飞秒激光诱导图案独立显示研究

介绍了采用中心波长为800 nm的飞秒激光在不锈钢(316L)表面诱导产生独立显示图案的研究。结果表明,当扫描速率为15 mm/s,扫描行距为20 m,能量密度为1.1 J/cm2时,飞秒激光能够在不锈钢表面形成均匀的周期为540 nm的亚波长条纹结构。利用条纹结构的方向与激光光波偏振方向严格垂直的特性,通过改变激光偏振,可以在金属表面形成不同方向的条纹图案。在照明白光的辐照下,改变样品的方位角,形成的图案能够以彩色方式显示出来。此外,对使图案彩色显示的坐标区域与图案色彩能够覆盖的可见光谱范围进行了研究,并对其可能的应用进行分析。     

飞秒激光诱导钛表面形成高空间频率周期条纹结构

利用波长为800 nm的飞秒激光,在空气和去离子水中诱导钛表面形成不同的周期条纹结构。在空气中,激光能量密度为0.265 J/cm2时,钛表面主要形成周期为500~560 nm低空间频率条纹结构;激光能量密度为0.102 J/cm2时,主要形成的是周期为220~340 nm高空间频率条纹结构。两种条纹均垂直于入射激光偏振方向,且条纹周期随着脉冲重叠数的增大而增大。在水中,除形成垂直激光偏振方向、周期为215~250 nm的高空间频率条纹结构,还形成了平行于激光偏振方向且周期约为入射激光波长八分之一的高空间频率条纹结构。利用表面等离子体理论、二次谐波及Sipe理论对各种周期条纹结构的形成机理进行分析,发现周期条纹结构的形成与钛表面氧化层有密切的关系。     

飞秒激光诱导钛表面形成高空间频率周期条纹结构

利用波长为800 nm的飞秒激光,在空气和去离子水中诱导钛表面形成不同的周期条纹结构。在空气中,激光能量密度为0.265 J/cm2时,钛表面主要形成周期为500~560 nm低空间频率条纹结构;激光能量密度为0.102 J/cm2时,主要形成的是周期为220~340 nm高空间频率条纹结构。两种条纹均垂直于入射激光偏振方向,且条纹周期随着脉冲重叠数的增大而增大。在水中,除形成垂直激光偏振方向、周期为215~250 nm的高空间频率条纹结构,还形成了平行于激光偏振方向且周期约为入射激光波长八分之一的高空间频率条纹结构。利用表面等离子体理论、二次谐波及Sipe理论对各种周期条纹结构的形成机理进行分析,发现周期条纹结构的形成与钛表面氧化层有密切的关系。     

采用飞秒激光诱导制备彩色金属

采用脉宽为35～65fs,中心波长为800nm的飞秒脉冲激光对经抛光的镍片进行表面扫描处理,并在金属表面上制备了彩色镍图案;设置不同的激光扫描速度和能量密度扫描处理不锈钢表面,亦制备了彩色图案。介绍了实验过程,分析了实验结果,扫描电子显微镜（SEM）形貌分析显示,经过飞秒激光扫描处理的金属表面出现了纳米量级的激光诱导周期表面结构（NC—LIPSS）,在镍上形成的结构周期约为480—510nm,在不锈钢上形成的结构周期约为480～540nm。     

采用飞秒激光诱导制备彩色金属

采用脉宽为35～65 fs,中心波长为800 nm的飞秒脉冲激光对经抛光的镍片进行表面扫描处理,并在金属表面上制备了彩色镍图案;设置不同的激光扫描速度和能量密度扫描处理不锈钢表面,亦制备了彩色图案。介绍了实验过程,分析了实验结果,扫描电子显微镜(SEM)形貌分析显示,经过飞秒激光扫描处理的金属表面出现了纳米量级的激光诱导周期表面结构(NC-LIPSS),在镍上形成的结构周期约为480～510 nm,在不锈钢上形成的结构周期约为480～540 nm。     

