双面抛光工艺的流场压力分布

建立了双面抛光工艺中晶片上下表面的压力分布模型,获得了晶片和抛光垫表面的速度分布关系,分析了自由晶片在抛光过程中的运动状态以及在压力荷载及转矩平衡时晶片上下表面的平均压力分布。数值计算结果表明:荷载压力越大,平均压差率越小;抛光垫转速越小,太阳轮转速越小;抛光液粘度越小,平均压差率越小。同时,根据通过调整抛光参数组合获得了最小的平均压差率,并利用正交实验法数值分析。研究发现抛光工艺参数对压力分布影响的主次关系依次为荷载压力、抛光液粘度、抛光垫转速、太阳轮转速。     

考虑对流效应和磁场的CMP模型及其数值模拟

推导了具有对流效应的化学机械抛光(chemical mechanical polishing,CMP)润滑模型,研究各参数对压力场分布的影响.在此模型基础上,研究了磁流体抛光液在外界磁场作用下的润滑模型,以及外磁场对抛光过程中压力场分布的影响. 数值结果表明,具有对流效应的润滑模型的压力分布与已有经验结果更一致,能更为有效地解释CMP过程中的负压现象; 进一步通过外界磁场的作用, 可以有效地改变磁流体CMP的压力分布,这为实现对晶片的全局抛光提供了一种可供参考的新途径.      

自旋对椭圆接触热弹流润滑的影响

通过数值求解研究了自旋运动对热弹流润滑的影响,分析了不同载荷下自旋对压力?最小油膜厚度?油膜中层温度的影响以及滑滚比?角速度对油膜中层温度的影响.结果表明:载荷越重时油膜压力越大,油膜整体厚度越小,同时油膜顶部倾斜度越大,关于y=0截面油膜厚度曲线的不对称性越明显.自旋存在使得滑滚比不再是常数,而滑滚比越大之处温升越大,因此润滑油膜的温度分布不再关于y=0截面对称;另外,角速度越高则油膜中层温升越大,而出口峰值越靠近接触中心.     

旋转爆轰胞格结构的实验和数值研究

对爆轰波在环形圆管(预混气体为2H2/O2/Ar)内的传播分别进行了实验和数值研究。实验研究 采用烟迹板记录了环形圆管内爆轰波的胞格结构。数值计算利用二阶附加半隐的Runge-Kutta法和五阶 WENO格式分别离散欧拉方程的时间和空间导数项,采用基元反应简化模型描述化学反应过程,得到了旋转 爆轰的流场及数值胞格结构。实验和数值模拟结果表明:爆轰波在圆环管中传播时,由于圆环的内壁发散、外 壁收敛,圆环内侧爆轰强度小于外侧,胞格尺寸较大;内侧OH 的分布区域大于外侧,浓度较低。旋转爆轰的 这种性质,使爆轰波能以稳定的角速度绕轴旋转。     

考虑滚道表面油层分布的滚动轴承润滑分析

研究表明供油量对弹流润滑性能产生显著影响.滚动轴承中由于离心力和滚动体的反复滚压,滚道表面上的润滑剂呈现出非均匀分布的特点.大多数润滑剂被推挤到滚道的两侧,致使接触区的入口间隙不能被完全充满,导致乏油润滑,滚动体与滚道间接触压力接近于赫兹压力分布,膜厚较全膜润滑有明显的减小.本文基于润滑剂的流量连续建立滚道表面油层厚度分布模型,考虑润滑接触压力的影响,计算滚道上的侧流量以预测轴承滚道上补给油层厚度及形状随时间的变化规律;进而以此作为滚动体和滚道接触区的入口油层厚度,采用统一Reynolds方程法数值模拟计算每个时刻轴承滚道与滚动体之间的润滑油膜厚度,压力分布等参数,分析轴承在点接触乏油条件下运行的润滑性能.     

