Bump formation on a glass surface with a transparent coating using femtosecond laser processing

The morphology of a glass surface having a transparent coating processed with focused femtosecond laser pulses is investigated. The transparent coating is formed of poly-methyl methacrylate (PMMA). When the glass was coated with a PMMA film with a thickness of 2.8 μm, bumps were formed over a wide range of axial focus positions. The same laser pulse energy produced cavities when processing bare glass with no coating. The bumps were formed as a result of suppressing material emission from the glass surface by a shielding effect of plasma generated by ablation of the PMMA film and by physical blocking of the PMMA film. A thinner film with a thickness of 0.7 μm produced a reduced shielding effect, forming an exploded bump with a small pit at its center and debris around the periphery. PACS 44.10.+i; 61.80.Ba; 79.20.Ds     

Sapphire surface patterning using femtosecond laser micromachining

This study presents an alternative method for micron-resolution patterning of a sapphire surface utilizing the characteristic of an ultra-short pulse (10^?15 s) from ytterbium (Yb) femtosecond laser (FS-laser) irradiation. Conventional processes often involve several steps, such as wet chemical or dry etching, for surface structuring of sapphire. In this study, two-dimensional array patterns on the sapphire surface with an area of 5×5 mm² and a depth of 1.2±0.1 μm can be directly and easily fabricated by a single step of the FS-laser process, which involves 350-fs laser pulses with a wavelength of 517 nm at a repetition rate of 100 kHz. The measured ablation depths on the sapphire surface display that the proposed process can be under well-controlled conditions. Based on the design changes for being quickly implemented in the micromachining process, a FS laser can be a promising and competitive tool for patterning sapphire with an acceptable quality for industrial usage.     

Self-organized structure formation on the bottom of femtosecond laser ablation craters in glass

Using femtosecond laser pulses (150 fs duration at λ=400 nm) for ablation experiments on glass samples with and without enclosed silver nanoparticles, characteristic sub-micrometer surface topologies are observed on the flat bottom of the ablation craters produced. The structures show increasing order towards periodic ripple-like features with an increasing number of successive pulses applied. Depending on sample and experimental conditions, the spatial periodicity varies between 340 nm and 1900 nm, despite a constant laser wavelength and incidence angle. An analysis based on electron and atomic force microscopy of the structures indicates that the formation of the ripples in this work is due to instabilities and self-organization of the surface relaxation after ablation. PACS 81.16.Rf; 42.70.-a     

基于空间光调制器的飞秒并行加工方法研究

针对飞秒激光微加工中能量利用率和加工效率低的问题,提出一种基于空间光调制器的飞秒并行加工方法。在讨论衍射光栅入射角与衍射角关系的基础上,分析了叠加多个衍射光栅产生多光束的原理,运用GS算法对目标多光束进行优化并计算出相应的相位全息图,将该全息图加载到空间光调制器中获得了多光束。采用脉宽100 fs、波长800 nm的飞秒激光,进行聚焦PMMA样品内部的并行加工实验,观察到PMMA上多点组合的一和工字型,得到了光束能量均匀的图形。实验结果论证了该方法对于多光束并行加工控制的有效性。     

偏振态对飞秒激光加工石英玻璃表面质量的影响

为研究线偏振和圆偏振对飞秒激光烧蚀加工石英玻璃表面质量的影响,开展不同扫描速度的线烧蚀试验和不同线重叠率的面烧蚀试验。研究了线、圆偏振光对烧蚀线宽度的影响,利用光学显微镜和环境扫描电子显微镜观察烧蚀形貌,并使用三维表面轮廓仪进行烧蚀面粗糙度分析。结果表明:线偏振光烧蚀线宽度大于圆偏振光,且激光功率越大,线宽差异越明显;当线重叠率在65%~90%时,线偏振光烧蚀表面粗糙度随重叠率增大而增大,在重叠率为65%时达到1.33μm;线轮廓算术平均偏差随重叠率增大先减小后增大,并在重叠率为80%时达到较小值1.05μm;当重叠率不到80%时,线偏振光烧蚀面线轮廓算术平均偏差比圆偏振光小;重叠率为90%时,其线轮廓算术平均偏差反而比圆偏振光大。     

Generation of bubbles in glass by a femtosecond laser

Permanent microscale bubbles with varied size and number density are induced in borosilicate glasses by adjusting the focusing depth (FD) of a tightly focused femtosecond laser. With continuously increasing of the focusing depth, the average size of generated bubbles experiences an increase-decrease process. However, the number density of generated bubbles experiences an opposite changing process compared to the change of the size. The possible mechanism for the bubble generation and changing with the focusing depth has been discussed.     