多偏振飞秒激光制备彩色铁

采用四个不同偏振方向的线偏振和圆偏振态飞秒激光扫描处理金属铁表面来制备不同的彩色铁。从不同角度观察被处理区域时,线偏振扫描处理的彩色区域呈现不同的色彩, 而圆偏振扫描处理的区域没有明显的颜色变化。扫描电子显微镜图片显示,线偏振激光扫描处理金属铁表面形成了nm量级的激光诱导周期表面结构,其方向始终与激光偏振方向垂直;圆偏振激光扫描处理金属铁表面形成的条纹结构不明显且有大量的纳米颗粒结构。     

多偏振飞秒激光制备彩色铁

采用四个不同偏振方向的线偏振和圆偏振态飞秒激光扫描处理金属铁表面来制备不同的彩色铁。从不同角度观察被处理区域时,线偏振扫描处理的彩色区域呈现不同的色彩,而圆偏振扫描处理的区域没有明显的颜色变化。扫描电子显微镜图片显示,线偏振激光扫描处理金属铁表面形成了nm量级的激光诱导周期表面结构,其方向始终与激光偏振方向垂直;圆偏振激光扫描处理金属铁表面形成的条纹结构不明显且有大量的纳米颗粒结构。     

线性、径向和环向偏振飞秒激光诱导非晶合金周期性表面结构

研究在复杂偏振条件下,飞秒激光诱导非晶合金Zr44Ti11 Cu10Ni10Be25(at％)表面周期性结构的形成机理.实验采用波长800 nm、脉宽120 fs的超短脉冲激光,分别在线性、径向、环向偏振条件下,诱导非晶合金表面生成复杂的周期性表面结构.表面结构由周期为652～723 nm的低频条纹和周期为1 304～1 765 nm的微型条纹组成.通过有限差分时域法仿真分析,发现微型条纹由粗糙表面引起的定向调制的表面散射电磁波与入射激光干涉形成.仿真结果与实验结果一致,验证了微型条纹形成机理的有效性.     

线性、径向和环向偏振飞秒激光诱导非晶合金周期性表面结构（英文）

研究在复杂偏振条件下,飞秒激光诱导非晶合金Zr_(44)Ti_(11)Cu_(10)Ni_(10)Be_(25)(at%)表面周期性结构的形成机理.实验采用波长800 nm、脉宽120 fs的超短脉冲激光,分别在线性、径向、环向偏振条件下,诱导非晶合金表面生成复杂的周期性表面结构.表面结构由周期为652~723 nm的低频条纹和周期为1 304~1 765 nm的微型条纹组成.通过有限差分时域法仿真分析,发现微型条纹由粗糙表面引起的定向调制的表面散射电磁波与入射激光干涉形成.仿真结果与实验结果一致,验证了微型条纹形成机理的有效性.     

飞秒激光诱导硒化锌晶体表面自组织生长纳米结构

 以250 kHz高重复频率钛宝石飞秒激光聚焦到硒化锌晶体表面,利用扫描电子显微镜观测飞秒激光辐照后晶体的表面结构。发现线偏振激光辐照的区域形成了自组织周期性纳米结构,其周期为160 nm左右,并且可以通过改变激光的偏振方向调节纳米光栅结构的取向;当晶体相对于激光光束以10 mm/s速度移动,经激光扫描后,在晶体表面形成了长程类布拉格光栅。当飞秒激光光束为圆偏振光时,辐照区域形成均匀的纳米颗粒。     

Gold coatings on polyethyleneterephthalate nano-patterned by F2 laser irradiation

In this work we present periodic surface structures generated by linearly polarized F₂ laser light (157 nm) on polyethyleneterephthalate (PET). Atomic force microscopy was used to study the topological changes induced by the laser irradiation. The laser irradiation induces the formation of periodic ripple structures with a width of ca 130 nm and a height of about 15 nm in the fluence range 3.80-4.70 mJ/cm² and the roughness of the polymer surface increases due to the presence of these periodic structures. Subsequently, the laser modified PET foils were coated with a 50 nm thick gold layer by sputtering. After Au deposition on the PET foils with ripple structure, the roughness of surface decreases in comparison to PET with ripples without Au coating. For 50 nm thick Au layers, the ripple structure is not directly transferred to the gold coating, but it has an obvious effect on the grain size of the coating. With considerably thinner Au layers, the ripple structures are smoothened but preserved.     

