基于干涉条纹跟踪实现纳米级位移测量的方法研究

设计了一套干涉条纹图像实时采集处理系统。在分析迈克尔逊干涉条纹特征表象的基础上 ,给出了通过跟踪干涉条纹的移动量测量被测对象纳米级位移量的理论公式 ;提出了干涉条纹特征点的提取与跟踪算法 :分段线性变换、方形窗口中值滤波和门限化边缘提取 ,给出了基于统计学原理的通过计算多条干涉条纹移动量获得被测对象纳米级位移量的计算公式。实验结果表明了该方法的有效性和实用性     

基于液晶显示投影技术的数字影栅云纹相移实现方法

影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。     

Digital moiré fringe measurement method for alignment in imprint lithography

Accurate layer-to-layer alignment, which is of prime importance for the fabrication of multilayer nanostructures in integrated circuits, is one of the main obstacles for imprint lithography. Current alignment measurement techniques commonly involve an image detection process for coarse alignment followed by a grating interference process for fine alignment. Though this kind of two-level alignment system is reasonable for measurement, when it is used in real imprint lithography, it is inconvenient because of the existence of a complex loading system that needs space for alignment. In this study, we propose a fine alignment method using only image detection using grating images and digital moiré fringe technology. In this method, though the gratings are also selected as alignment marks for accurate measurement, they do not interfere with the physics. The grating images captured from the template and wafer are used to measure angular displacement and to form parallel digital moiré fringes. The relative linear displacement between the template and wafer is determined by detecting the spatial phase of parallel digital moiré fringes. Owing to the magnification effect of digital moiré fringes, this method is capable of generating accurate measurements. According to the experimental results, this digital moiré fringe technique is accurate to less than 10 nm. In addition, without a complex grating interference system, this method has the advantage of being easy to operate.     

An automatic processing technique for accurate surface form measurement

A single shot algorithm using a Fizeau interferometer was used to measure the form profile of a spherical smooth surface by means of fringe thinning process, which plays an important role in fringe patterns analysis. In this paper, an automatic processing technique based on the fringe thinning process is presented. The circular interference fringe pattern of the spherical smooth surface captured by the Fizeau interferometer was corrected by using the flat fielding method and then processed. Based on the fringe thinning and the assignment of the fringe orders, the information on the fringe feature was recovered automatically and the interference wavefront was reconstructed by the Zernike polynomial fitting method. The results were compared with the results measured by Bünnagel method, and the results were in good agreement. This means that the single shot algorithm is reliable, fast, and less sensitive to vibration and turbulence in surface form measurements. Simulation fringes with the ray tracing technique were obtained to match the practical fringes.     

High-resolution time-average electronic holography for vibration measurement

Time-average electronic holography (also known as TV holography) is a widespread technique used in real-time, non-contact, whole-field vibration measurement. The quantitative interpretation of time-averaged fringe patterns is difficult because of speckle noise and of the decreasing visibility of higher-order Bessel fringes. Speckle noise may only be reduced during image acquisition, by multiple-frame averaging.The objective of this paper is to present two new methods allowing to obtain time-averaged fringe patterns presenting a high resolution and a high contrast between dark and bright fringes, as well as the associated quantitative interpretation. They are based on the elimination of the random phase component and on the reduction of the random intensity component of the time-averaged fringe pattern. The fringe patterns obtained by this method may be efficiently filtered in order to provide the precise locations of the Bessel-type fringes associated with the object vibration. The methods rely on the use of the simplest standard equipment, without any need for modulators or stroboscopic devices. Quantitative fringe interpretation is straightforward and based on the method of fringe skeletonizing and indexing. Fringe contrast is so high that skeletonizing may be done by simple thresholding.     