基于磨损行为的单晶硅片化学机械抛光界面接触形式研究

设计了3种不同的抛光液并进行一系列抛光试验,得到机械、化学及其交互作用所引起的材料去除率,分析了化学机械抛光时硅片与抛光垫之间接触形式的判别方法及其抛光机理.结果表明:化学机械抛光中的主要作用为磨粒的机械作用;材料的去除率主要为磨粒与抛光液交互作用所引起的材料去除率;硅片表面材料的去除形式主要为化学作用下的二体磨粒磨损;化学机械抛光时硅片与抛光垫之间的接触形式为实体接触.     

石英光纤端面的化学机械抛光实验研究

将化学机械抛光(CMP)技术引入光纤端面的加工过程并设计其抛光工艺,探讨了抛光垫和抛光液的类型、浓度及抛光压力、抛光盘的转速及抛光液的流速等参数对抛光性能的影响,设定了两步抛光的优选工艺.结果表明:在颗粒浓度为1%～2%,抛光液流速为100～150 mL/min,压力小于20.64 kPa,抛光盘转速90 r/min的条件下,可以得到较高的材料去除率和良好的抛光表面质量,其表面粗糙度Ra值可达0.326 nm.     

旋转Rayleigh梁动力学性能的研究

采用广义Hamilton原理推导了旋转Rayleigh梁在重力作用下的运动方程, 研究了简支-简支边界条件下旋转Rayleigh梁的动态特性, 指出并证明文献中所推导的运动方程缺失了一个由离心力引起的陀螺效应项. 理论分析和数值模拟了激励频率、陀螺效应、转动惯量、长细比对涡动频率、临界速度和模态振型的影响. 结果表明, 正向涡动频率随着激励频率的增加先增加后减小, 而反向涡动频率则随着激励频率的增加一直减小; 旋转Rayleigh梁有着无限多阶正向和反向临界速度; 正向涡动频率总是大于同阶的反向涡动频率.      

纯铅化学机械抛光中工艺参数对抛光性能的影响

为获得高质量纯铅表面,采用化学机械抛光(CMP)的方法并辅以自制抛光液,研究了胶体二氧化硅抛光颗粒的形状、粒径和浓度、加载压力、抛光头与抛光盘转向和转速、抛光液流量等工艺参数对铅片表面材料去除率和粗糙度的影响. 研究表明:小粒径异形(眉形)胶体二氧化硅抛光颗粒相较于大粒径球形颗粒更有利于铅片抛光,抛光颗粒的粒径和浓度对纯铅抛光性能的影响主要取决于铅片表面与胶体二氧化硅颗粒以及抛光垫表面丝绒的耦合作用关系. 随着加载压力、抛光头与抛光盘转向和转速、抛光液流量的改变,铅片表面和抛光垫之间驻留的层间抛光液的厚度以及状态发生改变,从而直接影响抛光液的流动性、润滑性和分散性,以及影响抛光颗粒和化学试剂与铅片表面的机械化学作用,进而影响抛光质量和材料去除率. 通过对工艺参数影响的研究和对工艺参数的优化,最终获得了表面粗糙度R_a为1.5 nm的较为理想的超光滑纯铅表面,同时材料去除率能够达到适中的380 ?/min.      

旋转压电纳米梁的振动分析

本文基于非局部弹性理论，对旋转压电纳米梁模型的振动进行了分析．首先由哈密顿原理导出旋转压电纳米梁的动力学控制方程及相应的边界条件；再通过微分求积法对控制方程和两类边界条件进行离散；最后通过数值计算分析振动特性．通过改变旋转角速度、轮毂半径、非局部参数以及外部电压分析它们对压电纳米梁振动频率的影响关系．数值结果表明这些参数对压电纳米梁固有频率有不可忽略的影响，本文进一步讨论了旋转角速度对结构模态的影响．     

Three‐dimensional numerical simulation of compound meandering open channel flow by the Reynolds stress model

Turbulent flow in a compound meandering open channel with seminatural cross sections is one of the most complicated turbulent flows as the flow pattern is influenced by the combined action of various forces, such as centrifugal force, pressure, and shear stresses. In this paper, a three‐dimensional (3D) Reynolds stress model (RSM) is adopted to simulate the compound meandering channel flows. Governing equations of the flow are solved numerically with finite‐volume method. The velocity fields, wall shear stresses, and Reynolds stresses are calculated for a range of input conditions. Good agreement between the simulated results and measurements indicates that RSM can successfully predict the complicated flow phenomenon. Copyright © 2008 John Wiley & Sons, Ltd.     

