超声气体射流辅助飞秒激光刻蚀石英微槽工艺研究

针对飞秒激光加工硬脆材料过程中存在重凝、微裂纹、崩边等物理缺陷,为获得高质量加工面,提出超声气体射流辅助飞秒激光加工方法。以刻蚀石英微槽为研究对象,探讨了超声气体射流辅助飞秒激光加工机理,探究了超声频率、超声功率及气体入口压力对飞秒激光刻蚀石英微槽深度及深宽比的影响规律,对比分析了有无超声气体射流辅助下飞秒激光刻蚀石英微槽形貌。实验结果表明,在飞秒激光重复频率20 kHz、单脉冲能量50μJ、离焦量0μm、扫描速度4 mm/s、单次扫描加工条件下,石英微槽深宽比从无超声气体射流辅助下的0.81提升至超声气体射流辅助下的1.23,槽深由27.16μm增加到48.82μm,此时超声气体射流参数为气体入口压力0.6 MPa、超声频率28 kHz、超声功率300 W。在超声气体射流辅助下石英微槽表面附着颗粒物减小,表面形貌显著提高。     

超声辅助电镀的仿真与实验*

为了提高镀层的表面质量,提出了一种超声辅助电镀的方法。超声的空化与搅拌作用可以影响电镀的电沉积过程。设计了合理的换能器结构,并搭建了超声辅助电镀装置。通过对模型进行压电声学场与电镀场耦合仿真分析,结果表明：在硫酸铜电解液,镀铜时间60s,电压300V条件下,进行超声辅助电镀,镀层厚度分布均匀,镀层中部电流密度分布均匀,边缘最大电流密度是未加超声的2倍左右 。基于仿真结果,进行相同的实验测试,结果表明：超声辅助电镀可以提高镀层的均匀性,减少铜颗粒表面的杂质,提高表面的光洁度。阴极样品距离换能器头部位置在60mm左右,镀层质量良好。     

硫酸甲醇体系中钽的电解动力学

 为了探索钽的电解动力学行为,在硫酸甲醇电解液中对钽进行了电解抛光的实验研究,测定了电解液配比、电压、搅拌速率对钽薄膜减薄速率的影响;通过测定温度对反应速率的影响,计算了阿仑尼乌斯（S.A.Arrhenius）活化能。研究结果表明：温度在0 ℃,硫酸甲醇体积比为1∶7时,钽的电解行为符合典型金属极化行为规律;在电压10~20 V的范围内,搅拌速率大于8 m/s时,减薄速率稳定为11.45 μm/min;当搅拌速率小于8 m/s时,扩散传质控制电解过程,当大于8 m/s后,电解过程为非扩散控制。温度对反应速率的影响表明,钽在硫酸甲醇电解液中的电解行为符合S.A.Arrhenius公式,活化能为15.77 kJ·mol^-1。     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。     

辅助药型罩材料对线型聚能射流性能影响的数值仿真

为了提升线型聚能射流的性能,将截顶加辅助药型罩结构应用于线型聚能装药,应用三维有限元分析软件(LS-DYNA)对以紫铜为主体药型罩,Al、Cu和W作为辅助药型罩时形成的线型聚能射流进行了数值仿真,并将其与传统的线型聚能射流进行了对比分析。结果表明:截顶加辅助药型罩结构形成的射流性能更优,并随辅助药型罩材料密度等的增大,射流的延展性、速度及有效质量均有提高,且均优于传统的楔形罩结构;W作为辅助药型罩材料时形成的线型聚能射流,速度较传统的楔形罩结构提高约25.9%,射流的有效长度增加约145%。     

双凹球面相控聚焦超声波场的产生与可视化

超声相控阵技术在声悬浮中有十分重要的价值,相较于传统的一维单轴声悬浮装置,本文在凹球面双发射极超声阵列的基础上引入相控聚焦原理,产生了声悬浮能力较强的声场,重点研究了声场的仿真模拟与可视化验证.首先,介绍了自发设计的凹球面双发射极超声阵列结构,阐述了相控聚焦原理、超声驻波悬浮机理、声压与声辐射力等声学理论.然后,根据理论分析结果,借助COMSOL Multiphysics多物理场仿真软件,仿真模拟相控聚焦超声波场.产生该声场的各超声波换能器相位可单独控制,通过相位的实时变化,可使声场进行动态聚焦,实现微粒的悬浮与任意轨迹移动.最后,使用单反射纹影系统实现了该声场的实时可视化,与仿真结果进行比较,证实了凹球面双发射极超声波装置相控聚原理的准确性.     

