Comparative Analysis of a Solar Control Coating on Glass by AES, EPMA, SNMS and SIMS

 A solar control coating was analysed by different methods of surface analysis with respect to the layer sequence and the composition and thickness of each sublayer. The methods used for depth profiling were Auger electron spectroscopy, electron probe microanalysis, secondary neutral mass spectroscopy and secondary ion mass spectroscopy based on MCs⁺. The structure of the coating was unknown at first. All methods found a system of two metallic Ag layers, embedded between dielectric SnO_X layers. Additionally, thin Ni-Cr layers of 1–2 nm were detected on top of the Ag layers. Thus the detected layer sequence is SnO_X/Ni-Cr/Ag/SnO_X/Ni-Cr/Ag/SnO_X/glass. The Ni:Cr ratio in the nm-thin layers could be quantified by every method, the Cr fraction corresponding to less than one monolayer. We compare the capabilities and limitations of each method in routinely investigating this solar control coating. Importance was attached to an effective investigation. Nevertheless, by combining all methods, measuring artefacts could be uncovered and a comprehensive characterisation of the system was obtained.     

Surface Characterisation of Water-Atomised Al–Zn–Mg–Cu Alloy Powders by SIMS and AES

 The present paper focuses on the characterisation of surface composition and alloying element in-depth distribution of water-atomised Al–Zn–Mg–Cu alloy powders by secondary ion mass-spectrometry and Auger electron spectroscopy. A pronounced segregation of Mg and some impurities (Fe, Ca, S) concurrently with some Zn depletion are observed on the powder surface. The oxide film formed on the powder surface mainly consists of Al and Mg oxides. The film is non-uniform in thickness: rather coarse surface oxide islands coexist with surface areas covered by a thin (<1.8 nm) oxide layer. The extent of surface oxidation is strongly affected by solidification conditions: The average thickness of the surface oxides increases with increasing particle size or with decreasing cooling rate. All alloying elements are homogeneously distributed in the bulk of individual particles. No significant differences in chemical composition between different particles of a given powder are observed. Received November 26, 1999. Revision September 25, 2001.     

Estimation of useful yields for electrospray droplet impact/secondary ion mass spectrometry (EDI/SIMS)

Useful yield for electrospray droplet impact/secondary ion mass spectrometry was estimated. The mixtures of C₆₀/rhodamine B and C₆₀/Aerosol OT were used as the samples for the positive and negative mode of operations, respectively. By assuming that (i) the desorption efficiencies are about the same for C₆₀, rhodamine B and Aerosol OT, and (ii) desorption of ionic compounds directly gives the secondary ion signals, the useful yields (i.e. total ions generated divided by the total molecules desorbed) for C₆₀ were estimated to be ~0.1. This value should be regarded as the upper limit because the neutralization of positive and negative ions in the plume and desorption of ionic compounds as neutral species are not taken into account. Copyright © 2012 John Wiley & Sons, Ltd.     

Development of a SIMS Method for Isotopic Measurements in Nuclear Forensic Applications

 Methodologies based on secondary ion mass spectrometry (SIMS) for isotopic measurements in nuclear forensic applications relevant to the age determination of Pu particles and isotopic composition of oxygen for geolocation assignment are described. For the age determination of Pu particles, a relative sensitivity factor (RSF) to correct for the different ionisation efficiencies of U and Pu, was obtained by analysing standard Pu materials with known ages. An RSF of 2.41±0.05 was obtained for PuO₂ from measurements on samples with different Pu/U ratios. In a sample of known origin, using this RSF value, the age calculated from the ²³⁸Pu/²³⁴U and ²⁴⁰Pu/²³⁶U ratios agreed well with the reported age of 2.3 years. For geolocation assignment, a new approach based on the measurement of differences in the natural abundance of ¹⁸O and ¹⁶O isotopes and their ratio was developed. The instrumental mass discrimination of the ¹⁸O/¹⁶O ratio was determined using three O-isotope samples of different chemical composition. The measured precision (the standard error of 100 cycles/analysis) obtained for the oxygen isotopic measurement on the samples was typically ±1.1‰.     

