微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

Two-photon fluorescence isotropic-single-objective microscopy

Two-photon excitation provides efficient optical sectioning in three-dimensional fluorescence microscopy, independently of a confocal detection. In two-photon laser-scanning microscopy, the image resolution is governed by the volume of the excitation light spot, which is obtained by focusing the incident laser beam through the objective lens of the microscope. The light spot being strongly elongated along the optical axis, the axial resolution is much lower than the transverse one. In this Letter we show that it is possible to strongly reduce the axial size of the excitation spot by shaping the incident beam and using a mirror in place of a standard glass slide to support the sample. Provided that the contribution of sidelobes can be removed through deconvolution procedures, this approach should allow us to achieve similar axial and lateral resolution.     

具有抗漂移特性的激光共焦拉曼光谱成像技术与系统

共焦拉曼技术结合了共焦显微技术和拉曼光谱技术,具有高分辨率、高灵敏度、可层析成像的优势,广泛应用于物理、材料科学、生物医学、文物鉴定以及刑侦等领域。由于拉曼光谱成像需要较长时间,测量中系统易受环境等因素影响产生漂移,造成离焦,而现有商用共焦拉曼光谱仪并无定焦能力,容易影响测量结果。针对此问题,研制了一种具有抗漂移能力的激光共焦拉曼光谱探测系统。在不改变共焦拉曼探测基本原理的基础上,利用拉曼轴向响应曲线最大值对应显微物镜焦面这一特性,对每个探测点进行轴向扫描,采集一定数量的轴向信号,通过曲线拟合寻找光谱强度极值位置,保证扫描过程中样品始终处于系统的焦点位置处,抑制离焦影响,改善拉曼光谱成像效果。以单层石墨烯样品进行单点测试,证明仪器在5 μm离焦范围内可以实现实时定焦,定焦后采集到的拉曼光谱强度几乎不变,具有良好的抗漂移能力;对硅台阶样品进行成像测试,结果表明成像过程中,信号强度未发生明显变化,且横向分辨率有一定改善,效果明显优于普通共焦拉曼光谱探测系统。     

线结构光共焦显微成像技术的实验研究

激光共焦扫描显微镜大多采用点共焦扫描成像形式,扫描机构复杂,成本高。新型的线结构光共焦显微成像技术是对样品进行线共焦成像,只需对样品进行一维扫描就可以得到整个平面的像。设计了线结构光共焦成像实验装置,进行了线结构光共焦显微成像实验。实验结果证明了线结构光共焦成像的可行性,杂散光明显地减少,提高了成像清晰度,并且有光学层析能力。采用低照度高分辨率CCD代替价格昂贵的像增强器大大降低了系统成本。     

Effect of an annular pupil filter on differential confocal microscopy

Combining differential confocal microscopy and an annular pupil filter, we obtained the normalized axial intensity distribution curve of an optical system. We used the sharp slopes of the axial response curve of the optical system to measure the surface profile of a reflection grating. Experimental results prove that this method can extend the axial dynamic range and improve the transverse resolution of three-dimensional profilometry by sacrificing axial resolution.     

反射式光纤共焦扫描成像的研究

建立了反射式光纤共焦扫描成像系统,分析了光纤－集光透镜参数Ａ及物透镜有效数值孔径等对系统成像分辨率的影响。并在此基础上选择了合适参数的透镜,获得了优化的反射式光纤共焦扫描成像系统,测试结果表明,该系统具有亚微米级横向成像能力,微米级向层析能力,成像稳定性那,它将应用于材料及生物组织三维成像检测中。     

Compact confocal readout system for three-dimensional memories using a laser-feedback semiconductor laser

We present a compact confocal readout system for three-dimensional optical memories that uses the thresholding property of a semiconductor laser for feedback light. The system has higher axial resolution than a conventional confocal system with a pinhole. We demonstrate readout results for data recorded in two recording layers with the developed system.     