Bifurcation analysis of an electro-statically actuated micro-beam in the presence of centrifugal forces

In this paper, the influence of centrifugal forces on the stability of an electro-statically actuated clamped–clamped micro-beam has been investigated. The non-dimensional governing static and dynamic equations have been linearized using the step by step linearization method (SSLM), then, a Galerkin-based reduced order model has been used to solve the linearized equations. For constant value of a bias DC voltage and different values of angular velocity the equilibrium points of the corresponding autonomous system including stable center points, unstable saddle points and singular points have been obtained using the equivalent mass-spring model. Subsequently the bifurcation diagram has been depicted using the obtained fixed point. The static pull-in voltage value for different values of angular velocity and the static pull-in angular velocity for different values of bias voltage have been calculated. The obtained results are validated using results of previous studies and a good agreement has been observed. The effect of the centrifugal force on the fixed points has been studied using the phase portraits of the system for different initial conditions. Moreover, the effects of centrifugal forces on the dynamic pull-in behavior have been investigated using time histories and phase portraits for different angular velocities.     

Effect of elasticity on the dynamics of a superconducting rotor rotating in a magnetic field

A spherical shape of the outer surface of rotors of some types of noncontact gyroscopes gives rise to conditions, where the force field ensures the stability of the center of mass relative to the base and has an insignificant effect on the angular motion of the rotor. However, there are some effects (for instance, the Barnett—London effect), which lead to emergence of moments of mechanical forces even for spherical bodies. The effect of rotor elasticity on the motion of a superconducting deformable spherical solid body in a magnetic field is studies. It is shown that the moment of mechanical forces acting on the body in the magnetic field is proportional in the first approximation to the angular velocity squared. The effect of this moment on the dynamics of angular motion of the rotor is studied.     

Passive deployment of a tether between two bodies in orbit

The authors consider the problem of deployment in orbit of a small tether that can serve as a standard of length for calibration of both onboard and ground optical and radar tracking systems, as an integrated sensor of the force fields of planets, etc. A tether for two bodies is examined. Possible methods for compact placement of a tether in orbit in operating condition are discussed. The main method is that of use of the centrifugal forces resulting from imparting to the tether an initial angular velocity in its deployment from the spacecraft. Various methods for creating moments of friction forces in hinges are considered. Numerical modeling of the dynamic processes is carried out within the framework of the theory of systems of bodies. Problems associated with determination of the required initial angular velocity and of the “cone of departure” of the tether from the spacecraft are examined. Translated from Prikladnaya Mekhanika, Vol. 35, No. 10, pp. 87–92, October, 1999.     

模型昆虫翼作非定常i运动时的气动力特性

基于Navier-Stokes方程的数值解,研究了一模型昆虫翼在小雷诺数(Re=100)下作非定常运动时的气动力特性.这些运动包括翼启动后的常速转动,快速加、减速转动,常速转动中快速上仰(模拟昆虫翼的上挥或下拍、翻转等运动).有如下结果在小雷诺数下,模型昆虫翼以大攻角(α=35°)作常速转动运动时,由于失速涡不脱落,可产生较大的升力系数.其机理是翼转动时,翼尖附近(该处线速度大)上翼面压强比翼根附近(该处线速度小)的小得多,因而存在展向压强梯度,同时存在着沿展向的离心力,此展向压强梯度和离心力导致的展向流动在失速涡的轴向方向,其可避免失速涡脱落.模型昆虫翼在快速加、减速转动和快速上仰运动中,虽然雷诺数小,但由于在短时间内产生了大涡量,也可产生十分大的气动力,例如在快速上仰运动中,升力系数可大于10.     

