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Based on diffuse and drift assumption, a 1-D fluid model of atmospheric pressure oxygen RF discharge was developed. The model includes continuity equations for electrons, positive and negative ions, and energy equation, and Poisson equation for eclectic potential. The finite difference method was adopted to solve the model by numerical simulation. The simulation results show that the electron density and electron temperature were 10¹²cm^-3 and 1.23eV, respectively, and the main negative ion was O^- . As the peak of voltage increased, the electron density and electron temperature increased, however, the ratio of O^-/n_e had a maximum value at 700V.     

大气压射频氧气放电特性的数值模拟研究

基于漂移扩散近似,对大气压下氧气射频放电产生的等离子体建立了一维流体模型,包括了电子、正离子和负离子的连续性方程、电子能量方程及泊松方程。采用有限差分法对所建立的模型进行了自洽的数值模拟,得到了相应的数值结果。通过对所得数值结果的分析,研究了大气压下氧气放电的基本特性。研究表明,大气压氧气放电中等离子体密度可达到10¹²cm^-3 ,电子温度约在1.23eV,放电中主要的负离子是O^-离子;随着电压峰值的增加,电子密度、电子温度都增加,但n_O-/n_e 的比率先增加到7.5%又后减小到5%,在电压峰值为700V 时达到最大。     

大气压管板结构纳秒脉冲放电中时域X射线研究

纳秒脉冲放电能在大气压下产生高电子能量、高功率密度的低温等离子体,由于经典放电理论无法很好地解释纳秒脉冲放电中的现象,近年来以高能逃逸电子为基础的纳秒脉冲气体放电理论受到广泛关注.纳秒脉冲放电会产生高能逃逸电子,伴随产生X射线,研究X射线的特性可以间接反映高能逃逸电子的特性.本文利用纳秒脉冲电源在大气压下激励空气放电,通过金刚石光导探测器测量放电产生的X射线,研究不同电极间隙、阳极厚度下和空间不同位置测量的X射线特性.实验结果表明,在大气压下纳秒脉冲放电能产生上升沿约1 ns,脉宽约2 ns的X射线脉冲,其产生时间与纳秒脉冲电压峰值对应,经计算探测到的X射线能量约为2.3×10-3J.当增大电极间隙时,探测到的X射线能量减弱,因为增大电极间隙会减小电场强度和逃逸电子数,从而减少阳极的轫致辐射.电极间距大于50 mm后加速减弱,同时放电模式从弥散过渡到电晕.随着阳极厚度增加,阳极后方和放电腔侧面观察窗测得的X射线能量均有所减弱,在阳极后面探测的X射线能量减弱趋势更加明显,这说明X射线主要产生在阳极内表面,因此增加阳极厚度会使穿透阳极薄膜的X射线能量减少.     

Nanoparticle formation by laser ablation in air and by spark discharges at atmospheric pressure

Recent promising methods of nanoparticle fabrication include laser ablation and spark discharge. Despite different experimental conditions, a striking similarity is often observed in the sizes of the obtained particles. To explain this result, we elucidate physical mechanisms involved in the formation of metallic nanoparticles. In particular, we compare supersaturation degree and sizes of critical nucleus obtained under laser ablation conditions with that obtained for spark discharge in air. For this, the dynamics of the expansion of either ablated or eroded products is described by using a three-dimensional blast wave model. Firstly, we consider nanosecond laser ablation in air. In the presence of a background gas, the plume expansion is limited by the gas pressure. Nanoparticles are mostly formed by nucleation and condensation taking place in the supersaturated vapor. Secondly, we investigate nanoparticles formation by spark discharge at atmospheric pressure. After efficient photoionization and streamer expansion, the cathode material suffers erosion and NPs appear. The calculation results allow us to examine the sizes of critical nuclei as function of the experimental parameters and to reveal the conditions favorable for the size reduction and for the increase in the nanoparticle yield.     

Reflex discharges at low pressure

An investigation is made of reflex discharges with cold and hot cathodes at low pressures at which the free path of the electrons exceeds the dimensions of the discharge region. It was found that in the reflex discharge with hot cathode radial deformation of the potential is produced even at weak magnetic fields. The relationship between the anomalous motion of electrons emitted by the cathode and the experimentally determined anomalies of the static and dynamic characteristics of the suppressed reflex discharge was determined. The changes in the linear dimensions of the discharge region were also investigated for all the given forms of discharge.     

