Thermoelastic damping of the axisymmetric vibration of circular plate resonators

Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale circular plate resonators. In this paper, the governing equations of coupled thermoelastic problems are established for axisymmetric out-of-plane vibration of circular plate. Then the analytical expression for thermoelastic damping is obtained. The effects of environmental temperature, plate dimensions and boundary conditions on the thermoelastic damping are studied.     

Damping in micro-scale generalized thermoelastic circular plate resonators

The out-of-plane vibrations of a generalized thermoelastic circular plate are studied under different environmental temperature, plate dimensions and boundary conditions. The analytical expressions for thermoelastic damping of vibration and phase velocity of circumferential surface wave modes are obtained. It is noticed that the damping of vibrations and phase velocities of circumferential surface wave modes significantly depend on thermal relaxation time in addition to thermoelastic coupling in circular plates under resonance conditions. The surface conditions also impose significant effects on the vibrations of such resonators. The expressions for displacement and temperature fields in the plate resonator are also derived and obtained. Some numerical results have also been presented for illustration purpose in case of silicon material plate.     

Analysis of thermoelastic dissipation in circular micro-plate resonators using the generalized thermoelasticity theory of dual-phase-lagging model

This study investigates the thermoelastic dissipation of micro-plate resonators by using the generalized thermoelasticity theory of dual-phase-lagging model. Explicit formulae of thermoelastic damping and frequency shift are derived. Influences of the plate thickness and vibration frequency on the thermoelastic damping are examined. Phenomena distinct from those of classical theory are observed in the numerical results of thermoelastic damping in micro-plate resonators. These results may bring new insights into the study of thermoelastic damping at submicrometer or nanometer scale.     

Nonlinear longitudinal waves in the presence of the interaction between the strain and temperature fields and the field of nonequilibrium atomic defects

The propagation of nonlinear longitudinal waves in a plate is studied by taking into account the interaction of the longitudinal displacement component with the temperature field and the field of concentration of nonequilibrium atomic point defects. A nonlinear evolution equation is derived for describing the self-consistent thermoelastic longitudinal strain fields. It is shown that the thermoelastic effect on the strain waves manifests itself in the appearance of dissipative terms, which describe the heat transfer and the thermoelastic interaction caused by the strain-induced heat release due to the recombination of nonequilibrium atomic defects. The soliton solutions to the evolution equation are investigated, and the characteristic features of their damping are considered with allowance for the low-frequency and high-frequency losses.     

Thermoelastic damping in torsion microresonators with coupling effect between torsion and bending

Predicting thermoelastic damping (TED) is crucial in the design of high Q MEMS resonators. In the past, there have been few works on analytical modeling of thermoelastic damping in torsion microresonators. This could be related to the assumption of pure torsional mode for the supporting beams in the torsion devices. The pure torsional modes of rectangular supporting beams involve no local volume change, and therefore, they do not suffer any thermoelastic loss. However, the coupled motion of torsion and bending usually exists in the torsion microresonator when it is not excited by pure torque. The bending component of the coupled motion causes flexural vibrations of supporting beams which may result in significant thermoelastic damping for the microresonator. This paper presents an analytical model for thermoelastic damping in torsion microresonators with the coupling effect between torsion and bending. The theory derives a dynamic model for torsion microresonators considering the coupling effect, and approximates the thermoelastic damping by assuming the energy loss to occur only in supporting beams of flexural vibrations. The thermoelastic damping obtained by the present model is compared to the measured internal friction of single paddle oscillators. It is found that thermoelastic damping contributes significantly to internal friction for the case of the higher modes at room temperature. The present model is validated by comparing its results with the finite-element method (FEM) solutions. The effects of structural dimensions and other parameters on thermoelastic damping are investigated for the representative case of torsion microresonators.     

Analysis of Frequency Spectrum of Laser-Induced Vibration of Microbeam Resonators

The vibration phenomenon during pulsed laser heating of micro-beams is investigated. The beam is made of silicon and is heated by a laser pulse with a non-Gaussian temporal profile and with an ultrashort pulse duration of 2ps, which incites vibration due to the thermoelastic damping effect. This coupled thermoelastic problem is solved using an analytical-numerical technique based on the Laplace transformation. The damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are also examined and discussed.     