Angle dependent laser nanopatterning of poly(ethylene terephthalate) surfaces

Interference effects can lead to the formation of ripple structures at laser-irradiated poly(ethylene terephthalate) surfaces. Poly(ethylene terephthalate) surface was irradiated with linearly polarized light of a pulsed 157 nm laser. In a certain range of irradiation parameters, the irradiation resulted in the formation of coherent ripples patterns. The dimension of the pattern depends on the angle of the laser beam incidence. The surface morphology of the nano-patterned poly(ethylene terephthalate) was analyzed by atomic force microscopy and focused ion beam-scanning electron microscopy. Oxygen concentration in the modified polymer surface was studied by angular resolved X-ray induced photo-electron spectroscopy. Gold nano-layers were consecutively sputtered onto the laser irradiated poly(ethylene terephthalate) surfaces. The morphology of the sputtered gold nano-layers was investigated with atomic force microscopy too. We found that the morphology of the gold nano-layers changes and depends on the surface pattern of the laser irradiated poly(ethylene terephthalate). Formation of gold “nano-hills” is observed at the ridges of the ripple structures. The amount of oxygen together with the morphology of prepared polymer pattern may be the dominant factors controlling the gold layer growth. The present results are compared with those obtained earlier on PET irradiated with krypton fluoride laser.     

Creation of periodic subwavelength ripples on tungsten surface by ultra-short laser pulses

Formation of periodic subwavelength ripples on a metallic tungsten surface is investigated through a line-scribing method under the irradiation of 800?nm, 50 fs to 8 ps ultra-short laser pulses. The distinctive features of the induced ripple structures are described in detail with different laser parameters. Experimental measurements reveal that with gradual decrease of the laser fluence, the pulse duration or the scanning speed, the ripple period is inclined to reduce but the ripple depth tends to become pronounced. Theoretical analyses suggest that the transient dielectric function change of the tungsten surface mainly originates from the nonequilibrium distribution of electrons due to the d-band transitions. A sandwich-like physical model of air?Cplasma?Ctarget is proposed and the excitation of a surface plasmon polaritonic (SPP) wave is supposed to occur on the interface between the metallic target and the electron plasma layer. Formation of ripples can be eventually attributed to the laser?CSPP interference. Theoretical interpretations are consistent with the experimental observations.     

准分子激光辐照HgCdTe半导体材料的损伤机理研究

利用光学显微镜和扫描电子显微镜对248 nm准分子脉冲强激光辐照的HgCdTe晶片表面进行了观察,观察到一些与红外波段内激光辐照HgCdTe晶片时大不相同的实验现象.研究表明,红外波段内1 064nm激光辐照HgCdTe半导体材料的损伤机制主要为光热作用,而紫外波段248 nm准分子激光对HgCdTe材料的损伤机制既包含光化学作用也包含光热作用.分析了准分子激光对晶体的机械破坏现象,同时对HgCdTe材料在激光辐照区的条纹产生机理进行了探讨,发现激光驱动声波理论模型比光学模型和热导波模型能更好地解释HgCdTe晶体表面的条纹现象.     