大气压He-Ar射频容性放电Ar亚稳态粒子数密度

利用发射光谱法测量大气压He-Ar混合气体射频容性放电中的Ar亚稳态1s5(3s23p54s［3/2］2)粒子数密度。在不同的放电功率和气体组分下测量放电等离子体中的重要参数：气体转动温度、电子激发温度和Ar亚稳态1s5粒子数密度。结果表明：气体温度在不同放电功率及Ar气压在5103 Pa以内时变化不大,范围为300~350 K;电子激发温度随着放电功率的增加而增加,并且在Ar气压为4103 Pa时最大,在放电功率为70 W时达到0.58 eV;1s5粒子数密度随着放电功率以及电子激发温度的增加而增加,在放电功率为70 W、Ar气压为4103 Pa时达到1.53109 cm-3。     

大气压He-Ar射频容性放电Ar亚稳态粒子数密度

利用发射光谱法测量大气压He-Ar混合气体射频容性放电中的Ar亚稳态1s5(3s23p54s［3/2］2)粒子数密度。在不同的放电功率和气体组分下测量放电等离子体中的重要参数:气体转动温度、电子激发温度和Ar亚稳态1s5粒子数密度。结果表明:气体温度在不同放电功率及Ar气压在5103 Pa以内时变化不大,范围为300~350 K;电子激发温度随着放电功率的增加而增加,并且在Ar气压为4103 Pa时最大,在放电功率为70 W时达到0.58 eV;1s5粒子数密度随着放电功率以及电子激发温度的增加而增加,在放电功率为70 W、Ar气压为4103 Pa时达到1.53109 cm-3。     

Spectroscopic measurements and electrical diagnostics of microhollow cathode discharges in argon flow at atmospheric pressure

This paper is dedicated to the study of the electrical and optical characteristics of direct current microhollow cathode discharges (MHCD) in argon flow. Experiments have been carried out in order to determine the so-called Paschen’s curves in a static open MHCD. Current-voltage characteristics were obtained as a function of the pressure and hole diameter. MHCD enable stable direct current discharge operation, which could be ignited for pressures ranging from 12 to 800 Torr, in a very wide range of current densities and electrodes materials. Optical emission spectroscopy and analysis of the spectral line broadening of plasma line emissions were performed in order to measure parameters such as electron number density (2–4 × 10¹⁴ cm^-3)^{-3}), gas temperature (460–640 K), excitation temperature (~ 7000 K) and electron temperature (~ 8500 K), for current ranging from 7 to 15 mA. Lower gas temperature was measured compared to the static MHCD ones.     

Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure

A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared.     

大气压脉冲调制射频氩气放电等离子体特性的数值研究

基于等离子体流体理论,建立了大气压脉冲调制射频氩气放电的一维流体模型。通过数值模拟的方 法研究了放电参数(放电电极间距、射频频率)对氩等离子体特性的影响。研究结果表明：当电压固定时,随着电 极间距的增加,等离子体区逐渐增大,最大电子密度也增加,在 0.20cm 达到最大值后略有降低;放电电流密度 与输入功率密度随着电极间距的增加而增加;鞘层区电子温度随着电极间距的增加而降低;在脉冲开启前期,等 离子体区电子温度随着电极间距的增加而增加,但当脉冲开启后期,电极间距对等离子体区电子温度影响较小。 不同射频频率下最大电子密度随电极间隙的增加而减小,也具有一个最优值。      

Continuous optical discharges at very high pressure

Continuous laser produced plasmas are phenomenologically investigated in various gases in a wide pressure range up to 210 bar. The minimum laser power needed to sustain the discharge is obtained and the range of existence of the discharge is discussed for argon and helium. Plasma temperature and particle densities are measured for argon and helium by spectroscopic and interferometric methods.     

X-ray radiation due to nanosecond volume discharges in air under atmospheric pressure

The formation of nanosecond discharges in atmospheric-pressure air versus the applied pulse polarity and discharge gap geometry is studied. It is shown that the polarity of high-voltage nanosecond pulses and the electrode configuration have a minor effect on the volume discharges under a variety of experimental conditions. When the spacing between needle-like electrodes is large, the discharge is asymmetric and its glow is weakly dependent on the sign of the potential applied to the electrode. Negative voltage pulses applied to the potential electrode generate X-ray radiation from both the surface and volume. For a subnanosecond rise time of the voltage pulse and diffusion character of the discharge, the X-ray radiation comes from the brightly glowing region of a corona discharge. The average values of the fast electron velocity and energy in nitrogen are calculated. At field strengths E/p < 170 kV/cm atm, the average velocity of a fast electron bunch is constant because of central collisions. At field strengths E/p > 170 kV/cm atm, fast electrons run away. Central collisions are the reason for X-ray radiation from the volume.     

Diagnostics of dielectric barrier discharges in noble gases: atmospheric pressure glow and pseudoglow discharges and spatio-temporal patterns

We present experimental results of atmospheric pressure glow discharges (APGD) in a dielectric barrier discharge reactor. These are examined in different noble gases and in the N/sub 2//O/sub 2/ system (air and pure N/sub 2/), under varying experimental conditions (frequency f; gap length d; and electric field intensity E). Discharge diagnostics have been carried out using ultrahigh speed imaging, and synchronous dual-detection of light emission and current-voltage measurements, the former using a photomultiplier . The time evolutions of the discharges and of columnar patterns in regular geometric arrangements at atmospheric pressure under different experimental conditions are reported for all of the noble gases studied here. We present evidence that columnar patterns and APGD are manifestations of the same discharge physics, which is discussed with reference to recent work reported by others.     

