Bump formation on a glass surface with a transparent coating using femtosecond laser processing

The morphology of a glass surface having a transparent coating processed with focused femtosecond laser pulses is investigated. The transparent coating is formed of poly-methyl methacrylate (PMMA). When the glass was coated with a PMMA film with a thickness of 2.8 μm, bumps were formed over a wide range of axial focus positions. The same laser pulse energy produced cavities when processing bare glass with no coating. The bumps were formed as a result of suppressing material emission from the glass surface by a shielding effect of plasma generated by ablation of the PMMA film and by physical blocking of the PMMA film. A thinner film with a thickness of 0.7 μm produced a reduced shielding effect, forming an exploded bump with a small pit at its center and debris around the periphery. PACS 44.10.+i; 61.80.Ba; 79.20.Ds     

Liquidly process in femtosecond laser processing

Nano-sized water-crown like structure in array was firstly generated on metallic thin film by interfering femtosecond laser processing. We named the structure as “nanocrown”. Ridges are standing on the edge of each ablated hole. The shapes of ridges are spike, nano-waterdrop and bead on column. The radius of the top of a spike was just 7 nm, which is far smaller than that of nanobump generated in the previous work. The self-rising in liquidly process result in the generation of mesoscopic nanostructure with the size between nanohorn or nanotube and micron structures processed by machining or lithography. This is a new surface modification technique in top-down technology.     

Mesoscopic nanomaterials generated by interfering femtosecond laser processing

Mesoscopic nanomaterials with a size ranging from a few nanometers to hundreds of nanometers were generated on a metallic thin film by interfering femtosecond (fs) laser processing. Because the nanomaterials seemed to demonstrate liquid behavior, we named their structure nano water drop. The structure is considerably similar to that of a real water drop observed with a high-speed camera. Using the phase shift between interfering beams, a duplicate structure was generated. This is a new surface modification technique, using a top-down approach.     

Ultraviolet conical emission produced by high-power femtosecond laser pulse in transparent media

In this work, supercontinuum conical emission (SC CE) accompanying the filamentation of powerful ultrashort laser pulse in BK₇ glass and fused silica is studied. The SC CE is controlled by the laser power density and the sample thickness, and the minimum SC CE cut-off wavelength is about 309?nm in the BK₇ glass and 237?nm in the fused silica. The angular distributions of the SC CE in the wavelength range less than 510?nm are measured by using a new method, and it cannot be explained by the Cerenkov emission theory but the unabridged X-Waves solution theory. Meanwhile numerical simulations of the propagation of femtosecond laser pulse in sample are performed to provide theoretical support to our results.     

Material removal effect of microchannel processing by femtosecond laser

Material processing using ultra-short-pulse laser is widely used in the field of micromachining, especially for the precision processing of hard and brittle materials. This paper reports a theoretical and experimental study of the ablation characteristics of a silicon wafer under micromachining using a femtosecond laser. The ablation morphology of the silicon wafer surface is surveyed by a detection test with an optical microscope. First, according to the relationship between the diameter of the ablation holes and the incident laser power, the ablation threshold of the silicon wafer is found to be 0.227 J/cm². Second, the influence of various laser parameters on the size of the ablation microstructure is studied and the ablation morphology is analyzed. Furthermore, a mathematical model is proposed that can calculate the ablation depth per time for a given laser fluence and scanning velocity. Finally, a microchannel milling test is carried out on the micromachining center. The effectiveness and accuracy of the proposed models are verified by comparing the estimated depth to the actual measured results.     

Super-hydrophobic transparent surface by femtosecond laser micro-patterned catalyst thin film for carbon nanotube cluster growth

In this work, super-hydrophobic surfaces were fabricated by femtosecond laser micro-machining and chemical vapor deposition to constitute hybrid scale micro/nano-structures formed by carbon nanotube (CNT) clusters. Nickel thin-film microstructures, functioning as CNT growth catalyst, precisely control the distribution of the CNT clusters. To obtain minimal heat-affected zones, femtosecond laser was used to trim the nickel thin-film coating. Plasma treatment was subsequently carried out to enhance the lotus-leaf effect. The wetting property of the CNT surface is improved from hydrophilicity to super-hydrophobicity at an advancing contact angle of 161 degrees. The dynamic water drop impacting test further confirms its enhanced water-repellent property. Meanwhile, this super-hydrophobic surface exhibits excellent transparency with quartz as the substrate. This hybrid fabrication technique can achieve super-hydrophobic surfaces over a large area, which has potential applications as self-cleaning windows for vehicles, solar cells and high-rise buildings.     

Intense femtosecond shaped laser beams for writing extended structures inside transparent dielectrics

We review recent results on the propagation and self-focusing of intense femtosecond laser pulses with shaped beam profiles in transparent dielectric media. At sufficiently high optical power, beam shaping seeds into the transverse modulation instability and results in the deterministic placement of intense laser filaments within the beam profile. Resulting spatial filament distributions may be utilized for writing complex extended structures inside transparent dielectrics. Specific examples of beam shapes we will discuss are Bessel beams, optical vortices, Bessel beams of higher order, and Airy beams.     

Ablation of microstructures applying diffractive elements and UV femtosecond laser pulses

A new method for simple and economic fabrication of diffractive optical elements (DOEs) with three and four phase levels, by UV nanosecond (ns) laser ablation is presented. The technique is based on the combination of two sequentially generated complementary 2-level phase elements. During the fabrication, complete ablative removal of a highly absorbing silicon suboxide layer by pixelated backside illumination ensures the necessary high precision and optical quality. Full functionality of the new DOEs is demonstrated by fabricating micro-structures using UV femtosecond pulses.     

