Shack-Hartmann波前传感器非零位在轴检测离轴非球面反射镜

在离轴非球面反射镜研磨后期和粗抛光阶段,被测反射镜面形与理想面形存在着较大的偏差,表面反射率较低,采用干涉测量会因局部区域干涉条纹过密或条纹对比度过低,造成普通干涉仪无法进行全口径测量,而普通接触式轮廓仪测量精度此时已经不能满足加工要求。鉴于Shack-Hartmann波前传感器较大的动态范围和较高的测量精度,提出了采用Shack-Hartmann波前传感器非零位在轴检测离轴非球面面形,研究了该方法的检测原理并搭建了检测系统,分析了系统误差来源,并制作了用于在轴检测离轴非球面的参考波前,对两个不同加工精度的离轴非球面反射镜进行了测量,并与干涉仪的测量结果进行了对比。对比结果表明,Shack-Hartmann波前传感器的测量结果是正确可靠的,并且可以弥补轮廓仪测量和干涉仪测量的不足,从而证明了采用Shack-Hartmann波前传感器在轴检测离轴非球面的可行性和正确性。     

干涉光谱仪动镜倾斜误差容限分析

本文从调制度和相位误差角度,系统分析了双光束干涉光谱仪中,当光束孔径为圆形和矩形时,动镜运动过程中发生倾斜的影响,讨论了动镜倾斜容限以及减小动镜倾斜误差的方法.     

Direct measurement of dispersion of the group refractive indices of quartz crystal by white-light spectral interferometry

We present a white-light spectral interferometric technique employing a low-resolution spectrometer for a direct measurement of the dispersion of the ordinary and extraordinary group refractive indices of a quartz crystal over the wavelength range approximately from 480 to 860 nm. The technique utilizes a dispersive Michelson interferometer with the quartz crystal of known thickness to record a series of spectral interferograms and to measure the equalization wavelength as a function of the displacement of the interferometer mirror from the reference position, which corresponds to a balanced non-dispersive Michelson interferometer. We confirm that the measured group dispersion agrees well with that described by the dispersion equation proposed by Ghosh. We also show that the measured mirror displacement depends, in accordance with the theory, linearly on the theoretical group refractive index and that the slope of the corresponding straight line gives precisely the thickness of the quartz crystal.     

基于小波变换的拼接重叠区域融合方法

为了解决大口径光学元件面形高精度测量问题,建立了拼接测量系统,通过测量得到整体表面面形。在拼接测量过程中,需要将待测面形进行划分,按着一定的顺序进行测量,再根据各个子口径之间的相对位置进行拼接。各个子口径存在重叠部分,采用均化的处理方法会导致高频面形数据的丢失。采用小波变换的拼接重叠区域融合方法可以减少高频数据的丢失。首先,对各个子口径的重叠区域分别进行小波变换得到低频和高频系数矩阵;然后,根据不同的方法对低频和高频系数矩阵进行融合得到新的系数矩阵;最后,通过小波逆变换得到整体面形。对尺寸为120 mm×40 mm的长方形反射镜面形进行拼接干涉测量,并用功率谱密度对本文方法和平均融合结果进行客观比较。实验结果表明,该方法可以保留更多的高频面形数据。     

基于干涉仪测量的变形镜面形展平标定研究

为了全面地了解变形镜的性能,以便自适应光学系统更好地工作,进行了基于干涉仪测量的变形镜面形展平标定研究.首先,给变形镜的压电陶瓷驱动器施加一半的控制电压;再用Zygo干涉仪测得变形镜的面形,计算对应各个驱动器位置的镜面高度,并算得各个位置镜面高度相对平均镜面高度的偏差;最后,控制驱动器运动使偏差量为零.测试及实验表明,受压电陶瓷迟滞的影响,上述过程需要迭代4到6次镜面面形才会收敛到希望的准确度;对镜面周边无驱动器约束的21单元变形镜,展平之后其80%口径的面形接近λ/20(λ=632.8nm);对镜面周边有驱动器约束的137单元变形镜,展平后的面形优于λ/50.在望远镜不同的观测条件下,该技术可以快速地对变形镜进行展平标定,以适应不同的工作环境.     

