全固态高压脉冲电源在半导体光刻光源中的应用

简要回顾了半导体光刻的发展历程以及准分子激光作为光源在半导体光刻中的需求。简述了高压脉冲电源的基本原理及应用,介绍了全固态高压脉冲电源的结构和特点。着重阐述了全固态高压脉冲电源在光刻用准分子激光器和EUV光源中的应用。大功率半导体开关结合多级磁脉冲压缩开关的全固态脉冲电源有效替代传统基于闸流管的高压脉冲电源,实现了光刻光源高重复频率下的长寿命运行。介绍了中国科学院安徽光学精密机械研究所近十年来,在准分子激光器的全固态高压脉冲电源研究上的相关进展。最后,对未来半导体光刻光源对全固态脉冲电源的需求进行了展望。     

Photoconductive semiconductor switches

Optically activated GaAs switches operated in their high-gain mode are being used or tested for pulsed power applications as diverse as low-impedance, high-current firing sets in munitions; high impedance, low-current Pockels cell or Q-switch drivers for lasers; high-voltage drivers for laser diode arrays; high-voltage, high-current, compact accelerators; and pulsers for ground penetrating radar. This paper will describe the properties of high-gain photoconductive semiconductor switches (PCSS), and how they are used in a variety of pulsed power applications. For firing sets, we have switched up to 7 kA in a very compact package. For driving Q switches, the load is the small (30 pF) capacitance of the Q switch which is charged to 6 kV. We have demonstrated that we can modulate a laser beam with a subnanosecond rise time. Using PCSS, we have demonstrated gain switching a series-connected laser diode array, obtaining an optical output with a peak power of 50 kW and a pulse duration of 100 ps. For accelerators, we are using PCSS to switch a 260 kV, 60 kA Blumlein. A pulser suitable for use in ground-penetrating radar has been demonstrated at 100 kV, 1.3 kA. This paper will describe the specific project requirements and switch parameters in all of these applications, and emphasize the switch research and development that is being pursued to address the important issues     

高重复频率脉冲功率技术及其应用:（4）半导体开关的特长与局限性

综合叙述了功率半导体开关在高重复频率脉冲功率技术中的意义和使用方法。并通过与传统脉冲功率开关的比较，归纳了半导体开关的特长和缺陷。在举例说明了半导体开关的控制方法以后，介绍了几种有效提高半导体开关工作能力的电路方法,包括采用多个器件的串联与并联、电压叠加、开关器件的组合与互补等方法。     

爆炸驱动铁电体电源快脉冲产生技术

以发展轻小型高电压脉冲驱动源为出发点,提出采用爆炸驱动铁电体作为初级电源,通过电感储能与电爆炸丝断路开关进行脉冲压缩和功率放大,探索基于爆炸驱动铁电体电源的小型化高电压快脉冲产生技术。从爆炸驱动铁电体电源的全电路模型和铁电陶瓷材料特性出发,通过理论分析和仿真研究,分别对大电流模式和高电压模式的爆炸驱动铁电体电源的物理参数进行了设计,获得了铁电体电源工作模式和电路参数对产生高电压脉冲的影响规律,认为铁电体电源高电压模式更适合于与断路开关技术结合产生高电压快脉冲,并通过实验对该技术原理进行了验证。实验中铁电体电源输出电流约360 A、脉宽约3.8 μs,对17.5 nF电容器充电至75 kV,电容器放电后在电爆炸断路开关中产生峰值大于12 kA的脉冲电流,最终在X射线二极管负载上获得了电压峰值大于180 kV、前沿3 ns、脉宽30 ns、电流峰值3.4 kA的高电压快脉冲。     

基于磁开关的全固态、高功率、长脉冲发生器的初步研究

大多数电容储能型脉冲功率装置的共同特点是采用了气体开关, 由于气体绝缘恢复的限制和电极的烧蚀, 使得其重复频率都不太高, 而且寿命有限. 而目前广泛研究的磁脉冲压缩技术在脉冲功率系统的长寿命、高平均功率和高重复频率运行方面具有很大的应用前景. 通过对BOOST电路、LC谐振电路和磁脉冲压缩电路详细的理论分析和计算机模拟, 设计了由BOOST电路, LC谐振电路, 脉冲变压器, 磁压缩系统, 负载五大部分组成的脉冲发生器电路系统模型, 使用Pspice软件对系统进行了模拟、优化, 得到了电压幅值为55kV, 脉宽为500ns的输出脉冲.     