Characterization of Two-Component Metal Coatings (Al/Sn) with SIMS

 Vacuum deposited films of immiscible metal–metal systems can be applied as tribological coatings for plain bearings in high performance diesel engines. These industrially manufactured coatings show higher lifetimes than conventional electroplated coatings. For our investigations we used aluminum-tin coatings of 1 μm thickness on a glass substrate produced by sequential deposition from two separate targets under working gas pressure of 0.4 Pa. The tough Al matrix takes high mechanical loads and the soft inclusions of Sn act as solid lubricant. While Sn is deposited it migrates on the Al surface and grows as islands. We characterized the conformation and the distribution of the Sn islands on the surface and to the interstitial area between the islands with 3-D secondary ion mass spectroscopy (SIMS). The existence of a Sn layer between the islands (“wetting layer”) has been detected by SIMS and verified by measurements with Auger electron spectroscopy (AES).     

Characterization of the Element Distribution Within TiN Coatings with SIMS

 The distribution of the relevant elements within TiN coatings, made with two different physical deposition methods as the conventional dc vacuum arc method and the filtered high current pulsed arc method (Φ-HCA) are characterized and finally compared. Despite the rougher surface of the dc-arc produced TiN layer, which is due to accumulated droplets, there is no evidence of different stoechiometric composition of Ti and N on the surface. The interface of the dc-arc produced TiN layer (600 nm) is 10 times wider than the one made with the new filtered high current pulsed arc method (60 nm). However the TiN layer made by Φ-HCA shows an inhomogeneous distribution of aluminum and chlorine in the vertical direction, whereas the dc-arc sample is homogeneous. Furthermore, the TiN layer made by Φ-HCA shows vertically an obvious local maximum of chlorine at a depth of about 130 nm. This vertical local maximum has an homogeneous distribution in horizontal direction, which means that a thin, chlorine enriched layer has been incorporated inside the TiN layer. Nevertheless, quantification by SIMS shows that aluminum as well as chlorine concentrations of both samples are too low to influence any TiN properties. Received January 3, 2000. Revision April 4, 2000.     

Characterization of oxygen precipitates in Czochralski silicon by imaging SIMS

This paper presents a three-dimensional characterization of oxygen defects in Czochralski-silicon (CZ) by 3D-SIMS using a camera based imaging system. Different manufacturing processes yielding a variation in size and distribution of oxygen precipitates are monitored by imaging SIMS and conventional depth profiling. Emphasis is laid on the characterization of the precipitation behavior governed by different annealing processes. The limitations of 3D SIMS for oxygen defect imaging are studied. Sputter induced microroughening of the crater bottom, investigated by SEM, is shown to be strongly correlated with defect densities caused by oxygen precipitates.     

Characterization of the distribution of the sintering activator boron in powder metallurgical steels with SIMS

Powder metallurgy is a well-established method for manufacturing ferrous precision parts. A very important step is sintering, which can be strongly enhanced by the formation of a liquid phase during the sintering process. Boron activates this process by forming such a liquid phase at about 1200 °C. In this work, the sintering of Fe–B was performed under the protective atmospheres of hydrogen, argon or nitrogen. Using different grain sizes of the added ferroboron leads to different formations of pores and to the formation of secondary pores. The effect of boron was investigated by means of Secondary Ion Mass Spectrometry (SIMS) supported by Scanning Electron Microscopy (SEM) and Light Microscopy (LM). To verify the influence of the process parameters on the mechanical properties, the microstructure (pore shape) was examined and impact energy measurements were performed.The concentrations of B in different samples were varied from 0.03–0.6 weight percent (wt%). Higher boron concentrations are detectable by EPMA, whereas the distributions of boron in the samples with interesting overall concentration in the low wt% range are only detectable by means of SIMS.This work shows that the distribution of boron strongly depends on its concentration and the sintering atmosphere used. At low concentration (up to 0.1 wt%) there are boride precipitations; at higher concentration there is a eutectic iron–boron grain boundary network. There is a decrease of the impact energy observed that correlates with the amount of eutectic phase.     

