Bonding and impedance matching of acoustic transducers using silver epoxy

Silver epoxy was selected to bond transducer plates on glass substrates. The properties and thickness of the bonding medium affect the electrical input impedance of the transducer. Thus, the thickness of the silver epoxy bonding layer was used as a design parameter to optimize the structure for the transducer input impedance to match the 50 Ω output impedance of most radio frequency (RF) generators. Simulation and experimental results show that nearly perfect matching is achieved without using any matching circuit. At the matching condition, the transducer operates at a frequency band a little bit below the half-wavelength resonant frequency of the piezoelectric plate. In experiments, lead titanate (PT) piezoelectric plates were employed. Both full-size, 11.5 mm × 2 mm × 0.4 mm, and half-size, 5.75 mm × 2 mm × 0.4 mm, can be well matched using optimal silver epoxy thickness. The transducer assemblies demonstrate high efficiency. The conversion loss from electrical power to acoustic power in soda-lime glass is 4.3 dB. This loss is low considering the fact that the transducers operate at off-resonance by 12%. With proper choice of silver epoxy thickness, the transducer can be matched at the fundamental, the 3rd and 5th harmonic frequencies. This leads to the possible realization of triple-band transducers. Reliability was assessed with thermal cycling test according to Telcordia GR-468-Core recommendation. Of the 30 transducer assemblies tested, none broke until 2900 cycles and 27 have sustained beyond 4050 cycles.     

一种非均匀厚度压电复合材料片宽带换能器的实验研究

本文利用１－３压电复合材料作为换能元件，通过特殊工艺制备成一面是平面，一面是球面的非均匀厚度压电振子，这种压电晶片加上激励电压后，不同厚度处以不同的共振频率振动，从而使压电晶片的振动频带加宽，本文介绍了这种压电晶片的机电特性，以及用这种压电晶片制成的宽带聚焦超声换能器的脉冲回波特性，此外，文中还对这种换能器与均匀厚度压电晶片换能器的脉冲回波特性进行了比较。     

Analysis of 2-D motion tracking in ultrasound with dual transducers

We study displacement and strain measurement error of dual transducers (two linear arrays, aligned orthogonally and coplanar). Displacements along the beam of each transducer are used to obtain measurements in two-dimensions. Simulations (5 MHz) and experiments (10 MHz) are compared to measurements with a single linear array, with and without angular compounding. Translation simulations demonstrate factors of 1.07 larger and 8.0 smaller biases in the axial and lateral directions respectively, for dual transducers compared to angular compounding. As the angle between dual transducers decreases from 90° to 40°, for 1% compression simulations, the lateral RMS error ranges from 2.1 to 3.9 μm compared to 9 μm with angular compounding. Simulation of dual transducer misalignment of 1 mm and 2° result in errors of less than 9 μm. Experiments demonstrate factors of 3.0 and 5.2 lower biases for dual transducers in the axial and lateral directions respectively compared to angular compounding.     

Feasibility of using ultrasound contrast agents to increase the size of thermal lesions induced by non-focused transducers: in vitro demonstration in tissue mimicking phantom

Miniature flat ultrasound transducers have shown to be effective for a large variety of thermal therapies, but the associated superficial heating implicates developing original strategies in order to extend therapeutic depth. The goal of the present paper is to use ultrasound contrast agents (UCA) to increase remote attenuation and heating. Theoretical simulations demonstrated that increasing attenuation from 0.27 to 0.8 Np/cm at 10 MHz beyond a distance of 18 mm from the transducer should result in longer thermal damages due to protein coagulation in a tissue mimicking phantom. Contrast agents (BR14, Bracco, Plan-les-Ouates, Switzerland) were embedded in thermo-sensitive gel and attenuations ranging from 0.27 to 1.33 Np/cm were measured at 10 MHz for concentrations of BR14 between 0 and 4.8%. Thermal damages were then induced in several gels, which had different layering configurations. Thermal damages, 12.8 mm in length, were obtained in homogeneous gels. When mixing contrast agents at a concentration of 3.2% beyond a first 18 mm-thick layer of homogeneous gel, the thermal damages reached 21.5 mm in length. This work demonstrated that contrast agents can be used for increasing attenuation remotely and extending therapeutic depth induced by a non-focused transducer. Additional work must be done in vivo in order to verify the remote-only distribution of bubbles and associated increase in attenuation.     