半导体开关在脉冲功率技术中的应用

国内外脉冲功率技术的一个重要的发展趋势, 即高功率、长脉冲、高重频以及小型化, 由此以半导体器件为基础的全固态脉冲功率技术得到了广泛的关注和应用; 文章以晶闸管(SCR)、绝缘门双极晶体管(IGBT)以及半导体断路开关(SOS)的应用为例进行了说明; 对用晶闸管控制的充电系统、IGBT应用于Marx发生器和脉冲变压器驱动源以及半导体断路开关的应用做了较为详细的原理性说明, 并给出了一些实验结果. 半导体开关技术的应用在一定程度上解决了传统脉冲功率发生器装置中存在的短寿命, 低重复频率, 稳定性差等缺点, 具有广泛的应用前景.     

小间隙异面电极结构的光导开关

介绍了应用于介质壁加速器的小间隙异面电极结构的光导开关。所用光导开关为异面结构的砷化镓（GaAs）光导开关,电极间隙5 mm,偏置电压为15~22 kV脉冲高压,工作在非线性（高增益）模式,由半导体激光器产生的脉冲激光触发。脉冲激光的中心波长为905 nm,脉冲宽度（FWHM）约20 ns,前沿约3.1 ns,抖动小于200 ps,峰值功率约90 W。实验结果表明：光导开关的偏置电压较低时,开关寿命较长,导通性能较差;偏置电压较高、驱动脉冲激光功率较大时,开关导通性能较好,寿命较短。     

A compact high-voltage pulse generator using a rotary airhole sparkgap

A pulsed-corona-discharge nonthermal plasma technique offers the advantages of energy efficiency and capability for the simultaneous removal of coexisting pollutants. The key to success in a nonthermal plasma approach is to produce a corona discharge in which the bulk of the electrical energy goes into the production of energetic electrons, rather than into gas molecules heating. By driving the nonthermal plasma reactor with very short pulses of high-voltage, short-lived corona discharge plasmas are created that consist of energetic electrons, which in turn produce the radicals and ozone responsible for the decomposition of the toxic molecules. Because of the short lifetime of the pulsed corona discharge, little electrical power is dissipated in movement of heavy molecule ions in the processing region, thus avoiding heating the gas and providing good electrical energy efficiency.A high-voltage pulse generator with a rotary airhole sparkgap, instead of a conventional rotary ball sparkgap, has been proposed. Its rise and fall time characteristics to be used as a smart pulse generator for pulsed corona discharge-type nonthermal plasma reactor were investigated. Parametric studies showed that the proposed airhole sparkgap had a very fast rise time, very short fall time, very low-and-stable breakdown voltage, and reliable pulse repetition characteristics, compared with the conventional rotary ball sparkgap.     

Pseudospark switches-technological aspects and application

We report results of the development of fast closing switches, so-called pseudospark switches, at Erlangen University. Two different parameter regimes are under investigation: medium power switches (32 kV anode voltage, 30 kA anode current and 0.02 C charge transfer per shot) for pulsed gas discharge lasers and high power switches (30 kV anode voltage, 400 kA anode current and 3.4 C charge transfer per shot) for high current applications. The lifetime of these switches is determined by erosion of the cathode. The total charge transfer of devices with one discharge channel is about 220 kC for the medium and 27 kC for the high power switch. At currents exceeding 45 kA a sudden increase in erosion rate was observed. Multichannel devices are suited to increase lifetime as the current per channel can be reduced. Successful experiments with radial and coaxial arrangements of the discharge channels were performed. In these systems the discharge channels move due to magnetic forces. A skilful use of this phenomena will result in a considerably increase of switch lifetime. Multigap devices enable an increase of anode voltage. A three gap switch has run reliably at an anode voltage of 70 kV     

