Measurement of vibration amplitude by an optical fiber-based moiré interferometer

A projected-fringe fiber-based moiré interferometer is proposed to measure the local amplitude vibration of a diffuse surface. The technique is based on an optical fiber interferometer which projects interference fringes on the object surface. The visibility of these carrier fringes is modulated by a function of local amplitude vibration. Full-field quantitative analysis is performed by analyzing the fringe pattern with a 2-D Fourier transform method. Theoretical details, and experimental results are presented.     

快速傅里叶变换与泽尼克模式拟合的条纹投影面形恢复算法

 针对条纹投影偏折法中需要多次迭代进行面形恢复,提出一种结合快速傅里叶变换（FFT）算法与泽尼克（Zernike）模式拟合的算法（FFT-尼克）。数值仿真结果表明,直接使用泽尼克模式拟合,需要迭代15次,用时1 min以上,而使用FFT-尼克算法,迭代5次已收敛到理想精度。在保证计算精度在纳米量级的情况下,计算时间也缩短了近2/3。     

Multiple-surface interference fringes analysis basing on wavelength-modulated phase shifting interferometry

Phase-shifting interferometry is widely used for high-precision surface measurements, but has difficulty in dealing with parallel optical plates. In this paper, an advanced method is proposed to simultaneously measure surface distributions of parallel optical plates from multiple surface interference fringes. The basic theory behind the technique is by applying wavelength-modulated phase shifting interferometry (WMPSI) to get enough frames of multiple surface interference fringes. In the procession of wavelength-modulated phase shifting, the phase variation for one point of the surface is traced and is processed by Fourier transform, and then the frequency spectrum of every surface can be separated from each other. Therefore, it allows extraction of front surface, back surface and thickness variation from multiple surface interference fringes with high precision.     

一种新的Fabry-Perot干涉条纹处理方法

介绍了一种提取Fabry-Perot(法布里-帕罗)干涉条纹圆心点坐标和条纹半径的新方法。首先对干涉图像依次进行二值化处理,对所得到的条纹强度曲线进行均平滤波和自适应滤波,根据条纹灰度值强度余弦函数分布的特点,对条纹灰度值数据进行最小二乘法拟合,获得条纹强度峰值坐标,通过精确的迭代算法,进而获得Fabry-Perot干涉条纹圆心点的坐标;然后再对干涉条纹进行圆周积分,从而可以确定每级Fabry-Perot干涉条纹的半径长度。该方法可提高计算精度,减小计算误差。     

Shape and slope measurement by source displacement in shearography

Shearography is a full field non-contact optical technique usually used to measure the gradient of the displacement of a surface subjected to thermal or mechanical loading. This paper describes the use of shearography for surface slope and shape measurement. Interferometric speckle patterns obtained before and after displacement of the optical source are correlated to yield correlation fringes which are, in general, a mixture of slope fringes and carrier fringes. This paper contains a full treatment of the sensitivity of slope fringes to the parameters; the illumination and the imaging geometry and the magnitude and the direction of the source displacement. The slope fringes are corrected for distortion, which is due to the necessary off-axis illumination, and are scaled using parameters calculated using a mathematical model. Experimentally generated phase-stepped slope fringes are unwrapped and integrated to recover the object shape.     

An automatic processing technique for accurate surface form measurement

A single shot algorithm using a Fizeau interferometer was used to measure the form profile of a spherical smooth surface by means of fringe thinning process, which plays an important role in fringe patterns analysis. In this paper, an automatic processing technique based on the fringe thinning process is presented. The circular interference fringe pattern of the spherical smooth surface captured by the Fizeau interferometer was corrected by using the flat fielding method and then processed. Based on the fringe thinning and the assignment of the fringe orders, the information on the fringe feature was recovered automatically and the interference wavefront was reconstructed by the Zernike polynomial fitting method. The results were compared with the results measured by Bünnagel method, and the results were in good agreement. This means that the single shot algorithm is reliable, fast, and less sensitive to vibration and turbulence in surface form measurements. Simulation fringes with the ray tracing technique were obtained to match the practical fringes.     