Experimental and finite element modelling studies on single-layer and multi-layer 1-3 piezocomposite transducers

Finite element modelling (FEM) using ATILA code and experimental studies have been carried out on 1-3 piezocomposite transducers. FEM study was initially carried out on a piezocomposite infinite plate and then extended to transducers of finite size. The infinite-plate model results agree well with that of a simple analytical model and experiments. The acoustic performance of multi-layer finite-size piezocomposite transducers was also studied. Transducer stacks were fabricated with different number of layers. The transducer characteristics such as the electrical impedance, the transmitting voltage response (TVR) and the receiving sensitivity (RS) of the 1-3 piezocomposite transducers were evaluated as functions of frequency, ceramic volume fractions and the number of layers. TVR increases and RS decreases with increase in ceramic volume fractions. The model results are found to agree with the experimental data, especially when the number of layers is less.     

PMN-PT single crystal focusing transducer fabricated using a mechanical dimpling technique

A ∼5 MHz focusing PMN-PT single crystal ultrasound transducer has been fabricated utilizing a mechanical dimpling technique, where the dimpled crystal wafer was used as an active element of the focusing transducer. For the dimpled focusing transducer, the effective electromechanical coupling coefficient was enhanced significantly from 0.42 to 0.56. The dimpled transducer also yields a −6 dB bandwidth of 63.5% which is almost double the bandwidth of the plane transducer. An insertion loss of the dimpled transducer (−18.1 dB) is much lower than that of the plane transducer. Finite element simulation also reveals specific focused beam from concave crystal surface. These promising results show that the dimpling technique can be used to develop high-resolution focusing single crystal transducers.     

Generation of very high pressure pulses at the surface of a sandwiched piezoelectric material

New clinical concepts in lithotripsy demand small shock heads. Reducing the size of piezoelectric shock heads will only be possible if the pressure generated at the surface of each transducer can be increased so that the total pressure at the focus remains very high. We propose for the first time to increase the pressure without increasing the transducer voltage by using sandwiched transducers, which are a combination of several stacked transducers. When excited at appropriate time intervals, the pressure waves generated by each one reinforce when they reach the load. This new technique has been successfully tested. A pressure of 2.5 MPa was generated with two stacked, 5 mm-thick 1-3 piezocomposite transducers operating at an excitation voltage of 8 kV. No transducer damage was detected after 10(6) shocks, which corresponds approximately to the treatment of 500 patients.     

High-frequency ultrasonic transducer based on lead-free BSZT piezoceramics

This paper describes the fabrication and evaluation of a high-frequency (40 MHz) transducer based on lead-free piezoceramics for ultrasonic imaging. The transducer with an aperture size of 0.9 mm has been fabricated using barium strontium zirconate titanate ((Ba_0.95Sr_0.05)(Zr_0.05Ti_0.95)O₃, abbreviated as BSZT) ceramics. The lead-free BSZT has a piezoelectric d₃₃ coefficient of 300 pC/N and an electromechanical coupling factor k_t of 0.45. High-frequency ultrasound transducers were fabricated and a bandwidth of 76.4% has been achieved with an insertion loss of −26 dB. Applications in high resolution biological and medical imaging could be possible with this lead-free material.     

Arbitrary shaped, liquid filled reverberators with non-resonant transducers for broadband focusing of ultrasound using Time Reversed Acoustics

The ability to generate short focused ultrasonic pulses with duration on the order of one period of carrier frequency depends on the bandwidth of the transmitter as the pulse duration is inversely proportional to the bandwidth. Conventional focusing arrays used for focusing ultrasound have limited bandwidth due to the resonant nature of the piezoelements generating ultrasound. Theoretically it is possible to build a broadband phased array composed of “non-resonant” elements: wedge-shaped or flat-concave piezotransducers, though there are numerous technical difficulties in designing arrays with hundreds of elements of complex shape. This task is much easier to realize in an alternative technique of ultrasound focusing based on the principles of Time Reversed Acoustics (TRA) because in TRA systems, effective focusing can be achieved with just a few, or even one, transducers. The goal of this study is to demonstrate the possibility of broadband focusing of ultrasonic waves using a TRA system with non-resonant transducers and to explore the factors affecting the performance of such a system. A new type of TRA reverberators, such as water-filled thin-wall plastic vessels, which can be used with the submersible piezotransducers fixed internally in the reverberator, are proposed and tested. The experiments are conducted in a water tank with the walls and bottom covered by a sound absorbing lining. A needle hydrophone mounted on a 3D positioning system is used as a beacon for the TRA focusing and then for measuring the spatial distribution of the focused ultrasound field. The bandwidth and spatial distribution of the signal focused by the TRA system using a single channel with the resonant versus non-resonant transducers have been analyzed. Two types of non-resonant transducers were tested: a flat-concave transducer with a diameter of 30 mm, and a thickness varying from 2 mm in the center to 11 mm at the edge, and a specially designed submersible transducer having an uneven shape with a diameter of about 25 mm and a thickness varying from 2 to 6 mm. It was shown that TRA focusing system using non-resonant transducer had a bandwidth at 10 dB of 500 kHz while the resonant transducer provided about 100 kHz bandwidth. Correspondingly, the extended bandwidth of the TRA focusing system, especially toward higher frequencies, provides a 50% sharper spatial distribution. Furthermore, the relative level of the background ultrasound was reduced by a factor up to 3 as more frequencies were added coherently in focus and incoherently out of focus. Advantages of water-filled reverberators made of thin-wall plastic vessels include easy manufacturing, low costs, extreme simplicity, and good acoustical matching with soft tissues, important for biomedical applications.     

