Transmission electron microscopy study of epitaxial La0.8MnO3 thin films on SrTiO3

The structure and microstructure of La_0.8MnO₃ thin films on SrTiO₃ substrates, fabricated by pulsed laser deposition at substrate temperatures of 873?K and 1073?K, have been studied by transmission electron microscopy. In both films, columnar growth morphology has been observed. The columnar grain size is found to increase with increasing substrate temperature. In the film deposited at a substrate temperature of 1073?K, there is only one rhombohedral phase. However, two phases, a rhombohedral one and an orthorhombic one, have been observed in the film deposited at 873?K.     

The electrical and magnetic properties of epitaxial orthorhombic YMnO3 thin films grown under various oxygen pressures

Orthorhombic YMnO₃ thin films were epitaxially grown on bare and LaNiO₃ buffered (0 0 1)-SrTiO₃ substrates by pulsed laser deposition under various oxygen pressures from 5 to 30 Pa. The crystal structure and microstructure of these films have been characterized by both X-ray diffractions and transmission electron microscopy. The leakage current, modeled as the space charge limited current (SCLC) mechanism, decreased significantly with the increase of oxygen content. It is further found that the magnetic property of films is greatly enhanced in YMnO₃ films grown under high oxygen pressure, which can be explained decreased oxygen vacancies. In addition, bipolar switching behavior was obtained only in the films grown under 30 Pa oxygen pressure, which is attributed to the decrease of voltage-driven oxygen vacancy migration.     

Synthesis and characterization of nanostructured bimetallic films on α-Al2O3 substrates using electroless deposition

The Pt-Pd and Pd-Ag nanostructured bimetallic films on porous α-Al₂O₃ substrates are successfully synthesized by chemical deposition using lyotropic liquid crystalline templating strategy. The co-reduction of two metallic species in the presence of liquid crystalline phase by hydrazine hydrate produces hexagonal nanostructured Pt-Pd and lamellar nanostructured Pd-Ag films. Low-angle X-ray diffraction (XRD) and transmission electron microscopy (TEM) studies show the ordered nanostructure of both Pt-Pd and Pd-Ag films. The energy dispersive X-ray (EDX) and wide-angle XRD analyses of the bimetallic films have verified the coexistence and uniform distribution of constituent metallic species. By taking into account of catalytic activities, well-defined nanochannels and higher surface areas, the nanostructured bimetallic films might have application potential in microreactors.     

Growth and characterization of nanostructured anatase phase TiO<Subscript>2</Subscript> thin films prepared by DC reactive unbalanced magnetron sputtering

Titanium dioxide thin films were deposited on three different unheated substrates by unbalanced magnetron sputtering. The effects of the sputtering current and deposition time on the crystallization of TiO₂ thin films were studied. The TiO₂ thin films were deposited at three sputtering current values of 0.50, 0.75, and 1.00 A with different deposition times of 25, 35, and 45 min, respectively. The surface morphology of the films was investigated by atomic force microscopy (AFM). The structure was characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The film thickness was determined by field emission scanning electron microscopy (FE-SEM), and the optical property was evaluated with spectroscopic ellipsometry. The results show that polycrystalline anatase films were obtained at a low sputtering current value. The crystallinity of the anatase phase increases as the sputtering current increases. Furthermore, nanostructured anatase phase TiO₂ thin films were obtained for all deposition conditions. The grain size of TiO₂ thin films was in the range 10–30 nm. In addition, the grain size increases as the sputtering current and deposition time increase.     

Crystal structure of (La,Ca)MnO3 ultrathin films deposited on SrTiO3 substrates

Epitaxial La_1?x Ca _x MnO₃ (x???0.33) ultrathin films with thickness between 3 and 6?nm have been grown on (001) SrTiO₃ substrates by sputter deposition. The films do not exhibit an insulator-metal transition as a function of temperature, which is normal in thicker films. High-resolution transmission electron microscopy and electron diffraction were used to investigate the crystal structure. It was found that the films grow coherently on the substrates and are perfectly crystalline. Their crystal structure was determined to be a body-centred orthorhombic structure with space group Imma, instead of the orthorhombic Pnma bulk structure. This structure change is probably responsible for the insulating property of the films.     

