Performance evaluation of a wave-front displacement system for vectorial shearing interferometer

We describe a wave-front displacement system using a novel configuration of a pair of wedge prisms. The wave-front propagation, through the displacement system, is analyzed using the exact ray trace. The main advantage, of this configuration, is that the shearing (direction and magnitude) is constant from the displacement system to the image plane. The direction of the shearing depends on the relative orientation of the prisms. The magnitude of the shearing is proportional to the distance between prisms. The proportionality constant depends on the wedge angle and the material of fabrication of the prisms, and it gives the sensitivity to the displacement of the system. The deviation of the shearing due to the difference between the wedge angles is larger than that the produced by the oblique incidence of the wave-front. The experimental results confirm the theoretical data.     

Real-time precision displacement measurement interferometer using the robust discrete time Kalman filter

This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real time. The interferometer system is modelled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modelling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high-precision displacement measurement in real time.     

用于位移精密测量的光外差马赫-泽德干涉仪

本文介绍了我们研制的用于位移精密测量的光外差马赫－泽德干涉仪。由于在光路设计中采用了共光路的布置，共模抑制技术得以实现，环境干扰产生的噪声得到很好的消除，相位检测的稳定性和精度大大提高。使用该干涉仪测量了一台在光学相移器内ＰＺＴ微位移驱动装置的电压－位移关系。测量结果具有良好的线性和重复性，与预期相符。根据测量数据分析，该光外差干涉仪具有３ｎｍ的位移测量精度。     

基于渥拉斯顿棱镜的单路实时偏振成像系统设计

针对非实时成像中动态场景偏振探测产生的虚假偏振信息问题,充分利用渥拉斯顿棱镜的分光特性,设计了一种新型实时偏振成像系统.采用像方远心望远透镜系统、准直透镜系统并设计匹配的成像镜系统,在单探测器阵列上同时获取偏振态相互垂直的两幅偏振图像.通过全系统联动设计与优化,系统的调制传递函数在截止频率处不小于0.55,全系统弥散斑均方根半径小于5.3μm,即小于探测器像元尺寸,满足成像设计要求.仿真结果证明该成像系统可有效解决传统分振幅偏振成像系统的实时性差的不足,分孔径偏振成像系统的能量利用率和分辨率低的问题以及偏振焦平面方法中光路串扰的缺陷,应用前景广阔.     

干涉光谱仪中棱镜的分光特性

对光波在Wollaston棱镜中的传播特性进行了深入的分析,得出了关于光波法线和光线的折射方向、折射率的解析表达式。对不同入射位置和不同入射角下o光与e光之间的光程差进行了计算机模拟,给出了相应的关系曲线。结果表明光程差与入射位置关系具有很好的线性,在切割角不太大的条件下光程差与入射角的关系也具有较好的线性。为双折射型空间调制干涉光谱仪的设计和应用提供了理论依据。     

Wollaston式平行分束与对称分束偏光棱镜设计

从Wollaston棱镜结构出发,寻找到两种设计方案,即把出射面为平面改为两个平面,若两平面向里凹,能得到大分束角对称分布的o、e光;若两平面向外凸,能得到剪切差大的平行出射的o、e光。大大拓宽了Wollaston式棱镜的使用范围。     

基于双Wollaston棱镜的对称分束角偏光分束镜

给出了基于双Wollaston棱镜的对称分束角偏光分束镜的一种新的设计思想,即通过改变组成棱镜的三部分之一的晶体光轴的方向来实现出射光束的对称分束,并研究了晶体光轴的旋转角与棱镜的结构角以及光波长的关系。结果表明,这种设计不但能实现光束的对称分束,而且还具有良好的偏光性能。     

Movement measurement with a grating interferometer using sinusoidal phase-modulation

Movements of a surface profile are measured with a two-grating interferometer using sinusoidal phase-modulation. Since sinusoidal phase-modulating (SPM) interferometry can record a phase change due to the movement of an object in the interference signal, the SPM interferometer is suitable for measuring the movement of the object. Some experiments show that the two-grating interferometer can measure a sinusoidal vibration with amplitude of several tens of microns and a step movement with a magnitude of several microns.     

双Wollaston棱镜光强分束比研究

利用折射定律和菲涅耳公式,研究了双Wollaston棱镜的光强分束比随入射光波长、棱镜结构角以及入射角等参量的变化关系,并进行了实验验证.结果表明：光强分束比随入射光波长的增大呈线性递减趋势;棱镜的结构角越小,光强分束比也越接近1;入射角对光强分束比的影响基本呈二次曲线型变化;当光正入射时,光强分束比最接近于1.给出了理论曲线和实验值的对比.     

