Geometric effects on thermoelastic damping in MEMS resonators

The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that reduces the dimensionality of the problem and considerably improves the computational efficiency. The method is first validated by comparing the two-dimensional model to the existing analytical solutions for a simply supported beam system, and then it is extended to a three-dimensional axisymmetric geometry to obtain the energy loss as a function of the geometric parameters in a silicon ring resonator. The computational results reveal that there is a peak value for the resonant frequency when the radial width of the ring varies. In addition, the quality factor (Q-factor) decreases with the radial width as a monotonic function.     

Disorder in a periodic Helmholtz resonators array

This paper considers the disorder in a periodic duct–resonator system. The transfer matrix method is used to investigate wave propagation in the duct. Two cases are investigated: the disorder in periodic distance and the disorder in the geometries of Helmholtz resonators. Different from the original attenuation characteristic brought about by pure periodic system, it is found that the disorder in the geometries of resonators with the periodic distance being kept unchanged provides a useful way for the design of such a system to achieve a relatively wide noise attenuation band and to track some narrow noise peaks within it.     

Wave propagation in a duct with a periodic Helmholtz resonators array

Helmholtz resonator is often used to reduce noise in a narrow frequency range. To obtain a broader noise attenuation band, combing several resonators is a possible way. This paper presents a theoretical study of sound propagation in a one-dimensional duct with identical side-branch resonators mounted periodically. The analysis of each resonator was based on a distributed-parameter model that considered multi-dimensional wave propagation in its neck-cavity interface. This model provided a more accurate prediction of the resonant frequency of the resonator than traditional lumped-parameter model. Bloch wave theory and the transfer matrix method were used to investigate wave propagation in these spatially periodic resonators. The results predicted by the theory fit well with the computer simulation using a three-dimensional finite element method and the experimental results. This study indicates that the wave coupling in this periodic system results in the dispersion of the frequency band into the stop and the pass bands. The long-term significance is that periodic resonators may more effectively control noise in ducts by broadening the bandwidth they attenuate and increasing the magnitude of sound attenuation.     

Thermoelastic damping in rectangular and circular microplate resonators

Predicting thermoelastic damping (TED) is crucial in the design of high Q micro-electro-mechanical systems (MEMS) resonators. In the past, some analytical models have been developed for TED in microbeam resonators. Rectangular and circular microplates are also common elements in many micro-resonators. Two analytical models have been developed for TED in the contour-mode vibration and the out-of-plane vibration of circular microplates, respectively. However, there is lack of works that model the TED in the out-of-plane vibration of rectangular microplates. This paper presents an analytical model for the TED in the fully clamped and simply supported rectangular microplates. The quality factor is found by calculating the energy dissipated per cycle of vibration over the volume of the microplate. The derivation in this paper shows that the model for the TED in the fully clamped and simply supported rectangular plates is the same as the model for the TED in the fully clamped and simply supported circular plates. For the rectangular microplates with other boundary conditions, based on Rayleigh's method, this paper presents a set of analytical approximate models to estimate the TED in the rectangular microplates vibrating in the fundamental mode. The present model is validated by comparison with previously reported model and the FEM model.     

Localisation and damping in resonators with complex geometry

Based on numerical studies, we show that localisation is a common phenomenon in resonators exhibiting some kind of geometrical complexity. In two-dimensional (2d) shallow cavities of irregular shape, localisation effects are due to spatial decoherence in a major fraction of the volume. In 2d shallow cavities of regular geometry with embedded absorbing material of irregular shape, one observes the appearance of eigenmodes localised in both, the absorbing and the non-absorbing media. Those modes are thought to be responsible for increased dissipation. These results may be a hint to understand why natural or practical systems absorbing wave energy are found, or built, with complex geometry.     

Propagation of acoustic waves in a fluid-filled pipe with periodic elastic Helmholtz resonators

Helmholtz resonators are widely used to reduce noise in a fluid-filled pipe system. It is a challenge to obtain lowfrequency and broadband attenuation with a small sized cavity. In this paper, the propagation of acoustic waves in a fluid-filled pipe system with periodic elastic Helmholtz resonators is studied theoretically. The resonance frequency and sound transmission loss of one unit are analyzed to validate the correctness of simplified acoustic impedance. The band structure of infinite periodic cells and sound transmission loss of finite periodic cells are calculated by the transfer matrix method and finite element software. The effects of several parameters on band gap and sound transmission loss are probed.Further, the negative bulk modulus of periodic cells with elastic Helmholtz resonators is analyzed. Numerical results show that the acoustic propagation properties in the periodic pipe, such as low frequency, broadband sound transmission, can be improved.     

