Ultrasonic micro-motor using miniature piezoelectric tube with diameter of 1.0 mm

At the present moment, the smallest piezoelectric ultrasonic micro-motors utilizing miniature PZT piezoelectric ceramic tubes were developed. The motor consists of a PZT-metal composite tube stator, two steel rotors and a thin shaft that keeps the two rotors pressing on both ends of the stator elastically. The dimensions of the PZT tube are 1.0 mm in outer diameter, 0.6 mm in inner diameter and 5.0 mm in length. The diameter and total length of the assembled micro-motor is 1.0 mm and 8 mm (including an adjusting spring), respectively. The tube-type micro-motor is driven by two pairs of alternative voltages with phase shift 90 degrees between the adjacent electrodes and operated in the first circular-bending vibration mode of the stator with the resonance frequency about 58 kHz. The experimental results show that the tube-type micro-motors have perfect performances: (i) high rotation frequency over 3000 rpm and (ii) large starting torque over 7.8 microN m under the conditions of the input voltage of 110 V(p-p) and the resonance frequency. The micro-motor is well suitable for operating in micro-spaces, such as in intravascular, micro-robots and micro-craft applications.     

Numerical analysis of the hybrid transducer ultrasonic motor: comparison of characteristics calculated by transmission-line and lumped-element models

In this paper, a hybrid transducer ultrasonic motor is numerically analyzed by using two equivalent electrical circuit models. A transmission-line model for the torsional vibration in the stator, which can model any torsional vibration mode and their combinations, was introduced and compared with a lumped-element model, which modeled the fundamental torsional resonance mode in the stator. The calculation result by using the transmission-line model demonstrated that the second harmonic torsional vibration increased either with the static spring force by which the rotor was pressed to the stator or with the load torque placed on the rotor. The difference in the calculated motor performance between the two models appeared when the second harmonic torsional vibration became large at a sufficient static spring force.     

A cylindrical micro-ultrasonic motor (stator transducer size: 1.4 mm in diameter and 5.0 mm long)

Ultrasonic motors are suitable for a micro-actuator because of a direct drive, no brake and their simple construction. In order to fabricate micro-ultrasonic motors, a piezoelectric thin film is essential. In this study, a hydrothermal method was adopted to deposit a PZT thin film. The dimensions of the stator transducer were: outer diameter, 1.4 mm; inner diameter, 1.2 mm; and length, 5.0 mm. The resonance frequency of the stator transducer was 227 kHz, and the vibration amplitude was 58 nmp-p at an input voltage of 4.0 Vp-p. The maximum revolution speed was 680 rpm, and the maximum starting torque was 0.67 microNm. The experimental conditions were 20 Vp-p and 5.3 mN pre-load. The motor property versus scale was investigated using an equivalent circuit. The calculated results indicated that the output torque of the 100 microns diameter motor was 27 nNm.     

Study on the prestressed sandwich piezoelectric ceramic ultrasonic transducer of torsional-flexural composite vibrational mode

Based on the classical torsional and flexural vibrational theory of a slender rod, the prestressed sandwich torsional-flexural composite mode piezoelectric ceramic ultrasonic transducer is studied. This type of transducer consists of the slender metal rods and the longitudinally and tangentially polarized piezoelectric ceramic rings. The resonance frequency equations for the torsional and flexural vibrations in the transducers are derived. The simultaneous resonance of the torsional and flexural vibrations in the transducer is acquired by correcting the length of the metal slender rods resulting from the piezoelectric ceramic elements. The experimental results show that the measured resonance frequencies of the transducers are in good agreement with the computed ones, and the measured resonance frequencies of the torsional and the flexural vibrations in the composite transducers are also in good agreement with each other.     