基于干涉仪测量的变形镜面形展平标定研究

为了全面地了解变形镜的性能,以便自适应光学系统更好地工作,进行了基于干涉仪测量的变形镜面形展平标定研究.首先,给变形镜的压电陶瓷驱动器施加一半的控制电压;再用Zygo干涉仪测得变形镜的面形,计算对应各个驱动器位置的镜面高度,并算得各个位置镜面高度相对平均镜面高度的偏差;最后,控制驱动器运动使偏差量为零.测试及实验表明,受压电陶瓷迟滞的影响,上述过程需要迭代4到6次镜面面形才会收敛到希望的准确度;对镜面周边无驱动器约束的21单元变形镜,展平之后其80%口径的面形接近λ/20(λ=632.8 nm);对镜面周边有驱动器约束的137单元变形镜,展平后的面形优于λ/50.在望远镜不同的观测条件下,该技术可以快速地对变形镜进行展平标定,以适应不同的工作环境.     

Zone-Plate Interferometer for Measuring the Shape Error of Mirrors with Large Numerical Aperture and Steep Asphericity

A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (0, 0) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.Presented at the International Commission for Optics Topical Meeting, Kyoto, 1994.     

Sub-50 nm patterning by immersion interference lithography using a Littrow prism as a Lloyd's interferometer

We present a simple setup that combines immersion lithography with a Lloyd's mirror interferometer. Aiming for smaller structure sizes, we have replaced the usual Lloyd's interferometer by a triangular Littrow prism with one metal-coated side, which acts as a mirror. Because of the higher refractive index of the prism, the wavelength and, thus, the attainable structure sizes, are decreased significantly. Using a laser with a wavelength of 244nm, we could produce line patterns with a period of less than 100nm and a width of 45nm. The introduced setup retains all the advantages of a Lloyd's mirror interferometer, in particular the flexibility in periodicity.     

卡塞格林系统装调过程中高精度测角方法

为了能够准确测量同轴三反相机中次镜的倾斜量变化,提出一种新的角度测量方法,即用大口径干涉仪与经纬仪相结合进行测量。以主镜为测量基准,两镜相对倾角较小时,使用大口径干涉仪同时测量两镜的干涉条纹,相对倾斜角度过大时次镜无干涉条纹,加入一台经纬仪分别自准直于干涉仪和次镜,间接测量两镜相对夹角。通过模拟计算与实验验证表明,对于次镜组件倾角测量误差可以控制在0.5″以内。结果表明,该检测方法具有通用性强,测量精度高等特点,克服了传统检测方法测量精度不足的问题。     

恒星光干涉仪中主动镜的研究

主动镜是恒星光干涉仪中的关键部件之一。介绍了主动镜在干涉仪主动镜系统中的作用和主动镜的结构。给出了用光电法设计的用来测试主动镜动程、分辨率和频率响应特性的两套系统。对所研制的主动镜的性能进行了实测并给出了测试结果。实测结果表明 ,主动镜两个轴上的转角行程和分辨率均方根值完全达到了设计指标。     

MGTI型不等带宽interleaver的输出光谱特性分析

用两面镜级联的GT腔代替Michelson干涉仪的两面全反射镜,通过MGTI中的GT腔镜面反射率、腔长、干涉仪臂长差等结构参量的选择,得出了宽口和窄口输出谱3 dB处带宽比分别为1.69、1.83、2.13和2.14的四组不等带宽、隔离度高、通带平坦且周期不等的输出光谱,并系统分析了这些结构参量对输出光谱特性的影响.模拟结果表明：可用此类MGTI结构设计出不同带宽比的不等带宽interleaver;输出光谱的平坦特性由GT腔镜面反射率决定,镜面反射率主要影响输出谱的通带带宽与隔离度,且对两者的影响程度不同;选择适当的GT腔腔长和臂长差可得到不同的光谱周期.     

The use of circular optical grating for measuring angular rotation of mirrors

This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of the angular rotation of the mirror. The circular grating may readily be generated using a standard Michelson interferometer or an LCD projector. Through manipulating the distance between the interferometer and the mirror surface, the diameter of the optical grating may be varied. Furthermore, the additional use of a converging lens enables a significant reduction in the size of the grating: with simple laboratory facility, small circular grating of about 400 μm is achieved for use on micro-systems. With the use of more sophisticated optical elements, the angular rotation of even smaller micro-mirrors may be measured.     

多电极静电拉伸薄膜反射镜的光学检测

利用研制的φ300 mm口径多电极薄膜反射镜原理样机,开展了光学检测实验工作.利用高斯光学原理对薄膜反射镜的基本光学参数进行了检测,获得了随电压变化的薄膜反射镜曲率丰径和最大变形值曲线,趋势与理论计算结果一致.对薄膜反射镜的面形特性和面形检测方法进行了分析,采用激光干涉仪测试了无电压时中心区域的平面面形,RMS值为1....     

