种电热驱动法布里 珀罗光调制器

提出了一种用于显示基于微机电系统的电热驱动法布里 珀罗光调制器.利用多光束干涉理论分析了该调制器的原理及光学特性.分析表明:当腔长为(2k+1)λ/4时,反射光强取极大值|当腔长为2kλ/4时,反射光强取极小值|通过改变腔长可以实现显示.光源谱宽越窄,衬比度越高|干涉级次越低,衬比度越高|衬比度随反射率的增加而减小.借助Ansys软件仿真分析了调制器的驱动特性.加工了器件并搭建实验装置进行了动态响应特性测试实验.结果表明,该调制器具有驱动电压低至3.2 V,响应速度约为5 kHz的良好驱动特性.实验结果初步验证了该结构的可行性.     

用于显示的透射型法布里-珀罗光调制器

提出了一种用于显示的,基于透射型法布里-珀罗干涉的微机电系统(MEMS)光学调制器。基于多光束干涉原理分析了调制器的光学特性,推导出了调制器结构的特征参量。分析表明,当调制器的腔长为cλ/4时,透射光可以实现暗态显示;当调制器的腔长取为零或cλ/2时,透射光可以实现亮态显示。通过控制法布里-珀罗腔长,就可实现调制器的明暗调制。理论上证明了该调制器用于显示的可行性。设计了一种基于微机电系统的透射型法布里-珀罗光学调制器结构,该调制器的理论衬比度达到150。仿真结果表明,该调制器具有2.4 V的低电压静电驱动性能。     

介质层充电对光栅光调制器驱动的影响

利用高斯定理分析了二氧化硅层中存在电荷时,光栅光调制器中的空间电场分布,得到了光栅光调制器在介质层存贮电荷影响下的静电力公式. 分析了调制器中二氧化硅介质的充电和放电机理,得到了光栅的位移随介质充放电的变化关系. 通过分析指出当驱动电压的周期和介质的充放电时间常数相近的时候,介质层中存贮的电荷会使得可动光栅被下拉后发生缓慢的回跳. 电压被撤消后,光栅会受到存贮电荷所产生电场的作用而被下拉. 当驱动电压的周期远小于介质的充放电时间常数的时候,随着存贮电荷的增加,光栅在有外加电场时被下拉的距离和外加电场为零时被下拉的距离逐渐相等,光调制器输出光的光强变化逐渐减弱,当存贮电荷产生的电场为外加电场的一半时,器件完全失效. 通过实验对理论分析的结果进行了验证,实验结果和理论分析一致. 文章最后提出了一种消除介质层所存贮的电荷的方法,通过实验证明了这种方法的可行性. 关键词： 微机电系统 光栅光调制器 介质层充电     

一种新型微机电系统法布里-珀罗滤波器的设计与分析

基于微机电系统(MEMS)技术,提出了一种光栅与法布里-珀罗(F-P)腔相结合的新型MEMS F-P滤波器结构,这种滤波器既能保证较宽的自由光谱范围又能够获得较窄的半峰全宽。从实现机理、参数设计和选择对F-P滤波器的结构进行了深入分析,并着重对微桥桥面的机电性能进行了仿真计算。通过选择不同的微桥桥面厚度(0.5,0.6,0.7,0.8,0.9,1μm),比较微桥在静电力作用下的平整度,发现当微桥表面厚度为1μm时,得到了一个较优结果,在5V电压下,上反射镜的倾斜位移ΔL为9.11nm,最大腔长变化量为242nm,这样能保持前后腔面反射光的平行要求,从而保证滤波器的滤波效率和对选择光的利用率。该滤波器能够解决传统微型滤波器自由光谱范围与半峰全宽相互限制的矛盾,提高微型滤波器的性能。     

二维光栅光调制器阵列的光学分析与实验

基于标量衍射理论分析了二维光栅光调制器的衍射特性,提出了投影系统的光学处理方法,利用Matlab软件进行了仿真分析.分析结果表明,二维光栅光调制器的衍射光强分布是单个像素衍射光强的干涉叠加,其分布趋势与单个光调制器的衍射光强分布类似;通过反傅里叶变换可将各个调制器的衍射光重新分开而成像.如果用±1级衍射光的成像,相位为2kπ的调制器在投影面得到一个明亮的像,而相位为(2k-1)π的调制器在投影像面上得到一个黑暗的像.通过一个基于静态微光电系统光栅光调制器的投影光学系统得到了一幅明暗调制的像,证明了光栅光调制器用于投影显示的可行性.     

