of heterogeneous surfaces, where the change from a strong to a weak pinning regime could be induced in the wetting front by varying the surface tension of the liquid-air interface.Received: 12 September 2003, Published online: 20 April 2004PACS: 05.10.-a Computational methods in statistical physics and nonlinear dynamics - 68.08.Bc Wetting - 02.50.Fz Stochastic analysis     

Three linear probe polarization method in Mueller polarimetry with a source of arbitrary ellipticity

This is a study of the effect of the ellipticity of the polarization of radiation at the inlet of the shaping polarizer in the probe channel of a Mueller polarimeter operating with three linear probe polarizations on the accuracy with which the incomplete Mueller matrix is determined (without a fourth beam). It is shown that the appearance of and variations in the ellipticity cause a change in the conditions for optimization of the set of polarizations of the probe radiation from the standpoint of minimizing the measurement error. In the case of linear polarization (zero ellipticity), the measurement error is the same as the error when four probe polarizations are used. This allows measurement of the complete Mueller matrix and makes this version of the polarimeter especially promising, because in the input channel of the polarimeter, a single polarizing element, i.e., a linear polarizer with a controllable azimuthal orientation, can be used as the polarization transducer. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 6, pp. 875–880, November–December, 2008.     

Error in determining Mueller matrix elements and its effect on solution of the inverse problem of polarimetry

We present an analysis of the errors in measurement of the Mueller matrix elements in polarimeters that are a combination of different types of Stokes polarimeters in the detection channel and controllable polarization converters in the probing channel. As polarization converters for the probing radiation, we consider a phase plate having four different angular positions in measuring the complete Mueller matrix and a linear polarizer having different angular positions in measuring the structural parts of an incomplete 4 × 3 Mueller matrix. We have shown that the error in determining the Mueller matrix elements is distributed nonuniformly over the matrix. The nature of the error distribution over the elements and its values are different for different combinations of detection and probing channels of the polarimeter, and depend on the anisotropy of the test object. The latter dictates the choice of the optimal layout for a Mueller polarimeter for studying media with the same or different types of anisotropy and the choice of Mueller matrix elements used to solve the inverse problem of determining the anisotropy parameters.     

Polarimetric target detection in the presence of spatially fluctuating Mueller matrices

In polarimetric imaging systems, the main source of perturbations may not be detection noise but fluctuations of the Mueller matrices in the scene. In this case, we propose a method for determining the illumination and analysis polarization states that allow reaching the highest target detection performance. We show with simulations and real-world images that, in practical applications, the statistics of Mueller matrix fluctuations have to be taken into account to optimize polarimetric imagery.     

Enhanced optical sensitivity to adsorption due to depolarization of anisotropic surface states

Reflectance difference spectroscopy is used to probe the optical transitions between surface states on the Cu(110) surface. Upon deposition of smallest amounts of carbon monoxide (CO) the signal is strongly quenched, which translates into a huge cross section of the order of 1000 A(2) for a single adsorbed CO molecule. This strongly enhanced surface sensitivity is interpreted as the loss in anisotropy (depolarization) of the surface states due to scattering from the adsorbed CO molecules. This feature renders RDS an extremely sensitive tool to probe the adsorption kinetics on anisotropic metal surfaces.     

Calculations of millimeter wave depolarization due to melting layer and rain

A model for calculating the total depolarization due to the melting layer and rain is proposed under the assumption that oblate spheroidal melting particles and raindrops have the same orientation. The melting layer is composed of the melting particles which are made up from the mixture of ice, air and water. The specific attenuation and the specific phase shift both for the melting layer and for rain are given in the power lawaR ^b form for the rain rates 0R12.5 mm/h and the parameters are tabled over the frequency range of 1–100 GHz. Using the model, the numerical calculation of the depolarization is possible for three drop size distributions.     

The local density of states in finite size photonic structures, small particles approach

The local density of states is studied with the help of the local perturbation method for vector and scalar wave fields propagating in finite size photonic structures. The local density of states is numerically calculated for one-, two-, and three-dimensional finite size photonic structures considering them as made of small particles.     

Fabrication of grating structures by simultaneous multi-spot fs laser writing

Two-photon polymerisation is an established technique for the fabrication of three-dimensional microstructures. To date structures have mostly been developed using single beam serial writing. A novel approach to simultaneous multi-spot two-photon polymerisation, that uses a SiO₂ on glass Fraunhofer diffractive optical element to generate an array of beamlets, is described. A Ti:sapphire laser, with wavelength 790 nm, 80 MHz repetition rate, 100 fs pulse duration and an average power of 25 mW, was used to initiate two-photon polymerisation. The DOE, in combination with a high power microscope objective, efficiently transforms the laser beam into a linear array of four spots of equal intensity. The fabrication of a periodic transmission grating, using parallel processing with these four spots, is shown. The grating was written in a Zr-loaded resin prepared on a glass substrate using dip coating deposition of a Zr/PMMA hybrid prepared by the sol-gel method. The operation of the diffractive element and the performance of the diffraction grating are also discussed.     

Attenuation and depolarization of millimeter waves due to incoherent scattering in tropical rainfall

The radiative transfer equation has been applied to investigate the effects of multiple scattering on communication at the millimeter wavelength in tropical rain. Horizontal linearly polarized incident waves are assumed. The scattering characteristics are calculated using the Mie theory at frequencies of 16, 34.8, 82, 140 and and at rainfall rates of 12.5, 50 and . Some results of the directional patterns of the incoherent intensities at various points in the rain medium are presented. The frequency dependence of the propagation distance, attenuation coefficient and the variation of incoherent specific intensities in tropical rainfall are investigated. The incoherent power at the receiver relative to the coherent power, which is important in assessing the quality of signal in the receiver, is also investigated. It is observed that the maximum incoherent copolarized received power is about in tropical rainfall at rainfall rate. Also the difference between the copolarized incoherent power in tropical and temperate rainfall is about at frequencies higher than , and about for the cross-polarized incoherent power components. It may therefore be safely said that multiple scattering may not result in serious degradation of the coherent wave component even in the most intense tropical precipitation. It also appears that it is independent of regional rainfall climatology.     