基于CCD虚拟针孔探测的双轴共焦显微技术

双轴共焦显微技术具有独特的非共轴结构,与传统单轴共焦显微技术相比可利用较低数值孔径物镜实现较高的轴向分辨力,且具有工作距离大、信噪比高等优势。对基于CCD虚拟针孔(VPH)探测的双轴共焦显微成像系统的空间分辨特性进行了理论分析,并构建了相应的实验系统,对其轴向响应进行了实验验证。实验中照明物镜NAi=0.117,采集物镜NAc=0.106,θ=45°,得出系统轴向半高宽(FWHM)为2.63μm,比同等参数(NA=0.117)下单轴共焦显微系统的轴向FWHM高出约20倍。     

激光分光瞳共焦显微镜系统研制

为了满足生物类等样品对大工作距和高分辨率共焦显微镜的需求,将分光瞳技术与激光共焦显微技术结合应用到成像系统上。阐述了激光分光瞳共焦显微成像原理,首次成功搭建了相应的显微镜成像测量系统。理论分析和实验表明:分光瞳共焦显微技术独特的非共轴结构使系统的轴向分辨力是相同数值孔径物镜单轴系统的3倍以上,对理论高度为100nm的台阶样品进行成像测试,得到的样品三维形貌,成像质量良好。     

改善共焦系统轴向分辨率的位相型光瞳滤波器

利用约束全局优化算法———CGO算法,设计了两种用于共焦系统的三区位相型光瞳滤波器.第一种滤波器在不改变系统的横向分辨率的同时,可以大幅度地提高轴向分辨率,提高了系统的层析能力.第二种滤波器在提高系统轴向分辨率的同时,又能提高其横向分辨率,适用于系统的三维成像. 关键词： CGO算法 光瞳滤波器 超分辨     

Stimulated emission depletion microscopy with a supercontinuum source and fluorescence lifetime imaging

We demonstrate stimulated emission depletion (STED) microscopy implemented in a laser scanning confocal microscope using excitation light derived from supercontinuum generation in a microstructured optical fiber. Images with resolution improvement beyond the far-field diffraction limit in both the lateral and axial directions were acquired by scanning overlapped excitation and depletion beams in two dimensions using the flying spot scanner of a commercially available laser scanning confocal microscope. The spatial properties of the depletion beam were controlled holographically using a programmable spatial light modulator, which can rapidly change between different STED imaging modes and also compensate for aberrations in the optical path. STED fluorescence lifetime imaging microscopy is demonstrated through the use of time-correlated single photon counting.     

差动共焦显微成像高稳定三维扫描技术与系统

激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。     

High-contrast microscopy of semiconductor and metal sites in integrated circuits by detection of optical feedback

High-contrast microscopy of semiconductor and metal sites in integrated circuits is demonstrated with laser-scanning confocal reflectance microscopy, one-photon (1P) optical-beam-induced current (OBIC) imaging, and detection of optical feedback by means of a commercially available semiconductor laser that also acts as an excitation source. The confocal microscope has a compact in-line arrangement with no external photodetector. Confocal and 1P OBIC images are obtained simultaneously from the same focused beam scanned across the sample plane. Image pairs are processed to generate exclusive high-contrast distributions of semiconductor, metal, and dielectric sites in a GaAs photodiode array sample.     

基于双边拟合的高稳定性共焦拉曼光谱定焦方法

共焦拉曼光谱技术可实现定量、无损、无需标记的样品微区“分子结构特征和物质组成信息”成像,被广泛应用于生物医学、物理化学以及材料科学等领域。由于共焦拉曼系统采用“点”激发和“点”探测的探测机制,且拉曼散射光谱信号微弱,导致成像所需时间可长达数小时甚至数十小时;测量过程中系统极易受环境变化、空气扰动等因素影响产生漂移,造成被测样品离焦,从而导致成像质量不稳定。针对现有共焦拉曼系统对样品定焦能力不足、样品易产生离焦误差、系统漂移大等问题,本文提出了一种基于双边拟合的高稳定性共焦拉曼光谱定焦方法。该方法首先对共焦拉曼光谱强度轴向响应曲线两侧对样品离焦敏感的数据区间分别进行线性拟合,得到两条拟合直线方程;然后,将所得的两条直线方程相减得到新的差分直线;最后,通过差分直线的过零点位置确定系统焦平面位置,实现了被测样品的高精度定焦,消除了离焦对系统测量结果的影响。以单晶硅表面同一位置,轴向扫描步距100 nm,进行60次重复定焦实验,实验获得的重复定焦极差为80.2 nm,说明系统具有良好的抗漂移能力。对周期5 μm的竖条栅格标准原子力台阶样品进行拉曼mapping成像测试,结果表明在长时间的成像过程中,和无定焦功能的图像相比,该方法获得的竖条栅格图像更清晰、边缘更锐利、信噪比较好。仿真分析和实验结果表明：提出的基于双边拟合共焦拉曼光谱探测方法可以提高系统的定焦准确度,抑制干扰因素导致的系统离焦对成像质量的影响,进而确保了系统探测的稳定性和成像分辨力,是一种自动定焦、抗漂移的拉曼光谱成像方法。     

微型差动式共焦自聚焦光聚焦探测系统

为解决微小内轮廓尺寸为代表的微小尺寸的非接触式超精密测量问题，提出了将自聚焦透镜体积小的特点与共焦显微技术的高分辨率和绝对位置跟踪特性相结合的差动式自聚焦共焦微型显微技术的光探测技术，建立了相应的传感系统，介绍了系统的工作原理和构成，自聚焦透镜测头直径为1mm，两个探测器差动设置，不但消除了光源的光强漂移和探测器的电子漂移产生的共模噪声，提高了测量信噪比，而且有效地提高了系统的轴向分辨率，初步实验表明，系统轴向分辨率在倾斜率小于20度的范围内可达5nm。     

基于双螺旋点扩散函数工程的多焦点图像扫描显微

在传统共聚焦显微技术的基础上,图像扫描显微技术使用面阵探测器来代替单点探测器,结合虚拟数字针孔并利用像素重定位和解卷积图像重构算法将传统宽场显微镜的分辨率提高一倍,实现了高信噪比的超分辨共焦成像.但是,由于采用逐点扫描的方式,三维成像速度相对较慢,限制了其在活体样品成像中的应用.为了进一步提高图像扫描显微术的成像速度,本文提出了一种基于双螺旋点扩散函数工程的多焦点图像扫描显微成像方法和系统.在照明光路中,利用高速数字微镜器件产生周期分布的聚焦点阵对样品进行并行激发和快速二维扫描;在探测光路中,利用双螺旋相位片将激发点荧光信号的强度分布转换为双螺旋的形式;最终,利用后期数字重聚焦处理,从单次样品扫描数据中重构出多个样品层的超分辨宽场图像.在此基础上,利用搭建的系统分别对纤维状肌动蛋白和海拉细胞线粒体进行成像实验,证明了该方法的超分辨能力和快速三维成像能力.     

Direction-sensitive subwavelength displacement measurements at diffraction-limited spatial resolution

Direction-sensitive displacement measurements at diffraction-limited spatial resolution are demonstrated with an interferometric optical-feedback semiconductor laser confocal imaging system. Subwavelength axial movements of the reflecting sample, including the directions of motion, are detected within the depth of field. A comparison of theory and actual instrument performance is presented.     

Combined Raman and continuous-wave-excited two-photon fluorescence cell imaging

We demonstrate a confocal optical microscope that combines cw two-photon-excited fluorescence microscopy with confocal Raman microscopy. With this microscope fast image acquisition with fluorescence imaging can be used to select areas of interest for subsequent chemical analysis with spontaneous Raman imaging. The distribution of the UV-absorbing fluorophore Hoechst 33342 in the apoptotic HeLa cells is measured in the combined cw two-photon-excited fluorescence and Raman microscopy modes. The 647-nm line of a Kr-ion laser is used to excite both the Raman scattering and the two-photon-excited fluorescence emission. The lateral and axial resolutions in the two imaging modes are compared by use of the Gaussian beam approximation and backprojection of the focal volume through the confocal pinhole.     

A lateral super-resolution differential confocal technology with phase-only pupil filter

In order to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, phase-only pupil filtering differential confocal microscopy (PFDCM), a new approach is proposed based on the differential confocal microscopy (DCM), which uses a three-zone phase-only pupil filter with lateral super-resolution capability obtained through optimized design to change the distribution of DCM three-dimensional point spread function, so that the DCM lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFDCM are better than 0.2 μm and 2 nm, respectively, when wavelength of incidence laser beam , numerical aperture of measuring lens NA=0.85, and lateral spot size with a three-zone phase-only pupil filter G_T=0.65. It is therefore concluded that PFDCM is a new approach to further improvement of lateral resolution in laser probe measurement systems.     

具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣，改善系统横向分辨力；通过差动共焦测量法改善系统的轴向分辨力，最终达到提高系统空间分辨能力的目的。理论分析和实验表明：整形环形光内孔归一化半径ε越大，横向分辨力改善越明显，量程扩展范围越宽；当入射光波长λ=632.8nm，物镜数值孔径取NA=0.85，ε=0.5时，该系统的横向分辨力优于0.2μm，轴向分辨力优于2nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法，可广泛应用于超精密三维微细结构工件的超精密测量。