基于法布里-珀罗微腔阵列的光读出红外热成像器件设计与制作

提出了一种新颖的基于硅基法布里珀罗微腔阵列的光读出红外热成像器件 ,该器件利用光学读出技术将红外图像直接转化为可见光图像 ,其焦平面阵列 (FPA)是一个基于微机电系统 (MEMS)制作的法布里珀罗微腔阵列。阐明了器件的工作原理 ;完成了可动微镜结构、热机械、可见光读出部分设计。理论分析表明 ,对Al/SiO2 双材料体系而言 ,SiO2 厚度应大于 0 .3μm ,其最佳厚度比为 0 .5 98,相应的最大热 机械灵敏度可达 10 -8m/K。采用体硅微机电系统技术 ,实验制作出了 5 0× 5 0焦平面阵列。     

一种基于MEMS光栅光调制器的近红外光谱探测系统

基于微机电系统技术的近红外光谱探测系统已成为了近红外光谱仪研究的一个新方向。文章提出了一种基于光栅光调制器的新型近红外光谱探测系统。该系统采用微加工技术制造的光栅光调制器阵列与单点近红外探测器相结合使用的方法进行光谱探测。设计了该光谱探测系统的光学结构, 论述了系统光谱探测原理, 并使用经表面微加工工艺得到的光栅光调制器器件进行了系统分辨本领、波长准确性、系统稳定性、器件响应频率等特征参数测试实验。结果表明,该探测系统在1 320到1 400 nm波长范围内,分辨本领小于10 nm, 波长准确性小于1 nm, 系统稳定性小于0.5%, 光栅光调制器的响应频率为5kHz。实验结果证明了该近红外光谱探测系统的可行性, 为研制基于微机电系统光栅光调制器的微型化近红外光谱仪提供了理论基础及实验指导。     

光纤微机电系统法布里-珀罗压力传感器的波分复用

提出了一种用阵列波导光栅复用光纤微机电系统法布里-珀罗压力传感器的方法,实现了法布里-珀罗压力传感器的准分布式测量。传感器基于法布里-珀罗腔干涉的原理,采用微机电系统技术加工制作,用双波长方法解调干涉信号,利用传感器对两个不同波长光的反射率的比值与压力的单值关系确定所施加压力的大小,用阵列波导光栅实现传感器复用。理论分析与实验验证了传感器解调和复用的基本原理。实验结果表明:在压力的线性测量范围(0~1.5 MPa)内,系统的灵敏度(相对反射率比值/压力)可达到0.02026 MPa-1,测量结果具有较好的线形性,相对反射率比值的标准偏差小于3×10-4。该系统可以补偿传感器光网中和波长无关的变动引起的误差,具有好的线性、灵敏度和精度,复用能力强且复用传感器间无串扰。     

光纤法布里-珀罗微压传感器

设计并研制了一种新型光纤法布里-珀罗压力传感器,通过光刻、硅片刻蚀、阳极键合等微机电系统技术制作而成,适合恶劣环境下、狭小空间内的微压环境压力测量。详细阐述了传感器的结构设计和制作方式。该设计巧妙地利用了光纤法兰盘,保证了光纤端面与敏感膜的平行,从而形成高质量的法布里-珀罗干涉腔。该结构也有利于初始腔长的稳定,减小了传感器误差。建立了实验解调系统,对其压力、温度等特性进行了详细的测试。实验结果表明,在0~0.1MPa的压力范围内,传感器线性度好,重复性高,灵敏度达到了61.6μm/MPa。     

一种微型光开关的设计与仿真分析

介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关,并对其总体结构进行了设计与仿真分析.运用有限元分析的方法,设计了永磁体的最佳尺寸并优化了悬臂梁的结构;分析了聚酰亚胺悬臂梁的扭转力、电磁力与挠度的关系.当输入电流为75 mA时,聚酰亚胺悬臂梁达到平衡时的挠度约为1.02 mm,能够满足器件转换光路的要求.     

FP腔中光驱动微悬臂的双稳效应的研究

研究了高灵敏度悬臂梁与光纤端面构筑的低精细度FP型光腔中光驱动的悬臂梁振动的双稳效应。通过改变输入到光腔内的激光功率,检测与之相应的悬臂梁的形变。在实验中发现悬臂梁的形变随激光功率的改变呈现非线性变化的关系,在激光功率增大到一定闽值时可以诱导产生光力双稳效应。通过改变光腔初始腔长成功实现了对产生光力双稳效应阈值的调节。     

Harmonic and Intermodulation Performance of Fabry-Perot Intensity Modulator

Abstract

In this article, a mathematical model for the transfer function of the Fabry-Perot intensity modulator is presented. The model, basically a cosine-series function, can be used to obtain closed-form expressions for the amplitudes of the harmonic and intermodulation products of the Fabry-Perot intensity modulator driven by a multi-frequency radio frequency voltage. The special case of a Fabry-Perot intensity modulator driven by an equal-amplitude two-frequency radio frequency voltage is considered in detail, and the results are compared, whenever possible, with previously published experimental and numerically obtained results.     

High Efficiency Electrically-Addressable Phase-Only Spatial Light Modulator

To realize a high efficiency electrically addressable phase-only modulator, we have coupled a liquid crystal display (LCD) to an optically addressed parallel-aligned nematic liquid crystal spatial light modulator (PAL-SLM) with a set of lenses. Phase modulation exceeding 3ϖ at 532 nm wavelength was obtained. We obtained linear transfer characteristics for phase modulation at various desired phase levels after calibration and adjustment of the transfer characteristics of the PAL-SLM and the LCD. Diffraction efficiency of 40% for binary phase grating and of 90% for 8-level blazed phase grating, which were very close to the simulation values, were observed. The power loss of the readout light was caused when passed through a half mirror, therefore, we examined a setup using an oblique readout light at the modulator. Very high diffraction efficiency was obtained from the setup by optimizing the polarization direction and optical path for this light, and the orientation of liquid crystals. Since the modulator can perform at better than 90% diffraction efficiency and at nearly 100% reflectivity, various high efficiency systems utilizing such modulators are expected.     

