Molecular dynamics study of groove fabrication process using AFM-based nanometric cutting technique

Three-dimensional molecular dynamics simulation of groove fabrication using atomic force microscopy (AFM)-based nanometric cutting technique is set up, fabrication processes of grooves with two types (line, and folder line) and five folder angles (0°, 30°, 45°, 60°, 90°) are simulated to investigate the effect of groove geometry on the fabrication process. The results show that the Normal force, Lateral force, and Resultant forces are almost symmetric with respect to the critical folder angle of 45°. The best surface quality of fabricated groove can be obtained at the folder angle of 45°. It reveals that the groove geometry has a significant effect on the groove fabrication process due to the material anisotropy on the atomic scale.     

Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation

The surface of flint glass of type F2 is patterned by nanosecond KrF excimer laser ablation. Strong UV absorption provides a comparatively low ablation threshold and precise ablation contours. By using a two-grating interferometer, periodic surface patterns with 330 nm period and 100 nm modulation depth are obtained. This method enables the fabrication of 7 mm×13 mm wide grating areas with perfectly aligned grooves without the need of high-precision sample positioning. By double exposure, crossed gratings with adjustable depths in the two orthogonal directions can be generated.     

Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser

We present a novel technique to fabricate deeply embedded microelectrodes in LiNbO₃ using femtosecond pulsed laser ablation and selective electroless plating. The fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of LiNbO₃ by femtosecond laser ablation; (2) formation of AgNO₃ films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modification of the inner surfaces; and (4) electroless copper plating. The void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. The dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside LiNbO₃ crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices.     

LiNbO3 Self-Aligned Ridge Waveguide with Dielectric Side Buffers

A simple fabrication method of self-aligned ridge waveguides with dielectric side buffers is demonstrated on +Z-cut LiNbO3. The ridge waveguide is fabricated by a combination of the annealed proton exchange process and the proton-exchanged wet etching technique.     

Femtosecond laser-induced blazed periodic grooves on metals

In this Letter, we generate laser-induced periodic surface structures (LIPSSs) on platinum following femtosecond laser pulse irradiation. For the first time to our knowledge, we study the morphological profile of LIPSSs over a broad incident angular range, and find that the morphological profile of LIPSSs depends significantly on the incident angle of the laser beam. We show that LIPSS grooves become more asymmetric at a larger incident angle, and the morphological profile of LIPSSs formed at an incident angle over 55° eventually resembles that of a blazed grating. Our study suggests that the formation of the blazed groove structures is attributed to the selective ablation of grooves through the asymmetric periodic surface heating following femtosecond pulse irradiation. The blazed grooves are useful for controlling the diffraction efficiency of LIPSSs.     

Femtosecond laser micromachining of grooves in indium phosphide

Femtosecond laser micromachining of indium phosphide is investigated using 150 fs light pulses at a center wavelength of 800 nm. The ablation rate for micromachining of grooves is investigated as a function of pulse energy, feed rate, number of passes over the same groove, and the light polarization relative to the cutting direction. A logarithmic dependence of the groove depth on the laser fluence is observed with two regimes characterized by different ablation rates and different thresholds. The groove depth is found to be inversely proportional to the feed rate or equivalently linearly proportional to number of pulses delivered per unit area. With multiple passes over the same groove the depth increases linearly up to about 20 consecutive passes. Above 20 passes the ablation rate decreases until a depth limit is approached. The best results in terms of groove geometry and depth limit are obtained with the polarization of the beam perpendicular to the cutting direction. PACS 42.62.Cf; 79.20.Ds; 81.20.Wk     

Finite Element Analysis of Field Pattern in Multiple Groove Guide

Rectangular groove guide with multiple grooves has been analyzed by finite element method (FEM) in this paper. The electrical field patterns of the dominant mode and the first higher-order TE mode have been presented for groove guide with single-, double-, triple-, and quadruple-rectangular grooves. The electromagnetic field of the dominant mode is distributed with a concentration in the groove regions, while the electromagnetic field of the first higher-order TE mode is mainly distributed in regions between grooves. The low loss characteristic has been found not only in single-groove guide, but also in multiple groove guide.     

Parallel ripple formation during femtosecond laser grooving of ceramic

The self-organized formation of ripples in the direction parallel to the groove during the femtosecond laser machining of microgrooves on aluminum nitride ceramic at laser fluences much higher than the single-pulse ablation threshold is reported. These parallel ripples are notably different from the commonly observed polarization-perpendicular ripples and are produced in grooves having an appropriate width and depth, irrespective of laser polarization. From subsequent experiments with narrow and wide groove widths, it could be considered that the groove walls play an important role in the formation of these parallel ripples, possibly by confining the laser-induced plasma.     

非晶硅薄膜太阳能电池的紫外激光刻蚀工艺

为提高电池的光电转换效率,通过改善激光刻蚀工艺,采用355 nm紫外纳秒激光分别进行了ZnO:Al薄膜（AZO）刻蚀（P1）、非晶硅薄膜（-Si）刻蚀（P2）和背电极刻蚀（P3）研究。采用万用表测量P1隔离电阻,采用电子扫描显微镜（SEM）和三维激光扫描仪测量刻槽的微结构和三维成像,激光拉曼散射光谱检测非晶硅薄膜刻蚀边缘的晶化。实验结果表明,当刻蚀速度600 mm/s,重复频率40 kHz,功率1.74 W的紫外激光刻蚀ZnO:Al薄膜时,刻槽的隔离效果最佳,达20 M; 紫外激光刻蚀能够有效地减小激光热效应引起的热影响和刻槽边缘的晶化范围,提高非晶硅薄膜电池的性能。     

Silicon V-shaped groove measurement by spectral domain optical coherence tomography

In this research, we focuses on a new detection method for testing a micro electro mechanical systems V-shaped groove in silicon using spectral domain optical coherence tomography with a thermal light source. By this method, the V-shaped groove depth, width and bottom width were measured. The technique, because of its noncontact operation and high acquisition rate, is suitable for on-line precision measurement of V-shaped grooves in silicon.     