小间隙异面电极结构的光导开关

介绍了应用于介质壁加速器的小间隙异面电极结构的光导开关。所用光导开关为异面结构的砷化镓（GaAs）光导开关,电极间隙5 mm,偏置电压为15~22 kV脉冲高压,工作在非线性（高增益）模式,由半导体激光器产生的脉冲激光触发。脉冲激光的中心波长为905 nm,脉冲宽度（FWHM）约20 ns,前沿约3.1 ns,抖动小于200 ps,峰值功率约90 W。实验结果表明:光导开关的偏置电压较低时,开关寿命较长,导通性能较差;偏置电压较高、驱动脉冲激光功率较大时,开关导通性能较好,寿命较短。     

基于光导开关及层叠Blumlein线的纳秒脉冲源

设计了一台层叠Blumlein线型脉冲功率源。该脉冲源以平板型Blumlein线为储能器件,使用4个GaAs光导开关作为脉冲形成开关,通过4级Blumlein线层叠结构以获得更高输出电压。分别使用10 mm及3 mm间隙光导开关进行实验,比较了PSpice电路仿真与实验结果。实验测试显示,10 mm开关充电23.5 kV时上升沿较大,可能的原因是偏置电场较低时开关导通时间较长。测试了不同工作电压下功率源的输出电压,结果显示:在10 mm间隙开关条件下,充电23.5 kV时,负载上得到了53 kV的高压脉冲输出;3 mm开关充电13.9 kV时输出电压39.4 kV,输出效率70%。实验结果表明, 随着工作场强的提高,电压输出效率呈现先下降后上升最终趋于饱和的趋势。     

基于光导开关及层叠Blumlein线的纳秒脉冲源

设计了一台层叠Blumlein线型脉冲功率源。该脉冲源以平板型Blumlein线为储能器件,使用4个GaAs光导开关作为脉冲形成开关,通过4级Blumlein线层叠结构以获得更高输出电压。分别使用10 mm及3 mm间隙光导开关进行实验,比较了PSpice电路仿真与实验结果。实验测试显示,10 mm开关充电23.5 kV时上升沿较大,可能的原因是偏置电场较低时开关导通时间较长。测试了不同工作电压下功率源的输出电压,结果显示：在10 mm间隙开关条件下,充电23.5 kV时,负载上得到了53 kV的高压脉冲输出;3 mm开关充电13.9 kV时输出电压39.4 kV,输出效率70%。实验结果表明, 随着工作场强的提高,电压输出效率呈现先下降后上升最终趋于饱和的趋势。     

用光电导开关产生稳幅ps量级时间晃动超快电脉冲的研究

报道了用半绝缘GaAs光电导开关产生电压幅值稳定、ps量级时间晃动超快电脉冲的实验结果.分别用ns，ps和 fs激光脉冲触发GaAs光电导开关的结果表明，在低电场偏置下，电极间隙为1 mm的GaAs光电导开关可以产生触发时间晃动小于10 ps、电压幅值变化小于1.2 %、亚ns量级脉冲宽度的稳定超短电脉冲.分析了触发光脉冲能量起伏对光电导开关产生超快电脉冲电压幅值的影响，指出通过控制光电导开关的触发条件和对开关的优化设计，就可以获得电压幅值稳定、时间晃动在ps量级的超快电脉冲. 关键词： 光电导开关 超快电脉冲 电压幅值稳定性 时间晃动     

高功率重复频率Marx型脉冲功率源小型化技术研究进展

传统的高功率重复频率脉冲功率源通常以低电压储能、升压、高压脉冲形成线、输出的顺序工作。因而系统至少包括低压储能和高压脉冲形成线两个储能环节,同时高压脉冲形成线的体积随着电压的升高快速增长。针对这些问题,课题组提出了一种高功率重复频率Marx型脉冲功率源小型化研究的设计思路和实现方式,并开展了相关技术研究。主要介绍了课题组在关键技术上取得的重要进展,包括高储能密度的储能/脉冲成形一体化技术、低抖动重复频率气体开关技术、低抖动高能触发技术、紧凑型Marx高压串叠技术等一系列关键技术。同时介绍了课题组研制的几种典型紧凑结构重复频率Marx型脉冲功率装置：同轴结构快Marx发生器、基于薄膜介质线的脉冲功率源、模块化低阻抗紧凑型Marx发生器、20 GW高功率重复频率脉冲驱动源。通过探讨关键技术研究及其发展现状,为未来脉冲功率源小型化研究的发展和应用方向提供参考。     

Research on electrical pulse of 20-kV/30-Hz GaAs photoconductive switches

Photoconductive semiconductor switches (PCSSs) are widely used in high power ultra-wideband source applications and precise synchronization control due to their high power low-jitter high-repetition-frequency. In this letter, a 14-mm gap semi-insulating GaAs PCSS biased under 20 kV is triggered by a 1064-nm laser with a repetition frequency of 30 Hz. Although the trigger condition is greater than the threshold of the lock-on effect, the high gain mode is not observed. The results indicate that the high gain mode of the PCSS is quenched by decreasing the remnant voltage of pulsed energy storage capacitor.     