Selecting passive and active materials for 1.3 composite power transducers

1.3 PZT-polymer composites were fabricated using the dice and fill method with various PZT types and volume fractions. These composites were evaluated for power underwater transducer applications with an air backed and no matching layer configuration. Electrical input and acoustical output powers were monitored as a function of the drive level. Total acoustic power densities of 30 W/cm2 were obtained with a P189/epoxy piezocomposite vibrating at 350 kHz with a low duty cycle (1-5%) and with a 90% efficiency. Power densities up to 20 W/cm2 were measured with a 50% duty cycle. Evolution and destruction of the transducers were monitored versus increasing averaged power. It was observed that better efficiencies were obtained with low volume fraction configurations allowing natural acoustic impedance matching to water. It was found that hard PZT type (Navy III) are optimal compositions even for piezocomposite transducers. It is shown that, unlike a common belief, the polymer mechanical losses are comparable to those of the active ceramic justifying that 1.3 piezocomposites are suited for low-cost power applications. In fact, the main limitation induced by the polymer phase is a strong thermal breakdown when the temperature of the transducer approaches the glass transition region of the polymer. Measurements of the polymer losses as a function of the temperature were obtained confirming this point and offering interesting new alternatives for future composite power transducers.     

A novel ultrasonic clutch using near-field acoustic levitation

This paper investigates design, fabrication and drive of an ultrasonic clutch with two transducers. For the two transducers, one serving as a driving element of the clutch is connected to a driving shaft via a coupling, and the other serving as a slave element of the clutch is connected to a slave shaft via another coupling. The principle of ultrasonic levitation is first expressed. Then, a series-resonant inverter is used to generate AC voltages at input terminals of each transducer, and a speed measuring system with optic sensors is used to find the relationship between rotational speed of the slave shaft and applied voltage of each transducer. Moreover, contact surfaces of the two transducers are coupled by the frictional force when both the two transducers are not energized, and separated using the ultrasonic levitation when at least one of the two transducers is energized at high voltages at resonance.     

A novel ultrasonic clutch using near-field acoustic levitation

This paper investigates design, fabrication and drive of an ultrasonic clutch with two transducers. For the two transducers, one serving as a driving element of the clutch is connected to a driving shaft via a coupling, and the other serving as a slave element of the clutch is connected to a slave shaft via another coupling. The principle of ultrasonic levitation is first expressed. Then, a series-resonant inverter is used to generate AC voltages at input terminals of each transducer, and a speed measuring system with optic sensors is used to find the relationship between rotational speed of the slave shaft and applied voltage of each transducer. Moreover, contact surfaces of the two transducers are coupled by the frictional force when both the two transducers are not energized, and separated using the ultrasonic levitation when at least one of the two transducers is energized at high voltages at resonance.     

