利用3D打印技术制备太赫兹器件

高性能的太赫兹器件在控制太赫兹波方面起到重要的作用,因此寻求一种简单有效的太赫兹器件加工方案非常必要。本文以太赫兹波导和太赫兹滤波器为例,分别选用Kagome型光子晶体结构的波导和一维光子晶体结构的滤波器,运用商用的3D打印机加工样品,并采用透射式太赫兹时域光谱系统对样品的参数进行测量。实验结果表明:加工的波导在0.2~1.0 THz范围内传输损耗平均值约为0.02 cm~(-1),最小值可达到0.002 cm~(-1),且可运用机械拼接的方式将多个波导进行简单的连接从而获得更长的波导而不引起严重的损耗;滤波器的透射谱在0.1~0.5 THz之间有两个明显高损耗带;这两组实验结果均与理论预计非常接近。本文运用太赫兹波导和滤波器的实例证实了3D打印技术加工太赫兹器件的可行性,将会成为获取性能可控、价格低廉的太赫兹器件的有效途径。     

亚微米投影光刻物镜光学制造技术

本文报告亚微米光刻５倍ｇ线与ｉ线投影光刻物镜的光学制造技术。讨论超高精度要求的球面曲率半径、透镜中心厚度、球面面形与透镜偏心差等各项指标的综合控制技术与检测方法。着重介绍了作者所发展的大口径高精度双胶合透镜的计算机辅助无变形胶合技术。给出了加工检测结果以及镜头的主要性能指标。     

Dye-sensitized solar cell module realized photovoltaic and photothermal highly efficient conversion via three-dimensional printing technology

Three-dimensional(3D) printing technology is employed to improve the photovoltaic and photothermal conversion efficiency of dye-sensitized solar cell(DSC) module. The 3D-printed concentrator is optically designed and improves the photovoltaic efficiency of the DSC module from 5.48% to 7.03%. Additionally, with the 3D-printed microfluidic device serving as water cooling, the temperature of the DSC can be effectively controlled, which is beneficial for keeping a high photovoltaic conversion efficiency for DSC module. Moreover, the 3D-printed microfluidic device can realize photothermal conversion with an instantaneous photothermal efficiency of 42.1%. The integrated device realizes a total photovoltaic and photothermal conversion efficiency of 49% at the optimal working condition.     

Novel materials for electronic device fabrication using ink-jet printing technology

Novel materials and a metallization technique for the printed electronics were studied. Insulator inks and conductive inks were investigated. For the conductive ink, the nano-sized copper particles were used as metallic sources. These particles were prepared from a copper complex by a laser irradiation process in the liquid phase. Nano-sized copper particles were consisted of a thin copper oxide layer and a metal copper core wrapped by the layer. The conductive ink showed good ink-jettability. In order to metallize the printed trace of the conductive ink on a substrate, the atomic hydrogen treatment was carried out. Atomic hydrogen was generated on a heated tungsten wire and carried on the substrate. The temperature of the substrate was up to 60 °C during the treatment. After the treatment, the conductivity of a copper trace was 3 μΩ cm. It was considered that printed wiring boards can be easily fabricated by employing the above materials.     

3D打印技术应用于加工微靶零件

采用三种商业3D打印机尝试加工了金属材质和树脂材质的微型靶零件。通过EOSINT M290 3D打印机以激光烧结的方式加工了钛金属靶架;通过Object 30 Pro 3D打印机以聚丙烯树脂为材料,通过喷射打印的方式加工了构型复杂的树脂靶架;通过Freeform Pico 3D打印机以蜡质树脂为材料,通过光固化成型的加工方式,获得了微腔、圆柱和平面元件,并在其表面设计了周期性图形结构。采用光学工具显微镜和共聚焦显微镜对样品的尺寸和表面形貌进行了表征。结果表明：金属靶架的线粗糙度为7.3~17.79m,抛光之后降低为0.87~1.66m;树脂靶架的面均方根粗糙度为2.88m;微腔和圆柱元件端面的面均方根粗糙度为2.03m,表面的条纹周期与设计值偏差为1.40%,平均振幅值偏差为55.50%;平面元件的面均方根粗糙度为4.87m,表面调制图形的周期与设计值偏差为0.80%,平均振幅偏差为3.60%。通过商业3D打印机加工靶零件,为惯性约束聚变实验中微靶零件的加工提供了新思路。     