LiFePO4 thin films grown by pulsed laser deposition: Effect of the substrate on the film structure and morphology

Well crystallized and homogeneous LiFePO₄/C (LFPO) thin films have been grown by pulsed laser deposition (PLD). The targets were prepared by the sol-gel process at 600 °C. The structure of the polycrystalline powders was analyzed with X-ray powder diffraction (XRD) data. The XRD patterns were indexed having a single phase olivine structure (Pnma). LFPO thin films have been deposited on three different substrates: aluminum (Al), stainless steel (SS) and silicon (Si) by pulsed laser deposition (PLD). The structure of the films was analyzed by X-ray diffraction (XRD), Raman spectroscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM) and atomic force microscopy (AFM). It is found that the crystallinity of the thin films depends on the substrate temperature which was set at 500 °C. When annealed treatments were used, secondary phases were found, so, one step depositions at 500 °C were made.Stainless steel is demonstrated to be the best choice to act as substrate for phosphate deposition. LiFePO₄ thin films grown on stainless steel plates exhibited the presence of carbon, inducing a slight conductivity enhancement that makes these films promising candidates as one step produced cathodes in Li-ion microbatteries.     

Ferromagnetism in epitaxial orthorhombic YMnO3 thin films

Epitaxial orthorhombic YMnO₃ thin films, (0 0 1) oriented, have been grown by pulsed laser deposition on (0 0 1)SrTiO₃ substrates. Their crystal structure and magnetic response have been studied in detail. Although bulk o-YMnO₃ is antiferromagnetic, our magnetic measurements reveal intriguing thermal hysteresis between the zero-field-cooled and field-cooled curves below the onset of the antiferromagnetic ordering temperature, thus signaling a more complex magnetic structure with net ferromagnetic moments. We discuss on the possible origin of this net magnetization and we have found a correlation of the magnetic response with the strain state of the films. We propose that substrate-induced strain modifies the subtle competition of magnetic interactions and leads to a non-collinear magnetic state that can thus be tuned by strain engineering.     

Nd:YAG laser synthesis of nanostructural V2O5 from vanadium oxide sols: Morphological and structural characterizations

Vanadium oxide thin films were prepared by sol-gel method, then subjected to Nd:YAG laser (CW, 1064 nm) radiation. The characteristics of the films were changed by varying the intensity of the laser radiation. The nanocrystalline films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and scanning electron microscopy (SEM). XRD revealed that above 102 W/cm² the original xerogel structure disappears and above 129 W/cm² the films become totally polycrystalline with an orthorhombic structure. From TEM observations, we can see that due to laser radiation, the originally fibrillar-like particles disappear and irregular shaped, layer structured V₂O₅ particles are created. From XPS spectra we can conclude that due to laser radiation the O/V ratio increased with higher intensities.     

Enhanced superconducting properties in epitaxial FeSe thin films with self-assembled Fe3O4 nanoparticles

In this paper we report epitaxial tetragonal iron selenide thin films grown on single crystal SrTiO₃ (STO) (0 0 1) and MgO (0 0 1) substrates by a pulsed laser deposition (PLD) technique. Deposition temperature and annealing process are found to be critical for achieving the tetragonal phase and the optimum superconducting properties of the films. The critical transition temperature of the thin films ranges from 2 K to 11.5 K depending on the deposition temperature and annealing condition. The samples with higher critical transition temperatures show better film crystallinity along with self-assembled Fe₃O₄ nanoparticles (～15 nm in average particle size) in the films according to both X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis. Besides the better crystallinity achieved in the films, the formation of Fe₃O₄ nanoparticles could assist the formation of the tetragonal FeSe phase and thus lead to the enhanced superconducting properties.     

XRD and XPS analysis of laser treated vanadium oxide thin films

In this work, we present X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) analysis of laser treated vanadium oxide sols. The films were also observed by transmission electron microscopy (TEM) and scanning electron microscopy (SEM) to reveal how the original xerogel structure changes into irregular shaped, layer structured V₂O₅ due to the laser radiation. XRD revealed that above 102 W/cm² the original xerogel structure disappears and above 129 W/cm² the films become totally polycrystalline with an orthorhombic structure. XPS spectra showed O/V ratio increment by using higher laser intensities.     