Lead-free KNLNT piezoelectric ceramics for high-frequency ultrasonic transducer application

This paper presents the latest development of a lead-free piezoelectric ceramic and its application to transducers suitable for high-frequency ultrasonic imaging. A lead-free piezoelectric ceramic with formula of (K_0.5Na_0.5)_0.97Li_0.03(Nb_0.9 Ta_0.1)O₃ (abbreviated as KNLNT-0.03/0.10) was fabricated and characterized. The material was found to have a clamped dielectric constant ε₃₃^S/ε₀ = 890, piezoelectric coefficient d₃₃ = 245 pC/N, electromechanical coupling factor k_t = 0.42 and Curie temperature T_c > 300 °C. High-frequency (40 MHz) ultrasound transducers were successfully fabricated with the lead-free material. A representative lead-free transducer had a bandwidth of 45%, two-way insertion loss of -18 dB. This performance is comparable to reported performances of popular lead-based transducers. The comparison results suggest that the lead-free piezoelectric material may serve as an alternative to lead-based piezoelectric materials for high-frequency ultrasonic transducer applications.     

Design and in vitro evaluation of a real-time catheter localization system using time of flight measurements from seven 3.5 MHz single element ultrasound transducers towards abdominal aortic aneurysm procedures

Interventional surgical instrument localization is a crucial component of minimally invasive surgery. Image guided surgery researchers are investigating devices broadly categorized as surgical localizers to provide real-time information on the instrument’s 3D location and orientation only. This paper describes the implementation and in vitro evaluation of a prototype real-time nonimaging ultrasound-based catheter localizer system towards use in abdominal aortic aneurysm procedures. The catheter-tip is equipped with a single element ultrasound transducer which is tracked with an array of seven external single element transducers. The performance of the system was evaluated in a water tank and additionally in the presence of pork belly tissue and also a nitinol-dacron stent graft. The mean root mean square errors were respectively 1.94 ± 0.06, 2.54 ± 0.31 and 3.33 ± 0.06 mm. In addition, this paper illustrates errors induced by transducer aperture size and suggests a method for aperture error compensation. Aperture compensation applied to the same experimental data yielded mean root mean square errors of 1.05 ± 0.07, 2.42 ± 0.33 and 3.23 ± 0.07 mm respectively for water; water and pork; and water, pork and stent experiments. Lastly, this paper presents a video showing free-hand movement of the catheter within the water tank with data capture at 25 frames per second.     

Micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular array

This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9 × 9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm² with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and −6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about −35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.     

Standing wave brass-PZT square tubular ultrasonic motor

This paper reports a standing wave brass-PZT tubular ultrasonic motor. The motor is composed of a brass square tube with two teeth on each tube end. Four PZT plates are attached to the outside walls of the brass tube. The motor requires only one driving signal to excite vibration in a single bending mode to generate reciprocating diagonal trajectories of teeth on the brass tube ends, which drive the motor to rotate. Bi-directional rotation is achieved by exciting different pairs of PZT plates to switch the bending vibration direction. Through using the brass-PZT tube structure, the motor can take high magnitude vibration to achieve a high output power in comparison to PZT tube based ultrasonic motors. Prototypes are fabricated and tested. The dimension of the brass-PZT tube is 3.975 mm × 3.975 mm × 16 mm. Measured performance is a no-load speed of >1000 RPM, a stall torque of 370 μNm and a maximum output power of 16 mW when a sinusoidal driving voltage of 50 V is applied. The working frequencies of the motor are 46,050 Hz (clockwise) and 46,200 Hz (counter-clockwise).     

Microfabrication of stacks of acoustic matching layers for 15 MHz ultrasonic transducers

This paper presents a novel method used to manufacture stacks of multiple matching layers for 15 MHz piezoelectric ultrasonic transducers, using fabrication technology derived from the MEMS industry. The acoustic matching layers were made on a silicon wafer substrate using micromachining techniques, i.e., lithography and etch, to design silicon and polymer layers with the desired acoustic properties. Two matching layer configurations were tested: a double layer structure consisting of a silicon–polymer composite and polymer and a triple layer structure consisting of silicon, composite, and polymer. The composite is a biphase material of silicon and polymer in 2-2 connectivity. The matching layers were manufactured by anisotropic wet etch of a (1 1 0)-oriented Silicon-on-Insulator wafer. The wafer was etched by KOH 40 wt%, to form 83 μm deep and 4.5 mm long trenches that were subsequently filled with Spurr’s epoxy, which has acoustic impedance 2.4 MRayl. This resulted in a stack of three layers: The silicon substrate, a silicon–polymer composite intermediate layer, and a polymer layer on the top. The stacks were bonded to PZT disks to form acoustic transducers and the acoustic performance of the fabricated transducers was tested in a pulse-echo setup, where center frequency, −6 dB relative bandwidth and insertion loss were measured. The transducer with two matching layers was measured to have a relative bandwidth of 70%, two-way insertion loss 18.4 dB and pulse length 196 ns. The transducers with three matching layers had fractional bandwidths from 90% to 93%, two-way insertion loss ranging from 18.3 to 25.4 dB, and pulse lengths 326 and 446 ns. The long pulse lengths of the transducers with three matching layers were attributed to ripple in the passband.     