A new standing-wave-type linear ultrasonic motor based on in-plane modes

This paper presents a new standing-wave-type linear ultrasonic motor using combination of the first longitudinal and the second bending modes. Two piezoelectric plates in combination with a metal thin plate are used to construct the stator. The superior point of the stator is its isosceles triangular structure part of the stator, which can amplify the displacement in horizontal direction of the stator in perpendicular direction when the stator is operated in the first longitudinal mode. The influence of the base angle θ of the triangular structure part on the amplitude of the driving foot has been analyzed by numerical analysis. Four prototype stators with different angles θ have been fabricated and the experimental investigation of these stators has validated the numerical simulation. The overall dimensions of the prototype stators are no more than 40 mm (length) × 20 mm (width) × 5 mm (thickness). Driven by an AC signal with the driving frequency of 53.3 kHz, the no-load speed and the maximal thrust of the prototype motor using the stator with base angle 20° were 98 mm/s and 3.2 N, respectively. The effective elliptical motion trajectory of the contact point of the stator can be achieved by the isosceles triangular structure part using only two PZTs, and thus it makes the motor low cost in fabrication, simple in structure and easy to realize miniaturization.     

Piezoelectric linear motor concepts based on coupling of longitudinal vibrations

Classically, rotary motors with gears and spindle mechanisms are used to achieve translatory motion. In means of miniaturization and weight reduction piezoelectric linear motors are of interest. Several ultrasonic linear motors found in literature base on the use of two different vibration modes. Most often flexural and longitudinal modes are combined to achieve an elliptic micro-motion of surface points. This micro-motion is converted to direct linear (or translatory) motion of a driven slider. To gain high amplitudes of the micro-motion and thus having a powerful motor, the ultrasonic vibrator should be driven near the eigenfrequency of its modes. Additionally, low mechanical and electrical losses lead to increased efficiency and large amplitude magnification in resonance. This demands a geometrical design that fits the eigenfrequencies of the two different modes. A frequency-deviation of only a few percent leads to non-acceptable disturbance of the elliptical motion. Thus, the mechanical design of the vibrators has to be done very carefully. Within this contribution we discuss different motor designs based on the coupling of two the same longitudinal vibrations within one structure to generate an elliptic motion of surface points. Different concepts based on piezoelectric plates and Langevin transducers are compared. Benefits and drawbacks against the combination of longitudinal and bending modes will be discussed. Numerical results of the stator vibration as well as motor characteristics are validated by measurements on different prototypes.     

Equivalent circuits and directivity patterns of air-coupled ultrasonic transducers

Air-coupled transducers for producing ultrasonic radiation in gases are studied. The transducer consists of a circular thin plate in flexural vibration and a sandwich longitudinal electromechanical vibrator that is attached to the center of the plate. The lowest-order axially symmetric flexural vibrational mode of a circular thin plate is analyzed. The equivalent circuits of the circular plate in flexural vibration and the compound transducer are presented and the frequency equation is derived. The radiated ultrasonic field of the circular thin plate in flexural vibration is calculated and the directivity pattern is obtained theoretically. Some transducers of this type are designed according to the frequency equation, and their resonance frequencies are measured. The measured resonance frequencies are in good agreement with the theoretical results, and the calculated radiation ultrasonic field is also in good agreement with the measured results of a previous work.     

夹心式纵-扭复合模式压电超声换能器的共振频率

本文对夹心式纵－扭复合振动模式压电超声换能进行了研究，从换能器的等效电路出发，在无耦合时，得出换热能器纵向振动模式及扭转振动模式的各自共振频率方程，实验表明，换能器各自共振频率的测试值与理论计算值基本符合。     

夹心式纵-扭复合模式压电超声换能器的共振频率

本文对夹心式纵-扭复合振动模式压电超声换能器进行了研究．从换能器的等效电路出发，在无耦合时，得出了换能器中纵向振动模式及扭转振动模式的各自共振频率方程．实验表明，换能器各自共振频率的测试值与理论计算值基本符合．     

Vibration behaviour of stators of electrical machines,part I: Theoretical study

A general analytical method for free vibrations of thick cylindrical shells is presented in this paper. The problems associated with thick cylindrical shells are of considerable engineering importance in numerous applications. One important application of such shells is the stator of electrical machines, where the thick stator-core with teeth and windings is encased by a thin frame provided with cooling ribs. In order to design a quiet electrical machine, the accurate determination of resonant frequencies and vibrational characteristics of the stator is essential. The well known energy method is used in the analysis presented for the derivation of the frequency equation of the stator. As a first step, the analysis is applied to a simple and smooth model of thick circular cylindrical shell having substantial axial length as used in actual stators. The analysis delivers information on resonant frequencies and associated mode shapes. The method of analysis and the theoretical results obtained for the model are presented. The experimental verification of the analysis is reported in a companion paper.     