Automatic refractive index profiling of fibers by phase analysis method using Fourier transform

Automatic fringe pattern analysis is a powerful and inexpensive digital image-processing technique. It is used to analyze the fringe pattern obtained by different optical techniques, such as multiple-beam Fizeau fringes. To perform accurate and fast automatic measurement of fiber refractive index profile, phase analysis method has been used with the Fourier transform technique. In this paper, the refractive index profiles of polyethylene fibers with different draw ratios are presented by two methods, fringe shift method and phase analysis method. A comparison between the results obtained is presented.     

Ultra-compact TDLAS humidity measurement cell with advanced signal processing

In this paper, tunable diode laser absorption spectroscopy humidity measurements with an ultra-compact measurement cell are presented. The optical path length is 2 cm. The system uses a vertical cavity surface emitting laser at 1.854 μm. The main limiting factor of the humidity resolution is not the noise but interference fringes produced by reflecting surfaces. Next to the system setup, a novel rejection method to eliminate these fringes, based on Fourier domain analysis of the absorption line, is described. In contrast to other fringe rejection methods, the presented method is able to handle fringes, whose free spectral range is in the range of the half width of the absorption line. The achievable humidity resolution for the presented cell is below 0.25 % relative humidity at room temperature.     

Automatic fringe analysis for moiré topography

Two digital systems are developed for the automatic measurement of 3-D shapes using moiré techniques—an automatic 3-D shape measuring system using the scanning moiré method and an interactive fringe analysing system for moiré fringe photographs. In the automatic 3-D shape measuring system, a deformed grating is scanned and sampled with an electronic image scanning device so that moiré fringes are generated in a computer. This technique of electronic fringe generation eliminates ambiguity with regard to the sign of the moiré fringes. The interactive fringe analyser provides a flexible and versatile tool for moiré fringe analysis. Medical applications of these analysing systems are discussed.     

用于微观场小应变测量的云纹干涉载波条纹法

在云纹干涉法的基础上，研究了一种新的测量方法——云纹干涉载波条纹法，利用初始载波条纹根据物体变形前后的变化对应变进行分析。实验证明：在结合适当的数字图像处理技术情况下，应用频率为1200lp/mm的试件栅，测量试件（微观场）变形产生的应变时，精度基本控制在±10με的范围内。对该方法的研究表明：其灵敏度可在1με以下。方法可给出U场诸行、V场诸列的平均应变值，使研究微观场小应变及微观场临近区域微小应变的不同成为可能。这一技术为MEMS研究中对相关力学内容的分析提供了技术支持。     

Quantitative vibration amplitude measurement with time-averaged digital speckle pattern interferometry

A new method of using time-averaged digital speckle pattern interferometry for the quantitative measurement of vibration amplitude was developed. Signal processing techniques especially the Hilbert transformation for quantitative evaluation of the Bessel fringes obtained in time-averaged digital speckle pattern interferometry were explored. The quadrature signal after Hilbert transformation is equivalent to a 90° phase-shifted interferogram for a monotonically increasing or decreasing phase function. An algorithm was developed for Bessel fringe contrast enhancement and phase extraction. The techniques were tested numerically and experimentally. Sub-fringe quantification of the time-averaged vibration fringes is realised with the proposed method. Compared with the commonly used phase shift method which requires a minimum of two images for image processing, this method requires only one fringe pattern for data extraction.     

N-point spatial phase-measurement techniques for non-destructive testing

Spatial phase-measurement interferometry techniques commonly used in non-destructive testing are affected by a number of fundamental error sources. This paper focuses on the major limitations for phase calculations using standard N-point algorithms. These limitations include: the wrong carrier frequency, unequally spaced fringes, detector non-linearities and variations in the dc fringe intensity. The character and magnitude of these errors are quantified by using computer simulations. A displacement measurement of a bent plate using different algorithms on the same data shows that practical limitations are unequally-spaced fringes and variations in dc intensity and fringe visibility. These errors limit the resolution of this type of measurement to about a tenth of a wave r.m.s.     