移动电解去污技术

设计了一种移动式电解去污装置，电解液密闭循环使用，废物量少且易于处理，可对大型工件和污染手套箱进行移动式现场去污，减少去污工作人员的辐照危险。在设计的移动电解去污装置（见图1）中，以污染的导电材料为阳极进行电解去污，阴极外壳为聚四氟乙烯材料，内衬金属网为阴极，电解液通过循环泵循环利用，并通过吸附阻滞材料，将电解液中的放射性物质吸附在吸附材料中。去污处理结束后，电解液流入储液罐待用，此时即可移动去污装置进行另一区域的去污或吸附阻滞材料的处理。由此产生的放射性废物量很少，可避免污染扩散。     

超声辅助搅拌摩擦焊仿真分析及实验

为解决传统的搅拌摩擦焊工艺存在的轴向压力过大、搅拌头易磨损、焊接表面存在缺陷等问题,设计了一种集搅拌头与夹心式纵扭超声振动换能器为一体的超声辅助搅拌摩擦焊工具头。对超声辅助搅拌摩擦焊工具头进行了模态分析与谐响应分析,确保换能器结构满足要求。应用仿真软件对超声辅助搅拌摩擦焊进行了流体场、温度场和声场仿真分析,验证了在搅拌摩擦焊过程中加入纵扭超声振动能够增强材料的软化率,提高焊接材料的塑性流动。搭建实验平台,进行了6061铝合金的超声辅助搅拌摩擦焊焊接实验。结果表明,纵扭超声的引入能够提高焊接过程中材料流动性,减小搅拌头的前进阻力和轴向压力,改善焊接表面质量。在焊头转速900 r/min、焊接速度1.4 mm/s、轴向压力2.6 kN、超声功率100 W时,焊接效果最好,能较好地应在铝合金、镁合金等焊接熔点比较低的轻金属焊接之中。     

超声辅助加工系统的刀具状态自感知算法

超声波振动台内含压电材料,可以拾取切削过程产生的振动信号,实现不借助外部传感器刀具工作状态的自感知。为了从刀具振动信号中获取有效信息,该文提出一种基于经验模态分解的时频域重构算法。首先,采用经验模态分解算法将原始信号分解,得到多个固有模态函数分量和残差分量;其次,计算原始信号与各分量之间的时频域互相关系数;再次,归一化时频域互相关系数作为权重值,将固有模态函数分量和残差进行重构;最后,通过数值仿真和超声辅助加工实验,验证了基于经验模态分解的时频域重构算法的去噪性能,提取了信噪比为5.03 dB的目标信号,从而实现了超声辅助加工系统的自感知功能。     

超声变幅杆的超声精密加工

本文探讨了超声变幅杆的精密加工．作者研制了双刀反间进给超声车削装置和单刀正向进给超声车削装置，采用了具有频率跟踪系统的晶体营型超声波发生器．超声车削设备连续140min工作时，频率漂移量只有29HZ，最高温度只有38℃．试验结果表明，加工精度可达IT7－ITS，表面粗糙度几可达0．4－0．8m，加工效率提高15倍，有效地解决了超声变幅杆的精密加工难题．     

Investigation of a novel hybrid process of laser drilling assisted with jet electrochemical machining

Recast layer and spatter are two inherent defects commonly associated with holes produced with laser drilling. This paper reports a novel hybrid process of laser drilling assisted with jet electrochemical machining (JECM-LD) that aims to minimize such defects and improve the quality of laser-drilled holes. The process based on the application of a jet electrolyte, being aligned coaxially with the focused laser beam, on the workpiece surface during laser drilling. The effect of the jet electrolyte mainly is an electrochemical reaction with materials. The jet electrolyte also cools the workpiece and transports debris during the process. On the basis of a measurement of laser attenuation in electrolyte, an experimental apparatus system is made and JECM-LD experiments have been performed on 0.5-mm-thick 321S20 stainless steel with two lasers at wavelength of 1064 and 532 nm. It is shown that recast layer and spatter have been effectively reduced during the JECM-LD compared with laser drilling in ambient atmosphere conditions.     