Low Mach Number Limits of Compressible Rotating Fluids

We consider the low Mach number limit for a compressible fluid rotating with a constant angular velocity in an exterior domain. The effect of Coriolis and centrifugal forces are taken into account, along with strong stratification due to the effect of gravitation. The anelastic approximation is identified as the limit problem. The main issue addressed in the paper is the interaction of the centrifugal force with acoustic waves.     

Convective stability of fluid in a rotating horizontal annulus

The convective stability of quasi-equilibriumof a fluid layer formed by two horizontal coaxial cylindrical surfaces which have different temperatures and rotate at the same angular velocity about the axis of symmetry is investigated theoretically and experimentally. Consideration is carried out from the standpoint of thermal vibrational convection caused by the average lifting force generated as a result of vibrations of a nonisothermal fluid with respect to the cavity. The vibrations are induced by an external field. The action of the centrifugal force field is also taken into account. Stability of mechanical quasi-equilibrium with respect to monotonic plane perturbations, which are, as shown experimentally, the most dangerous, is studied within the framework of the linear analysis. The stability boundaries are constructed for layers of various relative thickness in the plane of control parameters, the centrifugal and vibrational Rayleigh numbers. The thresholds of excitation of two-dimensional convective structures obtained experimentally are in good agreement with the theoretical ones.     

The characteristics of soil reaction forces on a single movable lug

In order to understand clearly the characteristics of the soil reaction forces on a single movable lug, the resultant of measured soil reaction forces was determined and presented along with its position on the lug plate. The resultant of soil reaction forces acting on the movable lug increased gradually and reached the maximum value when the lug was on about its lowest position in the soil, then it decreased without offering any downward resistance to the lug till the lug left the soil. The maximum resultant force of the movable lug was higher than that of a fixed lug. The point of action of the resultant force on the movable lug shifted in a similar way in all test cases, that is, it moves to the center of the lug from the outer tip until it reaches the position where it becomes the maximum, then it moves to the outer tip till the lug leaves the soil. The inclination angle of the resultant force increased with the decrease of lug inclination angle. The bigger lug sinkage of the movable lug produced bigger soil reaction forces and shifted the point of action of the resultant force from the tip part to the central part of the lug. However, there was no significant effect of the lug sinkage on the direction of the resultant force. The increase in lug slippage from 25% to 50% brought bigger soil reaction forces on the movable lug, but did not influence the direction and point of action of the resultant force.     

Unsteady force measurements in sphere flow from subcritical to supercritical Reynolds numbers

The flow over a smooth sphere is examined in the Reynolds number range of 5.0 × 10⁴ < Re < 5.0 × 10⁵ via measurements of the fluctuating forces and particle image velocimetry measurements in a planar cut of the velocity field. Comprehensive studies of the statistics and spectra of the forces are presented for a range of subcritical and supercritical Reynolds numbers. While the subcritical lateral force spectra are dominated by activity corresponding to the large-scale vortex shedding frequency at a Strouhal number of approximately 0.18, there is no such peak apparent in the supercritical spectra, although resolution effects may become important in this region. Nor does the large-scale vortex shedding appear to have a significant effect on the drag force fluctuations at either sub- or super-critical Reynolds numbers. A simple double spring model is shown to capture the main features of the lateral force spectra. The low-frequency force fluctuations observed in earlier computational studies are shown to have important implications for statistical convergence, and in particular, the apparent mean side force observed in earlier studies. At least one thousand dimensionless time units are required for reasonable estimates of the second and higher moments below the critical Reynolds number and even more for supercritical flow, stringent conditions for computational studies. Lastly, investigation of the relationship between the motion of the instantaneous wake shape, defined via the local position where the streamwise velocity is equal to half the freestream value, and the in-plane lateral force for subcritical flow reveals a significant negative correlation throughout the near wake, which is shown to be related to a structure inferred to arise from the large-scale vortex shedding convecting downstream at 61% of the freestream velocity. In addition to its utility in understanding basic sphere flow, the apparatus is also a testbed that will be used in future studies, examining the effect of both static and dynamic changes to the surface morphology.