Generation of debris in the femtosecond laser machining of a silicon substrate

A mechanism of debris accumulation around the hole created on a silicon substrate with a femtosecond laser is experimentally studied. The hole created by the laser pulses has an edge consisting of pillared structures. However, no solid or liquid materials with similar dimensions as the pillared structures were ejected from the hole as the laser machining was performed in vacuum or in the presence of various gases. When the target was placed in a gas under 100 Torr, a thick layer of cotton-like material formed around the hole. Laser irradiation of a vertically placed target resulted in re-solidified material that formed after dripping from the hole edge, showing that substrate was partially melted. The surface morphology features suggest that the debris was formed as a result of aggregation of small particles such as atoms or atomic clusters on the substrate surface instead of large-scale droplets or fragments, which are commonly observed with nanosecond lasers. PACS 78.67.Bf; 81.15.Fg; 81.16.Mk; 81.20.Wk; 81.65.Cf     

Shock-wave generation upon axicon focusing of femtosecond laser radiation in transparent dielectrics

It is shown experimentally that the axicon focusing of intense femtosecond laser pulses in transparent dielectrics leads to efficient excitation of shock waves. A method is developed for measuring the dynamics of shock waves, which uses a frequency-chirped probe pulse and has high spatial (～1 μm) and time (～10 ps) resolutions. The initial stage of the evolution of an intense (up to 10 GPa) shock wave is studied by this method.     

Tailored ablation processing of advanced biomedical hydroxyapatite by femtosecond laser pulses

The micromachining of hydroxyapatite (HAp) is highly important for orthopedics and dentistry, since human bone and teeth consist mainly of HAp. We demonstrate ultrashort Ti:sapphire laser ablation of HAp, using pulse-widths of 50 fs, 500 fs, and 2 ps at a wavelength of 820 nm and at 1 kpps. The crucial medical issue is to preserve the chemical properties of the machined (ablated) surface. If the chemical properties of HAp change, the human bone or tooth cannot re-grow after laser processing. Using X-ray photoelectron spectroscopy, we observe chemical properties of HAp ablated in air. The HAp is ablated at laser fluences of 3.2 J/cm² (6.4×10¹³ W/cm² at 50 fs), 3.3 J/cm² (6.6×10¹² W/cm² at 500 fs), and 9.6 J/cm² (4.8×10¹² W/cm² at 2 ps), respectively. As a result it is found that the ablated surface is unchanged after laser ablation over the pulse-width range used in this experiment. Received: 7 October 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003 RID="*" ID="*"Corresponding author. Fax: +81-45/566-1533, E-mail: obara@obara.elec.keio.ac.jp     

Spatially resolved measurement of femtosecond laser induced refractive index changes in transparent materials

We present a practical method to determine femtosecond laser induced refractive index changes in transparent materials. Based on an iterative Fourier transform algorithm, this technique spatially resolves the refractive index of complex structures by combining the dimensions of the modified region with the corresponding phase change extracted from far-field intensity measurements. This approach is used to characterize optical waveguides written by a femtosecond laser in borosilicate glass.     

Far-field and near-field material processing with. femtosecond laser pulses

Recently, it has been proven that femtosecond lasers are ideal tools for the microstructuring of solid targets. Since thermal and mechanical influences are minimized, diffraction-limited structures can be generated in the far field. The diffraction limit can be overcome when one works in the near field. In this paper, concrete applications and new developments in both regimes are highlighted.     

High spatiotemporal resolution in multifocal processing with femtosecond laser pulses

We report spatial and temporal dispersion compensation for fan-out of femtosecond pulses with a low-frequency diffraction grating by means of a hybrid diffractive-refractive lens triplet. In this way, we achieve a multifocal light structure with nearly diffraction-limited light spots even for 20 fs pulse duration. The spatial chromatic compensation, which drastically reduces the lateral walk-off of the various spectral components, also allows us to improve the available bandwidth at the dispersion-compensated diffraction orders. In fact, the temporal width of the output pulse is essentially limited by the group-delay dispersion term, which is shown to be small. The high spatiotemporal resolution provided by our proposal permits parallel multifocal processing of materials with femtosecond pulses.     

Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling

An integrated electro-optic waveguide modulator is demonstrated in bulk fused silica. A Mach-Zehnder interferometer waveguide structure is fabricated by direct writing with a femtosecond laser followed by thermal poling. A 20 degrees electro-optic phase shift is achieved at an operating wavelength of 1.55 microm with an applied voltage of 400 V and an interaction length of 25.6 mm, which correspond to an estimated effective electro-optic coefficient of 0.17 pm/V for the TE-polarized mode.     

Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass

A fused silica glass micro-channel can be formed by chemical etching after femtosecond laser irradiation, and the successful etching probability is only 48%. In order to improve the micro-channel fabrication success probability,the method of processing a high-temperature lattice by a femtosecond laser pulse train is provided. With the same pulse energy and scanning speed, the success probability can be increased to 98% by optimizing pulse delay.The enhancement is mainly caused by the nanostructure, which changes from a periodic slabs structure to some intensive and loose pore structures. In this Letter, the optimum pulse energy distribution ratio to the etching is also investigated.