Measurement of pure curvature fringe distribution by using a double whole-field filtering technique

A double whole-field filtering technique to measure pure curvature fringe distribution of a deformed object is proposed. In this method, the slope fringes which are contained in the pattern of curvature fringes can be completely eliminated from the curvature fringes. Thus the pattern of pure curvature fringes with a good contrast can be obtained. Theoretical analysis and experimental results are given in this paper.     

Measurement of surface form deviation of the plane optical element using grid line method

A method for automatically measuring the surface form deviation of the plane optical element is presented. It uses the image pre-processing technique to obtain the centerlines of the interference fringes, the grid line technique to search the average fringe spacing and the maximum curvature of the interference fringes, and the normalization to obtain the value of surface form deviation of the optical element. The experimental results show that the measuring precision of the surface form deviation of the plane optical element reaches the value of 0.1 and the method improves the adaptation capability of processing the interference fringes, which indicates that the method can substitute the visual interpretation of interference fringes in high-noise workshop environment.     

基于无衍射光莫尔条纹的轴锥透镜锥角测量方法

为了准确地测量轴锥透镜锥角值,根据无衍射光同心圆环间距不随距离改变的特点和莫尔条纹放大的特性,提出了一种基于无衍射光莫尔条纹的轴锥透镜锥角的测量方法。当无衍射光束经分束器分光合束后形成莫尔条纹,平移其中一束光在图像传感器上的位置,实现莫尔条纹数量的变化,通过记录不同莫尔条纹下的中心距离计算出轴锥透镜锥角。实验以锥角为0.5°的轴锥透镜作为被测对象,与CMM测量结果进行比较,该文提出的方法相对测量误差近似为0.54%,重复性为0.86″,验证了该文方法测量轴锥透镜锥角的可行性。     

变线距光栅线密度的干涉测量

变线距光栅在同步辐射装置、激光核聚变装置上有着广阔的应用前景，它的制作和检测方法尚未成熟。用干涉法测量变线距光栅的线密度，给出了测量原理、实验中的光路、数据处理的方法、测量结果。在待测光栅表面，衍射光干涉条纹的数量和密度是入射光干涉条纹和倍增后光栅的刻线之差。采用共光路的方案，使光路具有很强的抗干扰能力。用中值滤波消除干涉图像中的干扰。针对不同的干涉条纹，讨论和比较了两种测量方法，提出相对密度不变性。证明了干涉法完全可以用于变线距光栅的线密度测量，并能达到一定的精度，初步解决了检测问题，认为这种方法也可以用于变线密度光栅的加工中。     

液面微幅波动的激光干涉测量

对于低频微幅的液面波动,提出了一种激光干涉测量方法.实验上观察到了清晰、稳定的激光干涉图样.干涉图样受到调制,光强在两边界位置达到极大,形成两个极亮条纹.干涉条纹被限制在两个极亮条纹之间的确定区域内.根据光干涉理论推导出了调制干涉条纹光强度、相邻条纹角宽度、干涉区域角宽度与液面波物理参量之间的解析关系,该理论分析与实验...     

基于优化电子散斑光谱的三维物体测量研究

用激光光束直接照射到测试表面,再用CCD采其变形前后表面散斑颗粒干涉形成的条纹,条纹图解析为测量点的位移量和变形量,进而得到其离面位移,在优化算法的时候采用π位相技术获取另一个π相移的变形条纹图像,将面内位移与离面位移分离,为了消除零级分量,让投影光栅移动1/2个周期.通过Matlab和四步位相算法给出了三维空间模型,得出变形后物体的离面位移数据.实验仿真数据表明其能够稳定地测量物体变形场三维分量,误差较低.     

基于干涉条纹图像对比法测量微位移

研究了基于迈克尔逊干涉条纹对比法测量微位移的实验。用He-Ne激光器、反射镜和分束镜组成的干涉光路,其中一个反射镜固定在被测物体上,通过被测物体的移动带动反射镜移动使干涉光路发生变化,从而导致干涉条纹的改变。在形成干涉条纹的位置利用线阵CCD采集干涉条纹图像,用序列图像对比的方法对图像进行处理和计算,得出被测物体的微位移。实验表明利用序列图像对比的方法测量微位移,方法切实可行、测量准确度高、测量的精度能够达到微米量级。     