利用硅上倾斜V形槽结构制作闪耀光栅

以偏离〈100〉面25.24°的硅〈113〉晶面为基底,采用氧化、光刻等平面工艺,在其上制成光栅常数为36μm的二氧化硅光栅图形作掩模,用常规的硅各向异性腐蚀,在硅上形成连续倾斜的V形槽结构,制成槽距为36μm波长6328(?)时衍射效率达69%的闪耀光栅,进一步缩小槽距,可望获得实用的闪耀光栅.     

Correlations in ferromagnetic domain structures studied by means of the neutron depolarization technique

The polarization change of a polarized neutron beam after transmission through a partly magnetized ferromagnetic material can be described by a (3 × 3) depoalarization matrix. An earlier interpretation of this matrix in terms of domain quantities such as the reduced mean magnetization m, the mean domain size δ and the mean square direction cosines γ_x, γ_y and γ_z of the inner magnetization within the domain is extended by taking into account different correlations occuring in real domain structures, such as the correlation between neighbouring domain orientations expressed by the mean direction cosine K between these orientations and the correlation between the domain dimensions and the domain magnetization orientation of an arbitrary domain. The latter correlation can be expressed by means of the quantities Δ and I`, where Δ is a measure for the average shape anisotropy of the domains with respect to the direction of domain magnetization, and Γ is a measure for the movement of domain walls during the magnetization process of the sample. The possibilities and limitations of the resulting theory on neutron depolarization experiments are discussed.     

Resonant acoustic scattering by a finite linear grating of elastic shells

Theoretical and experimental studies of the acoustic scattering by a finite linear grating of elastic cylindrical shells are performed. It is observed that a resonant interaction takes place at low frequency when the shells are very close to each other. This phenomenon can be clearly associated to the Scholte-Stoneley wave that propagates around a single shell. It is shown that each resonance of the Scholte-Stoneley wave is split up into N resonances when N shells compose the grating.     

XPM-induced intensity distortion due to dispersion in fibre Bragg grating filters

We investigate the conversion of cross-phase modulation (XPM) to intensity distortion due to dispersion in fibre Bragg grating (FBG) filters. We find that there can be significant XPM-induced intensity distortion, especially near the edges of the filter passband where the in-band dispersion is increasingly pronounced. Since FBG filter dispersion occurs above and beyond that in standard single-mode fibre, this enhances XPM-induced intensity distortion arising from dispersion and should be accounted for in system design.     

Low-energy structures in strong field ionization revealed by quantum orbits

Experiments on atoms in intense laser pulses and the corresponding exact ab initio solutions of the time-dependent Schr?dinger equation (TDSE) yield photoelectron spectra with low-energy features that are not reproduced by the otherwise successful work horse of strong field laser physics: the "strong field approximation" (SFA). In the semiclassical limit, the SFA possesses an appealing interpretation in terms of interfering quantum trajectories. It is shown that a conceptually simple extension towards the inclusion of Coulomb effects yields very good agreement with exact TDSE results. Moreover, the Coulomb quantum orbits allow for a physically intuitive interpretation and detailed analysis of all low-energy features in the semiclassical regime, in particular, the recently discovered "low-energy structure" [C. I. Blaga, Nature Phys. 5, 335 (2009) and W. Quan, Phys. Rev. Lett. 103, 093001 (2009).     

Picosecond-pulse-induced two-photon fluorescence enhancement in biological material by application of grating waveguide structures

We report enhancement of two-photon fluorescence (TPF) excitation in fluorescent dyes and fluorescently labeled biomolecules by exploiting the optical properties of double grating waveguide structures (DGWSs). Picosecond laser pulses generate a large evanescent field based on the guided mode phenomenon in the resonant DGWSs, which induces strong TPF signals from fluorescent dyes at the waveguide surface. By recording enhanced TPF signals of Rhodamine B and Lucifer Yellow under resonance conditions, a detection sensitivity of concentrations of approximately one dye molecule per 0.1 microm2 was achieved. For the first time to our knowledge, enhanced TPF signals of a Lucifer Yellow-labeled biomolecule (human self-peptide) in an aqueous environment are demonstrated. These results strongly encourage the use of DGWSs as enhancement platforms in modern biophysics and biotechnology for investigations of biological membranes and cells.     

Optimization of grating size in chirped-pulse-amplification. laser system

We performed calculations for a chirped-pulse-amplification laser system with a sub-100-fs pulse duration including the finite size of gratings in an aberration-free stretcher/compressor design. Both the higher-order phase dispersion and the spectral clipping, which is due to the finite size of the optics in the stretcher and the compressor, are taken into account in the calculation. We discuss the influence of both phase dispersion and spectral clipping on the important parameters of the recompressed pulse, such as pulse duration, pulse contrast, and peak intensity, employing different phase-dispersion compensation methods. The calculations show that the use of a small compressor grating reduces the higher-order phase errors and smoothes the sharp spectral cut-off caused by spectral clipping in the stretcher, which consequently improves the pulse contrast ratio of the main pulse to the pedestal. Received: 1 April 2000 / Published online: 8 November 2000