Application of a ferroelectric plasma cathode as a high-current switch

In this paper the parameters of two types of high-current switches based on ferroelectric BaTiO₃ ignition are presented. Both types of switches showed a reliable and controllable operation with a repetition rate of several Hz. The first type is a vacuum two-electrode switch ignited by the plasma which is generated by a BaTiO₃ cathode. This type of switch was tested in the voltage range of 3-25 kV and switched current amplitude of 2-15 kA with either negative or positive polarity of the high-voltage electrode. The second type is a BaTiO₃ surface flashover strip-like switch ignited by a driving pulse which has an amplitude of several kV. It was shown that the application of the driving pulse (>10 kV) leads to the appearance of many non-complete surface discharges which transform further to a multi-channel discharge. This type of switch was tested in the voltage range of 1-25 kV and current amplitude of 0.5-15 kA. The design of the switches, their lifetime, the time jitter and the parameters of the switched current for different discharge conditions are presented. Received 5 November 2001     

20GW低阻负载电感储能功率调节装置研究

 对电感储能/电爆炸丝断路开关功率调节系统进行了数值模拟，研制了输出峰值功率大于20GW的小型化低阻负载电感储能/电爆丝断路开关功率调节装置。实验结果表明：以电容器作为初始能源，在6~10Ω电阻负载上输出脉冲电压大于400kV、脉冲电流50~60kA，峰值功率大于20GW，能量转换效率大于30%。     

20GW低阻负载电感储能功率调节装置研究

对电感储能/电爆炸丝断路开关功率调节系统进行了数值模拟,研制了输出峰值功率大于20GW的小型化低阻负载电感储能/电爆丝断路开关功率调节装置。实验结果表明：以电容器作为初始能源,在6~10Ω电阻负载上输出脉冲电压大于400kV、脉冲电流50~60kA,峰值功率大于20GW,能量转换效率大于30%。     

全固态电感储能形成线纳秒短脉冲功率调制器北大核心CSCD

全固态电感储能型脉冲形成线调制器是实现高重复频率、电压高增益和短脉冲输出的一种全新方案。但开关非理想的动态特性和传输线固定的物理空间尺寸限制,难以实现高压短脉冲的产生和调控。为解决上述难题,通过电磁场分析建立了碳化硅场效应器件开关驱动模型,发现高速驱动和开关器件低寄生参数能有效改善开关动态特性,提出了板上高速开关及驱动集成设计解决方案。基于波过程分析和多开关时序逻辑控制理论,提出多开关削波电路拓扑方法和主动负载阻抗调制技术。实验结果表明,该调制器可产生上升时间2.1 ns,下降时间3.5 ns,脉冲宽度5.1 ns的方波短脉冲,并且脉冲宽度5~20 ns连续可调。10级叠加后验证了调整器高压能力,初级储能充电电压25 V时,电压增益可达336倍,重复频率200 kHz。     

基于磁开关技术的长脉冲驱动源初步研究

基于磁开关技术提出了一种高功率长脉冲驱动源方案,主要包括脉冲变压器、磁脉冲压缩、低阻抗脉冲形成网络、磁开关类型主开关,以及感应电压叠加器等关键子系统;研制了各关键子系统并开展了单独的实验调试,基于跑道型磁芯制作了闭环磁芯脉冲变压器,采用硬连接绕组方式制作了方便调节的两级磁压缩系统,利用陶瓷电容器制作了圆周对称的Blumlein型低阻抗脉冲形成网络,配合低阻抗脉冲形成网络研制了磁开关类型主开关,基于单端口馈电和角向传输线技术建立了四级IVA实验装置;在上述关键子系统调试基础上,开展了全系统的初步联合实验,验证了技术方案。