脉冲激光辐照硅材料引起表面波纹的特性研究

叙述了激光与材料相互作用过程中引起相干受激光散射的机制,以及形成材料表面波纹的特性。在激光波长1．06μm、能量15mJ、光斑直径2mm、脉冲半峰全宽约10ns和入射方向为布儒斯特角的条件下,进行了脉冲激光辐照硅材料形成表面波纹的实验研究。在脉冲激光辐照硅材料表面功率密度略大于材料损伤阈值的条件下,发现了硅材料表面形成的平行等间距直线条纹结构。用光学显微镜和原子力显微镜分别测量了被辐照硅材料表面的波纹形貌特征。在假设硅材料表面波纹的产生与声波在材料中的传播速度有关的条件下,由声波传播速度和激光辐照硅材料的脉冲宽度较好地解释了材料表面形成条纹的宽度．并认为在形成表面波纹的过程中,热应力起主要作用。     

Textures induced by a femtosecond laser on silicon surfaces under various environments

We employ an ultrafast laser with 1?kHz repetition rate and 130?fs pulse width to fabricate micro/nanotextures and unique surface structures on silicon surfaces under different environments. First, we study the effect of vacuum and fabricate micro-spike structures at 800?nm wavelength and a pressure of 4 ? 10^?3?Pa. We observe even sub-100?nm ripple structures on micro-spikes after 800?nm laser irradiation in distilled water because the produced bubbles are expelled from the chamber. Finally, we show that submicron-spike structures fabricated after 400?nm laser irradiation in distilled water are smaller than those in vacuum.     

金膜上亚波长小孔阵列表面等离激元颜色滤波器偏振性质

金属薄膜上制备的表面等离激元颜色滤波器具有很强的颜色可调性. 在200 nm厚的金膜上, 通过聚焦离子束刻蚀, 制备一系列周期逐渐变化的圆形、方形、矩形亚波长尺寸小孔方阵列表面等离激元颜色滤波器, 改变入射光的偏振方向, 观察其超透射滤波现象. 研究发现: 对于矩形小孔阵列, 其透射光颜色随入射光偏振方向的变化而改变; 而对于圆形、方形的小孔阵列, 其透射光颜色对入射光的偏振方向并不敏感. 分析表明, 对于金膜上刻蚀的小孔结构, 虽然结构的周期性导致的表面等离激元极化子会对透射光的颜色变化产生一定影响, 但是随小孔形状变化的局域表面等离激元共振才是影响透射光颜色的决定性因素. 如果入射光没有在小孔中激发出局域表面等离激元, 则表面等离激元极化子对透射光的影响也会消失. 根据不同形状小孔周期结构透射光颜色随入射光的偏振变化特点, 制备出了包含两种小孔形状的复合周期结构. 随着入射光偏振方向的改变, 该结构会显示出不同的颜色图案. 关键词： 表面等离激元极化子 局域表面等离激元 颜色滤波器 亚波长小孔阵列     

Ripple formation in various metals and super-hard tetrahedral amorphous carbon films in consequence of femtosecond laser irradiation

Ripple formation in consequence of ultrashort laser pulse irradiation of materials is a well-known phenomenon. We have investigated the formation of ripples in various metals, i.e. steel, tungsten carbide hard metal, as well as in superhard ta-C films, where we used femtosecond laser pulses of 775 nm and 387 nm mean wavelength and 150 fs pulse duration. The aim was to investigate how the ripple parameters depend on irradiation parameters, and if such ripples have a potentiality for applications. In the paper, we will show that on smooth surfaces the ripple orientation is perpendicular to the electric field vector of the linearly polarized laser beam, as is well-known. Moreover, it will be shown that the ripple period decreases with decreasing laser wavelength and/or increasing angle of incidence of the laser beam on the substrate. By using optimum parameters large areas of the materials and films can be rippled swiftly, which would be important for applications. For instance, the improvement of frictional and wear behavior of tribologically stressed surfaces by ripples was investigated on ta-C coated steel surfaces.     

Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm

The grating-like spatially periodic structures are produced on the (100) surfaces of the single crystal silicon by the trains of 10 ps mode-locked ruby laser pulses at the wavelength of 694.3 nm. The periods and orientations of the structures are consistent with the model which involves the interference of the incident light with the surface electromagnetic wave excited through the coupling by surface roughness. Previously unappreciated elliptic ripple patterns are found and explained as the trails of the capillary wave excited on the molten Si surface due to the radially non-uniform deposition of energy.