Geometric phases and multiple degeneracies in harmonic resonators

In a recent experiment Lauber et al. have deformed cyclically a microwave resonator and have measured the adiabatic normal-mode wave functions for each shape along the path of deformation. The nontrivial observed cyclic phases around a threefold degeneracy were accounted for by Manolopoulos and Child within an approximate theory. However, open-path geometrical phases disagree with experiment. By solving exactly the problem, we find unsuspected extra degeneracies around the multiple one that account for the measured phase changes throughout the path. It turns out that proliferation of additional degeneracies around a multiple one is a common feature of quantum mechanics.     

一维亥姆霍兹共振腔声子晶体中缺陷模式的实验研究

基于亥姆霍兹共振腔单元设计并制作了一种一维局域共振型声子晶体, 针对结构中存在点缺陷的情况, 进行了实验研究. 实验结果表明, 由于点缺陷的存在, 局域共振型声禁带中出现了缺陷模式, 并且在缺陷单元周围引起了能量的局域现象, 与理论结果符合较好. 缺陷单元从两个不同的方向趋近于完美单元时, 缺陷模式分别按照不同的规律变化, 但是越靠近禁带边缘, 所局域的能量就越多. 另外, 当缺陷单元共振频率小于完美单元共振频率时, 局域能量主要集中在声波导内; 反之, 局域能量则主要集中在共振腔内. 本研究对设计新型低频声滤波装置及高声强集中装置具有一定意义. 关键词： 亥姆霍兹共振腔 声子晶体 缺陷模式 能量局域化     

封闭腔体噪声控制中亥姆霍兹共振器的优化设计方法

提出用亥姆霍兹共振器控制声腔内噪声时计算共振器最优阻尼比和最优工作带宽的理论公式,并进行实验验证。首先,建立共振器与待控腔体的声学耦合方程,以最小化腔体内目标声压幅值为参考,对共振器的阻尼比和工作带宽进行理论分析,求出最优阻尼比和最优工作带宽的计算公式。接着,提出在声腔噪声控制中使用最优亥姆霍兹共振器的实施步骤。最后,以一维声学腔体内的噪声为控制对象,通过对比控制前后的理论结果与实测数据,验证最优阻尼比和最优工作带宽的理论公式。结果表明,本文开发的亥姆霍兹共振器优化设计方法能准确地预报共振器的最优阻尼比与最优工作带宽,在声腔中低频噪声控制中有广泛的应用前景。     

Piezoelectric resonators with mechanical damping and resistance in current conduction

A novel design method for high Q piezoelectric resonators was presented and proposed using the 3-D equations of linear piezoelectricity with quasi-electrostatic approximation which include losses attributed to mechanical damping in solid and resistance in current conduction. There is currently no finite element sofware for estimating the Q of a resonator without apriori assumptions of the resonator impedance or damping. There is a necessity for better and more realistic modeling of resonators and filters due to miniaturization and the rapid advances in frequency ranges in telecommunication. We presented new three-dimensional finite element models of quartz and barium titanate resonators with mechanical damping and resistance in current conduction. Lee, Liu and Ballato’s 3-D equations of linear piezoelectricity with quasi-electrostatic approximation which include losses attributed to mechanical damping in solid and resistance in current conduction were formulated in a weak form and implemented in COMSOL. The resulting finite element model could predict the Q and other electrical parameters for any piezoelectric resonator without apriori assumptions of damping or resistance. Forced and free vibration analyses were performed and the results for the Q and other electrical parameters were obtained. Comparisons of the Q and other electrical parameters obtained from the free vibration analysis with their corresponding values from the forced vibration analysis were found to be in excellent agreement. Hence, the frequency spectra obtained from the free vibration analysis could be used for designing high Q resonators. Results for quartz thickness shear AT-cut and SC-cut resonators and thickness stretch poled barium titanate resonators were presented. An unexpected benefit of the model was the prediction of resonator Q with energy losses via the mounting supports.     

Suppression of thermoelastic damping in MEMS beam resonators by piezoresistivity

Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such a method is implemented by applying an electrostatic field along the beam length with a negative piezoresistive coefficient. During a resonance, the stretched part of the beam generates a higher electrical power density and thus a higher temperature, while the compressed region leads to a lower temperature. Such a temperature distribution is opposite to the temperature change caused by the thermoelastic effect. The working principle is described by a set of coupled differential equations, which are subsequently solved by the finite element method. The result indicates that the TED in the beam resonators can be completely compensated when the strength of electrical field is tuned to a critical value, namely CEF. The value of the CEF is further analyzed by a series of parametric studies on various material properties and geometric factors.     