Study on the Langevin piezoelectric ceramic ultrasonic transducer of longitudinal-flexural composite vibrational mode

In this paper, the Langevin longitudinal-flexural composite mode piezoelectric ultrasonic transducer is studied. This type of transducers consists of slender metal rods and longitudinally polarized piezoelectric ceramic rings. The resonance frequency equations for the longitudinal and flexural vibrations in the transducer are derived. By correcting the length of the metal slender rods, the simultaneous resonance of the longitudinal and flexural vibrations in the transducer is acquired. The experimental results show that the measured resonance frequencies of the transducers are in good agreement with the computed ones, and the measured resonance frequencies of the longitudinal and the flexural vibrations in the composite transducers are also in good agreement with each other.     

Study on the compound multifrequency ultrasonic transducer in flexural vibration

A new type of compound multifrequency ultrasonic transducer is analyzed in this paper. The compound multifrequency ultrasonic transducer consists of two sandwiched ultrasonic transducers and a rectangular radiator. In virtue of the coupling between longitudinal vibration of the sandwiched ultrasonic transducers and flexural vibration of the rectangular radiator, the compound multifrequency ultrasonic transducer can produce several resonance frequencies. Some compound multifrequency ultrasonic transducers are designed and simulated by finite element method (ANSYS), and modal shapes and harmonic response are analyzed. The compound multifrequency ultrasonic transducers are designed and manufactured. The resonance frequencies are measured and compared with the numerical results. The effect of the geometrical dimensions of the compound multifrequency ultrasonic transducer and the location of two sandwiched ultrasonic transducers on the compound multifrequency ultrasonic transducer is discussed. It is shown experimentally and numerically that the compound multifrequency ultrasonic transducer has several resonance frequencies.     

纵-扭复合振动模式指数型复合超声变幅杆的研究

本文对指数型纵－扭复合振动模式的复合超声变幅杆进行了理论及实验研究，该变幅杆由均匀截面直棒及指数型截面杆组成。文中推出了变幅杆中纵向振动及扭转振动的共振频率方程，通过发迹指数型变截面棒的截面变化规律，实现了同一变幅杆中纵向振动与扭转振动的同频共振。     

弯纵复合超声直线马达的研究

本文研究了一种利用一阶纵振动和二阶弯曲振动的弯纵直线超声马达，采用加粗两端金属块的方法达到频率简并。实验测量得出一阶纵振动为36．6kHz，二阶弯曲振动频率为37．3kHz。利用该马达设计研制了一套驱动装置，经实验测得，当马达的预压力14．3N时，该装置无承载且无负载速度大于6cm／s；该装置承载196N的重物且负载l-2kgf时，仍能正常运行。     

Vibration characteristics of piezoelectric torsional transducers

The vibrational characteristics of Langevin-type torsional transducers, which consist of two piezoelectric torsional disks and two elastic blocks, are studied theoretically and experimentally in this paper. The differential equations of piezoelectric torsional motions are derived in terms of the circumferential displacement and the electric potential. Solutions of the boundary-value problem yield the natural frequencies and mode shapes of the transducers, and the natural frequencies are verified by comparing the numerical results with the experimental ones. The theoretical results enable one to quantitatively predict the effect of the elastic blocks on the reduction of the natural frequencies of a Langevin-type torsional transducer.     