一种基于3D打印技术的结构型宽频吸波超材料

设计了一种三层宽频吸波超材料,其表层和中间层为单元尺寸不同的周期阵列结构,底层为吸波平板结构,优化后的总厚度仅为4.7 mm,并采用三维(3D)打印技术成功制备了该吸波超材料.吸波体反射率测试结果表明,在电磁波垂直入射条件下,宽频吸收峰分别出现在5.3和14.1 GHz,两峰叠加使得其在4-18 GHz频率范围内反射损耗均小于-10 dB.采用S参数反演法计算了每一层的等效电磁参数,并利用多层结构反射率公式推导得出该模型的理论反射率,理论计算结果与实测结果基本一致.通过研究能量损耗、电场分布和磁场分布揭示了吸波机理,分析表明该吸波体的宽频吸收效果源于三层结构产生的吸收带宽叠加.本文提出的吸波超材料具有良好的宽频吸收效果,尤其在低频范围吸波性能较佳,结合3D打印快速成型技术,可获得结构精细的三层吸波超材料,具有重要的实际应用价值和广阔的应用前景.     

Rapid fabrication of mini droplet lens array with tunable focal length

A rapid and cost-effective method for fabricating mini lens arrays is proposed. The lenses are made of silicone oil droplets and filled inside a polydimethylsiloxane(PDMS) elastomer. The lens arrays of different initial focal lengths and apertures can be fabricated by using the droplets of different volumes. Due to good elastic behavior of PDMS, the droplet lenses can be flexibly deformed, and the focal length and numerical aperture can be tuned by applying an external force on the PDMS elastomer. Furthermore, an apparatus for focal length tuning is designed and employed in the imaging system.     

基于人工复合材料的太赫兹波双波段滤波

本文分别从实验和理论模拟两方面详细的讨论了金属双环和反双环两种亚波长阵列结构在太赫兹波段的双频率响应特性. 这两种双环结构都可以实现双频率调制,金属双环结构表现为两个明显的吸收峰,反双环结构则表现出明显的透过峰. 这两种结构不仅在物理结构上互补,在太赫兹波段的响应也表现为吸收和透过互补的特性. 其中高频响应来源于内环电子振荡,低频影响则来源于外环电子振荡,并且这种结构在太赫兹波段的响应与周期无关. 关键词： 太赫兹 滤波器 亚波长阵列 FDTD     

Fabrication of terahertz metamaterials by laser printing

A laser printing technique was used to fabricate split-ring resonators (SRRs) on Si substrates for terahertz (THz) metamaterials and their resonance behavior evaluated by THz time-domain spectroscopy. The laser-printed Ag SRRs exhibited sharp edge definition and excellent thickness uniformity, which resulted in an electromagnetic response similar to that from identical Au SRR structures prepared by conventional photolithography. These results demonstrate that laser printing is a practical alternative to conventional photolithography for fabricating metamaterial structures at terahertz frequencies, since it allows their design to be easily modified and optimized.     

Rapid measurements of hydrogen cyanide concentration in combustion gas via terahertz spectroscopy

The development of a real-time measurement system to determine the concentrations of combustion gases mixed with smoke particles in fire environments is an essential technical issue in the fire safety field. In this study, the absorption line for the J = 8–7 rotational transition at 708.9 GHz of hydrogen cyanide (HCN) produced by the combustion of silk is rapidly measured in a 1 m cell during repeat scans (seven times a minute) via terahertz spectroscopy. The obtained time profile of HCN concentrations agrees well with the time profile obtained via Fourier transform infrared (FT-IR) spectroscopy. The maximum concentrations derived via terahertz spectroscopy are consistent with those derived via FT-IR within an accuracy of 10%. The minimum sensitivity of HCN is 100 ppm as detected via terahertz spectroscopy. The repetition rate, the accuracy, and the sensitivity for the scans demonstrate the potential of terahertz spectroscopy to rapidly diagnose combustion gas flow concentrations in fire environments.     

Highly reproducible technique for three-dimensional nanostructure fabrication via anodization scanning probe lithography

The effects of coated materials for Si probes on the sizes of line structure by using anodization scanning probe lithography (SPL) are investigated by using atomic force microscopy (AFM). Anodization SPL was carried out on the 1-decane monolayer directly attached to hydrogen-terminated silicon. Gold-coated, diamond-coated, and uncoated Si probes were used as the SPL probes in order to fabricate line structures of silicon oxide. In the cases of Au-coated and uncoated Si probes, the widths of line structures are widely influenced by the changes of scanning rate and applied bias voltage. However, the line width fabricated by use of the diamond-coated probe maintained 15 nm under any condition of scanning rate and applied bias voltage. One of the most narrow and three-dimensional nanostructures is found to be successfully fabricated on the hydrogen-terminated Si substrates when the diamond-coated probe was used as a probe of anodization SPL. In addition, this result indicated that high reproducibility of oxide nanostructures is attainable by anodization SPL used the diamond-coated probe.     

