High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

High throughput and low cost fabrication techniques in the sub-micrometer scale are attractive for the industry. Laser interference lithography (LIL) is a promising technique that can produce one, two and three-dimensional periodical patterns over large areas. In this work, two- and four-beam laser interference lithography systems are implemented to produce respectively one- and two-dimensional periodical patterns. A high-power single pulse of ∼8 ns is used as exposure process. The optimum exposure dose for a good feature patterning in a 600 nm layer of AZ-1505 photoresist deposited on silicon wafers is studied. The best aspect ratio is found for a laser fluence of 20 mJ/cm². A method to control the width of the sub-micrometer structures based on controlling the resist thickness and the laser fluence is proposed.     

利用干涉光刻技术制备LED表面微纳结构

为了制备大面积周期性微纳米结构以提高LED的发光效率,建立了劳厄德(Lloyd)干涉光刻系统。简单分析了该干涉光刻系统的工作原理,并介绍了利用干涉曝光工艺制备一维光栅、二维点阵、孔阵列等纳米结构图形的具体实验过程。最后对纳米图形进行结构转移,制备出了金属纳米结构。实验结果表明:利用劳厄德干涉光刻系统,可以在20 mm×20 mm大小的ITO衬底上稳定制备出周期为450 nm的均匀光栅或二维点阵列图形结构,它们的占空比也是可以调节变化的。     

Effect of added homopolymer on structures of thin films of PS-b-PDMS/PS mixture under solvent vapor annealing

Self assembly of poly(styrene-b-dimethylsiloxane) (PS-b-PDMS) followed by reactive ion etching technique is a promising method for fabricating periodical silica nanopatterns and can be applicable for device fabrication on nanoscale. We demonstrated a technologically useful way to control the inorganic silica nanostructures in thin films by directly mixing asymmetric (PS-b-PDMS) diblock copolymer with homopolymers of majority component, polystyrene (PS) under solvent vapor annealing followed by UV/O₃ treatment. The effects of molecular weight and volume fraction of added homopolymer (PS) on morphology and size of the nanostructure of blends have been carefully investigated by atomic force microscopy. Different morphology transitions observed on the ordering film surface by atomic force microscopy (AFM) are associated with kinetics of phase evolution with respect to homo-PS with different molecular weight. The periodic spacings and dimensions of the microdomains were readily tuned at the same time, just by adjusting the molecular weight and volume fraction of the blended homopolymer.     

Experimental and theoretical evaluation of wettability on micro/nano hierarchically engineered surfaces based on robust micro-post-arrayed- and highly ordered nano-rippled-structures

This paper reports a simple approach for demonstrating a micro/nano hierarchical surface, ensuring both geometrical regularity and mechanical stability, for improving the hydrophobicity. The proposed dual-scale hierarchical surfaces were realized simply by combining the highly self-ordered ripple-like nano patterns with the robust micro-post arrays, based on the cost-effective nonlithographic chemical oxidation process and well-established microfabrication technologies. The wettability of the proposed nano-scale mono- and micro/nano dual-roughened surfaces was evaluated by measuring the apparent contact angles (ACAs), and analyzed theoretically with analytic models based on the Wenzel, Cassie, and combined wetting theories. Through experimental and theoretical observations, it was found that the proposed micro/nano hierarchical structures can improve the wetting property and the superhydrophobic robustness of high- and low-density micro-post arrayed surfaces, respectively.     

A simple fabrication method for mechanically robust superhydrophobic surface by hierarchical aluminum hydroxide structures

Superhydrophobic surfaces with uniformly superhydrophobic surface where nano-scale structures were fabricated by alkali surface modification method and self-assembled monolayer coating. To enhance mechanical durability of the superhydrophobicity, we propose the fabrication process for dual-scale hierarchical structures combining both microstructure via sandblasting techniques and the nanostructured aluminum hydroxide layer. The superhydrophobic surfaces fabricated by both methods exhibited a high water contact angle and very low contact angle hysteresis. By forming the hierarchical structure, the mechanical durability of superhydrophobic aluminum hydroxide surface was improved. The resulting hierarchical structures are suitable for diverse applications of aluminum in various industrial areas, including self-cleaning, anti-frosting, and microfluidic devices for rigorous environments.     