Readout of Images on Spatial Light Modulator Using Reading Light Supplier

A readout function of a reading light supplier (RLS) is demonstrated by reading out images from an optical addressable spatial light modulator (SLM). The RLS supplies reading light to the reading side of the SLM and transmits readout images from the SLM. The RLS consists of a fiber plate and a redirector which has micro conical-hollows. The RLS contrast, which is the intensity ratio of the reading light to the stray light, is 9.2 and the power efficiency of the reading light supply is about 5%. A writing pattern on the SLM is a checkered pattern of 5 mm×5 mm cells, and it is read out successfully using the RLS. The maximum contrast of the readout image is 1.9.     

基于阴极射线管耦合液晶光阀空间光调制器的联合变换相关器

描述了一种基于电寻址空间调制器的二值化联合变换相关器，该系统主要包括阴极射线管耦合液晶光阀（ＣＲＴ－ＬＣＬＶ）、ＣＣＤ摄象机和ＣＯＭＰＡＱ３８６计算机，文中在理论分析的基础上给出了计算机模拟和初步的实验结果，表明该相关器具有良好的识别性能。     

LED照明的光栅光调制器光学特性分析与实验

针对一种新型的光凋制器--光栅光调制器,研究用LED作为其照明光源时对光学调制特性的影响.以部分相干光理论为依据,结合MATLAB仿真,推导出用LED照明光栅光调制器时,光源带宽对成像对比度具有较大的影响,通过滤色片将光源带宽减小到13 nm时,像面上的对比度约为150,进一步减小带宽至10 nm,对比度将达到225.光源的尺寸在与光源到光栅光调制器之间的距离相比小于0.03时,对光栅光调制器的光学信息处理不会有影响,并通过实验加以证实,从而说明采用LED作为光栅光调制器照明光源的可行性.     

基于液晶空间光调制器的太赫兹波频谱调制

频谱可调制的太赫兹波具有广泛的应用价值。利用一台纯相位式的液晶空间光调制器对飞秒激光脉冲进行空间整形,通过改变飞秒激光脉冲的横向空间分布,实现太赫兹波频谱的调制。在实验中,利用光泵浦整流方式产生太赫兹波,并利用太赫兹时域光谱系统对太赫兹信号进行探测。通过GS算法在液晶空间光调制器上加载不同的相位图,获得了不同的飞秒激光脉冲横向空间分布。通过改变探测距离和飞秒脉冲的空间分布参数,实现了太赫兹波频谱的调制。还利用菲涅尔衍射算法对这一过程进行了理论模拟,理论模拟结果与实验结果吻合的较好,这充分说明了基于飞秒脉冲空间整形的太赫兹光谱调制技术的可行性。     

Oblique-Incidence Characteristics of a Parallel-Aligned Nematic-Liquid-Crystal Spatial Light Modulator

We have developed optically-addressed and electrically-addressed liquid crystal spatial phase-only light modulators having no pixelized structures. We obtained a large depth of phase-only modulation and high diffraction efficiency based on the electro-optical characteristics of a parallel-aligned nematic liquid crystal. These spatial light modulators (SLM) are of the reflection type, so there would be a loss of power in the readout light from the half mirror, which was set up so as to separate the incident and reflected lights. To optimize the characteristics of a reflection type spatial phase-only light modulator, we have proposed an oblique incident optical readout setup. We have examined the effect of conditions such as the polarization direction and the incidence angle of the readout light, and the orientation of liquid crystal molecules in the SLM. High diffraction efficiency close to the theoretical maximum value was obtained by adjusting the above conditions. The simulation analysis can well explain the experimental results of phase modulation.     

Spatial Temporal Analysis of Electrically-Addressable Phase-Only Spatial Light Modulator

An optically addressed parallel-aligned nematic-liquid-crystal spatial light modulator (PAL-SLM) has been studied as a dynamic phase-only modulation device. A computer control feature of the spatial light modulator is strongly desired for practical applications. For those demands, an electrically-addressable phase-only spatial light modulator has been developed to combine a liquid crystal display (LCD) with a PAL-SLM (LCD-coupled PAL-SLM) and its performance has been reported. However, a temporal characteristic especially two-dimensional (2D) response has not been discussed before. In this paper, 2D response analysis system has been constructed by using a high-speed complementary Metal-Oxide-Semiconductor (CMOS) camera (1000 frames/sec) and the 2D-modulation characteristic of the LCD-coupled PAL-SLM has been observed. As a result, the LCD has a spatially non-uniform modulation characteristic due to a scanning addressing. It has the potential to cause problems in high speed switching for a computer generated hologram. On the other hand, the spatial non-uniformity has not been observed with the LCD-coupled PAL-SLM.