Electrochemical deposition of Bi2Te3-based thin films

The electrochemical reduction processes on stainless-steel substrates from an aqueous electrolyte composed of nitric acid, Bi³⁺, HTeO₂⁺, SbO⁺ and H₂SeO₃ systems were investigated using cyclic voltammetry. The thin films with a stoichiometry of Bi₂Te₃, Bi_0.5Sb_1.5Te₃ and Bi₂Te_2.7Se_0.3 have been prepared by electrochemical deposition at selected potentials. The structure, composition, and morphology of the films were studied by X-ray diffraction (XRD), environmental scanning electron microscopy (ESEM) and electron microprobe analysis (EMPA). The results showed that the films were single phase with the rhombohedral Bi₂Te₃ structure. The morphology and growth orientation of the films were dependent on the deposition potentials.     

Structural, optical and morphological studies on laser ablated nanostructured WO3 thin films

Thin films of tungsten trioxide (WO₃) are prepared by reactive pulsed laser deposition (PLD) technique on glass substrates at three different substrate temperatures (T_s). The structural, morphological and optical properties of the deposited films are systematically studied using X-ray diffraction (XRD), grazing incidence X-ray diffraction (GIXRD), micro-Raman spectroscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM) and UV-VIS spectrophotometry techniques. X-ray diffraction analysis reveals that crystalline WO₃ films can grow effectively even at 300 K at an oxygen pressure of 0.12 mbar. All the films deposited at various T_s exhibit mixed oxide phase consisting of orthorhombic and triclinic phase of tungsten oxide with a preferred orientation along (0 0 1) lattice plane reflection. Micro-Raman results are consistent with X-ray diffraction findings. The SEM analysis shows that deposited films are porous and crystalline grains are of nano-metric dimension. The effect of T_s on mean surface roughness studied by AFM analysis reveals that mean surface roughness decreases with increase in T_s. The optical response of WO₃ layers measured using UV-VIS spectrophotometry is used to extract the optical constants such as refractive index (n), extinction coefficient (k) and optical band gap (E_g), following the method of Swanepoel.     

Epitaxial growth of high quality β-FeSi2 layers on Si(1 1 1) under the presence of an Sb flux

β-FeSi₂ layers were grown on Si(1 1 1) substrates by Fe deposition and simultaneous reaction with Si under the presence of an Sb flux. High quality epitaxial layers were obtained at the substrate temperature of 650°C with smooth interface between the reactive resultant β-FeSi₂ layers and Si substrates, in comparison to the layers grown by conventional reactive deposition epitaxy (RDE). Sb/Fe flux ratio dependence of the structural property was examined using X-ray diffraction (XRD) measurements, transmission electron microscopy (TEM) and scanning electron microscopy (SEM). Photoluminescence spectra were also measured at low temperature.     

Synthesis of LaAlO3 by metal organic decomposition on SrTiO3 substrates

LaAlO₃ (LAO) films on SrTiO₃ (STO) substrates have been produced by metal organic decomposition using La(C₅H₇O₂)₃ and Al(C₅H₇O₂)₃ as precursors dissolved in propionic acid. The process consists of growing thin layers through dip coating and subsequent annealing. After testing different cationic ratios of La and Al, it was determined that an optimal ratio leads to a single LAO phase film that grows epitaxially (cube on cube) on top of the STO. This was shown by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analyses. These analyses, as well as additional X-ray reflectivity analysis, also revealed that the LAO's thickness obtained in one dip ranges from 8 nm to 16 nm. Taking advantage of the epitaxial conditions, several layers can be stacked by successive dip coatings and annealing to form an epitaxial structure.     

Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

Boron carbide was prepared by low pressure chemical vapor deposition (LPCVD) from BCl₃-CH₄-H₂ system. The deposition process conditions were optimized through using a uniform design method and regression analysis. The regression model of the deposition rate was established. The influences of deposition temperature (T), deposition time (t), inlet BCl₃/CH₄ gas ratio (δ), and inlet H₂/CH₄ gas ratio (θ) on deposition rate and microstructure of the coatings were investigated. The optimized deposition parameters were obtained theoretically. The morphologies, phases, microstructure and composition of deposits were characterized using scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman micro-spectroscopy, transmission electron microscopy (TEM), energy dispersive spectra (EDS), and Auger electron spectra (AES), the results showed that different boron carbides were produced by three kinds of deposition mechanisms.     