Phase separating bulk metallic glass: a hierarchical composite

Phase separating systems present a unique opportunity for designing composites with hierarchical microstructure at different length scales. We report here our success in synthesizing phase separating metallic glasses exhibiting the entire spectrum of microstructural possibilities expected from a phase separating system. In particular, we report novel core shell and hierarchical structures of spherical glassy droplets, resulting from critical wetting behavior and limited diffusion. We also report synthesis of a bulk phase separating glass in a metallic glass system. The combination of unique core shell and hierarchical structures in metallic glass systems opens a new avenue for the microstructure design of metallic glasses.     

Electronic structure of regular bacterial surface layers

We report photoemission and near-edge x-ray absorption fine structure measurements of the occupied and unoccupied valence electronic states of the regular surface layer of Bacillus sphaericus, which is widely used as the protein template for the fabrication of metallic nanostructures. The two-dimensional protein crystal shows a semiconductorlike behavior with a gap value of approximately 3.0 eV and the Fermi energy close to the bottom of the lowest unoccupied molecular orbital. We anticipate that these results will open up new possibilities for the electric addressability of biotemplated low-dimensional hybrid structures.     

三光束飞秒激光干涉在GaP,ZnSe表面诱导二维复合纳米-微米周期结构

报道了三光束飞秒激光干涉在GaP和ZnSe晶体表面诱导二维复合纳米-微米周期结构.改变三束光的偏振组合方式,可以得到不同的纳米-微米复合结构.理论计算了相应偏振条件下光场强度分布、椭偏度分布和偏振方向分布.实验和理论计算结果表明,烧蚀斑上的微米长周期结构是由三光束干涉的强度花样决定,短周期纳米结构是由光场的偏振干涉花样决定.这些研究在纳米材料制备、超高密度光存储以及材料特性周期性调制等方面有很大的应用前景.     

A facile approach for fabrication of underwater superoleophobic alloy

Superoleophobicity developed by creating roughness at multiple scales or lowering the surface energy has drawn extensive attention for technological applications. Currently, most methods for fabrication of superoleophobic surfaces employ either the complicated manufacture of micro/nano structures or delicate chemical decorations. Here, the sharp wetting transition from an oleophilic state to an oleophobic one has been practically realized, and the mechanism successfully interpreted. The underwater superoleophobic surfaces are newly realized and successfully controlled by subtly tuning the surface morphology of the alloy by practical corrosion plus a naturally obtained, stable, high-energy inorganic coating layer which induces the sharp wetting transition from oleophilic state to oleophobic state. The contact angle (CA) variations are quantitatively analyzed based on the wetting model by employing a roughness geometrical structure and a corrosion mechanism, which agree well with the measured results. Additionally, the dependence of the roughness on the corrosion procedure is modeled microscopically. Our method uncovers a facile fabrication protocol for optimum underwater superoleophobic surfaces by modifying the microstructures of alloy surfaces in the manufacturing process, which furthermore offers significant insights into the design and creation of other novel antifouling materials.     

Surface Plasmon Polaritons of Two-Dimensional Three-Order Dendritic Structures

We study surface plasmon polaritons excited on two-dimensional three-order dendritic structures. Previous studies show that split ring resonators (SRRs)
can be used to obtain magnetic resonance, thus sustaining surface waves behaving like surface plasmon polaritons (SPPs). In this paper, we obtain detailed results on surface plasmon polaritons of several different grating structures and theoretically prove that this kind of structures can sustain SPPs. Besides, since dendritic structures can be fabricated by double template-assisted electrochemical deposition, it is worth noting that fabrication of SPP-based materials might be much easier.     

Fabrication of micro-gratings on Au-Cr thin film by femtosecond laser interference with different pulse durations

We encoded surface relief micro-gratings on Au-Cr thin films using two-beam interference of femtosecond laser pulses with the durations from 25 fs to 70 fs. The dependence of the fabrication quality on the pulse duration has been investigated both numerically and experimentally. The results revealed that the shorter pulses were preferable to prepare periodical microstructures with minimal ablation fringe width and satisfied fabrication quality. This work has potential applications on periodic functional microstructures fabrication for ultra-fine processing and modification on various materials, especially for intractable materials.     