Time-domain simulation of damped impacted plates. I. Theory and experiments

A time-domain formulation for the flexural vibrations in damped rectangular isotropic and orthotropic plates is developed, in order to investigate transient excitation of plates by means of sound synthesis. The model includes three basic mechanisms of damping (thermoelasticity, viscoelasticity and radiation) using a general differential operator. The four rigidity factors of the plate are modified by perturbation terms, each term corresponding to one specific damping mechanism. The first damping term is derived from the coupling between the thermoelastic stress-strain relations and the heat diffusion equation. The second term is obtained from the general differential formulation of viscoelasticity. The third term is obtained through a Pade approximation of the damping factor which governs the coupling of the plate with the surrounding air. The decay factors predicted by the model reproduce adequately the dependence on both dimensions and frequency of the decay factors measured on rectangular plates of various sizes and thicknesses made of four different materials (aluminum, glass, carbon fiber, and wood). The numerical resolution of the complete problem, including initial and boundary conditions, and the comparison between real and simulated sounds are presented in a companion paper.     

Thermoelastic vibrations in micro-/nano-scale beam resonators with voids

In this paper the closed form expressions for the transverse vibrations of a homogenous isotropic, thermoelastic thin beam with voids, based on Euler-Bernoulli theory have been derived. The effects of voids, relaxation times, thermomechanical coupling, surface conditions and beam dimensions on energy dissipation induced by thermoelastic damping in (micro-electromechanical systems) MEMS/(nano-electromechanical systems) NEMS resonators are investigated for beams under clamped and simply supported conditions. Analytical expressions for deflection, temperature change, frequency shifts and thermoelastic damping in the beam have been derived. Some numerical results with the help of MATLAB programming software in case of magnesium like material have also been presented. The computer simulated results in respect of damping factor and frequency shift have been presented graphically.     

Flexural and transversal wave motion in homogeneous isotropic thermoelastic plates by using asymptotic method

The present investigation is concerned with the flexural and transversal wave motion in an infinite, transversely isotropic, thermoelastic plate by asymptotic method. The governing equations for the flexural and transversal motions have been derived from the system of three-dimensional dynamical equations of linear theory of coupled thermoelasticity. The asymptotic operator plate model for free vibrations; both flexural and transversal, in a homogenous thermoelastic plate leads to fifth degree and cubic polynomial secular equations, respectively, that governs frequency and phase velocity of various possible modes of wave propagation at all wavelengths. All the coefficients of differential operator have been expressed as explicit functions of the material parameters. The velocity dispersion equations for the flexural and transversal wave motion have been deduced from the three-dimensional analog of Rayleigh-Lamb frequency equation for thermoelastic plate waves. The approximations for long and short waves and expression for group velocity have also been derived. The thermoelastic Rayleigh-Lamb frequency equations for the considered plate are expanded in power series in order to obtain polynomial frequency and velocity dispersion relations whose equivalence is established with that of asymptotic method. The dispersion curves for phase velocity, group velocity and attenuation coefficient of various flexural and transversal wave modes are shown graphically for aluminum-epoxy material elastic and thermoelastic plates.     

Dynamic stability of thermoelastic coupling moving plate subjected to follower force

The dynamic characteristics and stability of the moving thermoelastic coupling rectangular plate subjected to uniformly distributed tangential follower force are investigated. Based on the heat conduction equation containing the thermoelastic coupling term and the thin plate theory, the thermoelastic coupling differential equation of motion of the rectangular plate under the action of uniformly distributed tangential follower force is established. Dimensionless complex frequencies of the moving thermoelastic coupling rectangular plate with four edges simply supported, two opposite edges simply supported and other two edges clamped are calculated by the differential quadrature method. The effects of the dimensionless thermoelastic coupling factor and dimensionless moving speed on the stability and critical load of the moving plate are analyzed. The results show that the divergence loads of the first order mode increase with the increase of the dimensionless thermoelastic coupling factor, and decrease with increasing the dimensionless moving speed.     