Laser surface patterning using a Michelson interferometer and femtosecond laser radiation

We report on a simple method to obtain surface gratings using a Michelson interferometer and femtosecond laser radiation. In the optical setup used, two parallel laser beams are generated using a beam splitter and then focused using the same focusing lens. An interference pattern is created in the focal plane of the focusing lens, which can be used to pattern the surface of materials. The main advantage of this method is that the optical paths difference of the interfering beams is independent of the distance between the beams. As a result, the fringes period can be varied without a need for major realignment of the optical system and the time coincidence between the interfering beams can be easily monitored. The potential of the method was demonstrated by patterning surface gratings with different periods on titanium surfaces in air.     

偏振态对飞秒激光加工石英玻璃表面质量的影响

为研究线偏振和圆偏振对飞秒激光烧蚀加工石英玻璃表面质量的影响,开展不同扫描速度的线烧蚀试验和不同线重叠率的面烧蚀试验。研究了线、圆偏振光对烧蚀线宽度的影响,利用光学显微镜和环境扫描电子显微镜观察烧蚀形貌,并使用三维表面轮廓仪进行烧蚀面粗糙度分析。结果表明：线偏振光烧蚀线宽度大于圆偏振光,且激光功率越大,线宽差异越明显;当线重叠率在65%～90%时,线偏振光烧蚀表面粗糙度随重叠率增大而增大,在重叠率为65%时达到1.33 m;线轮廓算术平均偏差随重叠率增大先减小后增大,并在重叠率为80%时达到较小值1.05 m;当重叠率不到80%时,线偏振光烧蚀面线轮廓算术平均偏差比圆偏振光小;重叠率为90%时,其线轮廓算术平均偏差反而比圆偏振光大。     

Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator

Single-mode X couplers and three-dimensional waveguides are fabricated in transparent glasses by use of an unamplified femtosecond laser generating energies of up to 100 nJ. Changing fabrication parameters such as power and scanning speed permits creation of waveguides with a wide range of structures and refractive-index difference. Optical coherence tomography shows large refractive-index changes of up to ~10(-2) in the waveguides; these changes are consistent with guided mode analysis.     

Structure formation on the surface of alloys irradiated by femtosecond laser pulses

Laser-induced periodic surface structures with different spatial characteristics have been observed after multiple linearly polarized femtosecond laser pulse (120 fs, 800 nm, 1 Hz to 1 kHz pulse repetition frequency) irradiation on alloys. With the increasing number of pulses, nanoripples, classical ripples and modulation ripples with a period close to half of classical ripples have all been induced. The generation of second-harmonic has been supposed to be the main mechanism in the formation of modulation ripples.     

Liquidly process in femtosecond laser processing

Nano-sized water-crown like structure in array was firstly generated on metallic thin film by interfering femtosecond laser processing. We named the structure as “nanocrown”. Ridges are standing on the edge of each ablated hole. The shapes of ridges are spike, nano-waterdrop and bead on column. The radius of the top of a spike was just 7 nm, which is far smaller than that of nanobump generated in the previous work. The self-rising in liquidly process result in the generation of mesoscopic nanostructure with the size between nanohorn or nanotube and micron structures processed by machining or lithography. This is a new surface modification technique in top-down technology.     

Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass

A fused silica glass micro-channel can be formed by chemical etching after femtosecond laser irradiation, and the successful etching probability is only 48%. In order to improve the micro-channel fabrication success probability,the method of processing a high-temperature lattice by a femtosecond laser pulse train is provided. With the same pulse energy and scanning speed, the success probability can be increased to 98% by optimizing pulse delay.The enhancement is mainly caused by the nanostructure, which changes from a periodic slabs structure to some intensive and loose pore structures. In this Letter, the optimum pulse energy distribution ratio to the etching is also investigated.     