Manipulation of cross-linked micro/nanopatterns on ZnO by adjusting the femtosecond-laser polarizations of four-beam interference

We report the fabrication of cross-linked micro/nanopatterns on ZnO by adjusting the femtosecond-laser polarizations of four-beam interference. The micro/nanopatterns are composed of two types of patterns with vertically oriented and horizontally oriented ripples, respectively. The relative locations, ablation depths and the nanoripple distributions of the two patterns can be manipulated by adjusting the laser polarizations. Theoretical calculations of the interference patterns indicate clearly that the micropatterns are determined by the interferential intensity patterns, while the nanopatterns depend on the interferential polarization patterns. The micro/nanopatterns have potential applications in micro-optical polarization diffraction elements by virtue of femtosecond-laser-induced anisotropy.     

微纳复合结构表面稳定润湿状态及转型过程的热力学分析

自然界中的微纳复合结构超疏水表面由于其独特的润湿性质引起了人们的广泛关注, 大量实验研究表明了仿生人工微纳复合结构表面润湿性能的优越性, 然而液滴在微纳复合结构表面的润湿状态和转型过程的理论研究还并不完善. 本文首先用热力学方法分析了液滴在微纳复合结构表面可能存在的所有状态(四种稳定润湿状态和五种亚稳态到稳定态转型中的过渡态), 推导出了相应的能量表达式及表观接触角方程; 基于最小能量原理, 确定液滴在微纳复合结构表面的稳定状态, 较以往模型相比, 能够更好的预测已有的实验结果; 其次研究了微纳结构尺寸对稳定润湿状态和亚稳态到稳定态转型过程的影响; 最后提出了微纳复合结构表面设计原则, 即确定“超疏水稳定区”尺寸范围, 为超疏水表面的制备提供理论依据.     

Antireflective properties of disordered Si SWSs with hydrophobic surface by thermally dewetted Pt nanomask patterns for Si-based solar cells

We have theoretically and experimentally investigated the antireflective properties of the disordered subwavelength structures (SWSs) with a hydrophobic surface on silicon (Si) substrates by an inductively coupled plasma (ICP) etching in SiCl₄/Ar plasma using thermally dewetted platinum (Pt) nanopatterns as etch masks for Si-based solar cells. The Pt thin films on the SiO₂/Si surface were properly changed into the optimized dot-like nanopatterns via the thermal dewetting by rapid thermal annealing process. The antireflection properties were definitely affected by the etched profile of SWSs which can be controlled by the conditions of etching process. For the tapered Si SWS with a high average height of 724 ± 78 nm, the reflectance was significantly reduced below 5% over a wide wavelength range of 350-1030 nm, leading to a relatively low solar weighted reflectance of 2.6%. The structure exhibited reflectances less than 14.8% at wide incident angles of 8-70°. The hydrophobic surface with a water contact angle of 113.2° was obtained. For Si SWSs, the antireflective properties were also analyzed by the rigorous coupled-wave analysis simulation. These calculated results showed similar behavior to the experimental results.     

Synthesis of Fluorinated Graphene Oxide and its Amphiphobic Properties

The richly functionalized basal plane bonded to polar organic moieties makes graphene oxide (GO) innately hydrophilic. Here, a methodology to synthesize fluorinated graphene oxide by oxidizing the basal plane of fluorinated graphite, allowing for tunable hydrophobicity of GO, is reported. Fluorine exists as tertiary alkyl fluorides covalently bonded to graphitic carbons, and using magic‐angle spinning (MAS) ¹³C NMR as a primary tool chemical structures for the two types of synthesized fluorinated graphene oxides (FGOs) with significantly different fluorine contents are proposed. The low surface energy of the C–F bond drastically affects GO's wetting behavior, leading to amphiphobicity in its highly fluorinated form. Ease of solution processing enables the fabrication of inks that are spray‐painted on various porous/non‐porous substrates. These coatings maintain amphiphobicity for solvents with surface tensions down to 59 dyn/cm, thus bypassing existing lithographic means to create similar surfaces. The approach towards fluorinating GO and fabricating graphene‐based surfaces with tunable wettability opens the path towards unique, accessible, carbon‐based amphiphobic coatings.     