Quality factors for the nano-mechanical tubes with thermoelastic damping and initial stress

The Quality factors (Q-factor) are defined as the ratio of the kinetic and potential energy to dissipation for various damping mechanisms of structures. Therefore, improvement in the Q-factors is an important issue in micro- and nano-resonator applications for the high performance. Also, it is well known that the thermoelastic damping is more crucial than the other damping factors in a device. Thus, the vibration of nano-mechanical circular tube is investigated with thermoelastic damping and initial stress effects in this work. To simplify the shell equations for the transverse displacement-dominated problems, the Donnell-Mushtari-Vlasov (DMV) approach is adopted. Applying the stress function, the equations of motion for deflection, compatibility equation and heat conduction equation are derived. Using an iterative scheme, the natural frequencies and the Q-factors under the initial stress are obtained, and the influences of the dimensions of the shell, the mode numbers and initial stress are discussed in detail.     

Generalized thermoelastic extensional and flexural wave motions in homogenous isotropic plate by using asymptotic method

In this paper the asymptotic method has been applied to investigate propagation of generalized thermoelastic waves in an infinite homogenous isotropic plate. The governing equations for the extensional, transversal and flexural motions are derived from the system of three-dimensional dynamical equations of linear theories of generalized thermoelasticity. The asymptotic operator plate model for extensional and flexural free vibrations in a homogenous thermoelastic plate leads to sixth and fifth degree polynomial secular equations, respectively. These secular equations govern frequency and phase velocity of various possible modes of wave propagation at all wavelengths. The velocity dispersion equations for extensional and flexural wave motion are deduced from the three-dimensional analog of Rayleigh-Lamb frequency equation for thermoelastic plate. The approximation for long and short waves along with expression for group velocity has also been obtained. The Rayleigh-Lamb frequency equations for the considered plate are expanded in power series in order to obtain polynomial frequency and velocity dispersion relations and its equivalence established with that of asymptotic method. The numeric values for phase velocity, group velocity and attenuation coefficients has also been obtained using MATHCAD software and are shown graphically for extensional and flexural waves in generalized theories of thermoelastic plate for solid helium material.     

Optimal Damping of Perturbations of Moving Thermoelastic Panel

The translational motion of a thermoelastic web subject to transverse vibrations caused by initial perturbations is considered. It is assumed that a web moving with a constant translational velocity is described by the model of a thermoelastic panel simply supported at its ends. The problem of optimal damping of vibrations when applying active transverse actions is formulated. For solving the optimization problem, modern methods developed in control theory for systems with distributed parameters described by partial differential equations are used.     

Circumferential thermoelastic waves in orthotropic cylindrical curved plates without energy dissipation

In this article, the propagation of guided thermoelastic waves in the circumferential direction of orthotropic cylindrical curved plates subjected to stress-free, isothermal boundary conditions is investigated in the context of the Green-Naghdi (GN) generalized thermoelastic theory (without energy dissipation). The coupled wave equations and heat conduction equation are solved by the Legendre orthogonal polynomial series expansion approach. The convergency of the method is discussed through a numerical example. The dispersion curves of thermal modes and elastic modes are illustrated simultaneously. Dispersion curves of the corresponding pure elastic cylindrical plate are also shown to analyze the influence of the thermoelasticity on elastic modes. The displacement, temperature and stress distributions are shown to discuss the differences between the elastic modes and thermal modes. A thermoelastic cylindrical plate with a different ratio of radius to thickness is considered to discuss the influence of the ratio on the characteristics of circumferential thermoelastic waves.     

Thermoelastic damping effect on in-extensional vibration of rotating thin ring

Sensitive devices such as resonant sensors and radio frequency micro-electro-mechanical system (RF-MEMS) filters etc., require high Quality factors (Q-factors) defined as the ratio of total system energy to dissipation that occurs due to various damping mechanisms. Also, thermoelastic damping is considered to be one of the most important factors to elicit energy dissipation due to the irreversible heat flow of oscillating structures in the micro scales. In this study, the Q-factor for thermoelastic damping is investigated in rotating thin rings with in-plane vibration. First, in order to obtain the temperature profile of the model, a heat conduction equation for the thermal flow across the radial direction is solved based on the bending approximation so-called in-extensional approximation of the ring. Using the temperature distribution coupled with a displacement, a governing equation of the ring model can then be derived. Eventually, an eigen-value analysis is performed to obtain the natural frequency of rotating thin rings, and the analytical and numerical values of Q-factors can then be determined by the definition. Furthermore, the effects of rotating speed, dimensions of the ring, mode numbers and ambient temperatures on the Q-factor are discussed in detail.     