Prebreakdown phase in atmospheric discharges

Pulsed X-ray radiation with quanta energy higher than 5 keV is recorded during the prebreakdown phase under discharges in atmospheric-pressure air at a maximum voltage from the 0.8?C1.2 MV range. The UV and X-ray generation region has been localized using collimated and time-resolved diagnostics. In the near-UV range, the maximum radiation intensity corresponds to the instant of X-ray generation.     

Effect of residual atmospheric pressure on the development of electrostatic discharges at the surface of protective glasses of solar cells

Electrostatic discharges obtained upon the irradiation of K-208 glass with 40-keV electrons at a flux density φ of 10¹⁰ to 2 × 10¹¹ cm^–2 s^–1 are studied. The residual pressure p _v in the vacuum chamber is varied from 5 × 10^–5 to 5 × 10^–3 Pa. Structural changes in the sample surfaces are studied by atomic-force microscopy. Depending on the pressure level, two types of discharges are observed in experiments at 3 × 10¹⁰ ≤ φ ≤ 1.2 × 10¹¹ cm^–2 s^–1: a microprojection at the glass–ionized-residual-atmosphere surface and a discharge which develops along the irradiated surface. It is found that at 5 × 10^–5 ≤ p _v ≤ 3 × 10^–4 Pa and 8 × 10¹⁰ ≤ φ ≤ 10¹¹ cm^–2 s^–1, discharges of the first type appear at the beginning of exposure; that is, an increase in microprojections is observed. Further, surface discharges propagate through these microprojections. At 10^–3 ≤ p _v ≤ 5 × 10^–3 Pa and 10¹⁰ ≤ φ ≤ 5 × 10¹⁰ cm^–2 s^–1, on the contrary, discharges of the second type are realized at the beginning. These discharges result in the appearance of channels with inhomogeneities on the glass, at which subsequently discharges of the first type occur. It is determined by calculations that in the region adjacent to the exposed glass surface, secondary electrons accelerated in a field of charge accumulated in the glass make the main contribution to the ionization of gases.     

极板电压与间距对大气压射频氩等离子体放电参数的影响

基于1维流体力学模型,对大气压射频裸露金属电极氩气放电过程进行了研究。模型中考虑了氩等离子体放电过程中主要发生的激发和电离等7个反应过程,对等离子体反应产生的主要粒子,包括电子、氩原子离子Ar+、氩分子离子Ar2+和氩激发态Ar*等,建立连续性方程、动量方程和电流平衡方程。分析了极板电压、极板间距对上述粒子数密度分布的影响。给出了电子,Ar+,Ar*和Ar2+密度随极板电压及间距变化的时空演化过程。得出极板电压或极板间距的改变会使放电空间的电场发生改变,对应一定的极板间距,极板电压有一个最佳值,极板电压和间距的变化会使对应的极板间有一个最佳电场值,而对应最佳电场有一个等离子体气体间最佳反应系数,从而使放电空间粒子数密度发生改变。     

Secondary ion mass spectrometry measurements of deuterium penetration into silicon by low pressure RF glow discharges

Abstract

Using secondary ion mass spectrometry (SIMS) the penetration of deuterium into Si(100) substrates as a result of exposure to deuterium low pressure rf discharges has been determined as a function of exposure time, thermal contact of the Si wafers to the substrate electrode, substrate doping, and discharge pressure. For undoped (100) single crystal Si exposed without intentional heating to a 25 m torr D₂ plasma for 1 min the deuterium concentration in the near-surface region (0—30 nm) approaches 10²¹ at.cm^?3. It drops off with depth, but is still greater than 10¹⁷ at.cm.^?3 at a silicon depth of 200 nm. The large penetration depth, the observation that lowering the substrate temperature decreases the rate of deuterium uptake, and the dependence of deuterium penetration on the substrate doping type indicate that hydrogen diffusion is of primary importance. The presence of a 50 nm thick oxide layer on the Si substrate during plasma exposure lowers the deuterium near-surface concentration in the Si substrate by about three orders of magnitude, while the presence of 10 nm of thermal oxide reduces the deuterium uptake only insignificantly. Heavily B and As doped polycrystalline Si show less deuterium penetration, while undoped polycrystalline Si shows more deuterium uptake than undoped single crystal Si for the same plasma treatment.     

使用斯塔克展宽计算大气压射频介质阻挡放电氮气等离子体的电子密度

大气压射频等离子体是近几年发展起来的一种新型非平衡等离子体。以氮气掺杂少量氩气为放电气体,实现了大气压射频介质阻挡放电。利用发射光谱对放电进行在线诊断研究,并分析谱线线型,从中分离出谱线的Stark线型,从而计算出放电通道的电子密度。研究了单个放电通道中电子密度的空间分布并测量了通道同一位置的电子密度随放电输入功率的变化。结果显示,在放电通道中部,当放电输入功率由138W增加至248W,电子密度由4.038×1021 m-3升高至4.75×1021 m-3。