一种基于结构光条纹投影的微小物体测量系统

为了通过结构光投影的方法测量微小物体,构建了一套微小物体三维形貌测量系统,视场范围可达1.8 cm×1.6 cm。这套测量系统利用了Light Crafter 4500数字投影组件的高速投影、立体显微镜的低畸变缩放、远心镜头的大景深与低畸变成像的特性。先利用立体显微镜对Light Crafter 4500投影的相移条纹图进行低畸变缩小,再投影到待测物体表面,采用配有远心镜头的相机同步记录受到物体表面形貌调制而发生形变的条纹,利用三步相移法计算出条纹对应的截断相位图,再根据可靠路径跟踪相位展开算法求取连续的相位分布,重建被测物体的三维表面形貌。实验成功重建了以BGA芯片为代表的微小物体表面三维形貌。实验结果表明,系统测量精度达到11 μm,系统的有效深度测量范围为700 μm。     

卡塞格林系统装调过程中高精度测角方法

为了能够准确测量同轴三反相机中次镜的倾斜量变化,提出一种新的角度测量方法,即用大口径干涉仪与经纬仪相结合进行测量。以主镜为测量基准,两镜相对倾角较小时,使用大口径干涉仪同时测量两镜的干涉条纹,相对倾斜角度过大时次镜无干涉条纹,加入一台经纬仪分别自准直于干涉仪和次镜,间接测量两镜相对夹角。通过模拟计算与实验验证表明,对于次镜组件倾角测量误差可以控制在0.5″以内。结果表明,该检测方法具有通用性强,测量精度高等特点,克服了传统检测方法测量精度不足的问题。     

一种用激光干涉测量光波波长的新方法

提出了一种利用激光干涉仪测量光波波长的方法。通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度,使相干光的光程差发生变化;利用干涉条纹与转过角度、透明玻璃厚度之间的关系,通过激光干涉实验能准确测量出光波的波长。     

球面的快速测量与非球面的快速拼接

利用立式车间用球面干涉仪实现比较法球面面形测量，一次调整好以后可以达到多片快速测量，避免复杂的调整，通过监示器看到光圈；并可以通过条纹扫描技术实现光圈数Ｎ及局部光圈数ΔＮ的自动客观判读；对于低陡度非球面的多块拼接，可以籍助“非球面特征干涉图”实现快速初步拼接，然后再用每个子孔径的相位探测实现整个孔径的拼接，并可以通过数字的测量与波面相减自动获得非球面的面形误差。     

双螺旋叠栅条纹检测光束准直性的两种方法

介绍双螺旋叠栅条纹检测光束准直性的基本原理,进一步就双螺旋叠栅条纹的特征参量与被测光束发散角(即光束准直精度)的关系进行分析和推导。在分析双螺旋叠栅条纹进行时,首先采用频域低通滤波提取纯叠栅条纹,然后提取纯叠栅条纹的特征参量。提出两种特征参量的提取方法,一种依次进行傅里叶变换计算相位信息的傅里叶变换方法,另一种是受传统时间相移算法启发而提出的空间相移算法,讨论了在两种方法中极坐标的重采样问题和相应的计算公式,并进行了计算机模拟。结果表明,傅里叶变换方法和空间相移算法实质都是获取叠栅条纹全场趋势的平均值,使最终光束发散角的检测具有很高的精度,对自成像条纹周期的检测误差在±2.8‰以内。     

基于单目视觉的矩形靶面弹着点测量

目前机器视觉技术广泛应用于弹着点坐标的测量领域,针对双目视觉技术标定、演算复杂的问题,提出一种基于单目视觉技术的弹着点测量方法.通过图像处理技术定位出靶面4个角点以及弹着点像素坐标,采用矩形P4P方法解算出靶面坐标相对于相机坐标系的位姿,根据单目视觉成像原理计算出弹着点在靶面的实际坐标.根据该方法成功测量出了实验中靶面...     

斜率和曲率的显色云纹及其级数识别

本文提出了用白光获得板面曲率的显色云纹方法。理论和实验分析说明，曲率和斜率的显色云纹可用于其级数的自动识别。本方法具有不必经过计算，实时确定条纹级数的优点，对于曲率和斜率测量方法和系统的完善具有实际意义。