Development of a compact self-focusing piezoelectric generator using electrical pre-strain piezocomposite material

New clinical concepts in lithotripsy demand small shock heads. Reducing the size of piezoelectric shock heads will only be possible if the pressure generated at the surface of each transducer can be increased so that, the total pressure at the focus remains very high. So, we propose a new method allowing the generation of large surface pressures. It is well known that the piezoelectric rods in piezocomposite material are more fragile in the extension mode than in the compression mode. For this reason, actuators are mechanically pre-stressed between two flasks. This method cannot be used for transducers working at high frequencies, about 0.5 MHz. For this reason, we proposed to electrically pre-strain the piezoelectric material by applying high electric field in the opposite direction of the polarisation. In a first mode we proposed to pre-strain in continuous mode the transducer. Unfortunately we noticed a rapid de-poling and re-poling in the inverse direction. In a second mode to reduce depolarisation, this field was applied only during a short time just before the generation of the pulse which generate the compressive wave and in a third mode, the transducer was re-poled between two successive electrical pulses. Using this last method, it was possible to increase the maximum pressure at the surface of a 20 mm diameter plane piston to 20% and reach 4 MPa. According to this idea a very compact shock wave generator was designed. The generator made of a 1-3 piezocomposite material has a diameter of 120 mm and focused at 120 mm. The maximum pressure and the width of the compressive wave at the focus were, respectively, 60 MPa and 1.5 micros. The focal zone measured at -3 dB is an ellipsoid 6 mm high in the propagating axis and 3 mm width in the perpendicular direction. The efficacy of this generator was measured as the number of shocks necessary to totally disintegrate plaster balls 15 mm in diameter mimicking the kidney stones. At full power the number of shocks was only 150 which is rather the same number as the one obtained using electrohydraulic machine generally considered as the gold standard. This results show that piezoelectric material may be advantageously used for the manufacturing of shock wave generators.     

Experimental study of underwater transmission characteristics of high-frequency 30 MHz polyurea ultrasonic transducer

In this paper, we present the transmission characteristics of a polyurea ultrasonic transducer operating in water. In this study, we used a polyurea transducer with fundamental resonance at approximately 30 MHz. Firstly, acoustic pressure radiated from the transducer was measured using a hydrophone, which has a diameter of 0.2 mm. The transmission characteristics such as relative bandwidth, pulse width, and acoustic sensitivity were calculated from the experimental results. The results of the experiment showed a relative bandwidth of 50% and a pulse width of 0.061 μs. The acoustic sensitivity was 0.60 kPa/V with good linearity, where the correlation coefficient R in the fitting calculation was 0.996. A maximum pressure of 13.1 kPa was observed when the transducer was excited at a zero-to-peak voltage of 21 V. Moreover, we experimentally verified the results. The results of the pulse/echo experiment showed that the estimated diameters of the copper wires were 458 and 726 μm, where the differences between the actual and measured values were 15% and 4%, respectively. Acoustic streaming was also observed so that a particle velocity map was estimated by particle image velocimetry (PIV). The sound pressure calculated from the particle velocity obtained by PIV showed good agreement with the acoustic pressure measured using the hydrophone, where the differences between the calculated and measured values were 12–19%.     

Ultrasonic transcutaneous energy transfer for powering implanted devices

This paper investigates ultrasonic transcutaneous energy transfer (UTET) as a method for energizing implanted devices at power level up to a few 100 mW. We propose a continuous wave 673 kHz single frequency operation to power devices implanted up to 40 mm deep subcutaneously. The proposed UTET demonstrated an overall peak power transfer efficiency of 27% at 70 mW output power (rectified DC power at the load).The transducers consisted of PZT plane discs of 15 mm diameter and 1.3 mm thick acoustic matching layer made of graphite. The power rectifier on the implant side attained 88.5% power transfer efficiency.The proposed approach is analyzed in detail, with design considerations provided to address issues such as recommended operating frequency range, acoustic link matching, receiver’s rectifying electronics, and tissue bio-safety concerns. Global optimization and design considerations for maximum power transfer are presented and verified by means of finite element simulations and experimental results.