A finite volume method and experimental study of a stator of a piezoelectric traveling wave rotary ultrasonic motor

Piezoelectric traveling wave rotary ultrasonic motors are motors that generate torque by using the friction force between a piezoelectric composite ring (or disk-shaped stator) and a metallic ring (or disk-shaped rotor) when a traveling wave is excited in the stator. The motor speed is proportional to the amplitude of the traveling wave and, in order to obtain large amplitudes, the stator is excited at frequencies close to its resonance frequency. This paper presents a non-empirical partial differential equations model for the stator, which is discretized using the finite volume method. The fundamental frequency of the discretized model is computed and compared to the experimentally-measured operating frequency of the stator of Shinsei USR60 piezoelectric motor.     

聚苯硫醚材料复合棒型换能器

本文选择了高聚物中杨氏模量较大、损耗较小的聚苯硫醚作为复合棒型换能器的前盖板.计算了聚苯硫醚棒中的纵波传播速度,研究了基于聚苯硫醚材料的复合棒型换能器的等效电路设计方法.利用有限元方法计算了换能器谐振频率、轴向应变分布、平均耗散功率等性能参数.对本文研制的前盖板为聚苯硫醚、后盖板为钢(1#)和前后盖板均为聚苯硫醚(2#...     

A miniaturization of the multi-degree-of-freedom ultrasonic actuator using a small cylinder fixed on a substrate

Multi-degree-of-freedom ultrasonic actuator has been studied for robot arms and multidimensional precision table and so on because of its simple structure, silent operation, and holding force. In this study, we aim to miniaturize multi-degree-of-freedom ultrasonic actuator for fabrication on a substrate. This actuator consists of a stainless steel cylinder and a PZT ring. The cylinder is fixed on a substrate and the PZT ring is glued to the substrate near the cylinder. The 1st longitudinal vibration and the 2nd bending vibration are simultaneously excited in the cylinder to make elliptical motion at the top of the cylinder and a ball rotor placed on the cylinder rotates because of the friction force. Length of the cylinder was decided so as to tune the resonance frequency of the 1st longitudinal vibration to the 2nd bending one. Actuator performances are evaluated experimentally using a 14 mm height and 7 mm diameter stainless steel cylinder with a 0.5 mm thickness PZT ring. The rotation about the cylinder axis is tested using the two orthogonal bending vibrations with 90 degrees phase difference. Also, the rotation about horizontal axes were investigated using the combination of the longitudinal vibration and one of two bending vibrations. We measured the rotation speed of a steel ball and obtained 15.8 rps using a 6 mm diameter ball rotor.     

二维振动方向变换器的耦合振动及其等效电路

二维振动方向变换器集功率合成和二维超声输出的功能于一体,在功率超声技术中具有重要的应用价值。然而,对于二维振动方向变换器的设计分析只有一种较为复杂的波动方程法。为此,本文研究了二维振动方向变换器的另外一种简明的设计分析方法——等效电路法。通过引入二维机械耦合系数和纵向力转换系数,利用力电类比原理建立了二维振动方向变换器的同相及反相二维耦合振动的统一等效电路模型。利用本文提出的设计方法,计算了两种不同材料的二维振动方向变换器的谐振频率,与有限元计算结果及实验测试结果一致,为该类超声振动系统的工程应用提供了一种简洁直观的设计分析方法。      

Two-dimensional coupled vibration and equivalent circuit of longitudinal-longitudinal orthogonal composite vibration direction converter

With the advantages of transmitting energy from multiple directions to one direction and transforming vibration from one source to multiple directions, the two-dimensional vibra?tion direction converter has important applications in power ultrasonic technology. However, for the complexity of using the wave equation to design and analysis the two-dimensional vibration direction converter, a concise equivalent circuit for the converter is investigated. By introducing the two-dimensional mechanical coupling coefficient and the longitudinal force transform coef?ficient, and using the electromechanical analogy principle, the equivalent circuit and resonance frequency equation of the two-dimensional vibration direction converter vibrating in anti-phase and in-phase two-dimensional coupled vibration are deduced. The resonance frequencies of the vibration direction converters of two different materials are calculated by using the proposed frequency equation, which are in agreement with the results from the finite element method and the experimental test. It provides a concise method for the design and applications of such ultrasonic vibration system.