Stress effect and evidence of ferroelectric weakening in highly c-axis-oriented PbTiO3 thin films

3 were successfully grown on Pt-coated SrTiO₃ single-crystal substrates by metalorganic chemical vapor deposition (MOCVD) and were investigated by using X-ray diffraction (XRD), scanning electron microscopy (SEM) and Raman spectroscopy. The as-deposited thin films were found to be highly (001)-oriented with an average grain size of about 0.3 μm. Both a decrease of the tetragonality and a frequency downshift of the long-wavelength optical phonons were observed and attributed to the effect of compressive stress in the thin films. However, Raman scattering studies estimated a stress value of 2.6 GPa, which is much larger than the value of 0.75 GPa obtained from the XRD analyses. Raman spectroscopic studies also confirmed the grain-size-related disorder feature in the as-grown PbTiO₃ thin films. Structural investigations implied the weakening of ferroelectricity in the heteroepitaxial ferroelectric thin films. Received: 1 April 1997/Accepted: 14 July 1997     

Synthesis of single crystalline GaN nanoribbons on sapphire (0001) substrates

Single crystalline GaN nanoribbons were synthesized through nitriding Ga₂O₃ thin films deposited on sapphire (0001) substrates by radio frequency magnetron sputtering. The component and structure of nanoribbons were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray (EDX), transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM). The flat and smooth ribbon-like nanostructures are high quality single crystalline hexagonal wurtzite GaN. The thickness and width-to-thickness ratio of the grown GaN nanoribbons are in the range of 8-15 nm and ∼5-10, respectively.     

The growth mechanism and supercapacitor study of anodically deposited amorphous ruthenium oxide films

In the present study, ruthenium oxide (RuO₂) thin films were deposited on the stainless steel (s.s.) substrates by anodic deposition. The nucleation and growth mechanism of electrodeposited RuO₂ film has been studied by cyclic voltammetry (CV) and chronoamperometry (CA). The deposited films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and energy dispersive analysis by X-rays (EDAX) for structural, morphological, and compositional studies. The electrochemical supercapacitor study of ruthenium oxide thin films have been carried out for different film thicknesses in 0.5 M H₂SO₄ electrolyte. The highest specific capacitance was found to be 1190 F/g for 0.376 mg/cm² film thickness.     

Microstructure evolution of Al-doped zinc oxide films prepared by in-line reactive mid-frequency magnetron sputtering

Aluminium-doped zinc oxide (ZnO:Al or AZO) thin films were deposited on glass substrates by reactive mid-frequency (MF) magnetron sputtering from Zn/Al metallic targets. Strong (002) preferred orientation was detected by X-ray diffraction (XRD). It was observed by plan-view transmission electron microscopy (TEM) that an AZO film deposited at low substrate temperature was composed of irregular large grains; but the film prepared at high temperature was composed of moderate sized grains with a regular shape. A secondary phase of ZnO₂ was also observed for the film deposited at low substrate temperature. The cross-sectional TEM study of the AZO film showed that prior to the well-aligned columnar growth an initial interfacial zone with nano crystallites were formed. The nano crystallites formed initially with a large tilt angle normal to the substrate surface and during the growth of the transition zone, the tilt angle decreased until it vanished. The evolution of the film structure is discussed in terms of evolutionary selection model and the dynamic deposition process. PACS 73.61.Ga; 68.37.Lp; 68.55.Jk     

Surface morphology and surface chemical states of epitaxial Pb(Zr0.95Ti0.05)O3 thin films grown on SrTiO3(100) by sputter deposition

0.95 Ti_0.05)O₃ thin films of an orthorhombic perovskite structure were obtained on SrTiO₃(100) substrates by radio frequency sputter deposition. The surface morphology of the films was investigated with atomic force microscopy, scanning electron microscopy, and reflection electron microscopy. It is shown that the film surfaces are rather bumpy. There are undulations of about 400 nm in length in an in-plane direction. The mean roughness perpendicular to the surface is 39.6 nm, for the film thickness of 0.45 μm. The surface roughening was probably caused by island-shaped nucleation and growth during the film growth. It has also been found that some gorges and a number of small pits remain at the film surfaces. The surface chemical states of the films were characterized by using X-ray photoelectron spectroscopy. A Pb enrichment layer and a large amount of adsorbed oxygen have been found at the surfaces of the films. Near the film surface Pb and Zr exist mainly in the forms of, besides Pb(Zr,Ti)0₃, metal Pb, metal Zr, oxygen-chemisorbed Pb, and various lead oxides. In addition, a small amount of lead, whose binding energy of Pb 4f_7/2 is much lower than that of metal Pb, was observed at the film surfaces, but its chemical state is unknown up to now. Received: 2 June 1997/Accepted: 22 September 1997