Influence of out-of-plane deformation and its elimination in white light speckle photography

The aim of this paper is to present the white light speckle method as a practical tool in metrology and to search for the optimum conditions for its application. In particular, the study provides evidence that the white light speckle technique is not exclusively sensitive to the in-plane components of displacement. Consequently, the interpretation of the Young's fringes as pure in-plane fringes is prone to inaccurate measurements. The errors so introduced are systematically analysed for various optical parameters. Some practical considerations are then pointed out to aid in the design of an error-tolerance limited white light displacement measurement system to suit a particular need. two complementary techniques are next proposed which promise to eliminate the influence of the out-of-plane movements on the measurement of the lateral components of displacement. The proposed methods not only allow an increase in the accuracy of in-plane measurements, but also permit mapping of the out-of-plane movements undergone by the object surface. The techniques presented, apply equally to coherent speckle photography where the same problems are manifest, and should pave the way for the application of these methods to concrete engineering problems.     

基于正弦和三角波条纹投影的三维测量方法

在现有的针对复杂物体表面形貌的三维测量方法中, 为了完成绝对相位的测量, 通常需要处理至少6幅条纹图像, 限制了测量速度。提出了采用2幅正弦条纹和2幅三角波条纹图来获得物体三维形貌的方法。利用两步相移正弦条纹和两步相移三角条纹得到截断相位, 再利用两步相移三角波条纹得到条纹级次, 减少了投影条纹幅数, 提高测量速度。在得到条纹级次时, 计算三角波条纹强度调制和强度对比度, 与计算相位相比, 可以减少数据处理的时间, 进一步提高测量速度, 同时能减小物体表面反射率的影响, 提高了测量精度。测量最大高度为39 mm的阶梯状标准块, 得到的最大绝对误差和最大的RMS误差分别为0.045 mm和0.041 mm。验证了该方法的有效性和实用性, 在高速实时的复杂形貌三维测量中有广泛的应用前景。     

Measurement of dynamic crack tip displacement field by speckle photography and interferometry

Speckle interferometry has been used to measure the transient displacement field around a crack due to stress wave loading. Double exposure interferograms are recorded with a pulsed ruby laser, and correlation fringes formed by spatial filtering of the developed film. A new technique is presented for reducing the noise level in spatially filtered speckle interferograms. Independent fringe patterns, obtained from one interferogram but with the filtering aperture sampling different regions of the Fourier transform plane, are digitised by a CCD camera and combined numerically. It is demonstrated that accurate analysis of fringe patterns by the Fourier transform method can be carried out, even if no carrier fringes are present. The measurements are compared with those obtained by speckle photography. Least-squares fitting of the theoretical displacement field is used to calculate the stress intensity factor at the crack tip as a function of time.     

Mach-Zehnder干涉仪条纹成像多普勒激光雷达风速反演及视场展宽技术

相对于传统多普勒鉴频器Fabry-Perot干涉仪, Mach-Zehnder干涉仪(MZI)具有透过率高、直线条纹易于探测、可进行视场展宽等优点. 本文设计了基于条纹成像MZI的非相干多普勒测风激光雷达系统, 构建了风速反演的数学模型, 利用MZI视场展宽技术优化了激光雷达系统的性能. 数值仿真实现了MZI鉴频系统干涉条纹图样的理想输出, 采用SineSqr函数拟合法获取了高精度的多普勒频移前后干涉条纹的移动距离, 并通过视场补偿减小了入射角对MZI光程差的影响, 从而实现视场展宽. 结果表明: 采用SineSqr函数拟合法可获得在±100 m·s^-1的径向风速范围内<0.45 m·s^-1的风速误差, 克服了条纹重心法反演风速不稳定性的缺点; 视场展宽技术在不降低鉴频性能的情况下, 能最大补偿1°的视场角. MZI条纹成像多普勒激光雷达应用技术的探讨将为中高层大气风速激光雷达测量系统的实际开发奠定良好的基础. 关键词： 激光雷达 条纹成像Mach-Zehnder干涉仪 风速反演 视场补偿     