Structural Characterization by SIMS of Alumina Coatings on Stainless Steel

Al₂O₃ coatings were obtained by the alkoxide route and deposited on stainless steel using the dip coating technique. The starting precursor was aluminum sec-butoxide modified by acrylic acid in order to prevent its precipitation in the presence of water.Useful information for the structural organization of alumina coatings on stainless steel is deduced from SIMS analysis. SIMS data reveal that the coating structure brings into play two different layers: an outer alumina layer that is more or less doped, mainly by iron, and an internal layer corresponding to the alumina/steel interphase. Beneath the interphase, the presence of an oxidized steel layer on the substrate surface is detected.Whatever the coating, the alumina/steel interphase exhibits a nearly constant thickness. On the other hand, a thickness variation of the oxidized steel layer is observed between samples under study: this thickness increases with the curing time of the coating.     

A comparison of the static SIMS and G‐SIMS spectra of biodegradable homo‐polyesters

Static SIMS (SSIMS) is a surface analytical technique capable of providing molecular chemical information from solids. A major barrier to the wider take‐up of the technique is the complexity associated with the interpretation of SSIMS spectra. Quality of the interpretation depends on the expertise of analysts and making references to the limited mass spectral libraries. For many materials, there are no SSIMS library spectra. A new library‐independent method, G‐SIMS, is capable of facilitating the interpretation of SSIMS data. G‐SIMS spectra contain parent fragments, which are formed without substantial degradation or rearrangements, and highlight molecular fragments, which are directly related to the surface. In our study, G‐SIMS has been tested on medically relevant biodegradable polyester series, including poly (glycolic acid) (PGA), poly‐l‐(lactic acid) (PLA), poly‐β‐(hydroxybutyrate) (PHB) and poly‐ε‐(caprolactone) (PCL). The polyester series chosen here have closely related structures, which allow us to explore the capabilities of G‐SIMS. The G‐SIMS spectra have facilitated the identification of different polyesters by exhibiting mainly characteristic ions, representative of the polymers' molecular structures. The results also indicated that for the chosen polyester series, the larger the repeating monomer structures, the smaller the maximum number of repeat units were seen in the G‐SIMS spectra. The G‐SIMS spectra for the homologous polyester series have provided an insight into the fragmentation mechanisms as a function of repeating monomer molecular weights and structures. Copyright © 2008 John Wiley & Sons, Ltd.     

Fundamental aspects of electrospray droplet impact/SIMS

A new ionization method, electrospray droplet impact ionization (EDI), has been developed for matrix-free secondary-ion mass spectrometry (SIMS). The charged droplets formed by electrospraying 1 M acetic acid aqueous solution are sampled through an orifice with a diameter of 400 microm into the first vacuum chamber, transported into a quadrupole ion guide, and accelerated by 10 kV after exiting the ion guide. The droplets impact on a dry solid sample (no matrix used) deposited on a stainless steel substrate. The secondary ions formed by the impact are transported to a second quadrupole ion guide and mass-analyzed by an orthogonal time-of-flight mass spectrometer (TOF-MS). Ten pmol of gramicidin S could be detected with the presence of as much as 10 nmol of NaCl. The ion signal for arginine disappeared with decrease in the substrate temperature below 150 K owing to the formation of ice film over the sample surface. While 10 fmol of gramicidin S could be detected for 30 min, the ionization/desorption efficiency for EDI becomes smaller with an increase in the molecular weight (MW) of a biological sample. The largest protein samples detected to date are cytochrome c and lysozyme. The high sensitivity for EDI is due to the fact that samples only a few monolayers thick are subject to desorption/ionization by EDI, with little fragmentation. A coherent phonon excitation may be the main mechanism for the desorption/ionization of the solid sample.     

Reduction of matrix effects in TOF‐SIMS analysis by metal‐assisted SIMS (MetA‐SIMS)