超声振动对光学玻璃加工的锯切力特征研究

超声振动辅助方法已在各种硬脆性材料的加工工艺中得以应用,其优异的加工能力和效果已得到广泛证明。本研究中通过采集有无超声振动条件下锯切光学玻璃的平均锯切力以及单颗金刚石磨粒划擦实验下的力信号,对不同工艺条件下的平均锯切力、单颗磨粒受力特征进行分析。同时通过扫描电镜观察对应力信号下工件与工具加工后表面形貌,进一步通过超声振动下材料去除机理解释超声振动对锯切力影响。结果表明：与传统锯切工艺相比,超声振动辅助使得单颗磨粒划擦过程中的受力降低引起平均锯切力的降低;超声振动改变普通锯切下材料的去除方式;同时可使工具保持良好的锯切状态,降低光学玻璃材料的锯切力比,改善其可加工性。     

离体射流对S809翼型气动性能的影响

在Re=5×10⁶的条件下,分别在S809翼型前缘点附近不同位置处设置离体射流装置,改变射流动量的大小和射流口宽度,探究其对S809翼型气动性能的影响。并通过流场分析,研究这种流动控制手段有效的物理机理。结果表明:在射流装置位置和射流口宽度固定时,射流动量的大小对控制效果影响显著;在S809翼型表面附近设置微小离体射流装置后,即使关闭射流(射流动量为零时),也具有一定的流动分离控制效果;当射流动量逐渐增大时,射流能明显的减小流动分离泡的大小,降低阻力系数,同时可以有效提升升力系数,使得翼型的气动性能得到进一步显著提升。值得指出的是,射流口宽度与射流装置的位置对流动控制效果也具有一定的影响。     

Numerical study on the splitting of a vapor bubble in the ultrasonic assisted EDM process with the curved tool and workpiece

Electrical discharge machining (EDM) is a powerful and modern method of machining. In the EDM process, a vapor bubble is generated between the tool and the workpiece in the dielectric liquid due to an electrical discharge. In this process dynamic behavior of the vapor bubble affects machining process. Vibration of the tool surface affects bubble behavior and consequently affects material removal rate (MRR). In this paper, dynamic behavior of the vapor bubble in an ultrasonic assisted EDM process after the appearance of the necking phenomenon is investigated. It is noteworthy that necking phenomenon occurs when the bubble takes the shape of an hour-glass. After the appearance of the necking phenomenon, the vapor bubble splits into two parts and two liquid jets are developed on the boundaries of the upper and lower parts of the vapor bubble. The liquid jet developed on the upper part of the bubble impinges to the tool and the liquid jet developed on the lower part of the bubble impinges to the workpiece. These liquid jets cause evacuation of debris from the gap between the tool and the workpiece and also cause erosion of the workpiece and the tool. Curved tool and workpiece affect the shape and the velocity of the liquid jets during splitting of the vapor bubble. In this paper dynamics of the vapor bubble after its splitting near the curved tool and workpiece is investigated in three cases. In the first case surfaces of the tool and the workpiece are flat, in the second case surfaces of the tool and the workpiece are convex and in the third case surfaces of the tool and workpiece are concave. Numerical results show that in the third case, the velocity of liquid jets which are developed on the boundaries of the upper and lower parts of the vapor bubble after its splitting have the highest magnitude and their shape are broader than the other cases.     

Large-eddy simulation of the generation and propagation of internal solitary waves

A modified large-eddy simulation model,the dynamic coherent eddy model(DCEM)is employed to simulate the generation and propagation of internal solitary waves(ISWs)of both depression and elevation type,with wave amplitudes ranging from small,medium to large scales.The simulation results agree well with the existing experimental data.The generation process of ISWs is successfully captured by the DCEM method.Shear instabilities and diapycnal mixing in the initial wave generation phase are observed.The dissipation rate is not equal at different locations of an ISW.ISW-induced velocity field is analyzed in the present study.The structure of the bottom boundary layer(BBL)of internal wave packets is found to be different from that of a single ISW.A reverse boundary jet instead of a separation bubble exists behind the leading internal wave while separation bubbles appear in other parts of the wave-induced velocity field.The boundary jet flow resulting from the adverse pressure gradients has distinctive dynamics compared with free shear jets.     