Improved 3D displacement measurements method and calibration of a combined fringe projection and 2D-DIC system

An improved measurement method and an automatic calibration procedure are proposed for a combined 2D Digital Image Correlation and Fringe Projection system that allows measuring in- and out-of-plane displacement maps with only one image at each deformation stage of a specimen. The proposed method increases the accuracy and range of the out-of-plane displacements by taking into account the divergences of both the projected fringes (uncollimated) and the camera (with non-zero FOV). The calibration is performed automatically by acquiring a sequence of images of a reference plane by displacing perpendicular to it the camera and fringe projector with a motorized translation stage. The acquired images are then used to obtain a fringe function for each pixel and the necessary parameters required for the correction of the in-plane displacements. Furthermore, a closed form expression is obtained that relates the out-of-plane displacements with the shifted phase at each pixel for a given experimental set-up. This expression is in good agreement with the fringe function obtained by fitting a simple 2nd order polynomial to the experimental obtained calibration data. Finally, the polynomial approach is proposed as a fringe function because it avoids the errors in the determination of the required parameters of the theoretical expression as well as some small misalignment or aberration effects.     

基于自适应条纹投影的高反光物体三维面形测量

结构光投影方法在三维形貌测量中应用广泛,但是由于被测物体表面反射率变化范围较大,过度曝光会导致相位信息无法获取。而传统的高动态范围扫描技术步骤复杂,耗时较长。文中提出一种自适应条纹投影技术,向待测物体表面投射较高灰度级的条纹图,判断并标记过度曝光点。降低投射强度后通过非线性最小二乘法拟合来确定每个饱和像素点最适合的最大输入灰度,用重新生成的自适应条纹图来采集图像并进行相位计算和三维形貌恢复。通过实验验证,该方法可以对物体表面的高反光区域进行有效测量,避免过度饱和,仿真误差在0.02 mm范围内,实测误差约为0.14 mm,实际实验对过曝点的补偿率可达到99%。     

Gerchberg迭代法在三维面形测量中的应用

在基于结构光照明的三维面形测量中,针对有孤立区域物体的条纹图像存在不规则缺陷的问题,提出先对其进行Gerchberg迭代,消除或减少条纹缺陷,获取较完善的迭代条纹,然后再利用傅里叶变换轮廓术(FTP)重建面形。设计了迭代流程,并分析了影响迭代精度的因素,解决了光学加工用具磨盘表面不完善条纹Gerchberg迭代过程中存在的问题,成功地重建了磨盘的三维面形。该工作为表面存在孤立区域的被测物体三维面形测量提供了可供参考的技术方案,也给可实时形变的应力盘三维面形动态测量奠定了基础。     

基于适度光反馈自混合干涉技术的振动测量

光反馈自混合干涉技术是一种新浮现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行振动的精密测量,提出了一种基于适度光反馈自混合干涉技术的振动测量方法。经对光反馈自混合干涉信号条纹分析,发现通过选定合适的光反馈水平及激光器线宽展宽因数,可以得到锯齿干涉条纹。这种干涉信号不仅包含振动幅度信息也包含振动方向信息。该振动测量方法利用锯齿干涉条纹的特点,首先通过条纹记数实现大范围振幅粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的线性表达式,从而实现位移的精测。仿真计算表明,该方法可以实现大量程高分辨力振动位移测量,在叠加20 dB的噪声下,振幅测量相对误差平均为0.5%。     

Young's fringes analysis with a computer image-processing system

A two-dimensional Fourier transform analysis is presented for numerically processing the Young's fringes diffraction pattern from a double- exposure speckle photograph. The fringe spacing and orientation are determined using only one Young's fringes pattern without any other diffraction halo patterns. This algorithm is based on the 2-D FFT of the fringe pattern with 256 × 256 pixels. Therefore, it enables automatic analysis to be performed on specklegram with noisy and poor fringe patterns. The measurement of deformation by the laser speckle method can be carried out with high accuracy, reliability and speed.