Superhydrophobic properties of a hierarchical structure using a silicon micro-tip array decorated with ZnO nanowires

In this study, wetting properties of a hierarchical structure using a silicon micro-tip array covered with ZnO nanowire are characterized, and compared with hierarchical structures composed of micro-pillars for micro-scale roughness. The superhydrophobicity of a surface can be efficiently enhanced by using a micro-tip array, compared with a micro-pillar structure, because a micro-tip structure with high aspect ratio and small apex radius can significantly reduce fractions of liquid droplet area in contact, maintaining the droplet in the regime of the Cassie state. The micro-tip array was simply fabricated by combining anisotropic and isotropic silicon etching processes with one-step photolithography and a single etch mask. The measured height and aspect ratio of the fabricated micro-tip was around 40 μm and 8, respectively, when the center-to-center distance between micro-tips was 30 μm. The maximum CA on the hierarchical surface using the micro-tip array was measured to be 165.0 ± 2.3° with a period of 30 μm, while the hierarchical surface using the micro-pillar array showed the maximum CA of 158.6 ± 1.1° with 20 μm-diameter and 70 μm-gap between micro-pillars. The smallest CAH on the hierarchical micro-tip array was measured to be 5.0 ± 0.3° for the center-to-center distance between micro-tips of 30 μm.     

Nonequilibrium wetting transition in a nonthermal 2D Ising model

Nonequilibrium wetting transitions are observed in Monte Carlo simulations of a kinetic spin system in the absence of a detailed balance condition with respect to an energy functional. A nonthermal model is proposed starting from a two-dimensional Ising spin lattice at zero temperature with two boundaries subject to opposing surface fields. Local spin excitations are only allowed by absorbing an energy quantum (photon) below a cutoff energy E _c . Local spin relaxation takes place by emitting a photon which leaves the lattice. Using Monte Carlo simulation nonequilibrium critical wetting transitions are observed as well as nonequilibrium first-order wetting phenomena, respectively in the absence or presence of absorbing states of the spin system. The transitions are identified from the behavior of the probability distribution of a suitably chosen order parameter that was proven useful for studying wetting in the (thermal) Ising model.     

Photonic crystal surface mode microcavities

Our recent research on surface mode optical microcavities based on two-dimensional photonic crystals (PhCs) was reviewed in this paper. We presented the design, fabrication and characterization of high quality (Q) factor surface mode microcavities. Realizations of these PhCs were based on both amorphous silicon-on-insulator (SOI) structures and crystalline SOI structures.     

Spreading of a drop on a contaminated substrate

Most wetting or spreading problems are treated with surface and interfacial free energies taken as constants for the system in question. We consider here the case where a two-dimensional drop (ribbon) is deposited on a solid substrate bearing a very fine layer of a contaminant which modifies the effective drop/solid interfacial free energy. As the contaminant diffuses into the drop, the interfacial free energy, and thus the capillary balance, evolve. This has strange effects on wetting behaviour, including causing a wetting `overshoot'. Possible applications are briefly discussed.     

单分散“核-卫星”金纳米结构的DNA控制组装：一种新型的纳米分级组装模块

报道了一种单分散“核-卫星”纳米金簇状结构的构造方法,不但可以有效调节卫星粒子的数目,还能实现核与卫星粒子间距离的准确控制. 利用DNA分子高度可控的程序化自组装性能,通过合理控制组装过程中核与卫星粒子表面的DNA修饰密度以及不同金纳米粒子的化学计量比,实现了单分散核-卫星结构的高产率组装,结合使用凝胶电泳这一高效的纳米分离技术实现了目标产物的分离. 该方法保证了卫星粒子表面极低的DNA覆盖率,使其与蛋白分子中的巯基基团具有较强的化学亲和作用,使得金纳米粒子在蛋白功能化石墨烯表面的二维层次化自组装得以实现.