半绝缘等离子体波导太赫兹量子级联激光器工艺研究

采用气态源分子束外延设备生长了GaAs/AlGaAs束缚态到连续态跃迁结构的太赫兹（THz）量子级联激光器（QCL）有源区结构,研究了半绝缘等离子体波导THz QCL的器件工艺,采用远红外傅里叶变换光谱仪以及探测器测量了器件的电光特性.器件激射频率为32 THz,10 K下的阈值电流密度为275 A/cm². 关键词： 太赫兹 量子级联激光器 波导 器件工艺     

太赫兹波三维成像技术研究进展

太赫兹波具有良好的光谱特性、非电离性和对许多非极性材料具有穿透性,在无损探伤、安检、生物医学诊断、艺术品鉴别等领域表现出许多独特的优点。特别是,太赫兹波三维成像技术能够实现样品内部信息探测,逐渐成为当前的研究热点,并展现出广阔的发展前景。本文重点介绍了太赫兹波三维成像的几种常用技术,包括其基本原理和对应的研究进展,并分析了存在的问题和发展趋势。     

Off-axis metallic diffractive lens for terahertz beams

A diffractive optical element for off-axis focusing of terahertz radiation is presented. It was designed in a nonparaxial regime and manufactured in a metal slab by laser cutting of curved stripes. The optical function of the structure includes focusing and deflecting the illuminating beam of a chosen frequency in a particular place. Therefore, the element acts as both a spatial and a spectral filter; hence it is especially suitable for separating the terahertz signal from a broadband thermal load in passive detection devices. The experimental evaluation of the proposed diffractive lens by means of time-domain spectroscopy is presented and discussed.     

Direct fabrication of copper patterns by reactive inkjet printing

Reactive inkjet printing (RIP) was applied to fabricate arbitrary copper (Cu) patterns. RIP prints reactive inks which can provide desired materials after the reaction on a substrate. Here, Cu precursors and reducing agents were dissolved together in one solution as a printable ink instead of conventional Cu nanoparticle inks. The prepared reactive ink was applied to the RIP method to provide dot arrays, lines, and films of Cu. The synthesis of Cu was confirmed to occur successfully by thorough analysis. The RIP method can reduce the process cost and resolve critical drawbacks of the conventional inkjet printing such as a nozzle clogging problem. Furthermore, utilizing reactive precursor inks broadens the choice of materials that can be processed by inkjet printing.     

太赫兹雷达技术研究进展

文章介绍了太赫兹技术的发展和研究现状,概述了太赫兹波的主要特性,着重论述并举例分析了太赫兹波在雷达探测系统中的应用。太赫兹雷达具有优越的反隐形能力,很高的距离分辨率,超大信号带宽,较强环境适应能力,低截获率,强抗干扰性和穿透等离子体能力等诸多优点,在军事上有很强的应用前景,对国防和国家安全具有重要的应用价值。     

Tunable ultra-wideband terahertz filter based on three-dimensional arrays of H-shaped plasmonic crystalsTunable ultra-wideband terahertz filter based on three-dimensional arrays of H-shaped plasmonic crystalsTunable ultra-wideband terahertz filter based on three-dimensional arrays of H-shaped plasmonic crystals

A face-to-face system of double-layer three-dimensional arrays of H-shaped plasmonic crystals is proposed, and its transmission and filtering properties are investigated in the terahertz regime. Simulation results show that our design has excellent filtering properties. It has an ultra-wide bandgap and passband with steep band-edges, and the transmittance of the passband and the forbidden band are very close to I and 0, respectively. As the distance between the two face-to-face plates increases, the resonance frequency exhibits a gradual blueshift from 0.88 THz to 1.30 THz. Therefore, we can dynamically control the bandwidths of bandgap and passband by adding a piezoelectric ceramic plate between the two crystal plates. Furthermore, the dispersion relations of modes and electric field distributions are presented to analyze the generation mechanisms of bandgaps and to explain the location of bandgaps and the frequency shift phenomenon. Due to the fact that our design can provide many resonant modes, the bandwidth of the bandgaps can be greatly broadened. This paper can serve as a valuable reference for the design of terahertz functional devices and three-dimensional terahertz metamaterials.     

非对称GRIN微透镜阵列的设计与制作

针对 L D光束的特点 ,提出利用单个非对称 GRIN微透镜 (双焦距 )对 L D光束进行准直、整形和像散校正。总结出了根据 L D光束参数结合离子交换工艺的设计方法。利用椭圆形掩模孔和电场辅助离子交换工艺制作了非对称GRIN微透镜阵列 ,并对样品的性能进行了测试