液体材料超声处理过程中声场和流场的分布规律研究

针对合金熔体等液体材料的超声处理过程,选取水作为透明模型材料,采用数值模拟计算和示踪粒子实验方法,研究了20和490 kHz两种频率超声作用下水中的声场和流场分布.结果表明,增大变幅杆半径能够提高水中声压水平,扩大空化效应的发生区域.当超声频率为20 kHz时,水中声压最大值出现在超声变幅杆下端面处,且声压沿传播距离的增大而显著减小.如果超声频率增加至490 kHz,水中的声压级相比于20 kHz时明显提高,且声压沿着超声传播方向呈现出周期性振荡特征.两种频率超声作用下水中的流场呈现相似的分布特征,且平均流速均随着变幅杆半径增大表现出先升高后降低的趋势.变幅杆半径相同时,20 kHz频率超声作用下水中的平均流速高于490 kHz频率超声.采用示踪粒子图像测速技术实时观察和测定了水中的流速分布,发现其与计算结果基本一致.     

Novel cavitation fluid jet polishing process based on negative pressure effects

Traditional abrasive fluid jet polishing (FJP) is limited by its high-pressure equipment, unstable material removal rate, and applicability to ultra-smooth surfaces because of the evident air turbulence, fluid expansion, and a large polishing spot in high-pressure FJP. This paper presents a novel cavitation fluid jet polishing (CFJP) method and process based on FJP technology. It can implement high-efficiency polishing on small-scale surfaces in a low-pressure environment. CFJP uses the purposely designed polishing equipment with a sealed chamber, which can generate a cavitation effect in negative pressure environment. Moreover, the collapse of cavitation bubbles can spray out a high-energy microjet and shock wave to enhance the material removal. Its feasibility is verified through researching the flow behavior and the cavitation results of the negative pressure cavitation machining of pure water in reversing suction flow. The mechanism is analyzed through a computational fluid dynamics simulation. Thus, its cavitation and surface removal mechanisms in the vertical CFJP and inclined CFJP are studied. A series of polishing experiments on different materials and polishing parameters are conducted to validate its polishing performance compared with FJP. The maximum removal depth increases, and surface roughness gradually decreases with increasing negative outlet pressures. The surface becomes smooth with the increase of polishing time. The experimental results confirm that the CFJP process can realize a high material removal rate and smooth surface with low energy consumption in the low-pressure environment, together with compatible surface roughness to FJP.     

紫外光诱导纳米颗粒胶体微射流碰撞特性（英文）北大核心CSCD

采用流体力学模拟方法,建立了垂直非淹没射流的计算流体动力学模型,研究了在紫外光诱导纳米颗粒胶体射流中用直径D为500μm的微孔光-液耦合喷嘴进行抛光加工的冲击动力学,分析了非淹没射流条件下光-液耦合喷嘴内、外的流场分布情况及其对工件表面的喷射冲击特征,对紫外光诱导纳米颗粒胶体射流冲击动力学过程进行了理论描述。计算结果表明,在1MPa入射压力时,微孔光-液耦合喷嘴口TiO2胶体的喷射速度约为30m/s,其集束匀速喷射距离约为5mm。在此喷射距离时进行垂直喷射,在胶束与工件表面的冲击射流作用区域,其射流静压最大值分布在射流冲击作用中心,但射流动压及射流合成速度在此区域的截面分布呈"W"形状,射流动压及速度最大值出现在胶体射流束的外环直径约2mm处。     

超声波法提取迎春花总黄酮含量的工艺研究

研究了超声波法对迎春花中总黄酮的提取条件。其最优提取条件为:料液比1∶40,超声波温度20℃,作用时间20min。在此条件下,用NaNO2-Al(NO3)3-NaOH显色法测定的总黄酮为18.22%,RSD=1.48%(n=5)。