Reduction of sound transmission into a circular cylindrical shell using distributed vibration absorbers and Helmholtz resonators

A modal expansion method is used to model a cylindrical enclosure excited by an external plane wave. A set of distributed vibration absorbers (DVAs) and Helmholtz resonators (HRs) are applied to the structure to control the interior acoustic levels. Using an impedance matching method, the structure, the acoustic cavity, and the noise reduction devices are fully coupled to yield an analytical formulation of the structural kinetic energy and acoustic potential energy of a treated cylindrical cavity. Lightweight DVAs and small HRs tuned to the natural frequencies of the targeted structural and acoustic modes, respectively, result in significant acoustic and structural attenuation when the devices are optimally damped. Simulations show that significant interior noise reduction can only be achieved by adding damping to both structural and acoustic modes, which are resonant in the frequency bandwidth of interest. In order to be independent of the azimuth angle of the excitation and to avoid unwanted modal interactions, the devices are distributed evenly around the cylinder in rings. This treatment can only achieve good performance if the structure and the acoustic cavity are lightly damped.     

The impact of the neck material on the sound absorption performance of Helmholtz resonators

Helmholtz resonators with sound absorption materials filling the neck may have an improved sound absorption capacity. In this work, parallel perforated ceramics with different perforation diameters were installed into the neck of a Helmholtz resonator to improve its acoustic impedance to simultaneously achieve a better acoustic absorption coefficient and a wider absorption bandwidth. An experimental system was built to investigate the effect of the perforation diameters on the sound absorption performance of the resonator. It is found that nonlinear effects near the resonance frequency affect the resonator?s neck mouth impedance and further its sound absorption performance significantly. For frequency range 50–500 Hz, a model of the neck mouth impedance is developed based on a revised Forchheimer relationship. The experimental results are in good agreement with the theoretical model.     

周期镶嵌亥姆霍兹共鸣腔平板的声全背向反射

研究斜入射声波在周期镶嵌亥姆霍兹共鸣器的刚性界面上的反射行为。共鸣器间的空间周期间隔d和入射声波的波长λ相当,且大于共振腔尺寸,因此可被视为具有集总参数的声学元件。理论分析和数值计算均表明,当入射波频率和方向既满足布拉格共振条件又同时满足亥姆霍兹共振条件时,在通常的反射方向上反射声波消失,反射波逆入射方向传播,引起与常规反射全然不同的全背向反射。     

On the operating efficiency of Helmholtz resonators in dead-end waveguides using fluid working media

An experimental study is presented of Helmholtz resonators in a dead-end waveguide representing a real hydraulic system with a centrifugal pump. With the example of the discrete spectrum components of the hydrodynamic noise of the waveguide under consideration, it is shown that the application of resonators can both reduce and increase noise levels.     

On optimal design of half-wave resonators for acoustic damping in an enclosure

Acoustic design parameters of a half-wave resonator are studied experimentally for purely acoustic tuning of the resonator. According to the standard acoustic-test procedures, acoustic-pressure signals in the model enclosure with the resonators are measured. Based on the signals, quantitative acoustic properties of damping factor and sound absorption coefficient are evaluated and thereby, the acoustic-damping capacity of the resonator is characterized. Sound absorption coefficient has the advantages of the damping factor in various aspects. The coefficient indicates clearly the tuning frequency of the resonator, absorption effectiveness as a function of frequency, and overall damping capacity. The diameter and the number of a half-wave resonator, its distribution, and the blockage ratio at its inlet are selected as design parameters for optimal tuning of the resonator in the model enclosure. The resonators with larger diameter have the advantage of those with smaller one with respect to purely acoustic damping at the tuning frequency. The optimum number of resonators or the optimum open-area ratio decreases as boundary absorption decreases. When the open-area ratio exceeds the optimum value, over-damping appears, leading to a decrease in peak absorption coefficient and a broadening of absorption bandwidth. Blockage at the resonator inlet controls both peak absorption coefficient and its absorption bandwidth and it can be considered one of design factors for acoustic tuning.     

Geometric interpretation of a new hadronization model

It is shown that the phenomenological potential, used in the context of a recent successful hadronization scheme to realize an effective quark confinement, can be reproduced by coupling, to first order, the quark field to the geometry of an anti-de Sitter vacuum. This seems to suggest a geometric interpretation whith could explain and justify the manifest Lorentz noninvariance of the original effective hadronization model.