We investigated reduction of the matrix effect in time‐of‐flight secondary ion mass spectrometry (TOF‐SIMS) analysis by the deposition of a small amount of metal on the sample surfaces (metal‐assisted SIMS or MetA‐SIMS). The metal used was silver, and the substrates used were silicon wafers as electroconductive substrates and polypropylene (PP) plates as nonelectroconductive substrates. Irganox 1010 and silicone oil on these substrates were analyzed by TOF‐SIMS before and after silver deposition. Before silver deposition, the secondary ion yields from the substances on the silicon wafer and PP plate were quite different due to the matrix effect from each substrate. After silver deposition, however, both ion yields were enhanced, particularly the sample on the PP plate, and little difference was seen between the two substrates. It was therefore found that the deposition of a small amount of metal on the sample surface is useful for reduction of the matrix effect. By reducing the matrix effect using this technique, it is possible to evaluate from the ion intensities the order of magnitude of the quantities of organic materials on different substrates. In addition, this reduction technique has clear utility for the imaging of organic materials on nonuniform substrates such as metals and polymers. MetA‐SIMS is thus a useful analysis tool for solving problems with real‐world samples. Copyright © 2005 John Wiley & Sons, Ltd.     

Quantitative SIMS analysis of SiC

We performed a systematic study of ion‐implanted 6H‐SiC standards to find the optimal regimes for SIMS analysis. Relative sensitivity factors (RSFs) were acquired for operating conditions typical of practical SIMS applications. The experimental SiC RSFs were compared with those found for silicon: 1 the matrix effect was insignificant in most cases. It was found that the SiO^? cluster ion cannot represent correctly the real oxygen distribution in SiC. The physics of the effect is discussed. Copyright © 2003 John Wiley & Sons, Ltd.     

Quantitative SIMS depth profiling of Al in AlGaN/AlN/GaN HEMT structures with nanometer‐thin layers

The possibilities of quantitative secondary ion mass spectrometry (SIMS) depth profiling of Al in AlxGa1 ? xN/AlN/GaN transistor heterostructures are shown. Using a series of test structures for a TOF.SIMS‐5 time‐of‐flight mass spectrometer, we obtained a refined linear calibration dependence of the secondary‐ion yield on the composition ×, namely, Y(CsAl+)/Y(CsGa+) = K × x/(1 ? x), with a high linear correlation coefficient, Rl = 0.9996, which permits quantitative SIMS analysis of relatively thick AlGaN barrier layers. The method of profile reconstruction with allowance for the main artifacts of ion sputtering has been first applied for the analysis of GaN/AlGaN/AlN/GaN high electron mobility transistor structure. This method permits to perform quantitative analysis of the thickness and composition of a nanometer‐thin AlN sublayer and to estimate the measurement error. For the structure being studied, the AlN sublayer is 1.2 ± 0.2 nm thick. Copyright © 2016 John Wiley & Sons, Ltd.     

Static TOF‐SIMS. A VAMAS interlaboratory study. Part II — accuracy of the mass scale and G‐SIMS compatibility

An interlaboratory study involving 32 time‐of‐flight static SIMS instruments from 13 countries has been conducted. In Part I of the analysis of data, we showed that 84% of instruments have excellent repeatabilities of better than 1.9% and that a relative instrument spectral response (RISR) can be used to evaluate variations between different generic types of instrument. Use of the RISR improves comparability between instruments by a factor of 33. Here, in Part II, we study the accuracy of the mass scale calibration in TOF‐SIMS and evaluate instrument compatibility with G‐SIMS. We show that the accuracy of calibration of the mass scale is much poorer than generally expected (?60 ppm for peaks <200 u and ?150 ppm for a large molecular peak at 647 u). This is a major issue for analysts. Elsewhere, we have developed a detailed study of the factors affecting the mass calibration and have developed a generic protocol that improves accuracy by a factor of 5. Here, this framework of understanding is used to interpret the results presented. Furthermore, we show that eight out of the ten participants submitting data for G‐SIMS could use operating conditions that generated G‐SIMS spectra of the PC reference material. This demonstrates that G‐SIMS may be conducted with a wide variety of instrument designs. © Crown Copyright 2007. Reproduced by permission of the Controller of HMSO. Published by John Wiley & Sons, Ltd.     