用于微位移测量的笔束激光干涉仪

介绍了一种基于空间干涉原理的亚微米零差干涉位移测量方法。该方法是对笔束激光干涉仪在微位移测量领域的应用 ,干涉仪的测量精度不受光束波前畸变等光源噪声的影响。给出了干涉仪主要结构参数的选取原则 ;构建了用于微位移测量的笔束激光干涉仪实验系统。实验结果表明 ,该系统具有纳米测量分辨率。     

Wollaston棱镜阵列中子棱镜结构角误差分析

Wollaston棱镜阵列中各个子棱镜的结构角间的误差影响着光谱仪的性能.从干涉图的无缝拼接入手,推导了n元Wollaston棱镜阵列的最大光程差公式,以三元Wollaston棱镜阵列为例,分析子棱镜结构角误差对光谱分辨率的影响,通过干涉条纹光强公式构建干涉图样模型,利用Matlab软件编写相关程序,仿真了630 nm单色光的复原光谱,分析结构角误差对光谱的影响.实验结果表明:当子棱镜结构角误差大于10-3数量级时,光谱中将有伪峰出现,为Wollaston棱镜阵列的研制提供了理论依据.     

基于Wollaston棱镜的大角度液晶光束偏转系统

设计了一种能够应用于空间光通信的大角度高精度光束偏转系统。系统采用液晶空间光调制器(LCSLM)实现小角度光束偏转,采用多Wollaston棱镜级联实现角度放大。介绍了LCSLM和Wollaston棱镜的光束偏转原理,并对大角度高精度光束偏转系统进行了仿真分析。仿真结果表明系统能够实现角度范围为±13.25°的光束偏转。国内首次提出运用Wollaston棱镜来实现大角度的光束偏转。     

低温环境中位移测量的实现

针对EAST装置极向场中心螺管线圈测试实验中线圈位移量的测量,对低温环境中的位移测量方法进行了探讨,并提出了一种有效消除温度影响的位移测量方法:恒流源输入式位移测量。     

Interferometric 3-D displacement measurement using wavefront analysis

We propose and demonstrate a novel interferometric technique for 3-D displacement measurement. The method is based on the analysis of the phase difference distribution measured when two coherent curved wavefronts originating from different locations interfere. Both the in-plane and out-of-plane displacements are found simultaneously from a single phase difference distribution. We find that our system could measure with an accuracy better than 1.5 μm for in-plane displacements and 36 μm for out-of-plane displacements over 1 mm range. This accuracy was limited by the output lens performance. Theoretical analysis reveals that sub-micron accuracy may be possible with more careful calibration.     

Instantaneous frequency measurement based on complementary microwave photonic filters with a shared Mach-Zehnder interferometer

A novel configuration using only one Mach-Zehnder interferometer (MZI) for photonic-assisted instantaneous microwave frequency measurement is proposed. The amplitude comparison function (ACF), related to the input microwave frequency while independent of the input optical power and modulate index, is achieved by using a ratio of low-pass to bandpass frequency responses introduced by intensity and phase modulation with a shared MZI. The microwave frequency can be estimated by the measured ACF. A proof-of-concept experiment for measurement of RF from 5 to 10 GHz is successfully demonstrated with the measurement errors less than ± 0.2 GHz.     

冰洲石晶体Wollaston棱镜分束角的温度效应

为了了解温度变化对冰洲石晶体W0llaston棱镜分束角的影响,首先需决定棱镜分束角的两个因素,即棱镜的结构角和晶体中o光、e光的主折射率;然后从温度对这两个因素的影响出发,从理论上对冰洲石晶体Wollaston棱镜中的o光、e光分束角的温度效应进行了研究。结果表明,随着温度的升高,两分束角减小,但o光减小的幅度要比e光大得多。建立了实验测试系统,实验测试结果与理论分析结果相吻合。     

改进型迈克耳孙干涉仪

采用分光梭镜代替迈克耳孙干涉仪中的分束镜和补偿板，不仅消除了杂散光斑，且简化了仪器的结构．     

剪切电子散斑平移棱镜相移方法研究

在剪切电子散斑干涉中,由于错位的二物光束同向传播,很难将二物光分开引入附加相位的方法来实现相移.平移棱镜相移法可以在二束物光不分开的情况下实现相移.本文对平移棱镜相移法进行了理论分析,证明平移棱镜可以引入稳定、线性的附加相位,给出了附加位移与附加相位之间的关系式.利用周边固定、中心加载的圆盘进行实验,给出了实验结果,证明平移棱镜相移法可以有效地从干涉条纹中定量提取位移导数信息.     

Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

In this paper, we propose a sinusoidal phase modulating (SPM) interferometer that is insensitive to external disturbances, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high-speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real-time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 4.2 nm. The results show that the impacts of nonlinear distortion of the piezoelectric transducer (PZT) and part external disturbance are removed.     

高测速双频激光干涉仪

现代机械工业的发展使得数控机床和三坐标测量机等的运行速度已经达到 10 0 0 mm/ s,而目前商用外差干涉仪的测量速度不能满足这一要求。为此研制了一种基于 5 MHz频差双反射膜激光器的高测速干涉仪。通过实验对干涉仪的测量速度进行了验证。实验证明 ,该种干涉仪可以对速度为 10 0 0 mm/ s的运动物体进行位移和速度测量