Research on the interference fringe contrast in ground glass shape measurement

To measure the ground glass surface shape, the oblique incidence method applied using a Fizeau interferometer. Interferograms with sufficient contrast values are needed during the measurement. The formula to calculate the fringe contrast in ground glass shape measurement is derived to give an optimum incident angle for the ground glass with different surface roughness. Four specimens grinded by abrasives numbered #400, #700, #1500 and #2000 are measured, using aluminum coated mirror as the reflective flat in the experiment. The minimum incident angles of the four specimens are 83°, 82°, 76° and 75° respectively. The contrast values of the interferograms with the specimens at different incident angles are measured using phase shifting interferometry and the results match the theoretical ones. The oblique incidence method can be used to measure ground glasses grinded by #400 abrasive and finer ones. A sufficient contrast can be achieved with the incident angle slightly greater than the minimum angle.     

Features of the interference field in a diffraction interferometer for surface testing

The interference field in an interferometer with a zone plate set at the center of curvature of a tested mirror has been investigated. The conditions for testing spherical and parabolic surfaces have been determined. It has been shown that the zero-fringe tracing method allows imperfections in the mirror shape to be distinguished from the instrumental error of the interferometer. The results of testing a parabolic surface are compared with measurements by the Ritchey method. The deviations between the mean asphericity values did not exceed λ/20.     

Path length differences in electron interferometers using mirrors

The path length differencefΔS is estimated between two rays in an electron interferometer which are reflected on electron mirrors with a height difference ΔS. In a light optical interferometer the factorf equals 2, but in electron opticsf is smaller (1 <f < 2). The faster the perturbation of the equipotentials due to the surface profile of the mirror dies out with increasing distance from the mirror surface, the smaller is the value off.     

φ150mm菲索干涉仪球面标准具结构分析与设计

在高精度的光学元件面形检测中,为了保证检测的精度,必须对高精度菲索干涉仪的标准镜的自重和温度变形进行严格地控制.针对高精度菲索干涉仪标准镜的精度要求,设计了一种新的标准镜装卡结构.采用有限元方法分析了标准镜在胶接方式下的表面变形情况,参考面表面变形峰谷(PV)值仅为9.6nm,均方根(RMS)值为2.1nm.同时对不同...     

子孔径拼接法检验大口径光学镜面精度分析

介绍子孔径拼接检测大口径光学镜面的原理，即用小口径的平面干涉仪检验大口径平面的一部分，通过改变2者相对位置获得覆盖到整个被检验镜面的子孔径检测数据。提出利用最小二乘法对相邻2个子孔径重叠部分的检测数据进行计算来确定实际所有子孔径之间的位置关系，进而得到拼接而成的整体面形信息。并对子孔径拼接成的面型与实际面型的误差进行分析，建立了对子孔径拼接全口径波面恢复精度的评价指标。根据子孔径拼接原理完成了实验，并对多组子孔径数据拼接后的波面恢复精度进行了分析。实验证明，子孔径拼接检测大口径光学元件综合误差小，重复精度高。     

An atom interferometer for measuring loss of coherence from an atom mirror

We describe an atom interferometer to study the coherence of atoms reflected from an evanescent wave mirror. The interferometer is sensitive to the loss of phase coherence induced by the defects in the mirror. The results are consistent with and complementary to recent measurements of specular reflection.Received: 3 August 2004, Published online: 26 October 2004PACS: 03.75.Be Atom and neutron optics - 03.75.Dg Atom and neutron interferometry - 39.20. + q Atom interferometry techniques The Laboratoire Charles Fabry is part of the Federation LUMAT, FR2764 du CNRS.     

经纬仪主镜在支撑系统下的面形变化

为研究在重力作用下主镜支撑系统对经纬仪主镜处于不同工作角度时面形误差的影响,以600 mm口径主镜为研究对象,利用Abaqus软件分别建立了600 mm主镜在加工状态下和工作状态下的有限元支撑模型,并进行了重力变形分析,然后借助4D干涉仪对在不同支撑系统下的主镜进行相关的面形检测。实验结果表明,在吊带支撑系统和主镜室支撑系统下,主镜的自身面形误差RMS为16.18 nm和16.90 nm。利用有限元分析了理想状态的主镜在不同仰角工况下的面形误差,结合主镜自身的面形误差,计算得到了主镜面形误差在光轴由水平变化到竖直的过程中逐渐变大,其RMS最大为19.58 nm,表明该主镜室支撑系统具有良好支撑效果,可满足工程要求,同时也验证了主镜室支撑系统有限元理论模型的准确性。