Static SIMS studies of the oxides and hydroxides of aluminium

The degree of hydroxylation or hydration of aluminium surfaces has been examined by static secondary ion mass spectroscopy (SSIMS). The SSIMS spectra of a series of aluminium oxide, oxyhydroxide and hydroxide surfaces have been obtained using instruments in three configurations. Similarities were observed in both negative and positive secondary ions spectra. Even though a direct comparison of the relative intensities cannot be made from one instrument to the other, a similar ranking of the various aluminium hydroxylation states was observed. Several ranking methods are discussed, as well as the similarities and differences observed while using the three instruments. Similar secondary ions were detected whatever the degree of hydroxylation of the aluminium oxide. This argues in favour of the formation of fragments by the combination of individually sputtered atoms or clusters to form the more stable secondaries, rather than the kick-off of 'structure-related' clusters originating directly from the upper surface layer.     

SIMS and AES measurements on the LaNi5-hydrogen system

Summary SIMS (Secondary Ion Mass Spectrometry) and AES (Auger Electron Spectroscopy) investigations were carried out on polycrystalline LaNi₅ samples and on LaNi₅ samples, which have been loaded with hydrogen electrochemically. AES measurements show an enrichment of obviously oxidized La at the surface, while in the SIMS spectra the emission of negative ions attracts special attention. In contrast to the V-H- and Nb-H-system negative Me_xH_y-ions turned out to be the most sensitive species for hydrogen detection in SIMS experiments on LaNi₅. The emission of negative ions of type Ni_x and Ni_yH_x, which are not observed on pure Ni are due to the electropositive character of La in this special matrix and the presence of hydrogen. The results point to a higher affinity of hydrogen to Ni than to La.     

Experimental shift allowance in the deconvolution of SIMS depth profiles

We study the deconvolution of the secondary ion mass spectrometry (SIMS) depth profiles of silicon and gallium arsenide structures with doped thin layers. Special attention is paid to allowance for the instrumental shift of experimental SIMS depth profiles. This effect is taken into account by using Hofmann's mixing‐roughness‐information depth model to determine the depth resolution function. The ill‐posed inverse problem is solved in the Fourier space using the Tikhonov regularization method. The proposed deconvolution algorithm has been tested on various simulated and real structures. It is shown that the algorithm can improve the SIMS depth profiling relevancy and depth resolution. The implemented shift allowance method avoids significant systematic errors of determination of the near‐surface delta‐doped layer position. Copyright © 2013 John Wiley & Sons, Ltd.     

Surface characterization and depth profiling of biological molecules by electrospray droplet impact/SIMS

Electrospray droplet impact (EDI) was applied to the analysis of peptides. The etching rate of bradykinin was estimated to be ~2 nm/min. This value is about one order of magnitude greater than the etching rate for SiO₂ (0.2 nm/min). Considering that the etching rate of argon cluster ions Ar₇₀₀⁺ for organic compounds is more than two orders of magnitude larger than that for inorganic materials, the rather small difference in etching rates of EDI for organic and inorganic materials is unique. When water/ethanol (1/1, vol%) solution of gramicidin S and arginine was dried in air, [gramicidin S + H]⁺ was observed as a predominant signal with little [Arg + H]⁺ right after the EDI irradiation, indicating that EDI is capable of detecting the analytes enriched on the sample surface. Copyright © 2011 John Wiley & Sons, Ltd.     

Low-temperature SIMS mass spectra of diethyl ether

For the first time a secondary ion mass spectrum of diethyl ether was obtained at low temperature. The spectrum recording became possible by carefully selecting the range of experimental conditions for the production of a cluster-type spectrum. This range is specified by the threshold for spectrum appearance above the melting temperature of the frozen sample and a fairly short time span of existence of the liquid estimated as only a few minutes. The latter necessitates rather rapid spectrum detection. In practice, about 1 min was available for recording of the cluster-type spectra. The secondary emission mass spectrum of diethyl ether appeared to be rich in peaks: along with abundant protonated clusters M(n).H(+) (n = 1-12), unusually intense [M(n) - H](+) and weaker M(n) (+.) peaks were present accompanied by several sets of fragmented clusters, [M(n) - 15](+), [M(n) - 29](+), [M(n) - 27](+), [M(n) - 45](+), and monohydrates, M(n).H(2)O.H(+). The analysis of all the peaks showed that the pattern of fragment clusters is qualitatively similar to the pattern of fragmentation of the diethyl ether molecular ion under high-energy electron impact. The general features of the behaviour of diethyl ether under low-temperature mass spectrometric conditions were similar to those observed earlier for some other organic solvents.