Formation of Si structure in glass with a femtosecond laser

Mixing metallic Al into the starting material for silicate glass is proposed as a means of forming Si structures in glass. We confirmed that Si nanocrystals are space-selectively deposited in silicate glass via a thermite reaction triggered by femtosecond laser pulses. Small Si particles were transformed into larger, but still micrometer sized, Si particles by laser irradiation. These structures grew to micro-size particles due to the thermite reaction promoted by heat treatment. We discuss what effect the irradiation of the focused laser pulse had on the Si deposition process in the laser-irradiated region. Localized high temperatures and pressures and generation of shock waves appear to be very important in forming Si-rich structures that contribute to the growth of Si particles. The diffusion of calcium ions by the generation of shock waves and the presence of Al-rich structures is important for forming Si-rich structures such as Si clusters, which is achieved by continuously breaking Si–O bonds using localized high temperatures.     

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Three-dimensional (3D) micromachining of photosensitive glass is demonstrated by photochemical reaction using femtosecond (fs) laser for lab-on-a-chip application. True 3D hollow microstructures embedded in the glass are fabricated by fs laser direct writing followed by heat treatment and successive wet etching. The modification mechanism of the photosensitive glass by the fs laser and advantage of this process are discussed. Various microcomponents for the lab-on-a-chip devices such as microfluidics, microvalves, microoptics, microlasers, etc. are fabricated by using this technique and their performance is examined . PACS 42.62.-b; 82.50.Pt; 87.80.Mj     

Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing

Microfluidic dye lasers three-dimensionally embedded in glass have been fabricated for what is believed to be the first time by integrating micro-optical and microfluidic components by use of a femtosecond laser. By pumping the microfluidic laser, in which the microfluidic chamber was filled with the laser dye Rhodamine 6G dissolved in ethanol, with a frequency-doubled Nd:yttrium aluminum garnet laser, lasing action was confirmed by analysis of the emission spectra at different pump powers. In addition, by arranging two microfluidic chambers serially in the glass, we built a microfluidic twin laser that produces an array of two simultaneous laser emissions with one pump laser.     

Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.     

Modelling the formation of nanostructures on metal surface induced by femtosecond laser ablation

We employ the particle-in-cell method to simulate the mechanisms of femtosecond (fs) laser interactions with a metallic target. The theoretical approach considers the solid as a gas of free electrons in a lattice of immobile ions and the laser fluences close to the ablation threshold. At first moments of the interaction, our simulations mapped out different nanostructures. We carefully characterized the rippling phase and found that its morphology is dependent on the distribution of the electron density and the period of the ripples depends on the laser intensity. The simulation method provides new insights into the mechanisms that are responsible for surface grating formation.     

New mechanism of the formation of the nanorelief on a surface irradiated by a femtosecond laser pulse

The kinetics of fast processes induced by an ultrashort laser pulse is considered. The reliefs remaining after the action of a series of ultrashort laser pulses {S. A. Akhmanov, V. I. Emelyanov, N. I. Koroteev, et al., Usp. Fiz. Nauk 147, 675 (1985) [Sov. Phys. Usp. 28, 1084 (1985)]; F. Costache, S. Kouteva-Arguirova, and J. Reif, Appl. Phys. A 79, 1429 (2004)} have been studied. A new mechanism of perturbing the surface of the initially ideal crystal face is described. First, the formation of a relief is induced by a single pulse. Second, the relief scale along the target surface is about the heating depth d _T ～ 10–100 nm rather than the pump-pulse wavelength λ_pump ～ 1 μm. Third, the formation of the relief is not attributed to the modulation of the electromagnetic field near the surface due to the interference of the incident light wave with the electromagnetic surface waves on the initial perturbations of the boundary. These three conditions are satisfied for a known instability induced by the interference of the incident and surface waves (see the works cited above [1]). In our case, the nanorelief is formed due to the deformation of the spalled layer by cavitation bubbles owing to the inhomogeneity of the drag force in the target plane. Cavitation is caused by the tension of the substance in the process of the expansion of a heated target. It is similar to the known phenomenon of the cavitation “spallation” in a liquid despite the large difference between the space-time scales of the usual spallation facility and the femtosecond heating. Owing to this difference, usual cavitation does not leave any morphological trace on the outer free surface of the spalled layer.     

Micromachining soda-lime glass by femtosecond laser pulses

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.     

Self-guided glass drilling by femtosecond laser pulses

Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements.