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1.
(Na0.85K0.15)0.5Bi0.5TiO3 thin films were deposited on LaNiO3(LNO)/SiO2/Si(1 0 0) and Pt/Ti/SiO2/Si(1 0 0) substrates by metal-organic decomposition, and the effects of bottom electrodes LNO and Pt on the ferroelectric, dielectric and piezoelectric properties were investigated by ferroelectric tester, impedance analyzer and scanning probe microscopy, respectively. For the thin films deposited on LNO and Pt electrodes, the remnant polarization 2Pr are about 22.6 and 8.8 μC/cm2 under 375 kV/cm, the dielectric constants 238 and 579 at 10 kHz, the dielectric losses 0.06 and 0.30 at 10 kHz, the statistic d33eff values 95 and 81 pm/V. The improved piezoelectric properties could make (Na1−xKx)0.5Bi0.5TiO3 thin film as a promising candidate for piezoelectric thin film devices.  相似文献   

2.
The orientation dependences of the converse longitudinal piezoelectric constant d33,f, and the in-plane converse piezoelectric constant e31,f, are calculated for tetragonal barium titanate epitaxial films. The calculations demonstrate that both e31,f and d33,f have their maximum values along an axis close to the (1 1 1) direction of the pseudo-cubic system, which are similar to the orientation dependence results for a tetragonal BaTiO3 single crystal. The calculated piezoelectric constants for a (1 1 1) oriented BaTiO3 epitaxial film (e31,f = −23 C/m2, d33,f = 124 pm/V) suggest that it is a good candidate material for lead-free MEMS applications.  相似文献   

3.
4.
ZnO film is attractive for high frequency surface acoustic wave device application when it is coupled with diamond. In order to get good performance and reduce insertion loss of the device, it demands the ZnO film possessing high electrical resistivity and piezoelectric coefficient d33. Doping ZnO film with some elements may be a desirable method. In this paper, the ZnO films undoped and doped with Cu, Ni, Co and Fe, respectively (doping concentration is 2.0 at.%) are prepared by magnetron sputtering. The effect of different dopants on the microstructure, piezoelectric coefficient d33, and electrical resistivity of the film are investigated. The results indicate that Cu dopant can enhance the c-axis orientation and piezoelectric coefficient d33, the Cu and Ni dopant can increase electrical resistivity of the ZnO film up to 109 Ω cm. It is promising to fabricate the ZnO films doped with Cu for SAW device applications.  相似文献   

5.
Since the 1960s, the piezoelectricity in biopolymers (e.g. proteins and polynucleotides) has attracted considerable scientific attention. In particular, poly(glutamate)s have been one of the most popular targets for this research due to their well-defined helical structure and permanent polarity along the helical axis. To date, films of poly(glutamate)s have been shown to exhibit piezoelectricity only in shear mode (d14), mainly due to the limitation in fabricating electrically poled polymer samples. This paper describes a combined electrospinning and hot press method that allows production of poled poly(??-benzyl-??,L-glutamate) (PBLG) films with piezoelectricity in all d33, d31 and d14 modes for the first time. It is found that this PBLG film belongs to the matrix structure of C??v group, which is the same as that of poled PVDF film. The moderately high piezoelectric coefficients in both d33 and d14 modes as well as their thermal stability make the poled PBLG film an excellent candidate for use in flexible transducers and small energy harvesting devices.  相似文献   

6.
Epitaxial (001)-oriented PbSc0.5Ta0.5O3 (PST) thin films were deposited by pulsed laser deposition. Local piezoelectric investigations performed by piezoelectric force microscopy show a dual slope for the piezoelectric coefficient. A piezoelectric coefficient of 3 pm/V was observed at voltages up to 0.8 V. However, at voltages above 0.8 V, there is a steep increase in piezoelectric coefficient mounting to 23.2 pm/V. This nonlinear piezoelectric response was observed to be irreversible in nature. In order to better understand this nonlinear behavior, voltage dependent dielectric constant measurements were performed. These confirmed that the piezoelectric non-linearity is indeed a manifestation of a dielectric non-linearity. In contrast to classical ferroelectric systems, the observed dielectric non-linearity in this relaxor material cannot be explained by the Rayleigh model. Thus the dielectric non-linearity in the PST films is tentatively explained as a manifestation of a percolation of the polar nano regions.  相似文献   

7.
This paper presents the latest development of a lead-free piezoelectric ceramic and its application to transducers suitable for high-frequency ultrasonic imaging. A lead-free piezoelectric ceramic with formula of (K0.5Na0.5)0.97Li0.03(Nb0.9 Ta0.1)O3 (abbreviated as KNLNT-0.03/0.10) was fabricated and characterized. The material was found to have a clamped dielectric constant ε33S/ε0 = 890, piezoelectric coefficient d33 = 245 pC/N, electromechanical coupling factor kt = 0.42 and Curie temperature Tc > 300 °C. High-frequency (40 MHz) ultrasound transducers were successfully fabricated with the lead-free material. A representative lead-free transducer had a bandwidth of 45%, two-way insertion loss of -18 dB. This performance is comparable to reported performances of popular lead-based transducers. The comparison results suggest that the lead-free piezoelectric material may serve as an alternative to lead-based piezoelectric materials for high-frequency ultrasonic transducer applications.  相似文献   

8.
Pyrochlore phase free [Pb0.94Sr0.06] [(Mn1/3Sb2/3)0.05(Zr0.53Ti0.47)0.95] O3 ceramics has been synthesized with pure Perovskite phase by semi-wet route using the columbite precursor method. The field dependences of the dielectric response and the conductivity have been measured in a frequency range from 50 Hz to 1 MHz and in a temperature range from 303 K to 773 K. An analysis of the real and imaginary parts of the dielectric permittivity with frequency has been performed, assuming a distribution of relaxation times. The scaling behavior of the dielectric loss spectra suggests that the distribution of the relaxation times is temperature independent. The SEM photographs of the sintered specimens present the homogenous structures and well-grown grains with a sharp grain boundary. The material exhibits tetragonal structure. When measured at frequency (100 Hz), the polarization shows a strong field dependence. Different piezoelectric figures of merit (kp, d33 and Qm) of the material have also been measured obtaining their values as 0.53, 271 pC/N and 1115, respectively, which are even higher than those of pure PZT with morphotropic phase boundary (MPB) composition. Thus the present ceramics have the optimal overall performance and are promising candidates for the various high power piezoelectric applications.  相似文献   

9.
Fibre-textured and epitaxial Nb-doped Pb(Zr0.53Ti0.47)O3 (PNZT) thin films were grown on the different substrates by a sol-gel process. The [1 0 0]- and [1 1 1]-fibre-textured polycrystalline PNZT films were obtained on platinized silicon substrates by introducing PbO and TiO2 seeding layers, while the [0 0 1]- and [1 1 1]-oriented epitaxial PNZT films were formed directly on Nb-doped SrTiO3 (Nb:STO) single-crystal substrates with (1 0 0) and (1 1 1) surfaces, respectively. The preferential orientation and phase structure of the fibre-textured and epitaxial PNZT films, as well as their influences on the electrical properties were investigated. Higher remnant polarization (Pr) and piezoelectric coefficient (d33) were obtained for the epitaxial PNZT films on Nb:STO substrates than that for the fibre-textured ones on platinized silicon substrates. For both fibre-textured and epitaxial cases, the PNZT films with [1 0 0]/[0 0 1] orientations show higher piezoelectric responses than [1 1 1]-oriented ones, whereas better ferroelectric properties can be obtained in the latter. The intrinsic and extrinsic contributions were discussed to explain the difference in electrical properties for differently oriented fibre-textured and epitaxial PNZT films on different substrates.  相似文献   

10.
Film sandwiches, consisting of two outer layers of fluoroethylenepropylene and one middle layer of patterned porous polytetrafluoroethylene, were prepared by patterning and fusion bonding. Contact charging was conducted to render the films piezoelectric. The critical voltage to trigger air breakdown in the inner voids in the fabricated films was investigated. The piezoelectric d 33 coefficients were measured employing the quasistatic method and dielectric resonance spectrum. The results show that the critical voltage for air breakdown in the inner voids is associated with the void microstructure of the films. For the films with patterning factors of?0%, 25% and?44%, the critical values are?300, 230?and 230?kV/cm, respectively. With an increase in the patterning factor, both the piezoelectric d 33 coefficients determined from the dielectric resonance spectra and those determined from quasistatic measurements increase, which might be due to a decrease in Young??s modulus for the films. The nonlinearity of d 33 becomes increasingly obvious as the patterning factor increases.  相似文献   

11.
To study the factors affecting the dielectric and piezoelectric properties of bismuth-containing complex perovskites, the solid solution (1−x)Pb(Mg1/3Nb2/3)O3-xBi(Mg2/3Nb1/3)O3 was prepared by the solid state reaction method and its dielectric and piezoelectric properties were investigated. It is found that (1) at room temperature, the nonlinearity of the DE-loop for Pb(Mg1/3Nb2/3)O3 is completely suppressed at a rather low x (<5%); (2) dielectric constant versus temperature curves deviate from the Curie-Weiss law at a temperature Td much higher than the dielectric constant peak temperature Tm and TmTd decreases considerably with increasing x; and (3) frequency dispersion ΔTm=Tm (1 MHz)−Tm (10 kHz) increases with increasing x. Possible factors responsible for the variation of the dielectric and piezoelectric properties with x are discussed.  相似文献   

12.
In this work, 0.30 μm thick LiNbO3 layers have been deposited by sputtering on nanocrystalline diamond/Si and platinised Si substrates. The films were then analyzed in terms of their structural and optical properties. Crystalline orientations along the (0 1 2), (1 0 4) and (1 1 0) axes have been detected after thermal treatment at 500 °C in air. The films were near-stoichiometric and did not reveal strong losses or diffusion in lithium during deposition or after thermal annealing. Pronounced decrease of the roughness on top of the LiNbO3 layer and at the interface between LiNbO3 and diamond was also observed after annealing, compared to the bare nanocrystalline diamond on Si substrate. Furthermore, ellipsometry analysis showed a better density and a reduced thickness of the surface layer after post-deposition annealing. The dielectric constant and losses have been measured to 50 and less than 3.5%, respectively, for metal/insulator/metal structures with 0.30 μm thick LiNbO3 layer. The piezoelectric coefficient d33 was found to be 7.1 pm/V. Finally, we succeeded in switching local domain under various positive and negative voltages.  相似文献   

13.
Nb2O5 films with the thickness (d) ranging from 55 to 2900 nm were deposited on BK-7 substrates at room temperature by a low frequency reactive magnetron sputtering system. The structure, morphology and optical properties of the films were investigated by X-ray diffraction, atomic force microscopy and spectrophotometer, respectively. The experimental results indicated that the thickness affects drastically the structure, morphology and optical properties of the film. There exists a critical thickness of the film, dcri =2010 nm. The structure of the film remains amorphous as d < dcri. However, it becomes crystallized as d > dcri. The root mean square of surface roughness increases with increasing thickness as d > 1080 nm. Widths and depths of the holes on film surface increase monotonously with increasing thickness, and widths of the holes are larger than 1000 nm for the crystalline films. Refractive index increases with increasing thickness as d < dcri, while it decreases with increasing thickness as d > dcri. In addition, the extinction coefficient increases with increasing thickness as d > dcri.  相似文献   

14.
Urea-succinic acid crystals have been grown at room temperature from aqueous solution in the presence of maleic acid by a slow evaporation technique. The structural parameters were determined using powder X-ray diffraction (XRD) and found to have monoclinic symmetry (space group P21/m) with a=9.902, b=17.510, c=5.555 Å and α=γ=90°, β=96.46°. The transparency and optical analysis were carried out using UV-vis analysis. The optical band gap is found to be 4.71 eV. The presence of various functional groups was confirmed by FTIR analysis. The samples have shown piezoelectric behavior with a fairly good piezoelectric charge coefficient (d33) of 5 pC/N, when it is poled at 7 kV/cm. The hysteresis loop was plotted and the remnant polarization and coercive field were found to be 2.8 μC/cm2 and 4 kV/cm, respectively. The dielectric analysis was carried out as a function of temperature at various frequencies and the results were also discussed.  相似文献   

15.
Nd–Fe–B-type hard phase single layer films and nanocomposite Nd28Fe66B6/Fe50Co50 multilayer films with Mo underlayers and overlayers have been fabricated on Si substrates by rf sputtering. The hysteresis loops of all films indicated simple single loops for fixed Nd–Fe–B layer thickness (10 nm) and different FeCo layer thickness (dFeCo=1–50 nm). The remanence of these films is found to increase with increasing dFeCo and the coercivity decrease with increasing dFeCo. It is shown that high remanence is achieved in the nanocomposite multilayer films consisting of the hard magnetic Nd–Fe–B-type phase and soft magnetic phase FeCo with 20 nm?dFeCo?3 nm. The sample of maximum energy product is 27 MG Oe for dFeCo=5 nm at room temperature. The enhancement of the remanence and energy products in nanocomposite multilayer films is attributed to the exchange coupling between the magnetically soft and hard phases.  相似文献   

16.
The dielectric properties of MgO-Ta2O5 continuous composition spread (CCS) thin films were investigated. The MgO-Ta2O5 CCS thin films were deposited on Pt/Ti/SiO2/Si substrates by off-Axis RF magnetron sputtering system, and then the films were annealed at 350 °C with rapid thermal annealing system in vacuum. The dielectric constant and loss of MgO-Ta2O5 CCS thin films were plotted via 1500 micron-step measuring. The specific point of Ta2O5-MgO CCS thin film (post annealed at 350 °C) showing superior dielectric properties of high dielectric constant (k ∼ 28) and low dielectric loss (tan δ < 0⋅004) at 1 MHz were found in the area of 3-5 mm apart from Ta2O5 side on the substrate. The cation's composition of thin film was Mg:Ta = 0.4:2 at%.  相似文献   

17.
Nickel oxide thin films were successfully fabricated with various deposition time (td = 5, 10, and 15 min) on glass substrates using spray pyrolysis technique. The deposited films undergo thermal treatment at 350 °C for various annealing time (ta = 0, 15, 30 and 60 min). In this study, the effect of td and ta on film thickness was observed and their influence on structural, morphological and optical properties were investigated. The films deposited with td = 5 min showed amorphous structure while the films grown at higher deposition time became partially crystallized with preferred growth along (1 1 1) direction. Heat treatment carried out in air allowed us to tune the polycrystalline structure and the diffraction intensity at preferred peak increases with the increase in ta which is a consequence of better crystallinity. This was reflected in the AFM micrographs of the films which suggested that the thermal annealing (or increasing ta) facilitates the process of grain-growth, and improves the crystalline microstructure. The optical transmission of the films was found to vary with td and ta and thus film thickness. The thinner films show higher transparency in the UV–vis spectral region. The optical band gap was blue-shifted from 3.35 eV to 3.51 eV depending on ta. The effect of ta on the various optical constants of the NiO films has also been discussed.  相似文献   

18.
Zirconium dioxide thin films were deposited on 316L-stainless steel type substrates using DC unbalanced magnetron sputtering. The process parameter of this work was the target-to-substrate distance (dt-s), which was varied from 60 to 120 mm. The crystal structure and surface topography of zirconium dioxide thin films were characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The results demonstrate that all of the ZrO2 thin films are composed monoclinic phase. The film sputtered at short dt-s (60 mm) shows a rather heterogeneous, uneven surface. The grain size, roughness, and thickness of thin films were decreased by increasing dt-s. The bioactivity was assessed by investigating the formation of hydroxyapatite (Ca10(PO4)6(OH)2) on the thin film surface soaked in simulated body fluids (SBF) for 7 days. XRD and scanning electron microscopy (SEM) were used to verify the formation of apatite layers on the samples. Bone-like apatites were formed on the surface of the ZrO2 thin film in SBF immersion experiments. A nanocrystalline hydroxyapatite (HA) with a particle size of 2-4 μm was deposited. Higher crystallinity of HA on the surface was observed when the distance dt-s increased to more than 80 mm. Therefore, it seems that a dt-s greater than 80 mm is an important sputtering condition for inducing HA on the zirconia film.  相似文献   

19.
The structural, morphological and optical properties of CuAlS2 films deposited by spray pyrolysis method have been investigated. CuAlS2 in the form of films is prepared at different deposition conditions by a simple and economical spray pyrolysis method. The structural, surface morphology and optical properties of the films were analyzed by X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscope (AFM) and absorbance spectra, respectively. The films were polycrystalline, crystallized in a tetragonal structure, and are preferentially orientated along the (1 1 2) direction. Grain size values, dislocation density, and d% error of CuAlS2 films were calculated. The optical band gap of the CuAlS2 film was found to be 3.45 eV. The optical constants such as refractive index, extinction coefficient and dielectric constants of the CuAlS2 film were determined. The refractive index dispersion curve of the film obeys the single oscillator model. Optical dispersion parameters Eo and Ed developed by Wemple-DiDomenico were calculated and found to be 3.562 and 12.590 eV.  相似文献   

20.
This paper focuses the influence of porous morphology on the microstructure and optical properties of TiO2 films prepared by different sol concentration and calcination temperatures. Mesoporous TiO2 thin films were prepared on the glass substrates by sol-gel dip coating technique using titanium (IV) isopropoxide. Porous morphology of the films can be regulated by chemical kinetics and is studied by scanning electron microscopy. The optical dispersion parameters such as refractive index (n), oscillator energy (Ed), and particle co-ordination number (Nc) of the mesoporous TiO2 films were studied using Swanepoel and Wemple-DiDomenico single oscillator models. The higher precursor concentration (0.06 M), films exhibit high porosity and refractive index, which are modified under calcination treatment. Calcinated films of low metal precursor concentration (0.03 M) possess higher particle co-ordination number (Nc = 5.05) than that of 0.06 M films (Nc = 4.90) due to calcination at 400 °C. The lattice dielectric constant (E) of mesoporous TiO2 films was determined by using Spintzer model. Urbach energy of the mesoporous films has been estimated for both concentration and the analysis revealed the strong dependence of Urbach energy on porous morphology. The influence of porous morphology on the optical dispersion properties also has been explained briefly in this paper.  相似文献   

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