Suppression of thermoelastic damping in MEMS beam resonators by piezoresistivity

Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such a method is implemented by applying an electrostatic field along the beam length with a negative piezoresistive coefficient. During a resonance, the stretched part of the beam generates a higher electrical power density and thus a higher temperature, while the compressed region leads to a lower temperature. Such a temperature distribution is opposite to the temperature change caused by the thermoelastic effect. The working principle is described by a set of coupled differential equations, which are subsequently solved by the finite element method. The result indicates that the TED in the beam resonators can be completely compensated when the strength of electrical field is tuned to a critical value, namely CEF. The value of the CEF is further analyzed by a series of parametric studies on various material properties and geometric factors.     

Generalized thermoelastic Lamb waves in a plate bordered with layers of inviscid liquid

The propagation of thermoelastic waves in a homogeneous isotropic, thermally conducting plate bordered with layers of inviscid liquid or half-space of inviscid liquid on both sides is investigated in the context of generalized theories of thermoelasticity. Secular equations for the plate in closed form and isolated mathematical conditions for symmetric and antisymmetric wave modes in completely separate terms are derived. The results for coupled and uncoupled theories of thermoelasticity have been obtained as particular cases. The different regions of secular equations are obtained and special cases, such as Lame modes, thin plate waves and short wavelength waves of the secular equations are also discussed. The secular equations for thermoelastic leaky Lamb waves are also obtained and deduced. The amplitudes of displacement components and temperature change have also been computed and studied. Finally, the numerical solution is carried out for an aluminum-epoxy composite and aluminum materials plate bordered with water. The dispersion curves for symmetric and antisymmetric thermoelastic wave modes and amplitudes of displacement and temperature change in case of fundamental symmetric (S₀) and skew symmetric (A₀) modes are presented in order to illustrate and compare the theoretical results. The theory and numerical computations are found to be in close agreement. The results have been deduced and compared with the relevant publications available in the literature at the relevant stages of the work.     

Thermoelastic equivalent circuit for laser ultrasound

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Transient analysis of nonlinear Euler–Bernoulli micro-beam with thermoelastic damping,via nonlinear normal modes

In this paper an Euler–Bernoulli model has been used for vibration analysis of micro-beams with large transverse deflection. Thermoelastic damping is considered to be the dominant damping mechanism and introduced as imaginary stiffness into the equation of motion by evaluating temperature profile as a function of lateral displacement. The obtained equation of motion is analyzed in the case of pure single mode motion by two methods; nonlinear normal mode theory and the Galerkin procedure. In contrast with the Galerkin procedure, nonlinear normal mode analysis introduces a nonconventional nonlinear damping term in modal oscillator which results in strong damping in case of large amplitude vibrations. Evaluated modal oscillators are solved using harmonic balance method and tackling damping terms introduced as an imaginary stiffness is discussed. It has been shown also that nonlinear modal analysis of micro-beam with thermoelastic damping predicts parameters such as inverse quality factor, and frequency shift, to have an extrema point at certain amplitude during transient response due to the mentioned nonlinear damping term; and the effect of system?s characteristics on this critical amplitude has also been discussed.     

Efficient prediction of the quality factors of micromechanical resonators

A high quality factor (Q-factor) is one of the major requirements of high-performance resonators. An understanding of the dissipation mechanism is crucial for maximizing the quality factor by reducing the energy loss. Thermoelastic damping has been well-known as the important intrinsic dissipation that affects the quality factor of micro-resonators. In this study, a finite element formulation based on the weak form of fully coupled thermoelastic problems is suggested. The coupled thermoelastic equation usually leads to a large-size complex eigenvalue problem, which is very massive and time-consuming to solve. Therefore, we also applied the model order reduction (MOR) scheme to this coupled multiphysical problem in order to achieve computational efficiency. The present approach is validated by comparing the numerical results and analytical solutions.