Design and Fabrication of Integrated-Optic Disk Pickup on LiNbO3 Substrate

An integrated-optic disk pickup device has been realized on a LiNbO3 substrate. The device is constructed by integrating an aplanatic double-convex aspherical waveguide lens (ADCAWL), a twin-grating focusing beam splitter (TGFBS) and two waveguide deflecting prisms (WDP) on a Ti∶LiNbO3 planar waveguide. The design considerations and fabrication of prototype device are summarized.     

Design and Fabrication of Integrated-Optic Disk Pickup on LiNbO_3 Substrate

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用有效折射率/有限元法设计1.55μmTi:LiNbO3单模条波导及其方向耦合器

应用有效折射率/有限元法(EI-FEM),考虑到LiNbO3晶体和Ti扩散的各向异性,折射率增量与寻常光、非寻常光及波长色散的关系,设计了1.55μm光波长下工作的z切y传播Ti:LiNbO3单模条波导的制备参数,计算和分析了其单模特性、模式场分布及其变化规律.扩展了EI-FEM,将其用于求解耦合波导系统,确定了方向耦合器的耦合长度及其波长色散特性.     

Invited Review Nanoscale devices fabricated by dynamic ploughing with an atomic force microscope

A review is given on the dynamic ploughing technique and its application on the fabrication of nanoscale semiconductor structures. The vibrating tip of an atomic force microscope is used to dynamically plough furrows into a polymer layer of a few nm thickness on top of the semiconductor surface. Wet-chemical etching transfers the desired line pattern. The resulting grooves of 50–100 nm width form an arrangement of barriers in the electron layer of a conventional modulation-doped GaAs/AlGaAs heterostructure. A new type of heterostructure with a compensating p-type doped cap layer shows an electron enhancement if the cap layer is selectively removed. Etching a groove in these structures enables one to induce a one-dimensional electron system. Both types of structures are used to fabricate various ballistic quantum devices and Coulomb-blockade structures.     

Ti∶LiNbO_3二维渐变折射率光波导传播常数的计算

从Ti∶LiNbO3波导截面折射率分布的特点出发，得出一套计算传播常数简单而精确的方法。文中对该法进行了分析，并应用该方法计算了钛扩散波导的色散关系。该方法为钛扩散光波导集成光学器件的设计提供了一种较可靠的理论手段。     

Laser fabrication of high-aspect-ratio holes and grooves in photoresist by time constant manipulation

We report on the cw-laser fabrication of sharp-edged holes and grooves in organic-dye-sensitized photoresists for g-line or i-line by manipulating its intensity and scanning rate. The laser fabrication is performed to locally control the reaction time constant of the photoresist. By scanning a tightly focused laser focal spot inside the transparent photoresist, various micron/submicron meter structures have been produced based on the reaction time constant depending on the beam intensity. The proposed method is considered to be a cost-effective technique for high-aspect-ratio holes and grooves fabrication.     

Picosecond laser ablation of high-quality micro-grooves on CIGS (CuIn(1-x)Ga2Se x ) thin films

ABSTRACT

This paper presents a study of the effects of ablation direction, beam profile and outer environment on the width and morphology of micro-grooves ablated by a 10-ps, 532-nm laser with a changing range of fluences and scan speeds on 600?nm-thick CIGS (CuIn_(1-x)Ga₂Se _x ) thin films. Experiments show that rear-side ablation by picosecond laser with a flat top beam in water environment yields a larger groove width than normal front-side ablation with a Gaussian beam in air, which is attributed to different material removal mechanisms, uniform energy distribution and the refraction of laser in water. The heat-affected zone and irregular edges induced by the tearing effect are the main defects of groove morphology associated with front- and rear-side ablation processes, respectively. Our studies indicate that flat top beam ablation, in general, inhibits the over-ablation in the central region, thereby improving the uniformity of grooves, though it does not eliminate the heat-affected zone and irregularity of two edges. The straightness of groove edges is further improved with the flat top beam ablation carried out in a water environment, resulting from the action of the shock wave in water. Hence, the nearly perfect micro-grooves can be fabricated with rear-side flat top beam ablation under water, which are characterized by steep sidewalls, straight edges and intact glass substrate without cracks.     

Electromagnetic plane-wave scattering from a sectorial groove in a perfectly conducting plane

Scattering characteristics of plane waves by a sectorial groove in a perfectly conducting plane are investigated. Both the transverse magnetic (TM) and transverse electric (TE) polarizations of the incident wave are considered. Judicious use of the region-matching technique provides a rigorous series solution to the problem. The analyzed region is separated into two sub-regions by choosing a semi-circular auxiliary boundary. Thefield in each sub-region is expanded as a summationof proper wave functions with unknown coefficients. Enforcing the matching of conditions on the auxiliary boundary and of boundary condition on the circular-arc surface of the groove leads to a linear set of equations and the unknown coefficients are then determined. Numerical results demonstrate the influence of central angles of the sectorial groove on echo width, far-field pattern and near-field distribution. The presented geometry is easily applicable to the design and fabrication of a grating structure for optical switches and tunable filters.